Polishing pad for substrate polishing apparatus
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The dashed-dot-dashed lines represent the boundary lines of the claimed design. The even dashed broken lines depict environment subject matter only and form no part of the claimed design.
Claims
The ornamental design for a polishing pad for substrate polishing apparatus, as shown and described.
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Type: Grant
Filed: Apr 28, 2014
Date of Patent: Jun 9, 2015
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Masaki Kinoshita (Tokyo), Toshifumi Kimba (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/489,180