Quartz cover for manufacturing semiconductor wafers
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Description
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a quartz cover for manufacturing semiconductor wafers, as shown and described.
Referenced Cited
U.S. Patent Documents
4978567 | December 18, 1990 | Miller |
5709543 | January 20, 1998 | Shimazu |
D404370 | January 19, 1999 | Kimura |
6423175 | July 23, 2002 | Huang et al. |
6966771 | November 22, 2005 | Irie et al. |
D582949 | December 16, 2008 | Yamashita |
20060199131 | September 7, 2006 | Kawasaki et al. |
20080066682 | March 20, 2008 | Yamashita |
Patent History
Patent number: D616390
Type: Grant
Filed: Sep 2, 2009
Date of Patent: May 25, 2010
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/342,844
Type: Grant
Filed: Sep 2, 2009
Date of Patent: May 25, 2010
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/342,844
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)