Abstract: A substrate carrier is described that uses a proportional thermal fluid delivery system. In one example the apparatus includes a heat exchanger to provide a thermal fluid to a fluid channel of a substrate carrier and to receive the thermal fluid from the fluid channel, the thermal fluid in the fluid channel to control the temperature of the carrier during substrate processing. A proportional valve controls the rate of flow of thermal fluid from the heat exchanger to the fluid channel. A temperature controller receives a measured temperature from a thermal sensor of the carrier and controls the proportional valve in response to the measured temperature to adjust the rate of flow.

Abstract: A movable structure includes a processing chamber configured to perform processing under a vacuum environment; a fixed portion disposed in the processing chamber; a movable portion that is movable with respect to the fixed portion; a transmission/reception module provided at the fixed portion and having a hermetically sealed structure; and a sensor module provided at the movable portion and having a hermetically sealed structure. The transmission/reception module and the sensor module perform transmission and reception of signals in a non-contact manner.

Abstract: A refrigerator and method utilize a pair of tandem evaporators to provide cooling for both a compartment and an ice making system of a refrigerator. An upstream evaporator in the pair of tandem evaporators provides cooling for a compartment such as a freezer, fresh food, flexible cooling, or quick cooling compartment, while a downstream evaporator is in fluid communication with the upstream evaporator to receive a portion of the air cooled by the upstream evaporator and further cool the received portion for use in cooling one or more components of the ice making system.

Abstract: An assembly for liquid cooling is provided herein. The assembly 8 includes a thermal member, a support member, and a gasket. The thermal member includes an array of cooling pins formed of a thermally conductive material to extend from the thermal member. The support member includes an inlet channel and an outlet channel. The inlet channel to provide a fluid to the array of cooling pins. The outlet channel to receive the fluid from the array of cooling pins. The gasket between the thermal member and the support member to form a cooling channel with a fluid tight seal therebetween.

Abstract: An expansion relief header and its method of operation are disclosed for use in an HVAC heat transfer coil. The expansion relief header includes a main body adapted to be secured to bends in fluid coils of the HVAC fluid tube system. The main body includes holes in alignment with holes formed in the bends to enable fluid to pass from the bends into the expansion relief header. The expansion relief headers include one or more relief devices, such as valves, that automatically open, preferably in response to pressure exceeding a predetermined threshold value or temperature falling below a predetermined value, to release fluid from the expansion relief header and then reseat themselves.

Abstract: A water tank includes a box, an air valve body, a valve core, a cap, and an elastic element. The box defines an accommodating space and a vent communicating with the accommodating space. The air valve body is extended out from the box and adjacent to the vent. The valve core is mounted to the valve body to airproof the vent, and comprises a first end inserted into the accommodating space through the vent and a second end opposite to the first end. The elastic element is arranged between the cap and the valve core. The valve core will open the vent to deform the elastic member and allow heated air in the accommodating space to leak out of the accommodating space through the vent, in response to an air pressure in the box is greater a reference air pressure.

Abstract: Reformer and method for producing hydrogen and steam where steam is used for steam-assisted extraction of heavy hydrocarbons. Steam is injected into a hydrocarbon-containing reservoir. Hydrocarbons are extracted from the reservoir along with produced water. Hydrogen is produced in a catalytic steam hydrocarbon reformer. Combustion product gas from the reformer is used to generate wet steam in a once-through steam generator from produced water recycled from the reservoir. The wet steam is used for the steam-assisted extraction of heavy hydrocarbons. The reformer has a heat exchanger section including a first heat exchanger and a second heat exchanger downstream of the first heat exchanger. The second heat exchanger is suitable for processing the produced water by once-through steam generation and is suitable for mechanical cleaning. The reformer also has a first exhaust downstream of the second heat exchanger and a closeable second exhaust downstream of the first heat exchanger.

Abstract: An apparatus and method for purging gases released from a heat exchanger are provided. The apparatus includes an enclosure that defines an interior space and is configured to receive at least a portion of the heat exchanger. A gas source is configured to deliver an inert gas to the interior space of the enclosure at a pressure higher than an ambient pressure outside the gas source and the enclosure. The enclosure is adapted to maintain a positive pressure difference between the interior space and the ambient pressure. A detector is configured to detect a leak of a gas from the heat exchanger into the interior space of the enclosure. A pressure relief device configured to release gas from the interior space of the enclosure if the pressure in the interior space exceeds a predetermined level.

