Abstract: The resist-processing system according to the present invention includes at least one processing sections having a plurality of treatment units for performing various kinds of treatments on a semiconductor wafer such as the coating process and baking process, a loading section connected to the processing section for supplying the wafer to the processing section, a vacuum tweezer for carrying the wafer in the loading section so as to transfer the wafer from the loading section to the processing section, a handling robot for receiving the wafer from said loading section and transferring it in the processing section so as to load and unload the wafer to/from each of the treatment units, control means for controlling the operations of the vacuum tweezer and the handling robot in accordance with a predetermined program, and a passage provided in the processing section in such a manner the passage is disposed along with said plurality of treating units.

Abstract: Scrap metal chips, which may be oily, wet and dirty and which may be of varying lengths and widths, twisted, curled and cracked, resulting from machining metal articles, are cleaned and dried by passing them sequentially through a washer cylinder, a rinse cylinder and a dryer cylinder. A thread formed of a plate-like metal strip is secured within the interior surface of each cylinder to provide a deep, spiral trough within each cylinder. Each cylinder is rotated so that the chips are moved, in a tumbling motion, along the troughs due to the auger-like thread, from one end to the opposite end. A hot, aqueous washing solution is flowed through the washer cylinder in a direction opposite to the movement of the chips. Similarly, a hot rinse water is flowed through the rinse cylinder in a direction opposite to the movement of the chips therethrough.

Abstract: An electrocoating machine for easy-open can ends has an electrocoating wheel rotatable about a horizontal axis and partially submersed in a bath of electrocoating solution. The electrocoating wheel carries ends into and through the bath. A transfer turret and elevator convey coated ends from the electrocoating wheel to a rinse wheel. The rinse wheel surrounds the electrocoating wheel and is mounted for rotation about a vertical axis. The rinse wheel is disposed in a tub which contains a plurality of nozzles for spraying rinse solution on the ends carried by the rinse wheel.

Abstract: A process for treating oil-contaminated debris or like material in particular material to be washed such as mill scale, which is produced in industrial processes, as well as a plant and an apparatus for carrying out the process, are to be improved in such a way as to permit oil to be removed from the industrial material to be washed, in particular mill scale. For that purpose it is proposed that the oil-contaminated material, in particular the mill scale, be introduced into a washing drum and there washed in counter-flow mode in a washing lye with a pH-value of from 12 to 14, preferably 10 to 14, with the material to be washed being lifted at the wall of the drum by means of support surfaces. The washing lye is preferably mixed with about 2% of caustic soda and/or washing is at about 50.degree. C. or a higher temperature.

Abstract: An apparatus is disclosed which forms a photo-resist film on a substrate surface and/or develops it.

Abstract: A system for ultrasonically cleaning tubes includes an elongated cleaning tank adapted to hold a quantity of detergent-containing water and a series of transducers mounted on the bottom wall of the tank in a generally linear arrangement extending between opposite end walls of the tank. The transducers generate ultrasonic cavitational energy within the water in the tank. An inclined upper tube entry ramp supported above the tank guides delivery of tubes in single file fashion into the tank to a reversely inclined middle tube transfer ramp. The inclined middle ramp guides transfer of tubes in single file fashion into the water in the tank and to a lower tube soak ramp having a tube accumulating terminal end. The lower ramp feeds the tubes across the tank within the water and above the transducers therein to its tube accumulating end such that each tube will pass through and be cleaned by the cavitation energy in the water.

Abstract: A device for the automatic cleaning, testing, and sorting of discoidal, flat substrates (9, 9', . . . ) for example magnetic memory plates, having three support mandrels (12, 13, 23) for the substrates (9, 9', . . . ) to be treated, three magazines (6, 7, 8) to deposit the treated and the untreated substrates (9, 9', . . . ), and having a transporting device fixed to a machine frame (2) or a machine support with several transferring arms (14, 15, 16) which can be moved on several levels and which are equipped with gripping devices (20, 21, 22) is provided with a motor-driven first support mandrel (23) rotating round its longitudinal axis (r) and with a nozzle (25, 26) disposed directly adjacent to said support mandrel in order to apply a cleaning liquid onto the substrate (9, 9', . . . ) which is firmly held by the first support mandrel.

