Abstract: A container storage includes a purger that supplies a purge gas into a stored container and an evacuator that is disposed near a lid of the container and evacuates an atmosphere around the lid.

Abstract: Methods and systems are provided for capless refueling system of a vehicle. In one example, a method may include cleaning a capless unit of a capless refueling system by generating vacuum in the capless refueling system and delivering compressed air to the capless unit from an electrical booster of an engine. The compressed air may be delivered to the capless unit via a two-way valve configured to control a flow path of the compressed air.

Abstract: A substrate processing apparatus includes a processing liquid supply nozzle to supply a processing liquid to a substrate, a storage portion that stores the processing liquid supplied, a liquid-sending pipe that sends the processing liquid stored in the storage portion to the nozzle, a flow pipe that allows a processing liquid to flow therethrough, an oxygen concentration meter interposed in the flow pipe, a hypoxic fluid supply pipe that is in communication with the flow pipe and that sends a hypoxic fluid to the flow pipe, and a flow rate changing valve interposed in the hypoxic fluid supply pipe. A flow-rate-changing controller controls the flow rate changing valve so that the hypoxic fluid is supplied to the flow pipe until an inside of the flow pipe is filled with the hypoxic fluid when the processing liquid inside the flow pipe is drained.

Abstract: The invention relates to a system for storing and feeding an auxiliary liquid to an internal combustion engine of a motor vehicle or to parts of the internal combustion engine of the motor vehicle, having a storage vessel for the fluid, having at least one delivery pump for the fluid, and having at least one line system comprising an inflow to a consumer and a return flow into the storage vessel, the system comprising a connector module which is inserted into an opening of the storage vessel, the connector module having fluid ducts which communicate with the storage vessel and are connected to an inflow line and to a return flow line of the line system, and the connector module comprising a module block which is configured as a thermally conductive and/or heatable body.

Abstract: A coating apparatus, a method of recycling a coating liquid by utilization of the same and a method for cleaning the same are provided. The coating apparatus includes a supply device, a coater device and a recycling device. The supply device includes a liquid inlet, a liquid outlet and a coating liquid supply unit connected with the liquid inlet. The coater device includes a coating liquid nozzle including a receiving opening connected with the liquid outlet of the supply device, a coating opening and an exhaust opening. The recycling device includes a recycled liquid outlet and at least one recycling inlet including a supply process recycling inlet which is connected with the exhaust opening of the coating liquid nozzle, and the recycled liquid outlet is connected with the liquid inlet of the supply device.

Abstract: A piping system of a steam turbine plant includes: a piping member including a first pipe section including a first passage, a second pipe section including a second passage, a connection section arranged between the first pipe section and the second pipe section and including a connection passage that connects the first passage and the second passage, and a third pipe section including a third passage connected with the connection passage through an opening, the first pipe section being supplied with steam; a steam stop valve connected with the third pipe section; and a turbine bypass valve connected with the second pipe section. An angle made by a first central axis and a second central axis is larger than an angle made by the first central axis and a third central axis.

Abstract: Generally, the present disclosure is directed to systems that may be used to facilitate the retrieval and/or replacement of production and/or processing equipment that may be used for subsea oil and gas operations. In one illustrative embodiment, a method is disclosed that includes, among other things, removing at least a portion of trapped production fluid (101a, 101b) from subsea equipment (100) while the subsea equipment (100) is connected to a subsea equipment installation (185) in a subsea environment (180), and storing at least the removed portion of the trapped production fluid (101a, 101b) in a subsea containment structure (120, 120a, 120b, 132) that is positioned in the subsea environment (180). Additionally, the disclosed method also includes disconnecting the subsea equipment (100) from the subsea equipment installation (185) and retrieving the subsea equipment (100) from the subsea environment (180).

Abstract: In a method of cleaning and sterilizing an ultrapure water manufacturing system including an ultrapure water manufacturing apparatus, a point of use of ultrapure water, and an ultrapure water channel connecting the ultrapure water manufacturing apparatus and the point of use, a cleaning and sterilizing process including an alkali cleaning step for cleaning at least part of the inside of the system with alkaline solution and a sterilizing step for sterilizing the system with sterile water after the alkali cleaning is treated twice or more. By treating the cleaning and sterilizing process twice or more, metals, organic substances, particles, and bacteria inside the ultrapure water manufacturing system can be highly efficiently removed, and thereby ultrapure water satisfying required water quality can be produced within a short period of time after the cleaning and sterilizing.

