Base plate for a processing chamber substrate support

Info

Patent number: D893441
Type: Grant
Filed: Jun 28, 2019
Date of Patent: Aug 18, 2020
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Shreesha Yogish Rao (Milpitas, CA), Mukund Sundararajan (Bangalore), Cheng-Hsiung Tsai (Cupertino, CA), Manjunatha P. Koppa (Bengaluru), Steven Sansoni (Livermore, CA)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Suzanne E Tisdell
Application Number: 29/696,587

Description

Description

FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof.

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3.

FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.

FIG. 11 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.

FIG. 12 is a bottom isometric view thereof.

FIG. 13 is a top plan view thereof.

FIG. 14 is a bottom plan view thereof.

FIG. 15 is a front elevation view thereof.

FIG. 16 is a back elevation view thereof.

FIG. 17 is a left side elevation view thereof.

FIG. 18 is a right side elevation view thereof.

FIG. 19 is a cross-sectional view taken along line 19-19 in FIG. 13; and,

FIG. 20 is a cross-sectional view taken along line 20-20 in FIG. 13.

The dashed lines in FIGS. 1-20 represent unclaimed environment forming no part of the claimed design.

Claims

The ornamental design for a base plate for a processing chamber substrate support, as shown and described.