Abstract: A method for forming a copper interconnect on an integrated circuit (IC) begins by forming a dielectric layer (20) having an opening. A tantalum-based barrier layer (21), such as TaN or TaSiN, is formed within the opening in the layer (20). A copper layer (22) is formed over the barrier layer (21). A first CMP process is used to polish the copper (22) to expose portions of the barrier (21). A second CMP process which is different from the first CMP process is then used to polish exposed portions of the layer (21) faster than the dielectric layer (20) or the copper layer (22). After this two-step CMP process, a copper interconnect having a tantalum-based barrier is formed across the integrated circuit substrate (12).

Abstract: An improved polishing composition is provided that includes an emulsion of a oil-based components and water-based components and a water soluble polishing agent. The polishing composition of the present invention is rubbed on a painted surface, hosed off with water and wiped or towel dried. Because of the use of a water soluble polishing agent in the polishing composition, all or substantially all of the polishing agent is washed away with the water. This eliminates the need for a two-step polishing process wherein a polishing composition is applied to a surface and allowed to dry in a first step and the surface is buffed with a dry cloth in a second step. One preferred embodiment of the present invention includes silicones, water, a nonionic or anionic surfactant and a water soluble polishing agent. Optionally, the polishing composition may include a solvent, mineral oil, wax, and a preservative.

Abstract: An abrasive composition for polishing a substrate for a magnetic recording disc is described, which comprises finely divided zirconium oxide particles, an abrasion promoter, an optional water-soluble oxidizing agent, and water. This abrasive composition is used for polishing a substrate for a magnetic recording disc by a process wherein the substrate is polished with a pad while the abrasive composition is supplied between the substrate and the pad, and at least one of the pad and the substrate is rotated. The contents of the finely divided zirconium oxide particles, the abrasion promoter and the optional water-soluble oxidizing agent are 2-20 wt. %, 1-20 wt. % and up to 10 wt. %, respectively, based on the weight of the abrasive composition as used for polishing the substrate.

Abstract: A furniture surface having a coating consisting of a bottom layer comprising a silicone oil adjacent to the furniture surface and a top layer comprising an oil having a specific gravity less than the silicone oil in the bottom layer and a water repelling film-forming fluorinated polymer. The coating may consist of a bottom layer comprising a silicone oil adjacent to the furniture surface, an intermediate layer comprising a water repelling film-forming fluorinated polymer, and a top layer comprising an oil having a specific gravity less than the silicone oil in the bottom layer. The coating may also consist of a bottom layer comprising a silicone oil adjacent to the furniture surface, an intermediate layer comprising an oil having a specific gravity less than the silicone oil in the bottom layer, and a top layer comprising a water repelling film-forming fluorinated polymer.

Abstract: A protective composition for automotive painted surfaces is provided, comprising emulsified silicone, an evaporation modifier and an agent which increases wetting speed, dispersed in water.

Abstract: A method for chemical mechanical polishing (CMP) a copper layer (22) begins by forming the copper layer (22). The copper layer (22) is then exposed to a slurry (24). The slurry (24) contains an oxidizing agent such as H.sub.2 O.sub.2, a carboxylate salt such as ammonium citrate, an abrasive slurry such as alumna abrasive, an optional triazole or triazole derivative, and a remaining balance of a solvent such as deionized water. The use of the slurry (24) polishes the copper layer (22) with a high rate of removal whereby pitting and corrosion of the copper layer (22) is reduced and good copper interconnect planarity is achieved. This slurry (24) has good selectivity of copper to oxide, and results in copper devices which have good electrical performance. In addition, disposal of the slurry (24) is not environmentally difficult since the slurry (24) is environmentally sound when compared to other prior art slurries.

Abstract: A slurry contains MnO.sub.2 or other manganese oxide as a primary component of abrasive particles. Further, a polishing process using such a manganese oxide abrasive and a fabrication process of a semiconductor device using such a polishing process are disclosed.

Abstract: A polishing composition is shown which includes (1) a polishing media particle; (2) a film forming binder for suspending the particle and forming a temporary film on an exposed surface of the workpiece, the temporary film being dissolvable in a subsequently applied polishing wash, whereby the polishing media particle is freed to polish the workpiece; (3) a solvent for suspending the polishing media particle in the film forming binder to facilitate forming the temporary film; and (4) a wetting agent to improve the wettability of the composition on the exposed surface of the workpiece.

