Abstract: A high flow differential cleaning system uses a source of pressurized compressed dry gas to pressurize a holding tank. A component to be cleaned is securely loaded and oriented against a blast plate designed specifically for the desired pressure, flow, and volume. A fast-actuated valve system opens to direct high volumes of pressurized gas from a holding tank through and around the component(s) held within the cleaning chamber for the removal of remnant powder and foreign particles from interior cavities as well as exterior component surfaces.

Abstract: A method and apparatus for cleaning, and removing contaminants from the interior of a lubrication rundown tank of a mechanical system provides a source of pressurized and heated cleaning fluid containing at least one solvent; a first jumper hose communicating between the source of pressurized cleaning fluid and the interior of the lubrication rundown tank; a second jumper hose communicating between the interior of the lubrication rundown tank and a dirty fluid collection body; and an outlet spray nozzle carried by a nozzle extension placed within the interior of the lubrication rundown tank and in fluid communication with the source of pressurized and heated cleaning fluid to receive the pressurized and heated cleaning fluid therefrom.

Abstract: An apparatus for raising and lowering a cutting tool within a decoking drum, a decoking system and a method of raising and lowering a decoking system cutting tool. Instead of using metallic ropes, chains, or a self-propelled gear-based approach, non-metallic belts are secured at respective ends to a crosshead and one or more counterweights to enable vertical movement of the crosshead that in turn permits vertical movement of the cutting tool throughout the height of the drum. A motorized pulley system controls the movement of the belt, and preferably avoids having the motor be carried by the crosshead. The belts on each pulley are preferably arranged as cooperative sets so that within each set, both primary load belts and secondary load belts are present.

Abstract: Wands are used as parts of cleaning systems to conduct cleaning agents into gas turbine engine cores. Wands according to the present disclosure include inlet assemblies adapted to connect to cleaning agents, dispensers adapted to discharge cleaners into gas turbine engines, and conduits that extend from the inlet assemblies to the dispensers.

Abstract: A centrifugal compressor includes: a rotational shaft; a main casing surrounding at least a part of the rotational shaft, the main casing having an inlet and an outlet separated from each other in an axial direction of the rotational shaft and an annular space surrounding a section of the rotational shaft at a side of the inlet and communicating with the inlet; at least one impeller disposed in a fixed state to the rotational shaft inside the main casing; a flow guide member disposed inside the annular space and extending along the axial direction of the rotational shaft; a plurality of injection holes disposed along the flow guide member and separated from one another along the axial direction of the rotational shaft; and a flow path which extends inside the annular space and through which a cleaning fluid to be supplied to the plurality of injection holes is capable of flowing.

Abstract: A swimming pool skimmer comprises a buoyant skimmer body. The swimming pool skimmer further comprises an electrical power supply including a solar cell mounted to a topside of the skimmer body. A set of proximity sensors are operatively connected to the electrical power supply, and are mounted at a forward end of the skimmer body. The set of proximity sensors are configured to generate a signal in response to detecting an obstruction. A set of pump jets are operatively connected to both the electrical power supply and the set of proximity sensors. The set of pump jets are configured to activate in response to the signal from the set of proximity sensors, thereby rotating the swimming pool skimmer away from the obstruction.

Abstract: A device and method of using a device for removing water from the trap of a plumbing appliance. In one embodiment, the apparatus provides a housing within which is movably mounted a plunger. An elongate hose is provided at one end of the housing to receive trap water therein upon actuation of the plunger or an inflatable member is provided at one end of the housing to force the trap water by inflating same by actuation of plunger. The disclosure also relates to methods of removing trap water using the apparatus described herein.

Abstract: Disclosed is a basement sewer drain pump housing that draws fluid from a drain into a housing, where after the fluid is discharged from the housing and out of the basement. The device comprises a pickup tube having a fluid level sensor, which is placed within a sewer main drain or floor drain. The housing comprises an enclosed volume, a suction tube connected to the pickup tube, a suction pump, and a discharge pump. The pump is activated by a switch controlled by the pickup tube fluid sensor, the fluid is drawn into the housing from the drain and discharged through a discharge pipe. The device operates from outlet or battery and serves as a basement drain pump that prevents fluid and sewage backflow during power outages and plumbing blockages. Another modification provides two donuts to prevent the flow of fluid locking both the floor drain and the main sewer drain. Another embodiment show an inflator to stop the flow of fluids.