Abstract: A waste heat recovery device includes a heat pipe in which a working fluid for transporting heat is enclosed, and a mode-switching valve for switching a heat recovery mode and a heat insulation mode. The heat pipe has a heating part for heating and evaporating the working fluid and a cooling part for cooling and condensing the evaporated working fluid. The heating part is made of a steel through which hydrogen gas permeates about at 500° C. and higher. In the heat recovery mode, the waste heat recovery device recovers heat of exhaust gas by using the heat pipe. Furthermore, in the heat insulation mode, a heat transport from the heating part to the cooling part is stopped.

Abstract: Disclosed is a freezing protection system of a heat exchanger capable of preventing freezing of a heat exchanger. The system includes a discharge valve for opening and closing a discharge pipe of a fluid inside a heat exchanger; a freezing factor detection unit for detecting a freezing factor such that the discharge pipe is open, under an automatic control of the discharge valve, upon detection of the freezing factor when the heat exchanger is in a standstill state; and a discharge completion detection unit for detecting whether the fluid inside the heat exchanger has been completely discharge or not, such that the open discharge valve is closed under an automatic control of the discharge valve after the fluid inside the heat exchanger has been completely discharged.

Abstract: Embodiments of an apparatus, system and method are described for monitoring an airflow and performing thermal management operations for a mobile computing device. An apparatus may comprise, for example, a heat generating component, an air mover, and a thermal management module to monitor one or more parameters of the air mover and to perform one or more thermal management operations based on one or more changes in the one or more parameters indicating one or more changes in an airflow for the apparatus. Other embodiments are described and claimed.

Abstract: An exemplary heat ventilation apparatus includes a server system having servers, a temperature sensor, a blower unit and a controlling unit electrically connected to the temperature sensor and the blower unit. The temperature sensor is mounted on the server system for sensing a temperature of an interior of the server system. The blower unit is adapted for drawing hot air from the server system to warm buildings. The controlling unit outputs different signals to turn on or turn off the blower unit according to different temperatures of the interior of the server system.

Abstract: Systems and methods for low ambient air temperature cooling in air-source based heat pump systems wherein an outdoor heat pump unit includes a discharge hood positionable over its fan. The hood including a damper that is openable and closeable as a function of outside temperature. The outdoor unit may also include wind deflectors positioned over the coil openings of the disclosure. During cooling operations below a low outside air threshold temperature, e.g., below 23° F., the damper assembly partially closes to reduce airflow across the condenser coil of the outdoor unit to a level below that which is possible at minimum fan speed. As the outdoor temperature continues to drop, the damper assembly continues to close to further reduce airflow.

Abstract: A method includes circulating a heat transferring fluid in a substantially closed system including an interstice between a wafer and a chuck at a first pressure. The method further includes pumping the fluid out of the interstice and increasing the pressure of the fluid to a second pressure. The method further includes reducing the pressure of the fluid to the first pressure and returning the fluid to the interstice. In the system, the fluid in the interstice transfers heat from the wafer to the chuck, or vice versa, by conduction. The presence of a conducting fluid in the interstice thereby decreases the resistivity of the interface, and enables more efficient heat transfer from the wafer to the chuck.

Abstract: A relief valve is provided and may include a housing having a first inlet port and a second inlet port. An initiator may be disposed within the housing and an engagement member may be slideably disposed within the housing and may be moveable between a retracted position and an extended position under force of the initiator. The engagement member may include a first bore aligned with the first inlet port in the extended position and a second bore aligned with the second inlet port in the extended position.

Abstract: A precision surface plate has a hollow casing with a reference plane used as a surface on which either or both of a workpiece and mechanical equipment are placed, a honeycomb structure, which is a collection of substantially identically-shaped enclosed cells disposed inside the casing, and a heat transfer device provided in the honeycomb structure to allow cells of the honeycomb structure to communicate with each other and transfer heat. The precision surface plate further includes casing ventilation openings provided in a wall of the casing to allow cells of the honeycomb structure inside the casing to communicate with the outside of the casing, and a shutter for opening and closing the casing ventilation openings. The heat is transferred effectively between the cells of the honeycomb structure through the heat transfer device.

