Substrate support lift pin

- Applied Materials, Inc.
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Description

A lift pin for selectively spacing a substrate from a substrate support is provided. Embodiments of the lift pin include a lift pin shaft and at least one larger diameter shoulder section symmetrical the lift pin shaft that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section reduces pin scratching, particle generation, and component wear, thus increasing the life of the lift pin. The shoulder section also minimizes sticking of the lift pin, thus enhancing movement of the lift pin through the guide hole. The shoulder section may be made of a different material than the lift pin shaft and/or an outer surface of the shoulder section may be machined to a micro-smooth surface. An upper portion of the lift pin also includes a tapered portion configured to provide a stop for the lift pin to prevent the lift pin from falling through the guide hole in the substrate support.

FIG. 1 is a schematic side view of one embodiment of a lift pin.

FIG. 2 is a top view of FIG. 1; and,

FIG. 3 is a cross-sectional view taken along line 3—3 of FIG. 1.

Claims

The ornamental design for a substrate support lift pin, as shown and described.

Referenced Cited
U.S. Patent Documents
4289522 September 15, 1981 Bailey et al.
5762544 June 9, 1998 Zuniga et al.
5796066 August 18, 1998 Guyot
5848670 December 15, 1998 Salzman
5879128 March 9, 1999 Tietz et al.
5900062 May 4, 1999 Loewenhardt et al.
6120609 September 19, 2000 Selyutin et al.
6146504 November 14, 2000 Patadia et al.
D469007 January 21, 2003 Chen et al.
6511368 January 28, 2003 Halley
D502644 March 8, 2005 Ellis et al.
D504313 April 26, 2005 Stoewer et al.
6887317 May 3, 2005 Or et al.
D506922 July 5, 2005 Simon
6958098 October 25, 2005 Gujer et al.
7204888 April 17, 2007 Tran et al.
20020011204 January 31, 2002 Gujer et al.
20020121312 September 5, 2002 Lubomirsky et al.
20030075387 April 24, 2003 Wang et al.
20030205329 November 6, 2003 Gujer et al.
20040045509 March 11, 2004 Or et al.
20040219006 November 4, 2004 Tran et al.
20050194100 September 8, 2005 Or et al.
20070131173 June 14, 2007 Halpin et al.
20070157466 July 12, 2007 Kida et al.
Foreign Patent Documents
0 284 343 September 1988 EP
0 592 017 April 1994 EP
1 202 330 May 2002 EP
07 176472 July 1995 JP
Other references
  • PCT International Search Report for PCT/US04/007164, Dated Apr. 18, 2005.
  • PCT Written Opinion for PCT/US04/007164, Dated Apr. 18, 2005.
Patent History
Patent number: D568914
Type: Grant
Filed: Mar 24, 2006
Date of Patent: May 13, 2008
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: David T. Or (San Jose, CA), Keith K. Koai (Los Gatos, CA), Hiroyuki Takahama (Sawara), Takahiro Ito (Urayasu), Koji Ota (Chiba), Hiroshi Sato (Chiba)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Patterson & Sheridan, LLP
Application Number: 29/256,744
Classifications
Current U.S. Class: Element Or Attachment (D15/138)