Abstract: A positioning control device mounted on an industrial machine including a driver including a motor, a movable body movable by the driver, a first detector that detects a position of the movable body based on the amount of driving of the driver, a servo amplifier that performs first feedback control of feedback-controlling driving of the motor based on a first detection value by the first detector, and a second detector that detects a position of the movable body when the movable body comes closer to a target position within a distance or shorter. The positioning control device is configured to position the movable body at the target position and includes a controller that controls the servo amplifier.

Abstract: A high rotation atomizer functioning with inner charging includes a high-voltage circuit which generates a high voltage that can be applied to a bell cup, from a low voltage. This high-voltage circuit includes a measuring resistor in a circuit path between the turbine casing of the turbine driving the bell cup and ground. A first measuring voltage can be tapped at this first measuring resistor, which voltage is a measure for the voltage applied at the turbine casing. A second measuring resistor is placed in a circuit path between the turbine casing and ground. A second measuring voltage is tapped at this resistor, which is likewise a measure for the voltage applied at the turbine casing. If the information gained from the two measuring voltages deviates too strongly from each other, then the control device triggers an error signal. By this means, the safety of the entire system is increased.

Abstract: Methods for depositing film on substrates are provided. In these embodiments, the substrates are processed in batches. Due to changing conditions within a reaction chamber as additional substrates in the batch are processed, various film properties may trend over the course of a batch. The methods herein can be used to address the trending of film properties over the course of a batch. More specifically, film property trending is minimized by changing the amount of RF power used to process substrates over the course of the batch. Such methods are sometimes referred to as RF compensation methods.

Abstract: An observation sample is prepared by immobilizing a nanomaterial on a substrate 10 by applying a voltage between a nanomaterial dispersion liquid 13, filled in an interior of an electrostatic spray nozzle 20, and the observation substrate 10 to electrostatically spray and dry the dispersion liquid 13 and electrostatically deposit the nanomaterial. With respect to the observation substrate 10, including a conductive grid portion 11 and a supporting film 12, a reference electrode 81 is disposed below the substrate 10 and a bias voltage of the same polarity as the electrostatic spraying voltage is applied to the grid portion 11 of the substrate 10 to adjust immobilization positions of the nanomaterial on the substrate 10. An observation sample, with which the nanomaterial is immobilized in a satisfactory state on the substrate, can thereby be prepared.

Abstract: A powder spray coating discharge assembly (230, 260, 216, 228, 232) for connection to an electrostatic spray coating gun (210), the gun (210) having a gun body (212), means for connecting to a supply of coating powder and means for supplying a voltage (20) at first and second potentials respectively to first (292) and second electrical connections (294) each for connection to a respective one of a discharge electrode (232) and a counter electrode (260), the means for supplying the voltage (20) comprising: a variable voltage power supply (114) having an input connected to an electrical power source (110), an output connected to each of the first and second electrical connections (292, 294), a control circuit (128) for controlling the variable voltage power supply (20) and means (120) for sensing an output load, wherein the control circuit (128) is adapted to adjust the variable voltage power supply (20) to reduce the voltage and current in proportion to a sensed increase in load, or vice-versa.

Abstract: In an immobilization process of electrostatically spraying a nanomaterial dispersion liquid 13 from an electrostatic spray nozzle 20 and immobilizing a nanomaterial on a sample 10, a voltage is applied between the dispersion liquid 13 and the sample 10 to electrostatically spray the dispersion liquid 13 onto the sample 10 from a spray outlet 22 of the nozzle 20 under a condition where one or zero particles of the nanomaterial 18 are contained in each individual droplet 16 sprayed and electrostatically deposit the nanomaterial 18 onto a surface of the sample 10 after drying a solvent 17, contained in each individual droplet 16, in an atmosphere to immobilize the nanomaterial 18 on the sample 10. Aggregation of the nanomaterial in each droplet is thereby prevented and the nanomaterial can be immobilized favorably on the sample.

Abstract: Disclosed are an apparatus and a method for plasma-supported coating and surface treatment of voluminous parts. The apparatus features a vacuum chamber (3, 20, 32) comprising one or more pumps, a first resonant circuit with a first high frequency generator (5, 17, 28, 40), with an adjustable capacitance and an adjustable inductance of the first resonant circuit, and a first connection for integrating the part (1, 21, 32, 39) into the first resonant circuit, with at least a second resonant circuit with a second high frequency generator (18, 29, 40), with a second connector for integrating the part (1, 21, 32, 39) into the second resonant circuit and an adjustable capacitance and an adjustable inductance of the second resonant circuit. According to the disclosed method the inductance and/or the capacitance of the first and second resonant circuits are determined based on the part (1, 21, 31, 39).

