For Producing Proportionate Flow Patents (Class 137/9)
  • Patent number: 10710037
    Abstract: A chemical component mixing apparatus for use with a fluid source in creation of a concentrated solution mixture is described. The mixing apparatus includes at least one mixing station. The mixing station includes an injector assembly, where the injector assembly includes at least one venturi chamber having at least one suction port in fluid communication with the at least one venturi chamber. The apparatus also includes at least one super concentrate chemical component housed within a chemical container, where the chemical container is fluidly connected by a first tube to the at least one venturi chamber via the at least one suction port, a receiving container fluidly connected to the injector assembly via a second tube, and a fluid source inlet introducing a fluid into the at least one mixing station, where the pressure within the at least one mixing station is less than 150 psi.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: July 14, 2020
    Assignee: DuBois Chemicals, Inc.
    Inventors: Brent McCurdy, Michael Maurizi
  • Patent number: 9405298
    Abstract: A system and method for dividing the flow of one or more process fluids in a predetermined flow ratio is provided herein. In one embodiment, a system for dividing flow of one or more process fluids in a predetermined flow ratio includes a process chamber having a plurality of inlets for delivering one or more process fluids into the process chamber; a plurality of modulating valves coupled to the plurality of inlets, wherein each inlet of the plurality of inlets is coupled to at least one modulating valve; and a controller coupled to the plurality of modulating valves, the controller configured to control the operation of the plurality of modulating valves to divide the flow of one or more process fluids in the predetermined flow ratio.
    Type: Grant
    Filed: November 20, 2006
    Date of Patent: August 2, 2016
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Bruno Geoffrion, Mark Adam Crocket
  • Publication number: 20150122339
    Abstract: A gas turbine engine includes a first duct, a second duct, and a bladder. The bladder is disposed in the first duct and communicates with the second duct. A first gas flow is capable of passing through the first duct and a second gas flow is capable of passing through the second duct. The bladder is adapted to receive a bleed gas flow from the second duct and inflate within the first duct, thereby decreasing an area in the first duct through which the first gas flow is capable of traveling.
    Type: Application
    Filed: March 11, 2014
    Publication date: May 7, 2015
    Applicant: UNITED TECHNOLOGIES CORPORATION
    Inventors: John R. Buey, Keegan M. Martin
  • Publication number: 20150059859
    Abstract: An apparatus for dividing and supplying gas is provided with a flow rate control device, a plurality of divided flow passages of gas flowing from the flow rate control device, thermal-type mass flow sensors disposed to the divided flow passages, electrically-operated valves disposed on a downstream side of the thermal-type mass flow sensors, controllers that control the electrically-operated valves, and a flow ratio setting calculator that calculates a total flow rate, then calculates flow rates of the divided flow passages, and then inputs the calculated flow rates as set flow rates to each controllers. One of the divided flow passages with the highest set flow rate is put in an uncontrolled state, and opening degree for each of the rest divided flow passages is controlled, and then feedback control of the divided flow rate of each of the divided flow passages is implemented by each of the controllers.
    Type: Application
    Filed: August 29, 2014
    Publication date: March 5, 2015
    Inventors: Eiji Takahashi, Norikazu Sasaki, Atsushi Sawachi, Yohei Sawada, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino
  • Publication number: 20140374346
    Abstract: A wastewater treatment apparatus includes: an air diffusing unit that supplies gas to nitrogen-containing water, so that ammonia contained in the nitrogen-containing water is nitrified to nitrate according to a flow of the water, and each desired proportion of the nitrate is denitrified at each position along the flow direction; a denitrification confirming unit provided at a halfway position between an upstream-side denitrification zone for obtaining a requisite minimum denitrified nitrogen amount and a downstream-side nitrification zone for obtaining ultimately required nitrified water quality, which follows the upstream-side denitrification zone on a downstream side thereof; and a gas supply-amount control unit that controls a gas supply amount from the air diffusing unit at least on an upstream side of the denitrification confirming unit, so that a desired proportion of the nitrate is denitrified at the halfway position, based on the denitrification state confirmed by the denitrification confirming unit.
    Type: Application
    Filed: September 9, 2014
    Publication date: December 25, 2014
    Inventors: Yuji FURUYA, Shigehiro SUZUKI, Nobuki TSUBOI, Hiroyuki TAKAHASHI, Noriaki INAGAKI, Tsutomu WADA, Makoto MAEDA
  • Publication number: 20140374345
    Abstract: A wastewater treatment apparatus includes an air diffusing unit, a denitrification confirming unit, a nitrification confirming unit, a gas supply-amount control unit. The air diffusing unit supplies gas to nitrogen-containing water. The denitrification confirming unit provided at a first predetermined position confirms a denitrification state whether a desired proportion of the nitrate has been denitrified. The nitrification confirming unit provided at a second predetermined position confirms a nitrification state whether a desired proportion of the ammonia has been nitrified. The gas supply-amount control unit controls a gas supply amount at least on an upstream side of the denitrification confirming unit, so that the desired proportion of the nitrate is denitrified at the first predetermined position, and controls the gas supply amount at least on an upstream side of the nitrification confirming unit, so that the desired proportion of the ammonia is nitrified at the second predetermined position.
