Plasma reactor showerhead face plate having concentric ridge pattern

- Novellus Systems, Inc.
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Description

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,

FIG. 5 is a cross-sectional view thereof, taken generally along line 55 in FIG. 3, showing succinctly the surface contours seen in FIGS. 1 and 3.

Claims

We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.

Referenced Cited
U.S. Patent Documents
D459434 June 25, 2002 Fauquet
D459435 June 25, 2002 Fauquet
D466183 November 26, 2002 Tse
D495776 September 7, 2004 Blomstrom
6983898 January 10, 2006 Clark
D593640 June 2, 2009 Schoenherr et al.
D599881 September 8, 2009 Wang et al.
D619202 July 6, 2010 Zhang
D623721 September 14, 2010 Reynoso
D624155 September 21, 2010 Yokoyama et al.
Patent History
Patent number: D641829
Type: Grant
Filed: Oct 29, 2010
Date of Patent: Jul 19, 2011
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Ivelin A. Angelov (Sunnyvale, CA), James E. Caron (Tracy, CA), Ilia Kalinovshi (Berkeley, CA)
Primary Examiner: Robin Webster
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/378,161