Abstract: A spray coating apparatus comprises a spray gun (12) operable to deposit a sprayed coating via a spray nozzle (18) onto a surface, a mapping means (22) associated with the spray gun (12) operable to ascertain and store topographical characteristics of the surface, a position sensor (28) operable to ascertain the position of the spray gun (12) relative to the surface, a coating thickness monitor (26) operable to ascertain the thickness of a coating applied to the surface, and a nozzle control means (24) operable to control the deposition of the sprayed coating, wherein the nozzle control means (24), in use, control the deposition of the sprayed coating in response to information provided by the position sensor (28), the coating thickness monitor (26) and the mapping means (22).

Abstract: An electrostatic coating apparatus for coating an object includes a base module, a nozzle, an electric field generator and a power supply. The object is mounted on the base module. The nozzle receives gas and liquid and ejects the gas and the liquid. The electric field generator mounted on the base module generates an electric field. The power supply has a first pole electrically connected to a first pole of the electric field generator, and a second pole electrically connected to the object and a second pole of the electric field generator such that the electric field is generated in the electric field generator and the atomized liquid passing through the electric field generator is charged and absorbed onto the object to form a coating layer on the object.

Abstract: Spray coating apparatus comprises a spray nozzle (2) and a regulation system (16) which limits the high voltage at a high-voltage electrode (10) to a predetermined voltage value. The system also directly measures and limits the electric spray current of the high-voltage electrode (10) to a predetermined current value. The electric spray current is limited by adjusting the high voltage at the high-voltage electrode (10).

Abstract: To control the distance between an adhesive application device and a joining surface during the application of a bead of adhesive, the distance between the application nozzle and the joining surface is measured with the aid of a contactless measurement method, and application nozzle and joining surface are moved with respect to one another in such a way that the distance measured value lies within a predetermined, adjustable range of values.

Abstract: A vacuum treatment system in which a part (9) is provided inside a vacuum treatment chamber (1). A potential (&phgr;9) which deviates from the system reference potential (&phgr;0) by approximately at least ±12 V is applied to said part. A sensor and/or an actuator (11) is/are arranged on said part. In addition, the invention comprises an electronic unit (13) which is connected to the sensor and/or actuator. Processing signals on the unit (13) is considerably simplified in that the electronic unit (13) is operated as a reference potential on the potential (&phgr;9) of said part (9).

Abstract: Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Abstract: The present invention provide an apparatus for manufacturing a bonded substrate that suppresses a defect in the bonded substrate. When the pressure in a vacuum chamber is at the atmospheric level, upper and lower chuck units respectively attract substrates through vacuum. When the vacuum chamber is depressurized, each chuck unit electrostatically attracts the associated substrate. During the depressurization of the vacuum chamber, the pressure for attracting each substrate to the associated chuck unit is controlled to be equal to the pressure in the vacuum chamber. This prevents each substrate from falling from or moving relative to the associated chuck unit. The first and second substrates are thus bonded together as accurately aligned.

Abstract: The inventive mechanism adjusts a working distance between a tool and a work surface. The provision for automatically setting and adjusting the working distance between two parts of an apparatus, possibly a coating apparatus, permits the mechanism to adjust in real time for unknown and possibly random variations in the dimensions of the work surface, the apparatus supporting the work surface, and imperfect leveling of the tool or the work surface. In a preferred embodiment, the inventive mechanism is used to accurately set and maintain the working distance of a dispenser above a substrate so as to provide that a consistent coating thickness is applied across the substrate. The mechanism preferably employs direct precision distance sensing means independent of the motor of drive means to continuously measure the working distance in real time with a high degree of resolution and accuracy.

Abstract: A plasma treatment apparatus for treating a surface of a conductive work object is disclosed. When the apparatus operates in a conductive work treating mode, the discharge energy per unit area can be varied by changing the discharge voltage duration and/or by changing the time interval between application of voltage. Further, the application of a variable voltage pulse changes a path of discharge on the effective treatment area of a work object. This results in the surface of the work object being effectively treated all over.

