Abstract: A semiconductor substrate processing apparatus includes a cooled pin lifter paddle for raising and lowering a semiconductor substrate. The semiconductor substrate processing apparatus comprises a processing chamber in which the semiconductor substrate is processed, a heated pedestal for supporting the semiconductor substrate in the processing chamber, and the cooled pin lifter paddle located below the pedestal. The cooled pin lifter paddle includes a heat shield and at least one flow passage in an outer peripheral portion thereof through which a coolant can be circulated to remove heat absorbed by the heat shield of the cooled pin lifter paddle. The cooled pin lifter paddle is vertically movable such that lift pins on an upper surface of the heat shield travel through corresponding holes in the pedestal and a source of coolant is in flow communication with the at least one flow passage.

Abstract: Cleaning solutions and processes for cleaning semiconductor devices or semiconductor tooling during manufacture thereof generally include contacting the semiconductor devices or semiconductor tooling with an acidic aqueous cleaning solution free of a fluorine containing compound, the acidic aqueous cleaning solution including at least one antioxidant and at least one non-oxidizing acid.

Abstract: The molecular etcher carbonyl fluoride (COF2) or any of its variants, are provided for, according to the present invention, to increase the efficiency of etching and/or cleaning and/or removal of materials such as the unwanted film and/or deposits on the chamber walls and other components in a process chamber or substrate (collectively referred to herein as “materials”). The methods of the present invention involve igniting and sustaining a plasma, whether it is a remote or in-situ plasma, by stepwise addition of additives, such as but not limited to, a saturated, unsaturated or partially unsaturated perfluorocarbon compound (PFC) having the general formula (CyFz) and/or an oxide of carbon (COx) to a nitrogen trifluoride (NF3) plasma into a chemical deposition chamber (CVD) chamber, thereby generating COF2. The NF3 may be excited in a plasma inside the CVD chamber or in a remote plasma region upstream from the CVD chamber.

Abstract: A method and apparatus for cleaning a stack of secure instruments is disclosed. Each secure instrument includes a substrate, visual data and a security feature. The method and apparatus include exposing the stack to a supercritical fluid at a temperature and a pressure and for a duration sufficient to clean each secure instrument and not compromise each security feature and each visual data, and maintaining a securing mechanism on the stack during exposure of the stack to the supercritical fluid such that cleaning each secure instrument includes one or more substances from each secure instrument into the supercritical fluid.

Abstract: A substrate cleaning method is used for performing scrub cleaning of a surface of a substrate. The substrate cleaning method includes rotating a roll cleaning member and a substrate respectively in one direction while keeping the roll cleaning member in contact with the substrate in a cleaning area, and supplying a cleaning liquid to a surface of the substrate to scrub-clean the surface of the substrate in the presence of the cleaning liquid in the cleaning area. The cleaning liquid is supplied initially to an inverse-direction cleaning area of the cleaning area where the relative rotational velocity between the roll cleaning member and the substrate is relatively high, and thereafter to a forward-direction cleaning area of the cleaning area where the relative rotational velocity between the roll cleaning member and the substrate is relatively low while the substrate makes one revolution on a central axis thereof.

Abstract: A water-based coolant contains at least one inorganic acid salt of phosphate, phosphite, sulfate, sulfite, borate, molybdate, tungstate, carbonate, hydrogen carbonate and sesquicarbonate. Since the water-based coolant of the invention exhibits a high cooling capability but does not easily corrode a metallic material (a cooling object), the water-based coolant of the invention is suitable as a quenching oil or a cutting oil for the metallic material.

Abstract: Methods are presented for cleaning and removing powder or other substances which may result from a Color Run™-style event or from other events or circumstances. In one embodiment, a contamination area, i.e., an area where powder or some other substance has been disseminated, is cleaned by plugging one or more storm drains, using water to wash the powder into the storm drain(s), and then relocating the contaminated water from the storm drain(s) into one or more sewer drain(s) or other acceptable location(s). Additional steps may include pre-cleaning the anticipated contamination area, using a sweeper vacuum to clean up the powder, pre-washing the anticipated contamination area, pre-cleaning the storm drain(s), closing access to storm drains that will not be used, pre-treating with a sodium hypochlorite solution, and/or pretreating with a brine solution.