Abstract: A tire repair device, which has a container for containing the tire repair fluid and a securing jig therefor, is characterized in that the securing jig is configured by coupling a securing portion, which holds the container in a predetermined direction, to a step plate portion.

Abstract: An apparatus connects first and second conduits that convey a flow of gas. The apparatus includes a first flange element fixed to the first conduit, and a second flange element fixed to the second conduit. The flange elements are coupled together to permit fluid communication in an internal environment between the first and second conduits. At least one port is intermediate the flange elements to deliver a flow of purge gas therebetween. The at least one port may be located within a purge gas channel arranged in one of the flange elements. A pressure gradient of the flow of purge gas may substantially prevent at least one of fluid egress from the internal environment and fluid ingress from an external environment. Purge gas distribution systems and related methods are also described.

Abstract: Method for cleaning the conveying pipe of a pneumatic material conveying system, such as of a waste conveying system, and/or for conveying material that is in the piping, in which method at least one cleaning member is fed into a conveying pipe, and a pressure difference is achieved in the pipe and under the influence of the pressure difference the cleaning member is brought to move for cleaning the pipe, and/or for conveying material, in the conveying pipe section intended to be cleaned. In the method a cleaning member or a combination of a number of cleaning members is moved in the conveying piping, and that the cleaning member or combination of a number of cleaning members is connected to a transmission member, with which the movement of the cleaning member or combination of a number of cleaning members in the conveying piping is limited or guided. The object of the invention is also a cleaning apparatus and a system.

Abstract: A method for operating an electronic device manufacturing system is provided that includes introducing an inert gas into a process tool vacuum pump at a first flow rate while the process tool is operating in a process mode; and introducing the inert gas into the process tool vacuum pump at a second flow rate while the process tool is operating in a clean mode. Numerous other embodiments are provided.

Abstract: Powder and deposition control in a throttle valve includes nozzle inserts in the valve body that form annular plenums and annular nozzles for injecting annular flows of cleaning gas adjacent to the inside wall surface of the valve body for cleaning powders and depositions off surfaces in the valve body and off the closure member of the throttle valve. The annular flows of cleaning gas can be in intermittent, periodic, or in pulsed bursts or at a steady-state flow rates to dislodge powder particles stuck to the inside surface of the throttle valve, to etch or reactively clean solid deposits, or to prevent or minimize build-up of powder particles or solid deposits in the throttle valve.

Abstract: A flush adaptor for use with a valve fitment assembly for dispensing liquids from a container; wherein the flush adaptor comprises an outer ring-collar; a flange with an edge molded to the bottom of the outer ring-collar; an interior ring-collar adjacent to the outer ring-collar; a ridge molded in the interior ring-collar; a seat molded onto the interior ring-collar and a pin molded into the interior ring-collar which keeps the valve in an open position; and a hollow tube molded into the adaptor to allow the flow of liquid through the adaptor and into the fitment assembly; whereby the flush adaptor allows for cleaning of the assembly and any tubes connected thereto.

Abstract: A method for removing blood from an extracorporeal blood circuit of a treatment apparatus for the extracorporeal blood treatment of a patient following termination of a blood treatment session, wherein the treatment apparatus includes at least one extracorporeal blood circuithaving a conduit interior; at least one blood pump for conveying blood inside the conduit interior of the extracorporeal blood circuit; and at least one substitute pumpfor introducing or conveying at least one substituate fluid inside the conduit interior of the extracorporeal blood circuit. The method comprises feeding of air into the conduit interior of the extracorporeal blood circuit by operating the blood pump, and introducing substituate fluid into the conduit interior of the extracorporeal blood circuitby operating the substitute pump. In addition, a suitable apparatus is described.

Abstract: A fire protection sprinkler system and method of inerting a fire protection sprinkler system includes connecting an inerting system to the piping network of a fire protection sprinkler system having a piping network and at least one sprinkler head connected with the piping network. The inerting system includes an inert gas source that is adapted to supply inert gas to the piping network and an inerting gas vent assembly. The gas vent assembly has a gas vent adapted to discharge gas, a solenoid and a control. The solenoid is adapted to selectively open the gas vent and to close the gas vent. The gas vent discharges gas when the solenoid opens the gas vent and does not discharge gas when the solenoid closes the gas vent. The control is adapted to operate the solenoid in a manner that allows the gas vent to discharge gas for a limited amount of time.