Abstract: This invention relates to a composition, comprising: an unsaturated functionalized monomer of from about 5 to about 30 carbon atoms, which is: (a) polymerized to form a functionalized polymer; (b) copolymerized with a comonomer to form a functionalized copolymer; or (c) reacted with an enophilic reagent to form a polyfunctionalized monomer. The polyfunctionalized monomer may be polymerized to form a polyfunctionalized polymer which may be further reacted with one or more additional reagents. The invention relates to lubricants, functional fluids, fuels, dispersants, detergents and polymeric resins.

Abstract: This invention relates to a fuel composition, comprising: (A) a normally liquid fuel; and (B) a cold flow improving amount of (i) a metathesized natural oil; (ii) a metathesized natural oil derivative; or (iii) a mixture of (i) and (ii). The invention also relates to metathesized derivatives formed by the reaction of a metathesized natural oil with a nucleophile, oxidizer, aromatic compound, enophilic acid reagent, or a mixture of two or more thereof.

Abstract: A method of internally restoring a pipe preferably includes the steps of isolating a leaking pipe from a system of pipes; drying an interior of a leaking pipe; measuring the airflow through the leak; cleaning the interior of the leaking pipe; presealing a leak with a leak sealing media, measuring the leak flow rate after the pre-sealing; applying an internal protective coating process; and pressure testing the leaking pipe for leaks. The pipe restoration method preferably uses a control box, a media injection system, an air compressor and a coating dispensing system at an inlet of the leaking pipe. The pipe restoration method preferably uses a coating overflow receiver, a muffler and a dust collector at an exit of the leaking pipe. After the treatments, the leaking pipe becomes a restored pipe. The restored pipe is pressure tested for leaks at a working pressure rating of the pipe.

Abstract: An ice dispensing system includes an ice hopper structure including a plurality of walls having inner surfaces that define an inner volume storing ice therein. The ice hopper may include a drain. A cleaning structure is coupled to the ice hopper structure. The cleaning structure includes a pump linked to a spray mechanism positioned within the inner volume of the ice hopper structure. The spray mechanism disperses a liquid on an inner surface of the ice hopper structure during a cleaning cycle of the ice dispensing mechanism.

Abstract: A tank cleaning system used for cleaning oil storage tanks. The system includes a rail vacuum pipe, an air line and a steam line connected to an air/steam mixing box. The mixing box includes an air nozzle, a steam nozzle and a mixing box vacuum tube connected to a vacuum pipe. The vacuum pipe includes a steering, guide rail for receiving a swivel wheel. The swivel wheel is attached to a door opening bracket. The bracket is attached to sides of a tank door opening. The steering, guide rail pivots on the swivel wheel and allows an operator, standing outside the tank, to move the mixing box back and forth for engaging and vacuuming up sediment in the tank.

Abstract: A sewer pipe is cleaned of collected solids by providing a water supply hose at a first location on the pipe and by driving a jet nozzle head to a second location along the pipe using jets directed along the pipe. At the second location the head is changed for a second head attached to a cable and is pulled back to the first location by the hose. The nozzle is then pulled back to the second location by pulling the cable while nozzles directed along the pipe toward the second location drive the solids forwardly to the second location for extraction.

Abstract: A system for cleaning an implanted blood pump, comprising: an inflow catheter having an expandable inflow member positioned about the periphery thereof; an inflow tube coupled with the inflow catheter; a valve assembly coupled to the inflow tube; an outflow tube coupled to the valve assembly; and an outflow catheter having an expandable outflow member positioned about the periphery thereof, the outflow catheter being coupled to the outflow tube. In use, the inflow tube and outflow tube extend through the skin of a human body, the inflow catheter and outflow catheter are positioned within the human body, and the valve assembly is positioned outside the human body.

Abstract: A substrate cleaning method is used for performing scrub cleaning of a surface of a substrate. The substrate cleaning method includes rotating a roll cleaning member and a substrate respectively in one direction while keeping the roll cleaning member in contact with the substrate in a cleaning area, and supplying a cleaning liquid to a surface of the substrate to scrub-clean the surface of the substrate in the presence of the cleaning liquid in the cleaning area. The cleaning liquid is supplied initially to an inverse-direction cleaning area of the cleaning area where the relative rotational velocity between the roll cleaning member and the substrate is relatively high, and thereafter to a forward-direction cleaning area of the cleaning area where the relative rotational velocity between the roll cleaning member and the substrate is relatively low while the substrate makes one revolution on a central axis thereof.