Abstract: Automobile spray wax compositions incorporating an aromatic compound having at least one of two linear C.sub.8 -C.sub.20 alkyl substituents, and a preferred embodiment thereof including a compound identified and characterized by a CAS registry number of 68988-79-4.

Abstract: A surface protective composition especially for use on automobiles is prepared which contains about 0.1 to 5% of a film forming fluorine containing polymer, 0 to 10% of micronized wax, a hydrocarbon solvent, an organosilicone compound, a surfactant and water.

Abstract: An improved compound for use as a spray wax and drying aid in automatic vehicle-washing devices. The invention includes an olefin constituent having the general structural formula: ##STR1## wherein R.sub.1 is an alkyl group having between 4 to 28 carbon atoms and a first emulsifier having a cationic constituent. Certain preferred embodiments include a second emulsifier and a coupling agent.

Abstract: A chemical mechanical polishing composition comprising carboxylic acid, a salt and a soluble cerium compound at a pH above 3 and a method to selectively polish a silicon oxide overfill in preference to a silicon nitride film layer in a single step during the manufacture of integrated circuits and semiconductors.

Abstract: A composition and method are described for repairing surface defects in plastic objects, particularly laser-readable discs such as audio compact discs, video laser discs and CD-ROM discs. Using the composition and method, a surface defect in the disc is smoothed over and filled with a waxy material having a refractive index approximating that of the plastic substrate, thereby forming a repair which does not distract the laser and permits continued use of the disc.

Abstract: An improved treatment compound for rendering glass surfaces and the like water repellant, is described. The treatment compound comprises a mineral acid, a solvent, a mild abrasive constituent and an alkyl polysiloxane. The polysiloxane is a film former while the mild abrasive serves to enhance dirt and grit removal, smooth the water repellant film and indicate the area of application.

Abstract: A dry, non-oily, non-greasy, rubber or vinyl surface protectant contains a silicone component and an acrylic component in its formulation. When only the silicone component is applied to rubber and vinyl surfaces, the surfaces become glossy but feel oily. When only the acrylic component is applied, they are glossy and feel dry but are tacky and draggy as if a heavy residue was present. When components are blended and applied to rubber and vinyl surfaces, the surfaces have a dry shine with good gloss and feel completely dry. The treated surfaces are also not tacky and give no sensation of heavy residue presence.

Abstract: Disclosed is a polishing composition for refinishing a plastic surface of a compact disk. The composition is made of (a) from about 15 to about 25 weight percent of a solvent for the plastic surface, (b) from about 12.5 to about 35 weight percent of an abrasive particulate, (c) from about 15 to about 35 weight percent of a petroleum distillate, (d) from about 2 to about 10 weight percent of a hard wax, and (e) from about 15 to about 25 weight percent water.

Abstract: A substantially liquid, aqueous, rare earth oxide based composition for preserving the luster of the smooth surfaces of objects needing to have such an appearance. The composition is characterized in that the rare earth oxide in the composition consists of particles with an average diameter of less than two micrometers (2 .mu.m), and in that aqueous solvent includes a polysiloxane oil and a degreasing agent for diluting the polysiloxane oil.

Abstract: A coating surface-lustering agent providing both excellent water repellence and stainproofing to coating surfaces is provided and suitable for use in lusterig the coating surfaces of bodies of automobiles, electric cars, aircraft or office furniture, or outside walls of buildings. The coating surface-lustering agent contains at least one modified silicone resin selected from the group consisting of an acrylurethane-modified silicone resin, acryl-modified silicone resin and fluoroacryl-modified silicone resin.

Abstract: Hard surfaces are polished by applying an abrasive free, preferably clear, composition formed from an aqueous phase and a silicone phase. The aqueous phase contains water and a water soluble hydrophilic organic solvent. The silicone phase contains a volatile methyl siloxane, a siloxane polyether, and an organosilicon resin.

Abstract: A coating composition for the attenuation of the reflection electromagnetic radiation and particularly electromagnetic radiation have a wavelength of greater than 800 nm including the near infrared is described. The composition comprises a chromophore capable of absorbing up to about 95% of the electromagnetic radiation having a wavelength greater than 800 nm. Optionally, the composition may comprise microbeads that serve the purpose of also scattering the electromagnetic radiation.