Abstract: A wafer transporting device for transposing and transferring wafers charged in at least two first carriers to second carriers, including a wafer holding device provided with a holder for holding the wafers which are removed from the first carriers and a wafer transferring device for removing the wafers charged in the first carriers by one stroke, thereby improving the working efficiency in a semiconductor manufacturing system.

Abstract: An apparatus for conveying untreated materials includes a unit conveyor (25), and a collective conveyor (33). The unit conveyor (25) is constituted of a carriage (19) operated so as to move along a treatment line (1) composed of a plurality of treatment vessels arranged in a row, and carriers (16) provided so that they are moved vertically by the carriage (19) so as to lift and lower from and into the interior of a treatment vessel, while the collective conveyor (33) is constituted of elevator frames (26) provided along the treatment line (1) within the zone of movement of the carriage (19), lifting gears (27) adapted to move the elevator frames (26) in the vertical direction, and supports (28) which are provided on the elevator frames (26) respectively so as to be moved in the direction of the treatment line (1) and which are adapted to support the untreated materials (15).

Abstract: A wafer washing and drying apparatus including a chemical cleaning bath for cleaning a wafer, such as a semiconductor wafer and a silicon wafer set in a carrier, with a liquid chemical reserved therein, a rinse bath for washing off the liquid chemical attached to the wafer with a washing liquid such as pure water or an organic solvent reserved therein, an organic vapor drier for drying the wafer in contact with a vapor flow of an organic solvent and a wafer holding device having a holder for holding the wafer only to be transferred from the carrier, which holder has a heat capacity smaller than that of the carrier, and which wafer holding device has a function of transporting the wafer from the rinse bath to the organic vapor drier and a wafer transferring device for transferring the wafer from the carrier to the holder in the rinse bath.

Abstract: Apparatus for cleaning/deburring manufactured parts, each part having an established axis of rotation, includes a conveyor operable to convey the parts in succession in intermittent step-by-step movement to a cleaning/deburring station and a drying station. At each of the cleaning/deburring and drying stations the part is driven in high speed rotation about its axis by a part rotating device. At the cleaning/deburring station the rotating part is sprayed with high pressure fluid and at the drying station high velocity air is discharged tangentially against the rotating part to strip residual fluid from the part. The spray nozzle assembly can be stationary, or can take the form of a transversing assembly for reciprocating movement along the longitudinal length of the part. Additionally, the transversing assembly can include rotation of the nozzle assembly about an axis as the nozzles are reciprocated longitudinally.

Abstract: Apparatus for cleaning manufactured parts, each part having an established axis of rotation, includes a conveyor operable to convey the parts in succession in intermittant step-by-step movement to a cleaning station and a drying station. At each of the cleaning and drying stations the part is driven in rotation about its axis by a part rotating device. At the cleaning station the rotating part is sprayed with cleaning fluid and at the drying station air is discharged tangentially against the rotating part to strip residal cleaning fluid from the part.

Abstract: A vapor drying apparatus for semiconductor wafers, which is capable of preventing dust particles from entering the interior of the vapor drying apparatus incorporating therein a water washing part and a vapor drying part for a semiconductor wafer and, at the same time, thoroughly removing from the surface of a vapor dried semiconductor wafer the vapor cleaner adhering in the form of film or in a molecular thickness to the surface or an organic substance contained in the cleaner thereby bringing the surface of the semiconductor wafer to an ideally cleaned and dried state.