Abstract: The present invention includes methods and materials for cleaning materials, particles, or chemicals from a substrate with a brush or pad. The method comprising: engaging a surface of a rotating wafer with an outer circumferential surface of a rotating cylindrical foam roller, the cylindrical foam roller having a plurality of circumferentially and outwardly extending spaced apart nodules extending from the outer surface, each nodule defining a height extending from the outer surface of the cylindrical foam roller to a substrate engagement surface of the nodule, the substrate engagement surface of one or more of the nodules having a rounded configuration; and positioning the cylindrical foam roller on the substrate such that the one or more nodules are positioned to have only the rounded substrate engagement surface contact the substrate such that no linear surface of the one or more nodules contacts the substrate.

Abstract: An instrument reprocessor for cleaning, disinfecting, and/or sterilizing a medical instrument is disclosed. To reprocess instruments having one or more channels defined therein, the reprocessor can include one or more flow control systems configured to control a fluid flow through each channel. In various embodiments, a flow control system can include a differential pressure sensor and a proportional valve for controlling the fluid flow in a channel. The reprocessor can also include, one, a fluid circulation pump configured to supply the flow control systems with fluid and, two, a system for controlling the pressure of the fluid supplied to the flow control systems. The reprocessor can also include a system for supplying a metered amount of fluid to the fluid circulation system. The system can include a reservoir having a fluid height sensor to monitor the amount of fluid therein and a pump configured to supply the reservoir with fluid.

Abstract: The disclosure relates to the cleaning of rods made of metal, particularly to the method of reclamation of used standard length rods, such as pump rods already used in the mechanical deep-pumping extraction of oil, as well as to the product made with the help of the mentioned method. The method of remanufacturing of standard length rods includes cleaning the rod with non-toxic particles which are able to undergo sublimation to eliminate environmental contamination and to assist in workplace safety.

Abstract: The present invention relates to formulations for cleaning hard surfaces and leaving a glossy, streak-free finish thereon, the formulations comprising one or more liquid solvents, one or more film-forming polymers and one or more polymer surfactants comprising polymerized units derived from ethylene oxide and butylenes oxide.

Abstract: A cleaning composition and process for cleaning post-chemical mechanical polishing (CMP) residue and contaminants from a microelectronic device having said residue and contaminants thereon. The cleaning compositions are substantially devoid of amine and ammonium-containing compounds, e.g., quaternary ammonium bases. The composition achieves highly efficacious cleaning of the post-CMP residue and contaminant material from the surface of the microelectronic device without compromising the low-k dielectric material or the copper interconnect material.

Abstract: Provided is a coating apparatus which includes: a slit nozzle provided with a discharge port at a lower side of the slit nozzle, and configured to discharge a coating liquid from the discharge port; a moving mechanism configured to move the slit nozzle relative to a substrate; a sealing unit formed to extend along a longitudinal direction of the discharge port, and including a top surface which is brought into contact with the discharge port to seal the discharge port; a solvent reservoir configured to retain a solvent; and an immersing mechanism configured to immerse the sealing unit into the solvent retained in the solvent reservoir.

Abstract: The present disclosure provides a method for cleaning a chlorine membrane electrochemical cell.

Abstract: According to the invention, the compositions and methods provide for the complete removal of synthetic glues or adhesives from a plurality of surfaces through the use of amide solvents in combination with surfactants, chelants, acidulants and/or additional bottle wash additives. Beneficially, the compositions and methods are suitable for use at lower temperatures, including below 35° C., and lower pH conditions, including from 5 to 10, from 6 to 9, and from 6 to 8, in comparison to conventional caustic-based adhesive removal compositions.

Abstract: A detergent emulsifier for laundry and other hard surface cleaning using an APE-free surfactant blend is disclosed. The emulsifier system is efficacious for removal of oily soils and greasy food removal. The compositions according to the invention include linear and branched fatty alcohol ethoxylates and ethoxylate propoxylate block copolymers. Methods of using the same are disclosed.

Abstract: The disclosure relates to the cleaning of rods made of metal, particularly to the method of reclamation of used standard length rods, such as pump rods already used in the mechanical deep-pumping extraction of oil, as well as to the product made with the help of the mentioned method. The method of remanufacturing of standard length rods includes cleaning the rod with cryogenic liquids to eliminate environmental contamination and to assist in workplace safety.

Abstract: To provide a method of manufacturing a semiconductor device, including: forming a thin film different from a silicon oxide film on a substrate by supplying a processing gas into a processing vessel in which the substrate is housed; removing a deposit including the thin film adhered to an inside of the processing vessel by supplying a fluorine-containing gas into the processing vessel after executing forming the thin film prescribed number of times; and forming a silicon oxide film having a prescribed film thickness on the inside of the processing vessel by alternately supplying a silicon-containing gas, and an oxygen-containing gas and a hydrogen-containing gas into the heated processing vessel in which a pressure is set to be less than an atmospheric pressure after removing the deposit.

