Including A Sliding Boat System Patents (Class 117/57)
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Patent number: 10381512Abstract: The present disclosure provides a light-emitting device. The light-emitting device includes a substrate, a light-emitting stack on the substrate, and a semiconductor window layer comprising AlGaInP series material disposed between the substrate and the light-emitting stack.Type: GrantFiled: December 8, 2017Date of Patent: August 13, 2019Assignee: Epistar CorporationInventor: Yi-Chieh Lin
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Patent number: 9926626Abstract: The present invention relates to a system for processing coated substrates, having the following features: at least one evacuable process box for accommodating at least one substrate with a gas-tightly sealable housing, which forms a hollow space, wherein the housing comprises at least one housing section, which is implemented such that the substrate is thermally treatable by incident electromagnetic thermal radiation, wherein the housing has at least one housing section coupleable to a cooling device for its cooling and at least one housing section not coupled to the cooling device, wherein the hollow space is divided by at least one separating wall into a process space for accommodating the substrate and an intermediate space, wherein the separating wall has one or a plurality of openings and is arranged between the substrate and the housing section coupled to the cooling device, and wherein the housing is provided with at least one sealable gas passage that opens into the hollow space, for evacuating and iType: GrantFiled: July 9, 2013Date of Patent: March 27, 2018Assignee: Bengbu Design & Research Institute for Glass IndustryInventors: Stefan Jost, Martin Fürfanger, Jörg Palm
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Patent number: 9768351Abstract: An optoelectronic semiconductor device comprises a barrier layer, a first semiconductor layer on the barrier layer, the first semiconductor layer comprising a first dopant and a second dopant, and a second semiconductor layer beneath the barrier layer, the second semiconductor comprising the second dopant, wherein, in the first semiconductor layer, a concentration of the first dopant is larger than a concentration of the second dopant, and the concentration of the second dopant in the second semiconductor layer is larger than that in the first semiconductor layer.Type: GrantFiled: September 2, 2014Date of Patent: September 19, 2017Assignee: Epistar CorporationInventors: Tsung-Hsien Liu, Rong-Ren Lee, Shih-Chang Lee
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Patent number: 8940095Abstract: An apparatus for growth of uniform multi-component single crystals is provided. The single crystal material has at least three elements and has a diameter of at least 50 mm, a dislocation density of less than 100 cm?2 and a radial compositional variation of less than 1%.Type: GrantFiled: November 4, 2011Date of Patent: January 27, 2015Assignee: Rensselaer Polytechnic InstituteInventor: Partha Dutta
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Patent number: 8540035Abstract: Embodiments of the present invention generally relate to extendable cutting tools for use in a wellbore. In one embodiment, a tool for use in a wellbore includes a tubular body having a bore therethrough, an opening through a wall thereof, and a connector at each longitudinal end thereof; and an arm. The arm is pivotally connected to a first piston and rotationally coupled to the body, is disposed in the opening in a retracted position, and is movable to an extended position where an outer surface of the arm extends outward past an outer surface of the body. The tool further includes the first piston. The first piston is disposed in the body bore, has a bore therethrough, and is operable to move the arm from the retracted position to the extended position in response to fluid pressure in the piston bore exceeding fluid pressure in the opening. The tool further includes a lock operable to retain the first piston in the retracted position; and a second piston operably coupled to the lock.Type: GrantFiled: November 10, 2009Date of Patent: September 24, 2013Assignee: Weatherford/Lamb, Inc.Inventors: Wei Jake Xu, Albert C. Odell, II, Simon J. Harrall, Thomas M. Redlinger, Christopher M. Vreeland, Andrew Antoine, David J. Brunnert, Tommy L. Laird, Michael J. Moody, Frederick T. Tilton
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Patent number: 7615115Abstract: A liquid-phase growth apparatus for growing a crystal on a substrate includes a crucible containing a solution that contains a raw material for forming the crystal, and a substrate holder for vertically holding the substrate. The substrate holder includes connectors, a receiving component, and a push component. The receiving component and the push component are opposite to each other and are connected by the connectors. The push component holds an upper portion of the substrate while the receiving component holds a lower portion of the substrate. The substrate holder containing the vertically held substrate is dipped into the solution. The receiving component ascends with buoyancy in the solution contained in the crucible, so that the substrate is now held securely and prevented from cracking due to thermal expansion.Type: GrantFiled: July 7, 2008Date of Patent: November 10, 2009Assignee: Canon Kabushiki KaishaInventors: Masaki Mizutani, Katsumi Nakagawa, Takehito Yoshino, Shoji Nishida