Abstract: A method for controlling operation of powder spraying coating apparatus comprising automatically reducing both the discharge current and discharge voltage of the electrostatic charging means as the spray apparatus approaches a workpiece.

Abstract: Apparatus and method for controlling the size of a gap through which material is metered. The gap is defined by a rigid surface and a flexible surface connected to at least one actuator for deforming the flexible surface. A plurality of sensors are positioned along the rigid or flexible surfaces to detect the other of the surfaces and generate signals indicating its position. A computing unit in communication with the plurality of sensors processes the signals to generate a continuous gap measurement profile. The computing system also stores a pre-determined desired gap measurement profile. A control system in communication with the computing unit actuates the actuators to deform the flexible surface to adjust the gap measurement profile to correct any deviation from the desired gap measurement profile.

Abstract: A method and apparatus for monitoring a parameter of the RF power applied to a plasma-enhanced chemical vapor deposition (PECVD) chamber. The parameter is used to monitor an aspect of the chamber or a process in the chamber. In particular, the parameter can be used to determine whether the susceptor is properly aligned, determine the spacing of the susceptor from the gas discharge head, determine whether the wafer is properly aligned on the susceptor, determine whether there has been any deterioration of the susceptor or the gas discharge head, and determine whether a chamber clean operation is complete.

Abstract: Disclosed is an apparatus for forming a coating film for semiconductor processing, including a holder for holding a substrate, a coating solution supply device arranged to face one main surface of the substrate held by the holder and provided with a discharge port for supplying a coating solution onto the one main surface of the substrate, the coating solution forming a band-like stream having a width smaller than that of the substrate, a moving device for moving the coating solution supply device in parallel and relative to the substrate held by the holder to form a coating region and a non-coating region on the one main surface of the substrate, and a clearance retaining device for maintaining constant the distance between the discharge port of the coating solution supply device and the one main surface of the substrate.

Abstract: A paint spray rig is disclosed for applying "high gain" reflective paints to a motion picture projection screen. The rig includes a tower which extends vertically of the screen and which can be indexed laterally across the screen. A paint spray head is carried by a carriage assembly that is vertically movable on a tower. The spray head can be moved towards and away from the screen under the control of ultrasonic sensors that measure the distance between the spray head and the screen, for maintaining the distance substantially constant. The spray head can also be moved progressively in the vertical direction with respect to the carriage so that it is at the bottom of the carriage for painting the bottom edge of the screen and at the top of the carriage for painting the top edge of the screen. The spray head can also be swapped from one side of the carriage to the other for painting opposite side edge portions of the screen.

Abstract: A powder spray coating system includes a spray gun for spraying powder in a spray pattern onto a part. The spray gun includes an electrode connected to a power supply, the electrode charging powder as the powder is dispensed from the gun toward the part. A first current sensor measures gun current from the power supply to the electrode. An ABI probe or ion collector is mounted with the gun for collecting free ions produced by the electrode. The collector has a forward portion positioned near the spray pattern and spaced from the electrode. A second current sensor measures return current from the ion collector. A regulating assembly regulates the return current from the ion collecting device. A controller is connected to the first and second current sensors and to the regulating assembly for operating the regulating assembly in accordance with a predetermined setting representing the difference between the gun current and the return current.

Abstract: A semiconductor fabrication apparatus including a plurality of process units for sequentially processing a semiconductor wafer. A heating unit, a cooling unit, a resin coating unit, and a resin hardening unit are included. Also, a sender unit and a process control unit are included besides the process units. In the sender unit, a wafer size sensor is provided in order to detect the size of an original wafer. The wafer size data detected by the sensor is held and processed in the process control unit. Finding the original size of a wafer, the process control unit gives instructions to process units so as to set a correct stop position of the wafer and to select suitable wafer supporting means according to the detected wafer size. Thus, the apparatus is automatically set to a correct state for uniformly processing the semiconductor wafer. In some units, there are provided sensors to find the size of the supporting means, for example, carrier guides, forks, and stoppers.