Abstract: An intelligent pig for pipeline monitoring comprises a single body containing signal transmitters and receivers provided with replaceable rings for centering the body within the pipeline, the rings may be provided with brushes which help center the pig within the pipeline and also aid its passage through pipelines which may contain bends and/or be of variable diameter, the pig may be used in combination with a cleaning pig to provide combined activities using a common driving force.

Abstract: The present invention relates to novel glycerin ether ethoxylate solfactant compounds, compositions employing the same, and methods of using these compounds. Beneficially the compounds have efficacy as both solvents and surfactants with low foam and low viscosity. The compounds of the present invention can be used as antimicrobials and/or sanitizing agents in various formulations. The compounds of the present invention are also suitable for use as solvents and/or hydrotropes.

Abstract: A method is disclosed. The method comprises the steps of preparing a serviceable catalytic converter such that a catalyst substrate of the catalytic converter is serviceable while the catalytic converter remains connected to an exhaust system by forming a lower surface of the body of the catalytic converter with an absence of material in order to provide at least one opening in the lower surface of the body of the catalytic converter for permitting selective access to a fluid-flow passage that extends through the body of the catalytic converter that contains the catalyst substrate; and disposing at least one close-out member in the at least one opening for fluidly-sealing the at least one opening. A component of an exhaust system that is serviceable while remaining fluidly-connected and physically-connected to the exhaust system is also disclosed.

Abstract: A solid controlled release composition according to the present invention includes at least one cellulosic material, water, at least one active ingredient, and optionally at least one of a saccharide, sugar alcohol or salt. The active ingredient can be a polycarboxylic acid.

Abstract: A nozzle for discharging droplets of a processing liquid for processing a substrate has a main body including a supply port, a drain port, a processing liquid flow passageway connecting the supply port and the drain port, and a plurality of discharge ports from which the processing liquid is discharged. The processing liquid flow passageway includes a plurality of branch flow channels, which branch out between the supply port and the drain port and collect together between the supply port and the drain port. The plurality of discharge ports form a plurality of columns respectively corresponding to the plurality of branch flow channels; and are aligned along and connected to the corresponding branch flow channels. A piezo element applies vibration to the processing liquid flowing through the plurality of branch flow channels.

Abstract: The invention relates to a cleaning composition with improved stain removal. The alkaline composition contains a hydrolysable dispersing polymer which is selected from carboxylated fructans and one or more biodegradable aminocarboxylate chelating agents.

Abstract: A method for removing residual filter cakes that remain adhered to a filter after typical particulate removal methodologies have been employed, such as pulse-jet filter element cleaning, for all cleanable filters used for air pollution control, dust control, or powder control.

Abstract: Provided is a method of controlling a dishwasher. The dishwasher includes a washing chamber accommodating a dish, a sump storing washing water, and supplying the washing water to the washing chamber, and a filter part provided to the sump, and filtering a foreign substance from the washing water. In the method, a first pump is driven to perform a washing or rinsing process, the first pump is stopped and a second pump is driven for a first set time to perform a discharging process, after the washing or rinsing process, the second pump is stopped and the first pump is driven for a second set time, and the first and second pumps are stopped.

Abstract: A recyclable article having an external surface with an image printed thereon by droplets of ink is provided. The droplets of ink comprise a composition that includes a hydrophilic component. In embodiments, the hydrophilic component can facilitate the separation or loosening of the image from the external surface of the container when the image is exposed to a liquid-based solution at an elevated temperature. Methods for facilitating recycling of recyclable articles having printed images are also disclosed.

Abstract: Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoid-containing solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions.

Abstract: Detergent compositions effective for controlling hard water scale accumulation are disclosed. Detergent compositions employing phosphinosuccinic acid and mono-, bis- and oligomeric phosphinosuccinic acid (PSO) derivatives with alkali metal carbonate and/or alkali metal hydroxide reduce had water scale accumulation on treated surfaces at alkaline conditions between about pH of 9 and 12.5. Methods employing the detergent compositions and preventing hard water scale accumulation are also provided.

Abstract: A cleaning path guidance method combined with a dirt detection mechanism is performed in an automatic cleaning device to generate a cleaning path, so as to guide the automatic cleaning device to clean an area to be cleaned, in which plural grids are defined in the area. The method includes: moving the automatic cleaning device in the area to clear dirt away, and continuously detecting a flow of the dirt cleared away to obtain a dirt level of a current gird; if the dirt level of the current gird exceeds a threshold, marking the grid as a dirty grid; performing an algorithm and finding a shortest path passing through all dirty grids as a cleaning path according to the marked dirty grids; and moving the automatic cleaning device to pass through each dirty grid according to the clean path, so as to clean each dirty gird sequentially.