Abstract: A basket for tumbling workpieces is positioned in a carrier. The carrier is rotatably mounted on a carrier rotation axis between two legs of a stage assembly and is rotated by a carrier rotation motor mounted on the stage assembly. A basket cover supported on the carrier is driven between open and closed position with respect to the carrier mounted basket by a container cover drive motor mounted on the stage assembly, a double-acting lead screw shaft rotatably supported in the carrier in parallel relation to the carrier rotation axis, a drive train between the lead screw shaft and the basket cover, and a drive train, including sprockets rotatable on the carrier rotation axis, between the cover drive motor and the lead screw shaft.

Abstract: A vapor drying apparatus for semiconductor wafers, which is capable of preventing dust particles from entering the interior of the vapor drying apparatus incorporating therein a water washing part and a vapor drying part for a semiconductor wafer and, at the same time, thoroughly removing from the surface of a vapor dried semiconductor wafer the vapor cleaner adhering in the form of film or in a molecular thickness to the surface of an organic substance contained in the cleaner thereby bring the surface of the semiconductor wafer to an ideally cleaned and dried state.

Abstract: Apparatus and a method for cleaning, rinsing and drying substrates, such as semiconductor wafers. The apparatus has a cleaning tank in which one or more megasonic transducers are located, the transducers being adapted to direct megasonic energy past the substrates for cleaning the same. The substrates are held in the cleaning tank by an improved holder which can be pivoted from one side to the other to present opposite side margins of the substrates to the megasonic energy field when otherwise such opposite side margins would not be exposed to such energy field due to the blocking action of parts of the holder. A rinse tank for containing a rinse solution is adjacent to the cleaning tank, and a robotic transfer arm mechanism moves the substrates in the holder from the cleaning tank to the rinse tank for immersion of the substrates into the rinse solution which can be heated to an elevated temperature or can be at ambient temperature.

Abstract: Automatic photomask or reticle washing and cleaning system comprises a foreign particle inspecting unit for inspecting whether or not foreign particles are attached to the surfaces of substrates; a washing and cleaning unit for washing and cleaning the surfaces of substrates with a cleaning liquid, thereby removing foreign particles and transfer means for withdrawing a substrate from a case, transferring the withdrawn substrate to the washing and cleaning unit, thereafter transferring the washed and cleaned substrate to the foreign particle inspecting unit and finally inserting the inspected substrate into the case again.

Abstract: A method and apparatus for high speed drying of the interior surfaces of a plurality of plastic bottles without causing heat deterioration of the bottles. Bottles to be dried are heated through application of a heated liquid to the exterior surface thereof while a gas jet is simultaneously directed into the bottle interior. Method and apparatus for continuously moving and rotating the bottles during the drying process is also described.

Abstract: The invention relates to a washing apparatus, especially to an apparatus for rinsing of glass bottles before first filling.The bottles to be rinsed are fed to the apparatus by means of a conveyor installation. The incoming bottles are picked up by a receiving means including a conveyor, the runway of which extending in a vertical plane. The bottles are transferred to a transportation device whereby the bottles are pivoted about 180 degrees. The transportation device includes a conveyor advancing said bottles to a rinsing station having a rinsing device and to a draining station. A removing device pick-up the clean bottles from the transportation device and transfers the bottles to a further conveying installation for discharging the bottles from the apparatus. During transferring the bottles are pivoted about 180 degrees such that upright bottles ready for filling are outputted from the apparatus.

Abstract: An automatic set-up system is provided for setting up on a pallet work to be machined by a flexible manufacturing system automatic machine tool. The pallet has a support plate and a jig plate which overlies the support plate on which the work is placed. The support plate, the jig plate and the work are sequentially conveyed by a convey unit on a setting table. The relative positions of the support plate and the jig plate, and of the jig plate and the work are usually held constant by the engagement of positioning recesses and positioning pins. Even if the position of the jig plate or the work conveyed by the convey unit deviates from a predetermined position, a float base and a support plate (the float base, the support plate, and the jig plate) are floated by means of air bearing pads. The horizontal movement of these components can be readily controlled, so that positioning pins can be easily fitted in the positioning recesses.

