Rotary tool for boat of semiconductor manufacturing apparatus

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Description

FIG. 1 is a front, top and right side perspective view of a rotary tool for boat of semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a rear, bottom and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a top plan view thereof; and,

FIG. 8 is a bottom plan view thereof.

Claims

The ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown and described.

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Patent History
Patent number: D871466
Type: Grant
Filed: Jan 17, 2018
Date of Patent: Dec 31, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hiromi Okada (Toyama), Yoshikazu Takashima (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/633,932
Classifications