Component of a liquid discharge nozzle for semiconductor substrate processing apparatus
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Description
The broken lines shown represent portions of a component of a liquid discharge nozzle for semiconductor substrate processing apparatus and form no part of the claimed design.
Claims
The ornamental design for a component of a liquid discharge nozzle for semiconductor substrate processing apparatus, as shown and described herein.
Referenced Cited
U.S. Patent Documents
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Patent History
Patent number: D934991
Type: Grant
Filed: Oct 23, 2019
Date of Patent: Nov 2, 2021
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventors: Yoshifumi Amano (Kumamoto), Kazuhiro Aiura (Kumamoto)
Primary Examiner: Jack Reickel
Assistant Examiner: Keith J Wilson
Application Number: 29/710,399
Type: Grant
Filed: Oct 23, 2019
Date of Patent: Nov 2, 2021
Assignee: TOKYO ELECTRON LIMITED (Tokyo)
Inventors: Yoshifumi Amano (Kumamoto), Kazuhiro Aiura (Kumamoto)
Primary Examiner: Jack Reickel
Assistant Examiner: Keith J Wilson
Application Number: 29/710,399
Classifications
Current U.S. Class:
Dispersal (i.e., Sprayer, Fogger, Nozzle, Aerator, Etc.) (4) (D23/213)