Abstract: Apparatus for continuously treating solids, with at least one liquid includes a first screw conveyor having first agitators positioned along the peripheral margin of each section of the thread of the screw conveyor for agitating the solid pieces being conveyed in the area between adjacent sections of the conveyor, and second agitators positioned along the shaft of the first screw conveyor for mixing the liquid with the solids within the area between adjacent sections of the thread of the first screw conveyor, and a second screw conveyor having agitators positioned along the peripheral margin of each section of the thread of the conveyor for agitating the solids being conveyed thereby, in the area between adjacent sections of the thread of the second screw conveyor, and liquid passages associated with the peripheral margin of each section of the thread of the second screw conveyor for allowing liquid introduced to the second screw conveyor to pass through the sections of the conveyor.

Abstract: An automatic set-up system is provided for setting up on a pallet work to be machined by a flexible manufacturing system automatic machine tool. The pallet has a support plate and a jig plate which overlies the support plate on which the work is placed. The support plate, the jig plate and the work are sequentially conveyed by a convey unit on a setting table. The relative positions of the support plate and the jig plate, and of the jig plate and the work are usually held constant by the engagement of positioning recesses and positioning pins. Even if the position of the jig plate or the work conveyed by the convey unit deviates from a predetermined position, a float base and a support plate (the float base, the support plate, and the jig plate) are floated by means of air bearing pads. The horizontal movement of these components can be readily controlled, so that positioning pins can be easily fitted in the positioning recesses.

Abstract: An automatic set-up system is provided for setting up on a pallet work to be machined by a flexible manufacturing system automatic machine tool. The pallet has a support plate and a jig plate which overlies the support plate on which the work is placed. The support plate, the jig plate and the work are sequentially conveyed by a convey unit on a setting table. The relative positions of the support plate and the jig plate, and of the jig plate and the work are usually held constant by the engagement of positioning recesses and positioning pins. Even if the position of the jig plate or the work conveyed by the convey unit deviates from a predetermined position, a float base and a support plate (the float base, the support plate, and the jig plate) are floated by means of air bearing pads. The horizontal movement of these components can be readily controlled, so that positioning pins can be easily fitted in the positioning recesses.

Abstract: An automatic set-up system is provided for setting up on a pallet work to be machined by a flexible manufacturing system automatic machine tool. The pallet has a support plate and a jig plate which overlies the support plate on which the work is placed. The support plate, the jig plate and the work are sequentially conveyed by a convey unit on a setting table. The relative positions of the support plate and the jig plate, and of the jig plate and the work are usually held constant by the engagement of positioning recesses and positioning pins. Even if the position of the jig plate or the work conveyed by the convey unit deviates from a predetermined position, a float base and a support plate (the float base, the support plate, and the jig plate) are floated by means of air bearing pads. The horizontal movement of these components can be readily controlled, so that positioning pins can be easily fitted in the positioning recesses.

Abstract: An automatic set-up system is provided for setting up on a pallet work to be machined by a flexible manufacturing system automatic machine tool. The pallet has a support plate and a jig plate which overlies the support plate on which the work is placed. The support plate, the jig plate and the work are sequentially conveyed by a convey unit on a setting table. The relative positions of the support plate and the jig plate, and of the jig plate and the work are usually held constant by the engagement of positioning recesses and positioning pins. Even if the position of the jig plate or the work conveyed by the convey unit deviates from a predetermined position, a float base and a support plate (the float base, the support plate, and the jig plate) are floated by means of air bearing pads. The horizontal movement of these components can be readily controlled, so that positioning pins can be easily fitted in the positioning recesses.