Abstract: An apparatus for insertion in an enclosed space, including: a tube with: first and second substantially straight portions including first and second ends of the tube, respectively; and a curved portion connecting the first and second portions. The apparatus includes: a plurality of nested segments at least partially disposed within the first substantially straight portion of the tube and connected to the first substantially straight portion; and a first actuator engageable with the tube to displace the first and second substantially straight portions of the tube into and out of the enclosed space through an opening into the enclosed space. The tube is arranged to accept a hose passing through the tube, and a distal segment from the plurality of nested segments is connectable to the hose.

Abstract: A storage facility includes a controller for monitoring a supply state of the inactive gas for the plurality of storage sections and for controlling the plurality of supply amount adjusting devices. The controller is configured to monitor the supply state of the inactive gas for the plurality of storage sections by dividing the plurality of storage sections into a plurality of monitoring areas, and to control a plurality of supply amount adjusting devices such that the supply state of the inactive gas supplied to the storage sections belonging to each of the plurality of monitoring areas satisfies a set restricting condition defined in advance.

Abstract: An improved electromechanical apparatus for injecting or purging fluids on demand is disclosed. Also disclosed are systems and methods for using the apparatus, including automatic fertilizer injection/injecting and water line purging systems for use in lawn maintenance. The apparatus can be located in a main water line before the distribution valves of an irrigation system, for example, where it can be activated or deactivated without interfering with the normal usage of the system.

Abstract: A wiping device has a wiping section that relatively moves along the nozzle surface, and the wiping section has: a curved surface in which a bulge is continuously formed along the identification line; a guiding section disposed such that the bulge faces the nozzle surface; a gas jetting port that applies gas to the curved surface; and a gas suction port that sucks the gas ejected from the gas jetting port and guided along the curved surface, wherein, as viewed from the direction perpendicular to the nozzle surface, the identification line which is the set of upper end points on the bulge on the curved surface intersects with the edges of the nozzle surface at an oblique angle.

Abstract: Methods and apparatus for particle reduction in throttle gate valves used in substrate process chambers are provided herein. In some embodiments, a gate valve for use in a process chamber includes a body having an opening disposed therethrough from a first surface to an opposing second surface of the body; a pocket extending into the body from a sidewall of the opening; a gate movably disposed within the pocket between a closed position that seals the opening and an open position that reveals the opening and disposes the gate completely within the pocket; and a plurality of gas ports disposed in the gate valve configured to direct a gas flow into a portion of the gate valve fluidly coupled to the opening.

Abstract: A fluid ionization and vaporization inlet provides for the ionization and vaporization of samples to be delivered to analytical instrumentation of the scientist's choice. A sample may be injected through a septum onto a sample plate whereby heat, direct current, or both can be applied to ionize and/or vaporize the sample into a carrier gas, which is then provided to the analytical instrumentation. A continuous fluid sample may also be provided to the fluid ionization and vaporization inlet wherein it is heated to vaporize the sample, and then excited volatile molecules pass through a gas permeable membrane and combined with a carrier gas, which in turn is provided to the analytical instrumentation.

Abstract: Disclosed are apparatus and methods for supplying a constant flow of precursor gas to a processing chamber. The apparatus described, and methods of use, allow a precursor ampoule to be removed from the gas delivery system without interrupting the process.

Abstract: Methods and systems for cleaning a capless refueling system in a vehicle are disclosed. In one example approach, a method comprises, in response to a leak detected following a refueling event, cleaning the capless refueling system using engine vacuum.

Abstract: A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein flow through the passageway is at a maximum flow, and a closed position wherein flow through the passageway is at a minimum flow, the valve flow control element is shaped so that a control gap is provided between the valve body and valve flow control element through which the first gas can flow, and the dimensions of the control gap vary depending on the position of the valve flow control element relative to the valve body; and a gas injector arrangement for selectively injecting a second gas into the control gap when the valve assembly is used to control the flow of the first gas through the passageway.