    Type: Application
    Filed: September 9, 2014
    Publication date: December 25, 2014
    Inventors: Yuji FURUYA, Shigehiro SUZUKI, Nobuki TSUBOI, Hiroyuki TAKAHASHI, Noriaki INAGAKI, Tsutomu WADA, Makoto MAEDA, Kouji KASSAI, Keiichi SONE
  • Publication number: 20140367319
    Abstract: A liquid chromatography system includes a gradient proportioning valve in fluidic communication with sources of solvent. From the solvent sources, the gradient proportioning valve produces a low-pressure gradient stream. A first pump is in fluidic communication with the gradient proportioning valve to receive, pressurize, and move the pressurized low-pressure gradient stream to a flow-combining device. A second pump operates in parallel with the first pump and moves a pressurized solvent stream to the flow-combining device where the pressurized solvent stream combines with the low-pressure gradient stream to produce a high-pressure gradient stream. A second gradient proportioning valve can produce, from a second plurality of sources of solvent, a second low-pressure gradient stream, wherein the solvent stream moved by the second pump to the flow-combining device and combined with the other low-pressure gradient stream comprises the second low-pressure gradient stream.
    Type: Application
    Filed: December 7, 2012
    Publication date: December 18, 2014
    Inventors: Joseph A. Luongo, Craig Hamilton Dobbs
  • Publication number: 20140366949
    Abstract: A multi-phase separation flow management system includes a housing with an inlet, a first outlet and a second outlet and in which a movable element is mounted. The movable element has a first passageway with an inlet and an outlet and a second passageway having an inlet and an outlet, and are disposed in the element so that the inlets of the first and second passageways are adjacent one another and the outlets of the first and second passageways are spaced apart from one another. The inlets are disposed adjacent a housing inlet, the first passageway outlet is disposed adjacent a first housing outlet and the second passageway outlet is disposed adjacent a second housing outlet.
    Type: Application
    Filed: June 12, 2014
    Publication date: December 18, 2014
    Inventors: David J. Elms, Gregory A. Hudspeth
  • Patent number: 8857461
    Abstract: A process and device enabling accurate mass flow control is described. A mass flow controller can be re-specified corresponding to multiple types of actual process gases and multiple flow rate ranges, even after the mass flow controller has been shipped. Calibration gas data is derived using actual flow rate versus a flow rate setting signal to generate calibration gas data. Actual gas data is derived by measuring actual flow rate versus a flow rate setting signal for each actual gas and saving. Subsequently, prior to operating the mass flow rate control device, the characteristic data for an actual and the calibration gas characteristic data is recalled. The calibration gas characteristic data is then converted to controlled flow rate correction data based on the actual gas characteristic data that is saved to the control unit and the actual gas flow rate is corrected based on this controlled flow rate correction data.
    Type: Grant
    Filed: February 12, 2013
    Date of Patent: October 14, 2014
    Assignee: Hitachi Metals, Ltd.
    Inventors: Takao Goto, Makoto Tanaka
  • Patent number: 8857463
    Abstract: A sensor system is provided for pressure vessels. In one embodiment, a compressor directs compressed air into a purification chamber for removing carbon monoxide from the air. A sensor system housing is fastened to an opening on the purification chamber. The sensor housing provides an electrochemical sensor driven by an independent power supply and an electronic processor for receiving a signal from the electrochemical sensor. If the carbon monoxide in the purification chamber reaches a predetermined level, the electronic processor is programmed to initiate a shutdown of the compressor utilizing a relay cable.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: October 14, 2014
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: James B. Carruth, James I. Fulton, Christopher B. Bottomy, Thomas M. Hosea, Marshal J. Black
  • Patent number: 8770214
    Abstract: A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline to a region where the gas mixture is used through a gas mixture supply line. When two or more gases having different flow rates are supplied simultaneously, a gas having a relatively low flow rate is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for a gas having a relatively high flow rate.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: July 8, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Yohei Uchida, Takahiro Yamamoto
  • Patent number: 8746269
    Abstract: The present invention relates to a method and apparatus for controlling a gas flow through a conjunction between one or more incoming streams and one or more outgoing streams through a conjunction. The method uses a biased mass flow imbalance value obtained by comparing the aggregate of incoming mass flow measurement value(s) with the aggregate of outgoing mass flow measurement value(s) and adding a bias component to provide the biased mass flow imbalance value. The flow of at least one of the incoming and outgoing streams (12, 14, 16, 18, 20) is adjusted to move the biased mass flow imbalance value towards zero. In addition, a conjunction pressure measurement (PC) is provided, which is used to adjust the bias component in response to a change in the conjunction pressure measurement (PC) relative to a pressure set point (PSP), to mitigate the change in the conjunction pressure measurement (PC) relative to the pressure set point (PSP).
