Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers

- Tokyo Electron Limited
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Description

FIG. 1 is a perspective view of the design for a pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a plan view thereof;

FIG. 7 is a bottom view thereof; and,

FIG. 8 is a sectional view along line 88 of FIG. 6.

Claims

The ornamental design for a pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

Referenced Cited
U.S. Patent Documents
5534074 July 9, 1996 Koons
D404375 January 19, 1999 Shimazu
6811040 November 2, 2004 Payne et al.
D570309 June 3, 2008 Sato et al.
D574792 August 12, 2008 Sato
D579885 November 4, 2008 Sato
20020092815 July 18, 2002 Kim et al.
20050145584 July 7, 2005 Buckley et al.
Patent History
Patent number: D601979
Type: Grant
Filed: Sep 26, 2008
Date of Patent: Oct 13, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/309,697