Shadow ring lift plate

- APPLIED MATERIALS, INC.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a back isometric top left-side view of a shadow ring lift.

FIG. 2 is a back isometric bottom left-side view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a back-side view thereof.

FIG. 6 is a front-side view thereof.

FIG. 7 is a left-side view thereof; and,

FIG. 8 is a right-side view thereof.

The broken lines in the drawings illustrate portions of the shadow ring lift plate that form no part of the claimed design.

Claims

The ornamental design for a shadow ring lift plate, as shown and described.

Referenced Cited
U.S. Patent Documents
5922133 July 13, 1999 Tepman et al.
9236284 January 12, 2016 Ouye
11512393 November 29, 2022 Hiester
20030000647 January 2, 2003 Yudovsky et al.
20060260749 November 23, 2006 Ueda et al.
20100107973 May 6, 2010 Aggarwal
20160068996 March 10, 2016 Lau
20180138074 May 17, 2018 Lee
20210040616 February 11, 2021 Park et al.
20220108908 April 7, 2022 Elumalai
20220172980 June 2, 2022 Aggarwal
Foreign Patent Documents
1106715 June 2001 EP
2019204754 October 2019 WO
WO-2021146352 July 2021 WO
2021167958 August 2021 WO
Other references
  • Semiconductor Equipment Spare Parts OEM Shadow Ring, posted date unknown [retrieved Dec. 12, 2022] from internet, URL: http://www.systa.kr/index.html?div=part&menu_1st=1S&menu_2nd=AM4&maker=&cont=view&sys_code=PRUS1S0290 (Year: 2022).
Patent History
Patent number: D997893
Type: Grant
Filed: Sep 28, 2021
Date of Patent: Sep 5, 2023
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Zubin Huang (Santa Clara, CA), Srinivas Tokur Mohana (Bangalore), Shreyas Patil Shanthaveeraswamy (Bangalore), Sandesh Yadamane (Bangalore), Jallepally Ravi (San Ramon, CA), Harpreet Singh (Santa Clara, CA), Manjunatha Koppa (Bangalore)
Primary Examiner: W. A. Teddy Falloway
Assistant Examiner: Caleb M Baker
Application Number: 29/809,529