Abstract: The disclosure relates to the cleaning of rods made of metal, particularly to the method of reclamation of used standard length rods, such as pump rods already used in the mechanical deep-pumping extraction of oil, as well as to the product made with the help of the mentioned method. The method of remanufacturing of standard length rods includes cleaning the rod with non-toxic particles which are able to undergo sublimation to eliminate environmental contamination and to assist in workplace safety.

Abstract: The disclosure relates to the cleaning of rods made of metal, particularly to the method of reclamation of used standard length rods, such as pump rods already used in the mechanical deep-pumping extraction of oil, as well as to the product made with the help of the mentioned method. The method of remanufacturing of standard length rods includes cleaning the rod with cryogenic liquids to eliminate environmental contamination and to assist in workplace safety.

Abstract: A method of cleaning containers in a container cleaning machine, in which the containers are moved in receptacles to a cleaning area, where both the containers and the receptacles are at least partially submerged in a dipping bath of liquid cleaning medium. The containers are positioned such that closed portions of the containers are at an equivalent or higher vertical position than mouth portions of the containers. A nozzle arrangement is used to produce a jet of a cleaning medium which impinges the interior of a corresponding container. The jet has a force which is insufficient to move the container from its resting position in its corresponding container receptacle.

Abstract: To provide a method of manufacturing a semiconductor device, including: forming a thin film different from a silicon oxide film on a substrate by supplying a processing gas into a processing vessel in which the substrate is housed; removing a deposit including the thin film adhered to an inside of the processing vessel by supplying a fluorine-containing gas into the processing vessel after executing forming the thin film prescribed number of times; and forming a silicon oxide film having a prescribed film thickness on the inside of the processing vessel by alternately supplying a silicon-containing gas, and an oxygen-containing gas and a hydrogen-containing gas into the heated processing vessel in which a pressure is set to be less than an atmospheric pressure after removing the deposit.

Abstract: Internal cleaning of inverted cans includes engaging a can's cylindrical wall with a wall-conforming vacuum or adhesive gripper, causing a spraying unit to travel axially in and out of the can's opening while the can is inverted on a circular conveyor, and using a supporting arm or bottom stop to subject the can to a counterforce against a flushing force from sprayed cleaning medium. This prevents the can from being pressed out of a receptacle in which it sits during cleaning.

Abstract: A device for the integrated production and filling of containers and a method for cleaning and/or disinfecting at least the mold of at least one molding and filling station of the device. During a cleaning and/or disinfecting operation of the device, at least the inside of the mold is cleaned and/or disinfected with at least one cleaning and/or disinfecting agent by at least one cleaning element. During the cleaning and/or disinfecting operation, the at least one mold is opened and closed at least once, preferably many times and/or the plunger is moved at least once, preferably many times, between its initial position and end position.

Abstract: A method for servicing a plasma processing system. The plasma processing system may include a plasma chamber. The plasma chamber may include a top piece and a bottom piece, wherein the top piece may be disposed above the bottom piece. The method may include using a robot device to control a lift mechanism to lift the top piece from the bottom piece. The method may also include extending a first member of the robot device into the top piece to perform a first set of tasks according to a first set of service procedures. The method may also include extending a second member of the robot device into the bottom piece to perform a second set of tasks according to a second set of service procedures.

Abstract: Apparatus and methods are disclosed for cleaning interiors of passageways in endoscopes or other luminal medical devices by flow of liquid and gas therethrough. The liquid flow may include rivulets, droplets or other liquid entities which move on the internal surfaces of the passageways, and may include a three-phase contact interface between liquid and dry solid and gas.

Abstract: A container cleaner comprising a spray head, a travel limiter wherein the length the spray head may be depressed is limited by the location of the travel limiter, a starter rod wherein said starter rod is capable of being depressed by said spray head, a timing cartridge wherein the timing cartridge is capable of being opened for a selected period of time when the starter rod is decompressed and a fluid inlet. The further the spray head is depressed the longer the time duration the timing cartridge remains open and the longer the time duration of the pressurized spray is sprayed. The length the spray head may be depressed is dependent on the position of the travel limiter and he travel limiter may be positioned by rotating the spray head.

