Lid assembly for a substrate processing chamber
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The broken line showing of structural features is included for the purpose of illustrating non-claimed subject matter and forms no part of the claimed design.
Claims
The ornamental design for a lid assembly for a substrate processing chamber, as shown and described.
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Type: Grant
Filed: Apr 2, 2010
Date of Patent: Aug 2, 2011
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Tetsuya Ishikawa (Saratoga, CA), Alexander Tam (Union City, CA), David H. Quach (San Jose, CA)
Primary Examiner: Antoine D Davis
Attorney: Patterson & Sheridan, L.L.P.
Application Number: 29/358,979