Abstract: An automatic set-up system is provided for setting up on a pallet work to be machined by a flexible manufacturing system automatic machine tool. The pallet has a support plate and a jig plate which overlies the support plate on which the work is placed. The support plate, the jig plate and the work are sequentially conveyed by a convey unit on a setting table. The relative positions of the support plate and the jig plate, and of the jig plate and the work are usually held constant by the engagement of positioning recesses and positioning pins. Even if the position of the jig plate or the work conveyed by the convey unit deviates from a predetermined position, a float base and a support plate (the float base, the support plate, and the jig plate) are floated by means of air bearing pads. The horizontal movement of these components can be readily controlled, so that positioning pins can be easily fitted in the positioning recesses.

Abstract: An apparatus, used in the treatment of cans, is made up of a number of individual units, each of which essentially comprises a pair of drums that are mounted for rotation about parallel axes which are vertically disposed. One of the drums is used in the treatment of the interior of the cans, while the other is utilized in the treatment of the exterior of the cans. Each of the rotary drums is provided with means for holding a number of cans in circumferential alignment around the outer periphery of the drum such that the longitudinal axes of the cans are radially oriented relative to the rotational axes of the drums. Other means are provided to successively transfer the cans from one drum to another. A number of such units can be used, in tandem, to treat the cans beginning from washing, rinsing and drying of the cans to heating, coating and drying of the coated cans.

Abstract: A surface treatment device capable of carrying out the surface treatment such as washing or etching of plate-like articles such as semiconductor wafers maintaining high degree of reliability, wherein a surface treating liquid is introduced into a ring-like or a conduit-like treating vessel. The plate-like articles to be treated are moved by a conveyor on a conveyor path having a surface in parallel with the surfaces of the plate-like articles against the stream of the treating liquid in a piece-by-piece manner, so that the surfaces of the plate-like articles are treated, whereby the surfaces of the semiconductor wafers can be desirably treated prior to manufacturing the semiconductor products.

Abstract: In can manufacturing apparatus there is provided an overhead magnetic conveyor for transferring cans from a conveyor upon which they are coated to a conveyor upon which the cans are dried. To remove excess coating material which tends to form a bead around the lower most edge of a can, a bath of coating material solvent is disposed adjacent to the transfer conveyor and has within it an endless belt conveyor to which cans on the overhead conveyor are caused to fall and from which those cans are subsequently returned to the overhead conveyor. The upper, can carrying course of the endless belt conveyor is disposed at a predetermined depth below the surface of solvent within the cans so that excess material accumulating on the lower portions of the cans in the coating region is removed prior to entry of the cans into the drying oven.

Abstract: In can manufacturing apparatus there is provided an overhead magnetic conveyor for transferring cans from a conveyor upon which they are coated to a conveyor upon which the cans are dried. To remove excess coating material which tends to form a bead around the lowermost edge of a can, a bath of coating material solvent is disposed adjacent to the transfer conveyor and has within it an endless belt conveyor to which cans on the overhead conveyor are caused to fall and from which those cans are subsequently returned to an overhead conveyor. The upper, can carrying course of the endless belt conveyor is disposed at a predetermined depth below the surface of solvent within the bath so that excess material accumulating on the lower portions of the cans in the coating region is removed prior to entry of the cans into the drying oven.

Abstract: An industrial washing machine for washing each of a continuous flow of production components in turn has a group of jets mounted in a respective manifold casing at each of one or more washing stations. Each manifold casing is hinged to fixed structure and is held in abutment with a locator stop by a toggle lever latch. Each jet is precisely located in position for use by the combination of the respective locator stop and hinge and can be swung from that position when the respective latch is released in order to facilitate access to the jets for cleaning and/or access to a production component which is supported at the respective washing station for cleaning so that, if such a production component should be displaced, relocation is facilitated. The jets in each manifold casing have a smaller diameter and longer bore than do the remaining jets in the washing section of the machine.

