Wafer carrier door
Latest Entegris, Inc. Patents:
- Electrostatic discharge mitigation device
- Chemical vapor deposition processes using ruthenium precursor and reducing gas
- System and method for removing airborne molecular contaminants from gas streams
- Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
- Method for nucleation of conductive nitride films
Description
The top surface, side surface, the latch and the details on the top and the side are shown in broken lines and form no part of the claimed design.
Claims
We claim the ornamental design for a wafer carrier door, as shown and described.
Referenced Cited
U.S. Patent Documents
5173273 | December 22, 1992 | Brewer |
5711427 | January 27, 1998 | Nyseth |
5713711 | February 3, 1998 | McKenna et al. |
5785186 | July 28, 1998 | Babbs et al. |
5915562 | June 29, 1999 | Nyseth et al. |
5957292 | September 28, 1999 | Mikkelsen et al. |
6248177 | June 19, 2001 | Halbmaier |
6267245 | July 31, 2001 | Bores et al. |
6273261 | August 14, 2001 | Hosoi |
6412502 | July 2, 2002 | Bexten et al. |
6430802 | August 13, 2002 | Miyajima |
6591987 | July 15, 2003 | Wu et al. |
6749067 | June 15, 2004 | Eggum |
6808352 | October 26, 2004 | Seita |
6880718 | April 19, 2005 | Eggum |
6945405 | September 20, 2005 | Bores et al. |
7325698 | February 5, 2008 | Halbmaier |
7344030 | March 18, 2008 | Burns et al. |
7344031 | March 18, 2008 | Hasegawa et al. |
7370764 | May 13, 2008 | Nyseth et al. |
20030009904 | January 16, 2003 | Tokunaga |
20030049101 | March 13, 2003 | Hisaharu |
20040074808 | April 22, 2004 | Bhatt |
20050111935 | May 26, 2005 | Kim et al. |
Patent History
Patent number: D611437
Type: Grant
Filed: Mar 18, 2008
Date of Patent: Mar 9, 2010
Assignee: Entegris, Inc. (Billerica, MA)
Inventors: John Burns (Colorado Springs, CO), Matthew A. Fuller (Colorado Springs, CO), Jeffery J. King (Colorado Springs, CO), Martin L. Forbes (Divide, CO), Mark V. Smith (Colorado Springs, CO)
Primary Examiner: Selina Sikder
Attorney: Patterson, Thuente, Skaar & Christensen, P.A.
Application Number: 29/305,320
Type: Grant
Filed: Mar 18, 2008
Date of Patent: Mar 9, 2010
Assignee: Entegris, Inc. (Billerica, MA)
Inventors: John Burns (Colorado Springs, CO), Matthew A. Fuller (Colorado Springs, CO), Jeffery J. King (Colorado Springs, CO), Martin L. Forbes (Divide, CO), Mark V. Smith (Colorado Springs, CO)
Primary Examiner: Selina Sikder
Attorney: Patterson, Thuente, Skaar & Christensen, P.A.
Application Number: 29/305,320
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)