    Type: Grant
    Filed: August 12, 2009
    Date of Patent: June 10, 2014
    Assignee: Shell Oil Company
    Inventors: Clive Beeby, Arina Petronella Jacoba Hupkes-van der Toorn
  • Publication number: 20140048141
    Abstract: Flow distribution networks that supply process gas to two or more stations in a multi-station deposition chamber. Each flow distribution network includes an inlet and flow distribution lines for carrying process gas to the stations. The flow distribution lines include a branch point downstream from the inlet and two or more branches downstream from the branch point. Each branch supplies a station. The flow distribution network also includes highly variable flow elements in each branch. Restrictive components are placed downstream from the variable control elements in each branch. These restrictive components are nominally identical and designed to shift the bulk of the pressure drop away from the variable flow components to improve flow balancing while not unduly increasing inlet pressure. In some cases, the load shifting allows the more variable flow components to operate in the unchoked flow regime.
    Type: Application
    Filed: November 2, 2012
    Publication date: February 20, 2014
    Applicant: Novellus Systems, Inc.
    Inventors: Jeffrey Womack, Stephen Lau
  • Patent number: 8644993
    Abstract: Integrated, stand-alone, multiple-purpose pump stands are provided for controlled pumping of different liquids from a stand-mounted tank to a downstream use location, e.g., a seed treating device. The pump stands are equipped with an operating assembly including a liquid tank, a powered pump, a liquid flow line equipped with a flow meter from the tank and pump to the use location, and a programmable digital control device. During operation, the control device serves to approach and maintain the flow rate from the pump stand at or about a desired setpoint flow rate.
    Type: Grant
    Filed: April 25, 2013
    Date of Patent: February 4, 2014
    Assignee: USC, L.L.C.
    Inventors: Timothy A. Craft, Daniel M. Tramp, Lynn E. Strahm
  • Patent number: 8584691
    Abstract: A liquid metering device that dispenses liquid into an adjacent reservoir at a precise ratio relative to the total volume of the adjacent reservoir as the reservoir is filled with liquid. The hydrostatic dispensing system includes an additive reservoir, a calibrated dispensing vessel, a hydrostatic pressure chamber, a pressure limiter, and a three-way valve that passively arms and dis-arms the system.
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: November 19, 2013
    Assignee: Hammonds Technical Services, Inc.
    Inventor: Carl L. Hammonds
  • Publication number: 20130213485
    Abstract: Strategies for tool designs and their uses wherein the tools can operate in either closed or open modes of operation. The tools easily transition between open and closed modes on demand. According to one general strategy, environmentally controlled pathway(s) couple the ambient to one or more process chambers. Air amplification capabilities upstream from the process chamber(s) allow substantial flows of air to be introduced into the process chamber(s) on demand. Alternatively, the fluid pathways are easily closed, such as by simple valve actuation, to block egress to the ambient through these pathways. Alternative flows of nonambient fluids can then be introduced into the process chamber(s) via pathways that are at least partially in common with the pathways used for ambient air introduction. In other strategies, gap(s) between moveable components are sealed at least with flowing gas curtains rather than by relying only upon direct physical contact for sealing.
    Type: Application
    Filed: April 1, 2013
    Publication date: August 22, 2013
    Applicant: TEL FSI, Inc.
    Inventor: TEL FSI, Inc.
  • Patent number: 8485219
    Abstract: It is possible to respecify the product (mass flow controller) corresponding to multiple types of actual process gases and multiple flow rate ranges, even after the mass flow controller has been shipped. With the mass flow rate control device in an initial state, calibration gas characteristic data is derived by measuring actual flow rate versus a flow rate setting signal using a calibration gas, and this calibration gas characteristic data is then saved to control unit. Meanwhile, actual gas characteristic data is derived by measuring actual flow rate versus a flow rate setting signal for each of a plurality of types of actual gas, and this actual gas characteristic data is then saved to a storage medium. Subsequently, prior to operating the mass flow rate control device, the actual gas characteristic data for an actual process gas is read from the storage medium via a computer, and the calibration gas characteristic data that was saved to the control unit is read out.