Abstract: Internal cleaning of inverted cans includes engaging a can's cylindrical wall with a wall-conforming vacuum or adhesive gripper, causing a spraying unit to travel axially in and out of the can's opening while the can is inverted on a circular conveyor, and using a supporting arm or bottom stop to subject the can to a counterforce against a flushing force from sprayed cleaning medium. This prevents the can from being pressed out of a receptacle in which it sits during cleaning.

Abstract: An automated method of cleaning the pipes of a plate washing system is provided. The plate washing system includes at least one manifold having a plurality of pipes configured to be provided within wells of a plate in order to wash the wells, an ultrasonic transducer mounted to a tank, and a control system. The plate washing system also includes sensors to sense the position of the pipes relative to plate and the tank, and the fluid level within the wells of the plate. The method includes dispensing fluid to the tank, submerging the tips of the pipes within the fluid, activating the ultrasonic transducer in order to vibrate the fluid, and aspirating the fluid from the tank. The control system may initiate a cleaning operation at the request of the user, at a scheduled interval, or when the level sensing system detects a decrease in instrument function.

Abstract: A composition includes a polysaccharide graft polymer composition. In one embodiment, the polysaccharide graft polymer composition includes a polysaccharide residue present in an amount from about 5% to about 90% by weight of the polysaccharide graft polymer composition and a residue of at least one ethylenically unsaturated monomer present in an amount from about 10% to about 75% by weight of the polysaccharide graft polymer composition.

Abstract: Disclosed is a liquid processing apparatus including first and second cups installed so as to surround a rotation holding unit of a substrate and guide a processing liquid scattered from the rotating substrate downwards. A first driving unit and a second driving unit elevate the first cup and the second cup between a position receiving the processing liquid and the lower position thereof. A controller controls that the first cup and the second cup are ascended at the same time by transferring the driving force of the first driving unit while the first cup or a first elevating member thereof is overlapped with the second cup or a second elevating member thereof from the lower side by setting the ascending speed of the first cup to be higher than the ascending speed of the second cup when the first and second cups are ascended at the same time.

Abstract: Provided herein is an aqueous, non-toxic, non-flammable, non-explosive, biodegradable, hypoallergenic cleaning composition. Also provided are pre-loaded wipes containing the cleaning solution, kits, and methods of cleaning surfaces using the same.

Abstract: The invention relates to methods for operating a washer, and in preferred embodiments to a washer having a water tank that is integrally, preferably detachably, formed with the washer, wherein the washer comprises a washing chamber for accommodating goods to be cleaned, said washing chamber having in its lower portion a sump for collecting water during operation of the washer, a water inlet, a circulating pump for circulating water through the washing chamber, and a control unit for controlling a washing cycle carried out by the washer. In accordance with the invention, in this method water is fed via the water inlet into the sump; the pressure within an inlet or outlet conduit of the circulating pump is measured; and based on the pressure measurement the washing cycle is controlled and/or indicator signals are issued to a user of the washer.

Abstract: A method of cleaning a carbon work piece includes the step of applying an acetone cleaning agent to the carbon work piece to remove debris therefrom. The removal of debris promotes adhesion between the carbon work piece and a subsequently applied coating. For example, other steps may precede the acetone cleaning step, such as submersing the carbon work piece in deionized water. In one example, a subsequent coating process deposits an alumina coating on the carbon work piece.

Abstract: A composition includes a polysaccharide hybrid polymer composition. In one embodiment, the polysaccharide hybrid polymer composition includes a polysaccharide residue present in an amount from about 5% to about 90% by weight of the polysaccharide hybrid polymer composition and a residue of at least one ethylenically unsaturated monomer present in an amount from about 10% to about 75% by weight of the polysaccharide hybrid polymer composition.

Abstract: A composition for machine dishwashing that includes a one copolymer obtainable by copolymerization of N-vinylamide, vinyl acetate, polyether, and alkoxylate.

Abstract: A method for cleaning objects made of organic or inorganic materials, wherein the relevant material is brought into contact with a composition in the form of a fluid nanophase system, comprising a) at least one water-insoluble substance having a water solubility of less than 4 grams per liter, b) at least one amphiphilic substance (NP-MCA) which has no surfactant structure, is not structure-forming on its own, the solubility of which in water or oil ranges between 4 g and 1000 g per liter and which does not preferably accumulate at the oil-water interface, c) at least one anionic, cationic, amphoteric and/or non-ionic surfactant, d) at least one polar protic solvent, in particular having hydroxy functionality, e) if necessary one or more auxiliary substance.