Abstract: A device configured for cleaning bag filters with compressed air comprises a frame having a hollow interior defining a wall of the frame and openings formed through a thickness of the wall so that the hollow interior is in open communication with an environment external to the frame. A mounting member is configured to be releaseably or permanently attached to one end of the frame and is further configured to be releaseably or permanently attached to a member configured to pass air flow therethrough.

Abstract: A method of using a rendering trailer, the rendering trailer including a dump box or trailer body with a center gate dividing the interior chamber of the trailer body into forward and rearward compartments, from which dead animal parts may be respectively dumped in different locations. A doorway is formed in the center gate to allow a person to walk therethrough to facilitate washing the forward and rearward compartments. A rigid door is mounted on the center gate to open and close the doorway. Opening the door allows the person to walk through the doorway and wash the compartments. A hose may be draped over a sidewall of the trailer and pulled through the doorway to spray the forward compartment. Perforated panels may be mounted along lower ends of left and right side walls of the trailer body to allow water and other fluids to drain therethrough.

Abstract: A device for combining multiple components into a foam mixture and dispensing the foam mixture into a pipe is described. The multiple components are combined immediately prior to dispensing, which maximizes activity for labile, biologically active components whose degradation accelerates upon combining components. Embodiments of the device are relatively light weight and adapted to removably couple to sewer cleaning vehicles.

Abstract: A portable automated mini-bulk container rinsing system for rinsing mini-bulk containers in a closed, efficient environmentally friendly and economical manner is disclosed. The system includes a cap attachable to a mini-bulk container opening; a rigid tube extending from the cap configured to extend into the mini-bulk container interior; a spray head coupled to the tube at a distal end of the tube spaced from the cap and configured to be within the mini-bulk container interior when the cap is attached to the mini-bulk container opening; and a fluid coupling member attached to an end of the rigid tube opposite the spray head and adapted to be coupled to a source of cleaning fluid, wherein fluid under pressure can flow from the source, through the fluid coupling, through the tube and through the spray head to rinse the mini-bulk container when the cap is coupled to the mini-bulk container opening.

Abstract: A cleaning device for cleaning an interior wall of a container includes a rotatable driveshaft which is supported in a nozzle head mounted for rotation about an axis extending transversely to the driveshaft. A nozzle holder is mounted on the driveshaft has an arm for holding a nozzle for ejecting a liquid under pressure. The driveshaft and/or the nozzle head are reversibly pivotable via a gear mechanism, with an auxiliary drive connected to the gear mechanism for driving the nozzle holder.

Abstract: An automatic toilet bowl treatment device, wherein said device comprises: a fluid reservoir, a pump means, a hanger means, and a fluid spray means wherein the entire device is configured so that it can be suspended from, preferably wholly suspended from, a part of a toilet bowl and in particular, a part of the toilet bowl rim. The device is used for the automatic treatment of a lavatory appliance, preferably a toilet bowl and especially preferably the interior surfaces of a toilet bowl which process comprises operating the device to provide a quantity of a treatment composition at periodic intervals to one or more interior surfaces of the lavatory appliance, and preferably to one or more of the interior surfaces of a toilet bowl.

Abstract: Methods and apparatus are provided for cleaning jacks in portable electronic components. In one embodiment of the present invention, an adaptor plug is designed having a hollow shaft and the end of the plug is designed with holes that communication with the hollow shaft. The plug can be inserted into a jack, which can operate to open one or more switches within the jack, thereby freeing any debris that may have accumulated under the switches. Compressed air can then be applied down the hollow shaft and out the holes in the plug to displace the debris and clean the jack. In another embodiment, the end of the plug can be constructed such that it rotates about an axis to increase the likelihood that the jack will be cleaned.

Abstract: A system and method for semiconductor processing chamber includes a housing that can cover an annular gap of a pedestal well of the semiconductor processing chamber. A cleaning nozzle is removably coupled to a compressed dry air (CDA) supply. The cleaning nozzle can inject the CDA into the pedestal well while the housing can contain a byproduct dust agitated by the injected CDA. The byproduct dust is evacuated by at least one vacuum port that is removably coupled to a vacuum source.