    Type: Grant
    Filed: August 2, 2007
    Date of Patent: July 16, 2013
    Assignee: Hitachi Metals, Ltd.
    Inventors: Takao Goto, Makoto Tanaka
  • Patent number: 8475550
    Abstract: A method for injecting a chemical, such as an odorant, from a chemical supply into a fluid-containing system such as a natural gas or an LPG pipeline. A tank of odorant is maintained at a pressure above ambient, but below pipeline pressure. An injection conduit communicates the odorant tank with the pipeline. A hydraulic pressure booster is located in the injection conduit for pressurizing the chemical to a pressure above that of the pipeline. Flow-control apparatus located within the injection conduit for metering chemical to be injected into the pipeline is either (a) drip-style metering valve adjustable between a drop-wise setting and a steady-flow setting or (b) a pair of valves one of which is a flow valve allowing larger volumes to be injected and the other which is a drop-wise flow valve for metering smaller volumes of the chemical.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: July 2, 2013
    Assignee: Sentry Equipment Corp.
    Inventor: Mark Zeck
  • Patent number: 8464740
    Abstract: A flow divider assembly includes a dividing valve and a balancing valve. The dividing valve includes a dividing cavity configured to receive a flow of fuel and a piston device arranged within the dividing cavity and selectively positioned to divide the flow of fuel in the dividing cavity into the first dividing valve port and the second dividing valve port. The balancing valve is fluidly coupled to the dividing valve and configured to receive the first portion and the second portion of the flow. The balancing valve includes a balancing cavity and a balancing device arranged within the balancing cavity and selectively positioned to direct the first portion of the flow into the first balancing cavity port at a third pressure and the second portion of the flow into the second balancing cavity port at a fourth pressure such that the first pressure is approximately equal to the second pressure.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: June 18, 2013
    Assignee: Honeywell International Inc.
    Inventor: Edward Zielinski
  • Patent number: 8463446
    Abstract: In a cooling section having a plurality of coolant outlets, the coolant outlets are supplied with the coolant via transmission lines and a mutual main line. Individually opening and closing valves are disposed in the transmission lines. An automation device of the cooling section opens and closes the valves at valve-specific opening and closing times during the normal operation of the cooling section in order to apply coolant to the rolling stock according to a quantitative target coolant course. During the determination of the opening times, the automation device considers a respective valve-specific characteristic. In calibration operation of the cooling section, the respective characteristic is initially determined at least for some of the valves by opening and closing the respective valve, and detecting the chronological course of the quantitative coolant flow effected thereby by a measuring arrangement disposed in the main line.
    Type: Grant
    Filed: September 2, 2008
    Date of Patent: June 11, 2013
    Assignee: Siemens Aktiengesellschaft
    Inventors: Udo Borgmann, Markus Forsch, Stefan Schmors, Klaus Weinzierl
  • Patent number: 8397739
    Abstract: Embodiments of the present invention generally relate to methods of controlling gas flow in etching chambers. The methods generally include splitting a single process gas supply source into multiple inputs of separate process chambers, such that each chamber processes substrates under uniform processing conditions. The method generally includes using a mass flow controller as a reference for calibrating a flow ratio controller. A span correction factor may be determined to account for the difference between the actual flow and the measured flow through the flow ratio controller. The span correction factors may be used to determine corrected set points for each channel of the flow controller using equations provided herein. Furthermore, the set points of the flow ratio controller may be made gas-independent using additional equations provided herein.
    Type: Grant
    Filed: January 6, 2011
    Date of Patent: March 19, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Mariusch Gregor, John W. Lane
  • Patent number: 8387755
    Abstract: A lubrication system is provided that includes a pump operatively connected to one or more supply lines for delivery of a lubricant, the system including a first pressure sensor associated with the supply line at a first position, and a second pressure sensor associated with the supply line at a second position downstream of the first position and pump, a controller configured to receive pressure signals and control operation of the pump based upon the pressure differential between the pressures at the first position and second position. The pressure differential may be employed to determine when a pressure at a third position downstream of the second position has been achieved. At least one of the pressure sensors may be positioned adjacent to the pump, the controller further being operable to deactivate the pump in the event that a maximum pump pressure has been met.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: March 5, 2013
    Assignee: Caterpillar Inc.
    Inventor: John P. Marek
  • Patent number: 8349038
    Abstract: A system is shown for injecting a chemical, such as an odorant, from a chemical supply into a fluid containing system such as a natural gas pipeline or an LPG pipeline. A tank of odorant is maintained at a pressure above ambient, but below the pressure of the pipeline. An injection conduit communicates the odorant tank with the pipeline. A hydraulic pressure booster is located in the injection conduit for pressurizing the chemical to a pressure above that of the pipeline, the hydraulic booster having a first side which communicates with the chemical in the injection conduit and another, isolated side which is exposed to hydraulic pressure but which is isolated from the chemical being injected. A flow control valve may be located within the injection conduit for metering chemical to be injected into the pipeline.
