Adjustable chemical vapor deposition showerhead assembly
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Claims
We claim the ornamental design for an adjustable chemical vapor deposition showerhead assembly, as shown and described.
Type: Grant
Filed: Mar 16, 2012
Date of Patent: Dec 4, 2012
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Percival Verdeflor (Fremont, CA), Alan Popiolkowski (Los Banos, CA), Evan Patton (Portland, OR)
Primary Examiner: Robin V Webster
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/416,016