Abstract: The present invention relates to a new degreasing composition comprising at least one levulinic acid ester according to general formula (I) CH3CO(CH2)2COOR1 (I) in which R1 is a linear or branched, saturated or unsaturated, aliphatic or aromatic, hydrocarbon radical having 2 to 56 carbon atoms, wherein said hydrocarbon radical is optionally hydroxysubstituted. The present invention also relates to a process for degreasing a metal surface comprising the step of contacting said metal surface with the composition of the present invention.

Abstract: The technology of washing and treatment MWU (modular washing unit) is conceived to wash and treat fruits and vegetables in a confined environment, with progressively more and more clean water (counter-current) and with an optimal ratio between the quantities of water used and processed products. The system allows important savings of water, chemicals and energy. The technology of washing and treatment MWU (modular washing unit) is conceived to allow the transport and the treatment of the product in confined environment, with clean water (counter-current) In the MWU the product is submitted to sequence of filling and emptying with appropriated solutions, progressively cleaner, prior to subsequent discretionary treatments. A treatment plant can be equipped with a variable number of MWUs, with additional remote MWUs to meet the desired production capacity.

Abstract: Solid detergent compositions according to the present invention include at least one alkali metal silicate, at least one polycarboxylic acid, at least one saccharide or sugar alcohol and water. Suitable saccharides include sucrose, fructose, inulin, maltose and lactulose, and may be present in the composition in a concentration of at least 0.5 wt %. Compositions according to certain embodiments form stable solid block detergent compositions that do not swell significantly even when subjected to elevated temperatures.

Abstract: Multi-purpose cleaning compositions, in particular multi-purpose aqueous alkaline compositions for cleaning surfaces, and base preparations for this purpose. Such base preparations comprise one or more solvents that are at least partially water-miscible, one or more alkali metal salts of carboxylic acids, and water. Such multi-purpose cleaning compositions comprise at least such base preparation, a surfactant, a basifying agent, and water.

Abstract: A braided hair washing method includes washing braided hair using a washing agent that includes a microbubble washing composition and microbubbles, the microbubble washing composition including a protease and a lipase. The braided hair washing method can conveniently and effectively wash braided hair without collapsing the hairstyle.

Abstract: The invention relates to a hydrophobic and particulate soil removal composition and method for removal of hydrophobic and particulate soil from an article. Stubborn hydrophobic greasy or oily soils, including associated organic particulate soils, such as finely divided elemental carbon, are frequently encountered on hard surfaces including vehicle parts. The composition is selected to provide enhanced soil removal, preferably in vehicle cleaning applications.

Abstract: The present invention includes a cleaning composition that includes at least one alkalinity source, at least one surfactant, water and at least one polyglycerol graft polymer. The polyglycerol graft polymer includes a polyglycerol and a residue of at least one carboxylic acid or carboxylate containing compound in an amount less than or equal to about 40% by weight of the polyglycerol graft polymer.

Abstract: A non-aqueous solvent composition and method for cleaning and removing oleaginous materials such as hydraulic fluids from reinforced-fiber composites characterized as a cleaning composition free of ozone depletion materials, having a low vapor pressure, a flash point above 140° F., and consists essentially of cyclohexenes, isoparaffinic hydrocarbons, dearomatized hydrocarbons and corrosion inhibitors.

Abstract: A method for cleaning process apparatus used for production of liquids, especially for cleaning filters, for example membrane filters. The apparatus is contacted with a solution of periodate. It is especially preferred that the cleaning process is carried out at a temperature between 15 and 95° C.

Abstract: An aqueous composition is disclosed, comprising at least one strain of Class 1 Bacillus bacterial spores, selected from Bacillus Cirulans, Bacillus Megaterium, Bacillus Licheniformis, Bacillus Pumilus, Bacillus Sphaericus, Bacillus Subtilis sub species 10144 and Bacillus Subtilis sub species 8646, a terpene and one or more surfactants. The terpene is preferably d-limonene. A method for cleaning surfaces is also disclosed, which method comprises deploying an aqueous composition comprising at least one strain of Class 1 Bacillus bacterial spores, selected from Bacillus Cirulans, Bacillus Megaterium, Bacillus Lichenforms, Bacillus Pumilus, Bacillus Sphaericus, Bacillus Subtilis sub species 10144 and Bacillus Subtilis sub species 8646, a terpene and one or more surfactants to a surface.