    Type: Grant
    Filed: March 19, 2009
    Date of Patent: January 8, 2013
    Assignee: Sentry Equipment Corp.
    Inventor: Mark Zeck
  • Patent number: 8267108
    Abstract: A liquid metering device that dispenses liquid into an adjacent reservoir at a precise ratio relative to the total volume of the adjacent reservoir as the reservoir is filled with liquid. The hydrostatic dispensing system includes an additive reservoir, a calibrated dispensing vessel, a hydrostatic pressure chamber, and a three-way valve that passively arms and dis-arms the system. The precise dispensing of liquid by a calibrated dispensing vessel into the adjacent reservoir is accomplished entirely through the management and arrangement of hydrostatic pressure creating a liquid piston generated by the addition of liquid to the adjacent reservoir and its subsequent application to the liquid in the calibrated vertical column that displaces the calibrated volume of liquid into the reservoir at the same rate that liquid is added to the reservoir.
    Type: Grant
    Filed: October 5, 2009
    Date of Patent: September 18, 2012
    Assignee: Hammonds Technical Services, Inc.
    Inventor: Carl L. Hammonds
  • Publication number: 20120080094
    Abstract: A method and device for feeding a presettable measurement quantity of a sample liquid from a liquid reservoir via a feed line through a switching valve into a temporary store in order subsequently, after actuation of the switching valve, to feed the sample liquid to an analytical measuring instrument where the sample liquid is conveyed into the temporary store until further conveying of the sample liquid is terminated and the switching valve is actuated by evaluation of a characteristic quantity, wherein a flow rate of the sample liquid is determined at a time at which a first proportion of the sample liquid has already flowed through the switching valve, and the switching valve is actuated as a function of the flow rate determined and a switching delay determined in advance.
    Type: Application
    Filed: September 29, 2011
    Publication date: April 5, 2012
    Applicant: MERK PATENT GMBH
    Inventor: Michael MARTIN
  • Patent number: 8053249
    Abstract: A method is provided for pumping fluid through a channel of a microfluidic device. The channel has an input port and an output port. The channel is filled with fluid and a pressure gradient is generated between the fluid at the input port and the fluid at the output port. As a result, fluid flows through the channel towards the output port.
    Type: Grant
    Filed: March 12, 2007
    Date of Patent: November 8, 2011
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: David J. Beebe, Jay W. Warrick, Michael W. Toepke, Ivar Meyvantsson, Glenn M. Walker
  • Publication number: 20110253225
    Abstract: The present invention relates to a method and apparatus for controlling a gas flow through a conjunction between one or more incoming streams and one or more outgoing streams through a conjunction. The method uses a biased mass flow imbalance value obtained by comparing the aggregate of incoming mass flow measurement value(s) with the aggregate of outgoing mass flow measurement value(s) and adding a bias component to provide the biased mass flow imbalance value. The flow of at least one of the incoming and outgoing streams (12, 14, 16, 18, 20) is adjusted to move the biased mass flow imbalance value towards zero. In addition, a conjunction pressure measurement (PC) is provided, which is used to adjust the bias component in response to a change in the conjunction pressure measurement (PC) relative to a pressure set point (PSP), to mitigate the change in the conjunction pressure measurement (PC) relative to the pressure set point (PSP).
    Type: Application
    Filed: August 12, 2009
    Publication date: October 20, 2011
    Inventors: Clive Beeby, Willem Hupkes, Der Toorn Hupkes-Van, Arina Petronella Jacoba
  • Patent number: 8019481
    Abstract: A flow ratio controller having: a main channel; branch channels branching from the end of the main channel; control valves respectively provided in the branch channels; a plurality of flow rate meters for measuring the flow rate of the main channel and the flow rate of each of the branch channels; a valve control section for controlling the control valve provided in one branch channel so that the pressure on the upstream side of the control valve is a given target pressure and, only when the upstream-side pressure is near or not less than the target pressure, starting control of the other control valve so that the flow rate ratios of the branch channels are predetermined ratios; and a target pressure setting section for setting the target pressure such that the smaller the flow volume is in the main channel, the lower is the target pressure.
    Type: Grant
    Filed: December 11, 2007
    Date of Patent: September 13, 2011
    Assignee: Horiba STEC, Co., Ltd.