Abstract: An apparatus for providing coolant fluid to a device, the apparatus includes a heat exchanger having a hot side and a cold side. The cold side is in fluid communication with a chilled fluid supply and adapted to receive a first fluid from the chilled fluid supply in a first inlet and return the first fluid from the cold side to the chilled fluid supply. The cold side and the chilled fluid supply form a first fluid circuit. The apparatus further includes a second fluid circuit in fluid communication with the hot side, means for introducing a second fluid within the second fluid circuit and integral thereto, a pump integral to the second fluid circuit and adapted to transmit a second fluid within the second fluid circuit and means for controlling a rate of flow of the second fluid within the second fluid circuit. The device is within the second fluid circuit and the means for controlling the rate of flow operates in the absence of internal recirculation.

Abstract: A vertical heat exchanger is described, which allows efficient elimination of the gas generated therein and efficient removal of the sludge accumulated therein. The vertical heat exchanger has at least part of one end of a vent pipe formed of an upper tube sheet part (an upper cover part in the case of a spiral heat exchanger) and the other end thereof connected outside the heat exchanger to an immediately adjacent fluid passing port passing the same fluid as the vent and/or at least part of one end of a drain pipe formed of a lower tube sheet part (a lower cover part in the case of a spiral heat exchanger) and the other end thereof connected outside the heat exchanger to an immediately adjacent fluid passing port passing the same fluid as the drain.

Abstract: The invention relates to a fluid conduit piece (8) for passing therethrough a spontaneously exothermic working fluid such as a synthetic polymer, a cellulose derivative and a solution on the basis of cellulose, water and amino oxide, said fluid conduit piece comprising a working fluid zone (9) through which said working fluid flows. The aim of the invention is to prevent the fluid conduit piece and other fluidic devices from being damaged in the event of a spontaneous exothermic reaction in the working fluid. To this end, the fluid conduit piece is provided with an anti-rupture device (1) for the purpose of pressure relief. Said anti-rupture device has a pressure equalizing volume (7) that, once a predetermined rupture pressure is exceeded, can be converted from a normal operation state in which the pressure equalizing volume is separated from the working fluid zone into a rupture state in which the pressure equalizing volume is linked with the working fluid zone.

Abstract: A system and method for controlling temperature in a workpiece chuck are described. A fluid circulation system circulates a temperature control fluid, such as an engineered HFE fluid, through te workpiece chuck. A fluid recovery system coupled to the fluid circulation system recovers a portion of the temperature control fluid from the fluid circulation system by circulating a gas through the fluid circulation system including fluid tubes and fluid passages in the chuck. The gas, which can be air, carries a portion of residual or excess fluid through the fluid circulation system as it is circulated. The residual fluid is carried back to a reservoir such that it can continue to be used to control temperature of the chuck. Where gas and temperature control fluid vapors are displaced from the reservoir, they are routed through a suction line heat exchanger which condenses the vapor. The gas and condensed fluid are separated in a fluid separator.

Abstract: A temperature adjustment apparatus that can reduce the amount of evaporation of a medium without using a closed type container. A temperature adjustment apparatus 24 is composed of a container 26 that contains PFC 42 for heat exchange, a circulation path 28 of the PFC 42 that passes through an electrode 20 of a plasma processing apparatus 10, and a pump 30. A liquid layer 40 that separates from the PFC 42 is formed in an upper layer of the PFC 42 that is contained in the container 26. As a result, the PFC 42 does not directly contact the atmosphere and therefore the amount of evaporation of the PFC 42 into the atmosphere is substantially reduced.

Abstract: An apparatus and method is provided to evacuate liquids from a water jacket of an enclosed clamber. An electronic valve, such as a solenoid can be actuated remotely to open and allow liquids to evacuate. A controller can also be used to actuate the solenoid or at a period of time or at an event.

Abstract: The present invention comprises a method and device for deterring the freezing within a condenser by preventing critical pressure differentials from building up between the exhaust steam header and the air ejector systemy. The means for regulating pressure in the air ejector system prevents the pressure difference between the turbine exhaust and the air ejector system from being great enough to carry condensate through a condensing tube into an air ejector system.