Abstract: A cleaning device for the frame of a coke oven retort has a tool carrier positioned between anchor stands of the coke oven retort and exhibits cleaning apparatuses for the frame of the coke oven retort, sheet-shaped sealing elements being arranged on the tool carrier. The sealing elements are secured to the reverse side of the tool carrier, which side faces away from the coke oven retort. The sealing elements are orientated vertically and completely cover the height of the reverse side. The sealing elements consist of at least one central piece which is immovably fixed to the tool carrier and of side wings, the side wings being connected with the central piece in such a manner as to be rotationally moveable on vertical axes. The side wings are moveable in an adjusting movement in the direction of the coke oven retort against the front surfaces of the anchor stands.

Abstract: The invention relates to a cleaner for use in washing an internal surface of a container, the cleaner comprising an elongate boom having a head, the head having a multiplicity of nozzles in fluid communication with a pressure chamber, and at least a portion of each nozzle being angled with respect to the longitudinal axis of the head.

Abstract: A method of introducing treatment fluid into containers to remove contaminants therefrom in a container filling plant, and an arrangement therefor. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.

Abstract: An Improved system for killing roots in sewers without stopping the existing sewer flow, a portable system to eliminate the roots in the sewers, this system makes it possible to treat the roots by treating only the zone concerned and not the overall length of the drain of sewer. The invention enters the sewer by an opening and travels to the problem and inflates in order to retain the poison dispensed by the dispenser. This system makes it possible to more easily deal with problems of roots in the sewers more quickly and, which makes it possible to reduce the cost. All the zones touched by problems of roots can be treated, treatment limits the progression of the roots and destroys them, which makes it possible to prevent the over flow of sewers and the damage of the drains of sewers. The prevention of overflows of sewers makes it possible to protect our wild, aquatic life and our water supply. Basically to help save our environment.

Abstract: There is provided a method for cleaning the compressor of a gas turbine engine. The method comprises providing a fluid passage in the inlet case strut with a nozzle communicating with the fluid passage and the inlet gas path. The fluid passage has a fluid connector for connecting wash/rinse fluid under pressure to the fluid passage. The method further comprises motoring the gas turbine engine, and injecting, through the nozzle, the wash/rinse fluid into the inlet gas path to mix with an incoming flow of air and flow into compressor rotor blades of the compressor.

Abstract: A method of cleaning industrial equipment includes propelling a sublimable media through a discharge wand. An inner surface and an outer surface of an object are contacted with the media. The media subsequently dissipates or is consumed.

Abstract: A tool and method for cleaning the interior of a freight container of ISO type. The tool having a framework, a robot movably connected to the framework and provided with a nozzle for supplying dry ice. The robot and the nozzle are adapted to clean the interior of the container by means of dry ice blasting. An actuating unit is arranged to move the robot between the framework and the interior of the container. The tool is a portable unit and has a size and a design that allows a truck adapted for gripping and carrying freight containers of ISO type to grip and carry the tool in order to move the tool to and from the container to be cleaned.

Abstract: A method of and apparatus for cleaning a surface, such as a wall of a waste boiler of a Kivcet furnace, are described. The invention comprises suspending a pair of spaced apart cables adjacent a surface to be cleaned, attaching ends of the rail to respective ones of the cables with equal lengths of cable between the rail and the roof, the rail being reversibly moveable up and down the surface. A carriage has a nozzle assembly, operative to emit a jet of water, with the carriage reversibly moveable along the rail. The rail is moved from one of a top and bottom of the surface to another of the top and bottom of the surface, and the carriage is moved from one side of the rail to another, cleaning the surface as it moves. The foregoing steps are repeated for each remaining uncleaned surface.

Abstract: An automatic toilet bowl treatment device, wherein said device comprises: a fluid reservoir, a pump means, a hanger means, and a fluid spray means wherein the entire device is configured so that it can be suspended from, preferably wholly suspended from, a part of a toilet bowl and in particular, a part of the toilet bowl rim.