    Inventors: Yuji Yamaguchi, Akihiro Matsumoto, Yutaka Yoneda
  • Patent number: 8002457
    Abstract: Disclosed are methods and systems for forming multi-component refrigerant compositions comprising: (a) introducing a first refrigerant component into a vessel at a first flow rate; (b) introducing at least a second refrigerant component into said vessel at a second flow rate, which may be the same as or different than the first flow rate, during at least a portion of said first refrigerant introducing step; and (c) controlling at least one of said first and second flow rates to obtain the desired relative proportions of said first and second refrigerants in the refrigerant composition.
    Type: Grant
    Filed: February 28, 2006
    Date of Patent: August 23, 2011
    Assignee: Honeywell International Inc.
    Inventors: Stephen Cottrell, Stephen Delo, Clifford Riegel, Jarrad Garrison
  • Publication number: 20100224256
    Abstract: A slurry feed system suitable for chemical mechanical planarization (CMP) processes in a semiconductor fabrication facility and related method. The slurry feed system includes a valve manifold box having a discharge piping header fluidly connected to at least one CMP station and a first slurry supply train. The first slurry supply train may include a slurry mixing tank, day tank, and at least two slurry feed pumps arranged in series pumping relationship. The first slurry supply train defines a first slurry piping loop. In one embodiment, a second slurry supply train defining a second slurry piping loop is provided. The valve manifold box is operable to supply slurry from either or both of the first and second slurry piping loops to the CMP station.
    Type: Application
    Filed: March 4, 2009
    Publication date: September 9, 2010
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Chiang TSENG, Yung-Long CHEN, Liang-Chieh HUANG, Yi-Wen HUANG
  • Patent number: 7735749
    Abstract: A fountain (50) comprises a supply of water under pressure, a primary fluidic diverter (10) having an input (12) for said supply, and first and second outputs (16a, b) diverging from said input. Two control ports (20a, b) are provided with control flow to direct input flow to one or other of the two outputs that lead to the two inputs of a vortex amplifier (40). This comprises a vortex chamber (54), a radial port (50), a vortex inducing port (60) and an axial output port (58). One (16a) of the diverter outputs is connected to the vortex inducing port, the other (16b) to the radial port, so that supply to said axial output port is modulated by formation of a vortex in the chamber when flow is to the vortex inducing port. The axial port leads to a nozzle whereby a vortex spray or axial jet is produced, depending on which diverter output (16a, b) is active. A wind detector (100) has a vertical jet (102) and a catcher (104) which fails to catch water from the jet in high wind conditions.
    Type: Grant
    Filed: November 26, 2003
    Date of Patent: June 15, 2010
    Inventor: John Tippetts
  • Publication number: 20100084022
    Abstract: A liquid metering device that dispenses liquid into an adjacent reservoir at a precise ratio relative to the total volume of the adjacent reservoir as the reservoir is filled with liquid. The hydrostatic dispensing system includes an additive reservoir, a calibrated dispensing vessel, a hydrostatic pressure chamber, and a three-way valve that passively arms and dis-arms the system. The precise dispensing of liquid by a calibrated dispensing vessel into the adjacent reservoir is accomplished entirely through the management and arrangement of hydrostatic pressure creating a liquid piston generated by the addition of liquid to the adjacent reservoir and its subsequent application to the liquid in the calibrated vertical column that displaces the calibrated volume of liquid into the reservoir at the same rate that liquid is added to the reservoir.
    Type: Application
    Filed: October 5, 2009
    Publication date: April 8, 2010
    Inventor: CARL L. HAMMONDS
  • Patent number: 7673645
    Abstract: The multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into multiple flow lines. In the MAO control algorithm, each flow line is provided with a flow sensor and a valve actively controlled by a SISO feedback controller combined with a linear saturator to achieve the targeted flow ratio set point. For optimal control performance, these SISO controller and linear saturators are substantial identical. It is proved that each valve control command is multiple antisymmetric to the summation of all other valve control commands. Therefore, the MAO control algorithm guarantees that there exists at least one valve at the allowable maximum open position at any moment, which achieves the optimal solution in terms of the maximum total valve conductance for a given set of flow ratio set points.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: March 9, 2010
    Assignee: MKS Instruments, Inc.
    Inventors: Junhua Ding, Kaveh H. Zarkar
  • Publication number: 20100038318
    Abstract: A method of cleaning drilling fluid including providing a flow of drilling fluid to a treatment loop, determining a flow rate of the drilling fluid, and injecting a polymer into the drilling fluid based on the determined flow rate of the drilling fluid. Additionally, the method includes injecting a coagulant into the drilling fluid based on the determined flow rate of the drilling fluid and adjusting the rate of polymer and coagulant injection based on a change in the flow rate of the drilling fluid. Also, a method of controlling a drilling fluid cleaning system, the method including inputting a polymer dosage rate and a coagulant dosage rate into a system controller and providing instructions to the system controller.