Abstract: An installation for draining thermal oil in a thermosolar plant, and includes an oil tank (7), a pump assembly (6), a depressor or suction assembly (8), lines for communication with valves (11, 21), and a valve assembly for opening/closing the passage between the separate elements, with the lines for communication with the valves (11, 21) including pairs of pipes of the closed loop or branches (3, 4) that do not have valves on the free end thereof, with the installation operated by sweeping the separate circuits that form the installation by driving or suction according to the corresponding operation phase.

Abstract: Enhanced tools and techniques are provided for performing fluid processes in connection with the fluid system of a machine. In one embodiment, a fluid process may include fluidically connecting to a fluid system of a machine through a common location; purging at least a portion of the fluid system by applying fluid pressure to a filter through the common location; evacuating at least one fluid reservoir of the fluid system by applying negative pressure at the common location; and, refilling at least one fluid reservoir of the fluid system through the filter portion by applying positive pressure at the common location.

Abstract: The present invention relates to a fluid circulation system for circulating fluid in a subsea cavity, the cavity being filled with a first fluid and having first and second end ports. The system comprises a container (26) containing a second fluid, fluid lines (21, 27) extending from the container to the first and second end ports of the cavity, respectively, and a pump (22) for exchanging the second fluid provided in the container (26) and the first fluid provided in the subsea cavity (10). The invention also relates to a method for circulating fluid in a subsea cavity.

Abstract: A method of draining heat-transfer oil in a solar power plant, and equipment for draining, storing and repositioning heat-transfer oil in order to implement the method, includes filling auxiliary ducts, flushing the oil from the solar power plant loop, cooling the outgoing oil and extracting the oil by suction; replenishing includes filling the loop by impulsion and emptying the auxiliary ducts by aspiration, with the installation including an oil tank (7); a pumping assembly (6); an oil cooler (5); communication ducts between same; a depressor or aspiration assembly (8); an assembly of ducts for emptying (3) the loop of the installation, forming a closed loop; and an assembly of filling ducts (4), forming a closed loop.

Abstract: To prevent corrosion, the pipes of a wet fire protection system (FPS) are purged of atmospheric oxygen by displacing in the pipes with an inert gas, such as nitrogen, prior to filling the pipes with water. After oxygen is purged from the pipes, they are filled with deoxygenated water which contains an O2 concentration of 500 ppb or less. The lack of dissolved oxygen in the deoxygenated water prevents O2 molecules from outgassing from the water into spaces within the pipe containing N2 gas. The dearth of oxygen in the system provides long-term corrosion inhibition. Oxygen may be purged from water by exposing the water to an inert gas (such as N2) having a sufficiently low O2 concentration.

Abstract: Automated condensate drain line cleaning apparatus are disclosed. In one aspect, an apparatus may include a controller, a fluid supply line, and at least one fluid flow regulation device. The at least one fluid flow regulation device may be electrically coupled with the controller to receive at least one control signal from the controller. The at least one fluid flow regulation device may cause a fluid to flow into a condensate drain line through the fluid supply line responsive to the at least one control signal. Other apparatus as well as methods and kits are also disclosed.

Abstract: The invention relates to a device for the supply of special gas that can be mounted on a gas cylinder. The device comprises a multi-function unit housing a fluid circuit comprising a single high-pressure regulator; a purge system consisting of three low-pressure valves; a fluidic connection with the inner space of a cylinder; and an outlet enabling equipment to be supplied with gas. The invention is characterized in that the high-pressure regulator is arranged upstream of the purge system.

Abstract: A valve assembly for a clean-in-place operation includes a valve body with a valve seat and inner cavity. A shaft extends through the valve body and a stopper is connected to the shaft for movement between a normally closed position and an open position to permit cleaning fluid to enter and exit the inner cavity only through the valve. An actuator contacts the shaft for moving the stopper toward the open position. An air inlet extends into the inner cavity. A stop valve associated with the inlet prevents fluid from exiting through the inlet such that cleaning fluid only enters and exits the inner cavity through the valve seat A source of pressurized air opens the stop valve and causes drying air to enter the cavity and move the stopper toward the open position and supply the air to the processing system.

Abstract: A spraying assembly is provided. The spraying assembly includes at least one nozzle for liquid that is to be sprayed, and at least one active substance injector which is situated directly upstream from the at least one nozzle and to which liquid to be sprayed is supplied by a pump or a pressurized reservoir, with interposition of an obturator on a conduit connecting the pump or the pressurized reservoir to the injector. The spraying assembly also includes an outlet valve for each injector designed to close each outlet orifice. The present invention avoids overdosing or underdosing of the product that is to be sprayed as active substance.

