Top panel for microwave introduction window of a plasma processing apparatus
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Description
Claims
The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D593585
Type: Grant
Filed: Jan 30, 2006
Date of Patent: Jun 2, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Kinya Ota (Amagasaki), Cai Zhong Tian (Amagasaki), Junichi Kitagawa (Amagasaki)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/252,839
Type: Grant
Filed: Jan 30, 2006
Date of Patent: Jun 2, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Kinya Ota (Amagasaki), Cai Zhong Tian (Amagasaki), Junichi Kitagawa (Amagasaki)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/252,839
Classifications
Current U.S. Class:
Element Or Attachment (D15/138)