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Patent number: 7351283Abstract: A crystalline thin structure (104, 204, 404) is grown on a surface (108, 228) of a substrate (112, 208, 400) by depositing molecules (136, 220) from a molecular precursor to a lateral growth front (144, 224) of the structure using a crystal grower (116, 200). In one embodiment, the crystal grower comprises a solution (124) containing the molecular precursor in a solvent (140). Molecules are added to the lateral growth front by moving one or both of the free surface (120, 120?) of the solution and deposition surface relative to the other at a predetermined rate. In another embodiment, the crystal grower comprises a mask (212) that includes at least one opening (216). Precursor molecules are vacuum deposited via a molecular beam (236) at the growth front (228) of the crystalline thin structure (204) as one or both of the opening and surface are moved relative to the other at a predetermined rate.Type: GrantFiled: March 11, 2005Date of Patent: April 1, 2008Assignee: The University of Vermont and State Agricultural CollegeInventor: Randall L. Headrick
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Patent number: 7048797Abstract: A liquid-phase growth process for continuously growing a crystal film on a plurality of substrates with respect to their one side surfaces, characterized in that said plurality of substrates are kept afloat on the surface of a flowing solution for liquid-phase epitaxy which comprises a crystallizing material dissolved in a solvent in a supersaturated state and which is flowing in a solution flow passage, and while said plurality of substrates being moved by virtue of said flowing solution in said solution flow passage, a crystal film is grown on the surfaces of said plurality of substrates which are in contact with said flowing solution. A liquid-phase growth apparatus suitable for practicing said liquid-phase growth process.Type: GrantFiled: September 22, 2003Date of Patent: May 23, 2006Assignee: Canon Kabushiki KaishaInventors: Masaki Mizutani, Takehiko Yoshino, Shoji Nishida
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Patent number: 7022181Abstract: In a liquid phase growth process comprising immersing a substrate in a melt held in a crucible, a crystal material having been dissolved in the melt, and growing a crystal on the substrate, at least a group of substrates to be immersed in the melt held in the crucible are fitted to the supporting rack at a position set aside from the center of rotation of the crucible or supporting rack, and the crystal is grown on the surface of the substrate thus disposed. This can provide a liquid phase growth process which can attain a high growth rate, can enjoy uniform distribution of growth rate in each substrate and between the substrates even when substrates are set in a large number in one batch, and can readily keep the melt from reaction and contamination even when the system has a large size, and provide a liquid phase growth system suited for carrying out the process.Type: GrantFiled: December 14, 2001Date of Patent: April 4, 2006Assignee: Canon Kabushiki KaishaInventors: Katsumi Nakagawa, Tetsuro Saito, Tatsumi Shoji, Takehito Yoshino, Shoji Nishida, Noritaka Ukiyo, Masaaki Iwane, Masaki Mizutani
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Patent number: 7014711Abstract: A liquid-phase growth apparatus for growing a crystal on a substrate includes a crucible containing a solution that contains a raw material for forming the crystal, and a substrate holder for vertically holding the substrate. The substrate holder includes connectors, a receiving component, and a push component. The receiving component and the push component are opposite to each other and are connected by the connectors. The push component holds an upper portion of the substrate while the receiving component holds a lower portion of the substrate. The substrate holder containing the vertically held substrate is dipped into the solution. The receiving component ascends with buoyancy in the solution contained in the crucible, so that the substrate is now held securely and prevented from cracking due to thermal expansion.Type: GrantFiled: March 12, 2003Date of Patent: March 21, 2006Assignee: Canon Kabushiki KaishaInventors: Masaki Mizutani, Katsumi Nakagawa, Takehito Yoshino, Shoji Nishida
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Patent number: 6902619Abstract: The invention provides a method of growing semiconductor epitaxial layers on a substrate comprising the steps of providing a substrate, providing at least a first growth solution and optionally one or more further growth solutions, and (i) exposing the substrate to the first growth solution, the growth solution being under a supersaturated condition such that a first layer grows on the surface of the substrate; and, (ii) optionally exposing the substrate to one or more further growth solutions, the further growth solutions being under a supersaturated condition such that one or more further layers grow on the surface of the first layer; and (iii) varying the pressure of the system to change the degree of supersaturation of the first growth solution or one or more further growth solutions to affect the growth of the first layer or one or more further layers.Type: GrantFiled: June 28, 2001Date of Patent: June 7, 2005Assignee: NTU Ventures PTE. Ltd.Inventors: Yuen Chuen Chan, Xiangjun Mao
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Patent number: 6197110Abstract: A liquid phase deposition method of mass producing substantially uniform silicon dioxide films on wafers by forming wafer sets from at least four wafers. The wafer sets are placed in a slotted polytetrafluroethylene polymer boat wherein a proper and short distance between the front surface of a wafer and another surface is created. Finally, a substantially uniform silicon dioxide film is deposited on the wafer surfaces by contacting the wafer sets with an aqueous supersaturated silicon dioxide solution comprising a mixture of hydrofluosilicic acid and boric acid.Type: GrantFiled: April 29, 1999Date of Patent: March 6, 2001Assignee: National Science CounselInventors: Ming-Kwei Lee, Bo-Hsiung Lei