Abstract: An arrangement and method for unloading raw material in connection with a cable manufacturing apparatus. The arrangement includes a feed inlet connected to the cable manufacturing apparatus for feeding raw material into the cable manufacturing apparatus, the feed inlet being adapted to be connected to an unloading spout of the raw material. The arrangement further includes a seal for opening and closing the feed inlet when the unloading spout is connected to the feed inlet.

Abstract: An automated irrigation purge system utilizes a pressure purge method of discharging compressed air from a reservoir through selected irrigation zones with feedback from pressure switches to determine when to open and close each zone valve. No programming or user interaction is required beyond starting the system. The system can operate with a wide variety of irrigation systems, with varying number of zones, pipe lengths, pipe diameters, number and variety of sprinkler heads or outlets, and terrain slope. The system tracks the pressure transition time from high pressure to low pressure for each zone as it is blown out. When the current transition time is within a specified range from the previous transition time, the system knows the water has been sufficiently purged from that zone. The purge system can protect the irrigation system from high-pressure conditions, handle multiple error conditions, and maintain water valve settings during power loss.

Abstract: A method and a corresponding device for controlling the temperature of steam in a boiler of a steam generator are provided. The gradual accumulation of dirt on heat exchanger surfaces inside the boiler is incrementally regulated by soot blowers. The targeted influencing of the heat transfer on the heat exchanger surfaces enables the steam temperatures to be controlled and regulated.

Abstract: A method and system is described for controlling an electrically driven fuel pump used in the filling of a hobbyist model craft's fuel tank, (airplane, car, boat etc). The system includes a microcontroller to control the direction and run time of a brushed electric motor-driven fuel pump. A calibration feature allows operating parameters for different sized pumps and tanks to be measured and recorded in memory, then later recalled and used in the filling of pre-selected models' tank to a predetermined level simply by pressing a button to initiate the operation.

Abstract: The flow cytometer system of the preferred embodiment includes a flow cell body that functions to contain, protect, and align the components of the flow cytometer system; a flow channel, coupled to the flow cell body, that functions to conduct and focus sample fluid through an interrogation zone; and a sample injection probe, removably coupled to the flow cell body, that functions to provide a uniform flow of sample fluid to the flow channel. The flow cytometer system is preferably designed for the flow cytometer field. The flow cytometer system, however, may be alternatively used in any suitable environment and for any suitable reason.

Abstract: A fluid processing system has a plurality of segments configured to receive flow of a fluid product. Each of the plurality of segments has a line input, a line output, a cleaning input valve, and a cleaning discharge valve. The cleaning input valve connects to the line input and the cleaning discharge valve connects to the line output. A cleaning medium is provided wherein the cleaning medium is injected into a respective cleaning input valve and drained through a respective cleaning discharge valve, such that each segment can be cleaned independently of each other.

Abstract: A double-seat valve having a seat-cleaning function, wherein the double-seat valve opens downward, and the two closing elements can be moved independently of each other by a partial lift in each case gap-wide into a seat cleaning position for the purpose of cleaning their seat such that the dependently driven second closing element is pushed into its respective seat cleaning position by a second partial lift in the same direction of the opening movement, and the independently driven first closing element is pushed into its respective seat cleaning position by a first partial lift in the direction counter to the opening lift.

Abstract: Some embodiments of a valve flushing kit used in temporarily flushing a globe valve can include a flushing bonnet assembly that includes a circular disk adapted to be received in the upper opening of an internal valve cavity of a valve when a closure bonnet and a closure member of the valve are removed and a plurality of bonnet clamps each having at least one opening therethrough, wherein the opening can be adapted to be received on one of the threaded studs protruding from the upper exterior surface of a body of the valve and the bonnet clamps can be held in place by the threaded nut.

Abstract: One possible embodiment of the invention could be a fire hose adapter comprising of a body and a vacuum generator, the body having a cap and a hose connector, the cap being penetrated by a generator channel that connects an intake port with an exhaust port, the two ports being located on an exterior of the cap; the hose connector defining a vacuum channel that continuously connects the generator channel to a vacuum aperture located on an exterior of the hose connector; the vacuum generator being located within the generator channel, wherein a stream of pressurized air passes through the vacuum generator causing a reduction in air pressure in the generator channel that subsequently induces air in an interior of a fire hose section connected to the hose connector to flow into the vacuum aperture and be directed out the exhaust port.