Abstract: A pan oiler for spraying oil into cavities in pans moving on a conveyor including a stationary center nozzle assembly and spaced outer nozzle assemblies. The outer nozzle assemblies are mounted on opposite ends of a drive screw having right hand threads formed on one end and left hand threads formed on the other end for moving the outside nozzle assemblies in unison relative to the stationary center nozzle assembly. A pair of electrically charged electrodes are positioned adjacent the nozzle assemblies for setting up an electric field across the spray paths of the nozzle assemblies for reducing overspray.

Abstract: The present invention is an improved coating roll drive that used frameless, inside out motor and a set of magnetic bearings, axial and radial, mounted inside a coating roll to provide adaptive positioning of the coating roll relative to a given reference, such as a hopper lip. The present invention minimizes the variation of distance between the coating roll and the given reference during operation.

Abstract: A slider is associated with a carrier for transferring a vehicle body through a magnet and an air cylinder. An amount or a distance of movement of the slider transferred together with movement of the carrier is detected with a rotary encoder and it is computed as an amount or a distance of movement of the carrier. When the carrier is transferred in a predetermined amount or distance, an image of the vehicle body is fetched by an investigating robot. The fetching does not undergo any adverse influence due to a deviation of the position of the investigating robot relative to the position of the carrier.

Abstract: Articles, such as plastic parts, having the appearance of a naturally-occurring material such as wood or leather are formed by the techniques of (1) providing a plurality of grooves in a surface of the article, (2) applying a surfactant to the surface of the article, and (3) applying one or more color solutions to the surface of the article. The article may be a solid substrate, a part or a film. A topcoat is preferably applied to the surface of the article. The techniques include controlling movement of an applicator implement for applying the surfactant and color solutions to the surface of the substrate, and controlling movement of a saturator tool for modifying and synthesizing the surfactant and color solutions on the surface of the part and permeating the surfactant and color solutions into the plurality of grooves.

Abstract: An epitaxial facility with at least one reaction chamber made of dielectric material, comprising a gas inlet in the ceiling area and a gas outlet in the floor area, a gas mixer connected to the gas inlet of the reaction chamber for the infeed of reaction and scavenging gases, a polyhedral support made of graphite, which is mounted so as to be able to rotate in the reaction chamber between the gas inlet and the gas outlet and tapers toward the gas inlet, for accommodating a number of wafers, and induction heating system essentially surrounding the reaction chamber for indirect heating of the wafer support. The epitaxial facility further comprises a device for transferring the wafer support from a charging zone outside of the reaction chamber to a working position inside the reaction chamber, a device for charging the wafer support with wafers in the charging zone, and a clean-air space accommodating the facility components.

Abstract: A machine for removing bubbles from coated flat substrates, namely PC boards. The machine includes one or more conveyors for transporting the boards into an enclosure and a vacuum platen positioned above the conveyor which, when lowered into contact with the conveyor encloses the board in a plenum. A pump withdraws air from the plenum to create a vacuum and remove any entrained or surface bubbles from the boards.

Abstract: An improved control circuit for protecting a high voltage DC electrostatic system from arcing by removing the high voltage from the electrostatic system under incipient arcing conditions. A signal having a voltage proportional to the instantaneous high voltage current in the electrostatic system is established. DC components and unwanted noise and unwanted AC components are removed from the signal to leave only signal components relating to the rate of change of the current in the high voltage system and information indicative of incipient arcing conditions. When the remaining signal exceeds a predetermined reference level, high voltage is removed from the electrostatic system.

Abstract: An improved method and apparatus for non-impact printing on a substrate is disclosed. The substrate is dried and one surface thereof is coated with a barrier material, after which a marking material immiscible with the barrier material is applied to that surface. An electric field generator which may be in the form of an array of electrical styli is positioned adjacent a second surface of the substrate, opposite the point of application of the marking material. Vacuum means may be used to promote contact between the substrate and the styli. Voltage selectively applied to the styli allows the marking material to displace the barrier material and wet the previously coated substrate surface, thereby forming a printed image.

Abstract: The caliper of single face corrugated paperboard is measured and a caliper signal is generated. A gap signal is generated to represent the gap between a rider roll and an applicator roll. A value is subtracted from the caliper signal or a value is added to the gap signal to represent the desired compression of the paperboard as it passes between the rider roll and the applicator roll. A comparator compares the signals after one of the signals has been modified and generates a difference signal. A motor responsive to the difference signal is provided for adjusting the rider roll so as to maintain the gap at a preselected value with respect to the caliper of the board prior to its compression.