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Patent number: 5985023Abstract: While a nitrogen-doped gallium phosphide epitaxial layer in an epitaxial wafer as a material of light-emitting diodes is desired to have a high concentration of nitrogen in order to enhance the efficiency of light emission, the present invention provides a reliable and efficient means to accomplish a high nitrogen concentration by the increase of the concentration of ammonia as a nitrogen source in the doping atmosphere to the contrary to the general understanding that increase of the ammonia concentration to exceed a limit rather has an effect of decreasing the concentration of nitrogen doped in the epitaxial layer. The inventive method is based on the discovery that an exponential relationship is held between the growth rate of the epitaxial layer and the concentration of nitrogen in the thus grown epitaxial layer.Type: GrantFiled: March 22, 1996Date of Patent: November 16, 1999Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Susumu Higuchi, Masato Yamada, Munehisa Yanagisawa
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Patent number: 5922126Abstract: The disclosed semiconductor liquid phase epitaxial growth method and apparatus and the wafer holder used therefor can improve the deposition of polycrystal, the non-uniformity of film thickness, the thermal deterioration of the substrate, etc. The wafer holder comprises a holder body (11) formed with at least one wafer accommodating space in which at least two semiconductor wafers (15) can be held in such a way that reverse surfaces of the two wafers are brought into contact with two opposing inner side walls of the wafer holder and right surfaces of the two wafers are opposed to each other with a predetermined space between the two; and a holder cover (12) for covering an open surface of the holder body (11). Further, the holder body (11) is formed with an inlet port (16) for injecting a source into the wafer accommodating space and an outlet port (13) for exhausting the source from the wafer accommodating space.Type: GrantFiled: May 30, 1997Date of Patent: July 13, 1999Assignee: Kabushiki Kaisha ToshibaInventors: Kazuyoshi Furukawa, Masami Iwamoto
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Patent number: 5603761Abstract: In an improved liquid phase epitaxial growth method and apparatus in which a plurality of substrates are placed in a deposition chamber having at least one first vent hole; a solution for liquid phase growth is held in a solution chamber having at least one second vent hole and at least two sub-chambers separated by a partition plate and communicated with each other via a communicating portion; and before the substrates and the solution for liquid phase growth are brought into contact with each other, the deposition chamber and the solution chamber are revolved for causing the solution for liquid phase growth to move through the communicating portion so as to increase and decrease the volume of space portions of the respective sub-chambers and thereby replacement of a heat-treatment gas in the deposition chamber and the solution chamber is undertaken to achieve heat treatment.Type: GrantFiled: August 3, 1995Date of Patent: February 18, 1997Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Munehisa Yanagisawa, Susumu Higuchi, Yuji Yoshida, Masahiko Saito
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Patent number: 5525539Abstract: An infrared LED can function efficiently as both an emitter and a detector at a common wavelength without undesirable characteristics found in avalanche diodes. The LED comprises a graded-bandgap Ga.sub.1-x Al.sub.x As semiconductor material with two semiconductive regions that form a p-n junction. The value of x (the amount of aluminum in the semiconductive material Ga.sub.1-x Al.sub.x As) is varied monotonically as the material is grown so that x decreases monotonically from a value greater than approximately 0.08 at the diode surface on the N side of the p-n junction to a value not less than zero at the diode surface on the P side of the junction. The value of x at the p-n junction is greater than 0 and less than approximately 0.08 as a result of a high initial growth temperature of at least about 930 degrees Celsius.Type: GrantFiled: March 29, 1995Date of Patent: June 11, 1996Assignee: Opto Diode CorporationInventor: James C. Kim
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Patent number: 5482555Abstract: A liquid-phase epitaxy system having an LPE boat which consists of a slider section, a source holder section, and a contacting well section, in which the distance between the first two contacting wells is different from that between the first two source holding wells, so that the concentration of the solutions can be controlled by a proper temperature profile, since the solution for melt-etching and the remaining solution for the epitaxial growth are not deposited into the contact wells at the same time. This permits in-situ melt-etching and improvement in the quality of the epitaxial layer and the epitaxial yield by minimizing the contamination of the melt-etched surface of the substrate.Type: GrantFiled: April 28, 1994Date of Patent: January 9, 1996Assignee: Samsung Electronics Co., Ltd.Inventor: Song J. Lee
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Patent number: 5334278Abstract: The liquid-phase epitaxy system having the LPE boat consists of of a slider section, a source holder section, and a contacting well section, in which the distance between the first two contacting wells is different from that between the first two source holding wells, so that the concentration of the solutions can be controlled by the proper temperature profile, since the solution for melt-etch and the remaining solution for the epitaxial growth are not filled into the contacting wells at the same time.Thus, the present invention can easily perform the in-situ melt-etch and can improve the quality of the epitaxial layer and the epitaxial yield by minimizing the contamination of the melt-etched surface of the substrate.Type: GrantFiled: August 30, 1991Date of Patent: August 2, 1994Assignee: Samsung Electronics Co., Ltd.Inventor: Song J. Lee