Abstract: A service station, for the filling, emptying and flushing of an air conditioning system in a vehicle, is coupled to the air conditioning system and includes: a cabinet in which a pipeline for transporting the coolant connects a first port with a compressor, cooling unit, an internal cylinder for storing the coolant, as well as a second port. A heated flushing accumulator is arranged inside the service station between the first port and the compressor.

Abstract: The present invention relates to a method for removing fluid from a blood filter which is used for the blood treatment of a patient and/or for removing blood from an extracorporeal blood circuit at the end of a blood treatment session. It further relates to a medical treatment apparatus with a control and/or regulating device which executes the method according to the present invention. It further relates to a digital storage medium, a computer program product as well as a computer program for executing the method according to the present invention.

Abstract: A selective catalytic reduction system includes a fluid distribution system for supplying an exhaust gas reducing agent. The system includes a liquid storage tank and a fluid distribution module with a fluid pump that draws liquid reducing agent from the tank volume and provides the liquid at a module outlet port, while simultaneously discharging excess liquid from a circulation line outlet within the tank volume. The circulation line outlet can be located at a bottom portion of the tank volume near other distribution module components to promote liquid circulation around the module components during a fluid distribution period, to promote thawing of frozen reducing agent at and around the module components, and to ensure a continuous supply of liquid to the fluid pump. The distribution module is also capable of purging liquid from fluid lines located outside the storage tank and returning the purged liquid to the tank volume.

Abstract: An apparatus for dispensing liquid fuel comprises a plurality of inlet valves, each connected in-line with a respective inlet pipe in fluid communication with a respective source of a specific liquid fuel. A plurality of outlet valves are also provided, each connected in-line with a respective outlet pipe. A respective fuel hose is in fluid communication with each of the outlet pipes. The apparatus further comprises a coriolis flow meter located between the inlet valves and outlet valves, the coriolis flow meter providing a flow signal indicative of flow therethrough. A controller is operative to receive the flow signal and control the valves such that selected inputs of specific liquid fuels are dispensed to at least one of the fuel hoses. In accordance with an exemplary embodiment, the selected inputs of specific liquid fuels may include individual liquid fuels and blended combinations thereof.

Abstract: A device for recovering puncture repair liquid includes a tube to be inserted from a tire valve mounted to a wheel up to an inner surface of a tire, a container having a pair of connecting ports for receiving and containing puncture repair liquid recovered from inside the tire, and a connecting hose for connecting between the tire valve and one of the connecting ports. The other connecting port is removably attachable to a pressurized air source. A valve core is detached from a tire valve of a wheel with a tire mounted thereon into which puncture repair liquid has been injected. The tube is inserted into the tire which is filled with air from the pressurized air source that is then detached from the container. Thus, recovery of the puncture repair liquid is efficiently performed using pressure escaping from the tire without cutting out the tire valve.

Abstract: A system is disclosed. The system is provided with an oilfield material reservoir, a fluid nozzle, and a fluid supplier. The oilfield material reservoir is provided with an opening for receiving an oilfield material and an orifice for discharging the oilfield material. The fluid nozzle is positioned adjacent to the orifice to direct a fluid flow through the orifice, and the fluid supplier is connected to the fluid nozzle.

Abstract: A gas supplying system includes a processing gas supply pipe for supplying a processing gas from a gas cylinder 210 into a processing apparatus and a nonreactive gas supply source 230 for supplying a nonreactive gas into the gas supply pipe. While the system is in operation, the gas supply pipe is charged with the nonreactive gas and a control unit is in a standby state. If a processing gas use start signal is received from the processing apparatus, the system exhausts the nonreactive gas from the gas supply pipe to create a vacuum therein; charges the gas supply pipe with the processing gas; and starts a supply of the processing gas from the processing gas supply source. If a processing gas use finish signal is received from the processing apparatus, the system stops the supply of the processing gas from the processing gas supply source; exhausts the processing gas from the gas supply pipe to create a vacuum therein; and charges the gas supply pipe with the nonreactive gas.