Wafer support ring

- Entegris, Inc.
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Description

FIG. 1 is a top perspective view of a wafer support ring showing my new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side view thereof; and,

FIG. 6 is a partial perspective cross-sectional view thereof.

Claims

I claim the ornamental design for wafer support ring, as shown and described.

Referenced Cited
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8016542 September 13, 2011 Cox
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Foreign Patent Documents
D1184862 September 2003 JP
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D1362609 June 2009 JP
D1362612 June 2009 JP
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Patent History
Patent number: D783922
Type: Grant
Filed: Dec 8, 2014
Date of Patent: Apr 11, 2017
Assignee: Entegris, Inc. (Billerica, MA)
Inventor: Eric A. Kirkland (Colorado Springs, CO)
Primary Examiner: Cynthia Ramirez
Application Number: 29/511,213
Classifications
Current U.S. Class: Belt Or Roller Conveyor (D34/29)