Abstract: A polishing compound for plastic surfaces. The compound contains by weight approximately 4 to 17 parts at least one petroleum distillate lubricant, 1 to 6 parts mineral spirits, 2.5 to 15 parts abrasive particles, and 2.5 to 10 parts water. The abrasive is tripoli or a similar material that contains fine particles silica. Preferably, most of the abrasive particles are less than approximately 10 microns, more preferably less than approximately 5 microns in size. The compound is used on PLEXIGLAS.TM., LEXAN.TM., LUCITE.TM., polyvinyl chloride (PVC) and similar plastic materials whenever a smooth, clear polished surface is desired.

Abstract: A leather cleaner and conditioner consists of d-limonene, N-methyl-2-pyrrolidone, aliphatic dibasic acid ester, mineral oil, cetyl acetate, and butylated hydroxytoluene.

Abstract: A leather cleaner and conditioner consists of d-limonene, sorbitan monolaurate, mineral oil, lecithin, and butylated hydroxytoluene.

Abstract: A leather cleaner and conditioner consists of d-limonene, diporpylene glycol N-butyl ether, lecithin, poly (5) oxyethylene isodecyl oxypropyl amine, sorbitan monolaurate, triethanolamine modified dodecylbenzene sulfonate, butylated hydroxytolune, mineral oil, and water.

Abstract: A composition which comprises approximately by weight 1 to 8 percent of a hydrocarbon solvent; 1 to 4 percent of a silicone; 1 to 5.5 percent of at least one nonionic surfactant; 0.5 to 3 percent of an alkali metal neutralized tall oil fatty acid and 0.25 to 2.5 percent of an unneutralized tall oil fatty acid.

Abstract: Polishes for metal surfaces, based on dispersions of waxes, fluorinated polymers and perfluoropolyoxyalkylene oils acquire high gloss characteristics combined with improved water-repellency and resistance to soiling of 0.1-5% by weight of at least a cationic emulsifier comprised in the general formulaR--L--Q.sup.+ X.sup.-.sub.t (I)where:R=a chain of perfluoropolyoxyalkylene units;L=a divalent organic group;Q=a polar group;X=a halogen, or a group of formulaCH.sub.3 -Phenylene-SO.sub.3.sup.-R"SO.sub.3 --R"=F-(CF.sub.2).sub.m -;t=1 or 2;m=1-4.The polished containing the emulsifiers of formula (I) as well as the compounds comprised in said formula are claimed as new products.

Abstract: A polish is provided for cleaning metallic and fiberglass surfaces, such as an automobile, truck and boat bodies, and for providing a protective film on the surface. The polish comprises water in an amount between about 40.0 to about 75.0 percent, a solvent in an amount between about 12.0 to about 35.0 percent, a rheological additive in an amount between about 0.30 to about 1.0 percent, an ultraviolet absorber in an amount between about 0.05 to about 0.50 percent, a dye in an amount between about 0.0005 to about 3.0 percent, a first silicate in an amount between about 5.0 to about 15.0 percent, dimethylpolysiloxane in an amount between about 0.50 to about 6.0 percent, a silicone resin solution in an amount between about 0.10 to about 3.0 percent, oleic diethanol amide in an amount between about 0.50 to about 2.0 percent, a second silicate in an amount between about 0.10 to about 3.0 percent, and a bactericide in an amount between about 0.05 to about 0.20 percent, by weight of the total polish.

Abstract: A paste-like composition for abrasively cleaning and polishing hard surfaces which comprises silica, stearic acid, mineral seal oil, and petroleum distillate. The composition can be applied with a cleaning cloth, buffing pad or the like which has been impregnated with it. When used to polish metals, wood, plastic, fiberglass, painted surfaces or the like, the composition gives a characteristically brilliant shine.

Abstract: A seam cleaning paste, cream or liquid is disclosed, which comprises a hydrocarbon solvent and a finely divided inorganic powder. Treatment of the area near the seams of various types of floor coverings, especially highly stain resistant and soil resistant floor coverings, does not significantly change the appearance of the floor nor its resistance to soiling or staining. Yet it results in much improved adhesion of certain seam coaters subsequently applied to bridge the seam and prevent dirt from lodging therein. These creams do not exaggerate bubble formation in subsequently applied seam coaters and in fact, preferred embodiments help prevent such bubbles from forming.

