Adjustable chemical vapor deposition showerhead assembly

- Novellus Systems, Inc.
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Description

FIG. 1 is a front view of an adjustable chemical vapor deposition showerhead assembly, showing our new design

FIG. 2 is a back view thereof.

FIG. 3 is a right side view thereof.

FIG. 4 is a left side view thereof.

FIG. 5 is a top view thereof.

FIG. 6 is a bottom view thereof, wherein holes are represented in dashed lines to indicate that they are for illustrative purposes only and that the hole pattern does not form a part of the claimed design.

FIG. 7 is an isometric top, front view thereof; and,

FIG. 8 is an expanded isometric view of the top-most portion of the adjustable chemical vapor deposition showerhead assembly shown in FIG. 7.

Claims

We claim the ornamental design for an adjustable chemical vapor deposition showerhead assembly, as shown and described.

Referenced Cited
U.S. Patent Documents
D512120 November 29, 2005 Haug et al.
D524904 July 11, 2006 Hoernig
D540424 April 10, 2007 Kirar
D556855 December 4, 2007 Mullenmeister et al.
D559952 January 15, 2008 Bickler et al.
Patent History
Patent number: D672010
Type: Grant
Filed: Mar 16, 2012
Date of Patent: Dec 4, 2012
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Percival Verdeflor (Fremont, CA), Alan Popiolkowski (Los Banos, CA), Evan Patton (Portland, OR)
Primary Examiner: Robin V Webster
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/416,016