Abstract: A low-cost vehicle air-conditioning apparatus for idle stopping vehicles is capable of performing both cooling and heating operations throughout the year. The air-conditioning apparatus includes an engine-driven compressor and engine-driven pump for a heating unit. The air-conditioning apparatus includes a motor-driven compressor and pump. A control unit drives the motor such that the motor-driven compressor is operated when there is a need for cooling and the motor-driven pump is operated when there is a need for heating when the engine is stopped. Battery power is conserved through various methods.

Abstract: A check valve 27 for preventing backflow of a coolant 5 in outside pipes 14a and 14b into a tank 10 when operation is stopped, a cubical expansion relief valve 28 for suppressing increase of pressure of the coolant in the outside pipes 14a and 14b, and a purge check valve 29 for blowing compressed gas into the outside pipes 14a and 14b to recover the coolant are connected to a primary-side flow path for sending the coolant 5 to a heat load 1, a flow rate control valve 31 for controlling a flow rate or pressure of the coolant is connected to a secondary-side flow path for receiving the coolant 5 from the heat load 1, a bypass flow path 35 is provided between the primary-side flow path and the secondary-side flow path, and a bypass flow rate control valve 36 which opens when the pressure of the coolant in the outside pipes 14a and 14b exceeds prescribed pressure is connected in the bypass flow path 35.

Abstract: A check valve 27 for preventing backflow of a coolant 5 in outside pipes 14a and 14b into a tank 10 when operation is stopped, a cubical expansion relief valve 28 for suppressing increase of pressure of the coolant in the outside pipes 14a and 14b, and a purge check valve 29 for blowing compressed gas into the outside pipes 14a and 14b to recover the coolant are connected to a primary-side flow path for sending the coolant 5 to a heat load 1, a flow rate control valve 31 for controlling a flow rate or pressure of the coolant is connected to a secondary-side flow path for receiving the coolant 5 from the heat load 1, a bypass flow path 35 is provided between the primary-side flow path and the secondary-side flow path, and a bypass flow rate control valve 36 which opens when the pressure of the coolant in the outside pipes 14a and 14b exceeds prescribed pressure is connected in the bypass flow path 35.

Abstract: A system and method for controlling temperature in a workpiece chuck are described. A fluid circulation system circulates a temperature control fluid, such as an engineered HFE fluid, through te workpiece chuck. A fluid recovery system coupled to the fluid circulation system recovers a portion of the temperature control fluid from the fluid circulation system by circulating a gas through the fluid circulation system including fluid tubes and fluid passages in the chuck. The gas, which can be air, carries a portion of residual or excess fluid through the fluid circulation system as it is circulated. The residual fluid is carried back to a reservoir such that it can continue to be used to control temperature of the chuck. Where gas and temperature control fluid vapors are displaced from the reservoir, they are routed through a suction line heat exchanger which condenses the vapor. The gas and condensed fluid are separated in a fluid separator.

Abstract: A heat exchanger which is symmetrical with respect to rotation, especially a thermal roller which is driveable for rotation and is heated by a fluid or gas, preferably a heat transfer oil, water or steam, and is preferably used in the paper industry includes at least one shut-off device for cutting off the forward flow and/or return flow of the thermal roller as soon as the forward flow pressure and/or the return flow pressure of the heat transfer medium drops off significantly or drops to zero.

Abstract: A pressure relief device mounts to heat exchange coils having fluid flowing therethrough. A base has an orifice formed therethrough extending through an orifice in the coil to the interior of the coil. A cover attaches to the base with bolts or other attachment means. A diaphragm strip inserts between the cover and the base to close off the orifice in the base. An o-ring or other gasket may also be utilized to seal the structure. When a rupture through the diaphragm occurs due to pressure buildup, the diaphragm strip may be advanced to reclose the orifice.

Abstract: A method and apparatus for separating entrained gases from a pumped fluid. A degas pipe having an increased inner dimension relative to surrounding process piping is provided to generate a stratified two-phase gas/liquid flow. A controlled release mechanism permits selective removal of gas from the degas pipe.