Boat for substrate processing apparatus
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The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.
Claims
We claim the ornamental design for a boat for substrate processing apparatus, as shown and described.
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Type: Grant
Filed: May 17, 2019
Date of Patent: Jan 11, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Makoto Sambu (Toyama), Makoto Tsuri (Toyama), Satoshi Fujii (Toyama)
Primary Examiner: Manpreet S Matharu
Assistant Examiner: Suzanne E Tisdell
Application Number: 29/691,588