Abstract: A method for cleaning a jet engine comprises storing fluid comprising water in a water holding tank. The water is heated to create heated fluid. The let engine desired to be cleaned is at least partially covered with a waterproof cover, and a J-hook is inserted into the jet engine and affixed to a front compressor stator of a second compressor stage of the jet engine. An input hose is coupled between the storage tank and the waterproof cover and the J-hook is coupled to the input hose. The heated fluid is injected into the jet engine via the input hose and J-hook, which directs the heated fluid inside the jet engine. The resultant effluent is collected in the waterproof cover.

Abstract: The centrifugal compressor is provided with a casing, a rotating shaft which is supported inside the casing, an impeller which is arranged on the rotating shaft and rotates to compress a fluid, and a washing liquid injection device which injects a washing liquid into a flow path formed by the impeller and the casing. The washing liquid injection device is provided with a plurality of nozzles which are arranged along a circumferential direction of the rotating shaft to inject the washing liquid into the flow path and a plurality of chambers which communicate with each corresponding nozzle among the plurality of nozzles and supply the washing liquid to the corresponding nozzle.

Abstract: A foreign matter removal method that removes foreign matter attached to a surface of a substrate having been subjected to predetermined processing. An edge of a rotating substrate mounted on a mounting stage is irradiated with misalignment measurement laser light. The misalignment measurement laser light other than the laser light blocked by the edge of the substrate is received, and power thereof is detected. The amount of misalignment of the substrate is calculated based on the detected power of the misalignment measurement laser light and a detected rotation angle of the rotating substrate. The misalignment of the substrate is corrected for based on the calculated amount of misalignment. After that, foreign matter removal laser light is irradiated, and a process gas that is to react with the foreign matter is jetted to the edge of the substrate. Consequently, the foreign matter attached to the substrate is decomposed and removed.

Abstract: The object of the invention is a device for cleaning the core engine of a jet engine, having a supply unit, which provides the cleaning medium, a nozzle unit, which is configured for feeding the cleaning medium into the core engine, and a line connection (10) between the supply unit and the nozzle unit. The invention provides that the nozzle unit has a means for the rotationally fixed connection to the fan shaft of the jet engine, and that a rotary coupling (5) is provided between the nozzle unit and the line connection (10). The object of the invention is further an arrangement of such a device and a turbo fan jet engine, and a method for cleaning the core engine of a jet engine using the device.

Abstract: A method for rinsing crockery in a dishwashing machine is disclosed. The dishwashing machine includes a circulation pump, a water heater, an upper spray arm and a lower spray arm both alternatively fed by the circulation pump. The method includes the step of heating of the rinsing circulated water up to a maximum predetermined value. The method further includes the step of interrupting the feeding of the lower spray arm when a threshold water temperature is reached so that only the upper spray arm is fed by the circulated water.

Abstract: A method of in-situ cleaning of a portion of a boiling water reactor nuclear power plant. In one aspect, the method includes identifying a jet pump for the boiling water reactor nuclear power plant for cleaning, providing an ultrasonic cleaning tool that has a transducer, inserting at least a portion of the transducer into or adjacent to the interior cavity of the jet pump, in-situ, and energizing the transducer to a desired energy level.

Abstract: A method is provided for the removal from a heat exchange of lint that is generated during a drying process in a domestic appliance for laundry care. A rinsing fluid is run through the heat exchanger for cleaning and the rinsing fluid is deflected during a cleaning phase with the magnitude of deflection or the direction of deflection of the rinsing fluid being a function of the strength of an air flow that is applied to deflect the rinsing fluid. The rinsing fluid is thus run through various regions of the heat exchanger depending on the deflection.

Abstract: Equipment is realized which is capable of increasing the frequency of use of a deposition mask of an organic EL element and the recycle of an adhesive agent by efficiently cleaning the deposition mask with little damage and efficiently collecting the adhesive agent. A pulse laser is irradiated to a deposition mask to separate the deposition agent from the deposition mask. The separated deposition agent is sucked by a suction nozzle, and the deposition agent is separated from air by a cyclone and deposited on a bottom of the cyclone. Thereafter, a first valve is opened to collect the deposition agent in a deposition agent collection section. Then a second valve is opened to move the deposition agent to a deposition agent refining section to be refined. A third valve is opened to store the refined deposition agent in a deposition agent storage section. The deposition mask may be cleaned without being damaged to collect the deposition agent with high efficiency.