Abstract: A seam cleaning paste, cream or liquid is disclosed, which comprises a hydrocarbon solvent and a finely divided inorganic powder. Treatment of the area near the seams of various types of floor coverings, especially highly stain resistant and soil resistant floor coverings, does not significantly change the appearance of the floor nor its resistance to soiling or staining. Yet it results in much improved adhesion of certain seam coaters subsequently applied to bridge the seam and prevent dirt from lodging therein. These creams do not exaggerate bubble formation in subsequently applied seam coaters and in fact, preferred embodiments help prevent such bubbles from forming.

Abstract: A polish formulation containing as components thereof at least one member selected from the group consisting of waxes, solvents, surfactants, thickening agents, abrasives, dyes, odorants and other ingredients normally used in making polishes. The improvement resides in incorporating into the polish formulation a novel reactive amine functional silicone polymer.

Abstract: A buffing composition for imparting very fine finishes to automobile surfaces. The buffing composition contains no silicone-containing materials and comprises alumina abrasive and a synthetic wax dispersed in a liquid medium. The liquid medium can be a solvent, water, a hydrocarbon oil, or mixtures thereof. The buffing composition can optionally contain other additives or modifiers such as wetting agents, thickeners, stabilizers, preservatives, emulsifiers, dyes, pigments and perfumes.

Abstract: This invention relates to surface cleaner/polish compositions comprising (i) a volatile liquid carrier selected from water, a monohydroxy alcohol having from 1 to 5 carbon atoms and mixtures thereof, and (ii) a crystalline aluminosilicate selected from Zeolite A, Zeolite X, Zeolite, Y, Zeolite P and mixtures thereof as an abrasive material, wherein said crystalline aluminosilicate has a particle size distribution sufficient to (a) provide enhanced wettability properties, (b) provide enhanced dispersion stability, (c) provide enhanced anti-fogging properties, (d) reduce or eliminate residual filming, and/or (e) reduce or eliminate dust during surface removal. This invention also relates to a process for preparation of the surface cleaner/polish compositions.

Abstract: The addition of 2-pyrrolidone in combination with a surfactant having an HLB range of 13 to 15 and a formula C.sub.9 H.sub.19 C.sub.6 H.sub.4 (OCH.sub.2 OCH.sub.2).sub.n OH in which n has an average value of 15 improves the gloss and depth of gloss of floor polish compositions.

Abstract: A process and liquid composition for cleaning, restoring and polishing a hard, porous surface wherein the composition contains from 0.1 to 4 weight percent of a surfactant, from 5 to 20 weight percent of a synthetic hydrocarbon oil, and from 76 to 94.9 weight percent of a C.sub.1 -C.sub.4 aliphatic alcohol. The composition may be applied to a variety of work surfaces such as work benches and kitchen counters, particularly porous surfaces such as slate, wood, vinyl, tile and rubber, wiped thereon and the surface allowed to dry.

Abstract: There is disclosed an antiseptic polish for covering highly touched surfaces which contain a solution comprising Povidone-Iodine of approximately 7.5 to 10 percent by volume dispersed in a liquid polish.

Abstract: An aqueous polish composition comprising a polymeric polish material and an alkoxylated amine sulfactant is disclosed. Also disclosed is a method of making the aqueous polish composition as well as a method of using an alkoxylated amine surfactant to improve selected physical properties of a polymeric polish material.

Abstract: A compound containing a tall oil fatty acid, oleic diethanol amide, aluminum oxide abrasive material, and organo-treated bentonite provides a polish for metals, such as aluminum, having a uniform viscosity and the abrasive particles uniformly dispersed throughout the carrier. Water may be added to form a scratch removing compound. Mineral spirits may be substituted for the fatty acid in the scratch remover to form a prepolish compound.

Abstract: An aqueous polish composition comprising a polymeric polish material and an alkoxylated amine surfactant is disclosed. Also disclosed is a method of making the aqueous polish composition as well as a method of using an alkoxylated amine surfactant to improve selected physical properties of a polymeric polish material.

Abstract: A composition is described which cleans, imparts water repellency and polishes hard surfaces. This composition comprises a solvent mixture of a glycol ether, a lower aliphatic alcohol, a hydrocarbon solvent and water, together with an organic polysiloxane, a silane, and a polycarboxylic chelating acid. A preferred composition contains propylene glycol monomethyl ether, isopropanol, high flash naphtha or mineral spirits, a polydimethysiloxane, citric acid, and orange oil terpene.