Abstract: An automatic closure cleansing machine has at least two rotary carriers each having a plurality of receptacles arranged in equally spaced relation to each other and also in equally spaced relation to the axis of rotation of the corresponding rotary carrier, and first and second cleansing liquid applicators being positioned adjacent the rotary carriers, respectively, for spraying a cleansing liquid under pressure towards the closure members carried by the rotary carrier by the effect of a suction force. For this purpose, the receptacles on each rotary carrier are successively communicated to a source of vacuum. One of the opposed sides of each of the closure members is cleansed during the transportation of the closure member by the first rotary carrier while the other of the opposed sides of the closure member is cleansed during the transportation of the closure member by the second rotary carrier.

Abstract: A system and apparatus for treating articles of variable size and shape is disclosed in the illustrative embodiment utilizing vibrating feeder bowls into which fluids are introduced for treating the articles simultaneously with their automatic advancement. The system is further adapted for various spacial dispositions in accordance with the area available. A particular system is disclosed for treating aluminum nails by continuous advancement through a succession of feeder bowls at which the nails are subject to cleaning, washing, coating and rinsing.

Abstract: An arrangement for surface treating workpieces has a pair of rotary conveyors each rotatable about a respective vertical rotation axis and provided with a plurality of angularly spaced holders each of which can grip a respective workpiece and advance it angularly stepwise through a plurality of respective working stations. In addition each of these holders can be rotated about an axis generally radial of the respective rotation axis for the rotary conveyor for treatment on all sides of each workpiece as it is stepped through the various surface treatment stations. A line conveyor extends tangentially passed the two conveyors and is of the walking-beam type. This line conveyor feeds workpieces to the upstream conveyor so that they then move around the working stations of this upstream rotary conveyor, then takes them off the upstream rotary conveyor and feeds them to the downstream rotary conveyor where they are stepped through the respective working stations of this conveyor.

Abstract: A ferris wheel type parts washer has its ferris wheel driven by a rotary fluid pressure motor under the control of a variable rate fluid flow control mechanism with means provided for sensing approaching registry of a parts supporting station on the ferris wheel with the parts transfer conveyor for slowing the rotation of the ferris wheel and with means sensing substantial registry of the parts supporting station and the parts transfer conveyor for stopping the fluid pressure motor and locking the ferris wheel in parts transfer registry with the conveyor, such locking means capable of camming the ferris wheel into parts transfer registry should it be slightly out of transfer registry when its movement is arrested. The disclosure shows mechanism for unlocking the ferris wheel and quickly accelerating it to maximum speed.

Abstract: A system for cleaning, rinsing, coating and drying cans having a circular side wall and a closed end wall at a high rate of speed as the cans emerge from the apparatus by which they are formed. The system basically comprises a washing stage, at least one rinsing stage and a drying stage, with one or more coating stages provided if desired. Each stage is housed in its respective housing and having a can entrance location and a can exit location, with the exit location of one stage being connected to the entrance location of the next succeeding stage by conveyor means. The stages are of a generally similar construction and basically comprise a carrier assembly disposed within the housing for receipt of the formed cans. The carrier rotates about a main longitudinal axis for carrying the cans from the entrance location to the exit location through a circular orbit and in planetary motion, wherein the cans are rotated about their own longitudinal axis as they orbit about the main longitudinal axis of the housing.

Abstract: An improved transfer device comprised of powered endless surface elements for supporting and moving coated articles in an upright position, such as coated can bodies, from one treatment station, e.g. a coating station to a further treatment station, such as a coating/curing oven. Various parts of the endless surface elements are arranged at selected levels in a trough through which a suitable aqueous medium, e.g. deionized water, is substantially continuously circulated. The height within the trough of this aqueous medium is advantageously controlled relative to the top surface portions of the endless surface elements so that there will be a substantially continuous cleaning of the endless surface elements as excess coating material moves towards and drains from the lower portions of the article being transported while the article is moved through the trough by way of the endless surface elements.