Abstract: A fluidic accelerometer and electromagnetic transducer formed from a plurty of vertical laminations having a nozzle, a pair of outlets for receiving nozzle fluid and a flexible member as an extension of one of the laminations which forms a vertical wall of said nozzle extending into a chamber between the nozzle and the outlets. The flexible member is responsive to acceleration or electromagnetic forces transverse the nozzle centerline to vary the proportion of nozzle fluid received by each outlet. The flexible member is separated from the horizontal walls of the chamber by a selected small distance to create sufficient viscous shear force to effectuate damping.

Abstract: The invention relates to thin silicon membranes formed in layers of silicon such as are normally utilized as substrates in the manufacture of integrated electronic circuits. The thin membranes constructed in accordance with the invention are capable of deformation by electrostatic forces and are applicable to a wide range of uses including the manufacture of solid state pressure sensors, resonant, and antenna structures, as well as electro-optical display elements. A processing technique is disclosed which is particularly adapted to forming membranes in silicon substrates in a manner which is compatible with the construction thereon of other integrated circuit components.

Abstract: A flow device for interaction with a fluid stream to control its direction comprises a conduit system which includes a cavity in communication with an inlet for the stream and at least one outlet for the stream. Controllable flexible means co-operative with the cavity are provided for interaction with the stream and function to deflect the stream in one direction or the other from its entering direction as it leaves the cavity. The fluid stream can be selectively directed into one or the other of two separate outlets, or a single outlet can be combined with a vortex arrangement so as to enable one to select the direction of rotation of the stream about the axis of the vortex.

Abstract: The converter comprises a plurality of series-connected bistable fluidic elements each having a supply input, two outputs separated by a jet splitter, and two conical inputs. The outputs of each bistable fluidic element are connected to respective control inputs of the next preceding bistable element. Feedback conduits are branched off the outputs of the last fluidic element and connected to the control inputs of the first fluidic element. The feedback conduits are closed or cleared by an electromagnetically operated valve which opens in the direction of fluid flow through the then blocked feedback conduit responsive to a signal from an electric control circuit.

Abstract: An electrofluidic transducer which utilizes an electromagnetic device that is energizable by electric currents of opposite polarity to shift a fluid beam in opposite directions away from a central position. In its central position the beam deflector is between a pair of fluid nozzles, and shifts to deflect respective fluid beam from the two nozzles upon opposite energization of the electromagnet, so that three different pressure differential signals may be selectively impressed upon a pair of fluid output ports registering with the pair of fluid nozzles.

Abstract: An electro-fluidic signal converter has a body provided with an inlet and two outlets for pressure fluid. The body is composed of a pair of outer non-magnetic plates and a plurality of laminated-together inner magnetizable plates which are fluid-tightly sandwiched between the outer plates. The inner plates have respective plate portions which together constitute a body section that is resiliently deflectable out of a neutral position, and this body section is formed with a fluid channel which communicates with the inlet and has a discharge orifice that communicates equally with both of the outlets when the body section is in its neutral position. An electromagnet is located adjacent the body and is energizable to thereby deflect the body section out of its neutral position to one of a plurality of operated positions in which the discharge orifice communicates preferentially with one of the outlets. A method of making the body is also disclosed.

Abstract: The converter includes a pressure fluid operated, bistable fluidic element, n the form of a fluid oscillator, having a pressure fluid supply inlet opening into an interaction chamber, two outlets extending downstream from the interaction chamber to the exterior and diverging in direction at an acute angle, two control inlets communicating with the interaction chamber, and a magnetic system actuated by electric input signals and influencing the control pressure in the control inlets to deviate the pressure fluid from one outlet to the other outlet. Respective feedback conduits are branched from the outlets to respective associated control inlets. Valve arrangements are selectively actuable by the magnetic system to close or open the feedback conduits. In one embodiment of the invention, a single valve is provided in the form of an armature of the magnetic system. In another embodiment of the invention, each control inlet has a respective valve therein in the form of an armature of the electromagnetic system.

Abstract: A fluidic system (e.g. amplifier or bistable unit) having an inlet branch and a pair of outlet branches separated by a fluid-flow splitter whereby the fluid is rendered electromagnetically susceptible, e.g. magnetic by incorporating magnetic particles therein, electrostatically responsive by being relatively dielectric, or electrically conductive, so that the fluid flow to the outlet branches may be controlled by magnetic, electrostatic or current flow means or an output may be derived by similar electromagnetic means for controlling an ancillary device, providing an indication of a fluid flow parameter or feedback control of an input parameter.