Abstract: The cleaning and polishing composition for metals described herein comprises (a) a flour component, (b) a mineral spirits component, and (c) an abrasive component. The abrasive component comprises various combinations of aluminum oxide, ferric oxide, and chromic oxide, along with various animal fats, tallow glycerides, process oils, and wetting agents. Various metals and alloys, such as aluminum, magnesium, gold, silver, brass, copper, stainless steel, and chromium can be cleaned and polished by these compositions.

Abstract: A non-homogenized oil-in-water, essentially wax free emulsion cleaner polisher composition that resists phase separation. The composition comprises from about 75 to 99% water, 0.5 to 12% film former, 0.1 to 5% nonionic emulsifier and 0.01 to 0.3% thickener. The composition may be dispensed from pump, trigger or squeeze sprayers. Various methods are also disclosed to formulate the composition.

Abstract: A non-caking shoe polish composition comprising in addition to a traditional base mixture of paraffin wax and turpentine oil, refined petroleum jelly, silicone oil, and optionally, camphor oil, silicone powder, and color ink. The composition may be usefully impregnated into a shoe polish cloth consisting of a section of fabric material adapted for easy and non-messy application of the composition onto leather or imitation leather materials.

Abstract: A coating composition consists essentially of a major amount of light mineral oil and a small amount of eucalyptus oil, preferably between about 0.01 and about 1%, by volume.

Abstract: Water-in-oil compositions having a continuous oil phase comprising a silicone and a hydrocarbon cleaning component, a discontinuous water phase, comprise as emulsifier an organopolysiloxane of the formulaZ(Me).sub.2 SiO[(Me).sub.2 SiO].sub.x [(Me)(R)SiO].sub.y [(Me)(QR')SiO].sub.z --Si(Me.sub.2)Zwhere Me denotes methyl, Q a polyoxyalkylene radical, R a C.sub.6 -C.sub.16 alkyl radical, R' an alkylene and Z a monovalent radical. The organopolysiloxane allows stability and easy emulsification of water into an oil phase comprising those silicones and hydrocarbons which are preferred in polishes.

Abstract: A wood polish comprising a vinegar solvent, oil base and oleoresin suitable for use in both cleaning and polishing furniture in a single operation. A preferred embodiment includes linseed oil, turpentine and vinegar.

Abstract: A furniture polish composition characterized by an internal aqueous phase and an external oil phase, the composition containing an ethoxylated montan acid wax in an amount of from 0.5 to 5% by weight, which constituent functions both as an emulsifier and as the wax. Also included in the composition is from 10 to 50% hydrocarbon solvent; from 0 to 15% polysiloxane, and water. A coemulsifier may be included at low levels, less than 0.5% by weight, the weight ratio of the ester to the emulsifier being greater than 1:1.

Abstract: A substantially nonabrasive, liquid car cleaner composition which cleans car surfaces without an external source of water to wash or rinse. The product is a composition of up to 30% polymeric solids, up to 95% liquid carrier and a suspension aid. It is good for cleaning painted, metal and vinyl surfaces. It does not leave unsightly residue embedded in the texture of vinyl surfaces. A container/applicator kit comprising a bristled fibrous pad and container is also provided.

Abstract: The invention is generally accomplished by providing a cloth which is coated or impregnated in a discontinuous manner with a polish composition. The polish composition comprises a silicone oil, a detergent and soap or wax. In a particularly preferred form, the cloth comprises a polypropylene meltblown material that has been treated with a surfactant, and the wax is a combination of saponified and non-saponified waxes. The polishing wipe further may have added thereto antistatic agents, UV absorbers and mineral oil.

Abstract: Multi-phase paste and liquid polish compositions having improved gloss life and water resistance durability are obtained by providing an oil external emulsion phase containing aminofunctional polysiloxane, and a water external emulsion phase containing dimethyl polysiloxane. The oil external emulsion phase and the water external emulsion phase are packaged in the same container or in separate containers in a manner as to keep each phase separate from the other phase until the polish compositions are applied to a surface to be polished. The method of preparing and packaging the multi-phase polish compositions is also disclosed.