Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
Latest Tokyo Electron Limited Patents:
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
5494524 | February 27, 1996 | Inaba et al. |
5743967 | April 28, 1998 | Kobori et al. |
5752609 | May 19, 1998 | Kato et al. |
D404016 | January 12, 1999 | Ishii |
5897311 | April 27, 1999 | Nishi |
D411176 | June 22, 1999 | Shimazu |
6056123 | May 2, 2000 | Niemirowski et al. |
6099302 | August 8, 2000 | Hong et al. |
6099645 | August 8, 2000 | Easley et al. |
6110285 | August 29, 2000 | Kitazawa et al. |
6287112 | September 11, 2001 | Van Voorst Vader et al. |
6450346 | September 17, 2002 | Boyle et al. |
6716027 | April 6, 2004 | Kim et al. |
6796439 | September 28, 2004 | Araki |
6979659 | December 27, 2005 | Zehavi et al. |
7033168 | April 25, 2006 | Gupta et al. |
D580894 | November 18, 2008 | Sato |
7484958 | February 3, 2009 | Kobayashi |
Type: Grant
Filed: Sep 2, 2009
Date of Patent: May 25, 2010
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Izumi Sato (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/342,850