    Type: Application
    Filed: August 10, 2009
    Publication date: February 18, 2010
    Applicants: M-I L.L.C., M-I DRILLING FLUIDS CANADA, INC.
    Inventors: Alan Gilmour, Nicolas Christopher Wade Thiessen
  • Patent number: 7621290
    Abstract: The antisymmetric optimal control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into at least two flow lines. Each flow line includes a flow meter and a valve. Both valves of the flow ratio controller are controlled through a ratio feedback loop by the antisymmetric optimal controller which includes a single input single output SISO controller, an inverter and two linear saturators. The output of the SISO controller is split and modified before being applied to the two valves. The two valve control commands are virtually antisymmetric to the maximum allowable valve conductance position.
    Type: Grant
    Filed: April 21, 2005
    Date of Patent: November 24, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Junhua Ding, John A. Smith, Kaveh H. Zarkar
  • Publication number: 20090218110
    Abstract: A hybrid foam system for providing a variety of proportioned foam solutions is provided. The system includes a low flow foam proportioning system operatively associated with a high flow foam proportioning system and a system controller for controlling the operating conditions of the overall hybrid foam system.
    Type: Application
    Filed: February 28, 2008
    Publication date: September 3, 2009
    Applicant: Hale Products, Inc.
    Inventors: Michael A. Laskaris, Dominic John Colletti
  • Patent number: 7543595
    Abstract: An arrangement for calibrating a Venturi valve includes a source of flow measurements and a processing circuit. The Venturi valve has a variable shaft position and is operable to provide an air flow corresponding to the variable shaft position. The processing circuit is operable to provide a plurality of voltages to an actuator, the actuator operable to change the variable shaft position dependent on said plurality of voltages. The processing circuit is also operable to receive from the source of flow measurements a flow measure for each variable shaft position corresponding to each of the plurality of voltages. The processing circuit is further operable to store information representative of the relationship between each of the plurality of voltages and the flow measures.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: June 9, 2009
    Assignee: Siemens Building Technologies, Inc.
    Inventors: Steven D. Jacob, William Glaser, Paul E. Pelczynski
  • Publication number: 20090065065
    Abstract: Chemical concentrate flow is cycled into a diluent via an eductor to provide a wide range of possible dilution ratios from a dispenser.
    Type: Application
    Filed: September 7, 2007
    Publication date: March 12, 2009
    Inventor: William F. Sand
  • Publication number: 20080264491
    Abstract: A fluid multiplexer includes a manifold having a plurality of fluid conduits formed therein, a fluid input and a plurality of fluid connection points located on the manifold and fluidically coupled together via the fluid conduits, and a flow control module coupled to the fluid connection points, the flow control module configured to provide a plurality of blocking flows to the manifold to control the flow of a primary fluid through the fluid conduits.
    Type: Application
    Filed: April 27, 2007
    Publication date: October 30, 2008
    Inventors: Matthew S. Klee, Wesley Miles Norman
  • Publication number: 20080245416
    Abstract: The invention relates to a device and a method for distributing two liquids that cannot be mixed with each other for mass transfer and heat exchange columns, comprising at least one distributor channel or a distributor channel arrangement, the distributor channel being fed one or more liquids in different phases via at least one inflow from a collecting device arranged above said distributor channel, and said distributor channel having overflow and/or outflow openings for the distribution of the liquids. The device according to the invention is distinguished by the fact that the distributor channel has at least one internal means for the phase separation of the liquid and that separate outflow and/or overflow openings are provided for each of the phases to be separated, the cross section and/or elevation of which openings are arranged in dependence on the physical properties of the liquids in such a way that a homogeneous distribution of the liquids on the basis of predetermined phase components is achieved.
    Type: Application
    Filed: September 19, 2006
    Publication date: October 9, 2008
    Applicant: EVONIK DEGUSSA GmbH
    Inventors: Ralf Meier, Joerg Leistner
  • Patent number: 7424894
    Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment, the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: September 16, 2008
    Assignee: Celerity, Inc.
    Inventors: John M. Lull, William S. Valentine
  • Publication number: 20080163413
    Abstract: A metered water control system inlet tube (24) receiving water conducting water into the interior of the tank to a diverter. A diverter (48) channels the flow to cause mechanical motion responsive to the channeled flow. A control valve (66 and 60), responsive to a mechanical switch, opens and closes access of the water from the inlet tube to the diverter. A mechanical switch (124, 112, and 114), responsive to flow of water from the diverter, closes the control valve automatically when a pre-determinable volume of water flows through the diverter. A discharge tube (20 and 24) receives water from the diverter to discharge the water into the tank. An actuator (158 and 162) linked to a flush arm of the toilet and linked to the mechanical switch causes the switch to open the control valve to allow the ore-determined volume of water to flow into the discharge tube.
