Top panel for microwave introduction window of a plasma processing apparatus

- Tokyo Electron Limited
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Description

FIG. 1 is a front view of a top panel for microwave introduction window of a plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a sectional view taken along line 77 of FIG. 5;

FIG. 8 is an enlarged view taken along line 88 of FIG. 7;

FIG. 9 is an enlarged view taken along line 99 of FIG. 7; and,

FIG. 10 is a perspective view thereof.

Claims

The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as shown and described.

Referenced Cited
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5335801 August 9, 1994 Lee
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D386792 November 25, 1997 Miller
6108190 August 22, 2000 Nagasaki
6403933 June 11, 2002 Strodtbeck et al.
6578853 June 17, 2003 Treur et al.
7153199 December 26, 2006 Decker
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Foreign Patent Documents
0592017 April 1994 EP
Other references
  • Asian Sources Hardwares for World Markets, High Quality Ductile and Grey Iron OEM Products From One of Taiwan's Leading Manufacturers, Nov. 1990, 1 cover Page and p. 251.
Patent History
Patent number: D593585
Type: Grant
Filed: Jan 30, 2006
Date of Patent: Jun 2, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Kinya Ota (Amagasaki), Cai Zhong Tian (Amagasaki), Junichi Kitagawa (Amagasaki)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/252,839
Classifications
Current U.S. Class: Element Or Attachment (D15/138)