    Type: Application
    Filed: January 5, 2007
    Publication date: July 10, 2008
    Inventor: WILLIAM SHAW
  • Patent number: 7389786
    Abstract: A system is shown for injecting a chemical, such as an odorant, from a chemical supply into a fluid containing system such as a natural gas pipeline or an LPG pipeline. A tank of odorant is maintained under a positive pressure which exceeds that of the pipeline. An injection conduit communicates the odorant tank with the pipeline. A precise control flow valve, located within the injection conduit, meters odorant to be injected into the pipeline. An ultrasonic measuring unit allows the odorant to be metered on a drop wise basis with drops of chemical being counted as they pass through the flow valve into the injection conduit and into the natural gas pipeline. The ultrasonic measuring unit also allows steady state flow conditions to be measured accurately. A sonic measuring unit can also be utilized in low flow situations.
    Type: Grant
    Filed: November 17, 2004
    Date of Patent: June 24, 2008
    Inventor: Mark Zeck
  • Publication number: 20080142548
    Abstract: A combination unit including pre-set flow regulators and pressurization pumps combines drinks in pre-determined ratios. A common pressure source sends a base liquid through a first regulator and a mix liquid through a second regulator the outputs of which are thereby combined to be served using a dispenser.
    Type: Application
    Filed: December 13, 2006
    Publication date: June 19, 2008
    Applicant: FROZEN BEVERAGE SERVICES OF CALIFORNIA, INC.
    Inventors: Jason Moen, Bruce Kirshbaum
  • Publication number: 20080128025
    Abstract: A controller (10) provides water to outlet (22) from a supplementing water supply (e.g. from a rainwater tank) attached to passage (18) in preference to a main water supply (e.g. from a mains water supply) attached to passage (14). If there is insufficient supplementing water to meet demand, then mains water flows through passage (14), around partition (36) and to outlet (22). If there is sufficient supplementing water for the demand, a supplementing water pump is activated, and the pressure of supplementing water in passage (18) is raised above a threshold level at which it is able to move piston (28) against mains pressure to seal against valve seat (34) and block the mains supply, so that supplementing water can flow to outlet (22) via one-way valve (42).
    Type: Application
    Filed: July 22, 2005
    Publication date: June 5, 2008
    Applicant: DAVEY PRODUCTS PTY LTD
    Inventors: Rodney James Brown, Da-Wei Zhang
  • Publication number: 20080115834
    Abstract: A system and method for dividing the flow of one or more process fluids in a predetermined flow ratio is provided herein. In one embodiment, a system for dividing flow of one or more process fluids in a predetermined flow ratio includes a process chamber having a plurality of inlets for delivering one or more process fluids into the process chamber; a plurality of modulating valves coupled to the plurality of inlets, wherein each inlet of the plurality of inlets is coupled to at least one modulating valve; and a controller coupled to the plurality of modulating valves, the controller configured to control the operation of the plurality of modulating valves to divide the flow of one or more process fluids in the predetermined flow ratio.
    Type: Application
    Filed: November 20, 2006
    Publication date: May 22, 2008
    Applicant: Applied Materials, Inc.
    Inventors: Bruno Geoffrion, Mark Adam Crocket
  • Patent number: 7360551
    Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment, the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.
    Type: Grant
    Filed: January 9, 2007
    Date of Patent: April 22, 2008
    Assignee: Celerity, Inc.
    Inventors: John M. Lull, William S. Valentine
  • Patent number: 7189581
    Abstract: A method is provided of obtaining a sample concentration of a solution in a microfluidic device. The microfluidic device includes a channel having a reservoir and a collection port. The channel is filled with a solution having particles therein. A reservoir drop is deposited over the reservoir of the channel such that the solution of the channel flows towards the collection port in response to evaporation of the solution at the collection port. The particles at the collection port are collected to obtain the sample concentration.
    Type: Grant
    Filed: April 29, 2003
    Date of Patent: March 13, 2007
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: David J. Beebe, Glenn M. Walker
  • Patent number: 7189580
    Abstract: A method is provided for pumping fluid through a channel of a microfluidic device. The channel has an input port of a predetermined radius and an output port of a predetermined radius. The channel is filled with fluid and a pressure gradient is generated between the fluid between the input port and the fluid at the output port. As a result, fluid flows through the channel towards the output port.
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: March 13, 2007
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: David J. Beebe, Glenn M. Walker
  • Patent number: 7155319
    Abstract: A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable. The method further includes transmitting the AO signal to a control device and adjusting the process variable proportional to the value of the AO signal.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: December 26, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Roy C. Nangoy, Allen L. D'Ambra, Yevgeniy Rabinovich, David Z. Chen, Tao Li