Abstract: A method of fabricating a MEMS switch having a free moving inductive element within in micro-cavity guided by at least one inductive coil. The switch consists of an upper inductive coil at one end of a micro-cavity; optionally, a lower inductive coil; and a free-moving inductive element preferably made of magnetic material. The coils are provided with an inner permalloy core. Switching is achieved by passing a current through the upper coil, inducing a magnetic field unto the inductive element. The magnetic field attracts the free-moving inductive element upwards, shorting two open conductive wires, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the conductive wires open. When the chip is not mounted with the correct orientation, the lower coil pulls the free-moving inductive element back at its original position.

Abstract: The present invention relates to an electrical relay in which a solid slug is moved within a channel and used to make or break an electrical connection. The solid slug is moved by electromagnets. In the preferred embodiment, the slug is wetted by a conducting liquid, such as liquid metal, that also adheres to wettable contact pads within the channel to provide a latching mechanism. The relay is amenable to manufacture by micro-machiningtechniques.

Abstract: A method and structure for an electrical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of switch contacts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber. The plurality of switch contacts are coupled to a plurality of liquid metal globules. According to the method, a piezoelectric element is actuated, causing a membrane element to be deflected. The deflection of the membrane element increases pressure of actuator liquid and the increase in pressure of the actuator liquid breaks a liquid metal connection between a first contact and a second contact of the electrical switch.

Abstract: A liquid electrical switch is disclosed that uses a plurality of droplets of conducting liquid to form an electrical path. In a first embodiment, at least a first voltage differential is used to create a separation distance between two droplets. The droplets are illustratively contained within a housing and surrounded by an immiscible, insulating liquid. In this embodiment, the at least a first voltage differential draws at least a portion of at least one of the droplets away from a second droplet, thus preventing electrical current from flowing from the at least one droplet to the second droplet. In another embodiment, the at least a first voltage differential is changed in a way such that at least one liquid droplet is made to come into contact with a second droplet, thus creating an electrical path between the two droplets.

Abstract: A miniaturized relay with an integrated electromagnetic actuator allows scaling a reed relay to a small size to reduce the power needed to actuate it while retaining a high quality liquid metal contact. A dragged liquid metal contact is used. Coplanar waveguides may be used for the switched signal instead of microstrip transmission lines to reduce transmission line discontinuities that occur due to impedance changes.

Abstract: A method and apparatus for maintaining a liquid metal switch in a state of readiness for switching. The liquid metal switch has a liquid metal volume contained in a cavity of a switch body. A signal path though the cavity is made or broken by energizing an actuator to move the liquid metal volume within the cavity in response to a switching signal. To maintain readiness, a signal generator supplies a vibratory signal to the actuator. The resulting vibrations in the liquid metal volume allow the liquid metal volume to be subsequently moved with reduced power.

Abstract: A method and structure for an optical switch. A channel is housed within a solid material. Contacts coupled to the channel are further coupled to the solid material, while a plurality of piezoelectric elements are coupled to chamber and further coupled to a slug. Optical waveguides are coupled to the channel. The contacts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. One or more piezoelectric elements are actuated, causing the slug to be moved within the channel. The motion of the slug is operable to block or unblock one or more of the plurality of optical waveguides.

Abstract: An electrical relay comprising having two wettable electrical contacts supporting a conducting liquid. A non-wettable switch finger is moved between first and second positions between the electrical contacts by action of an actuator. In the first position the switch finger permits the conducting liquid to bridge the gap between the contacts and complete an electrical circuit between the contacts. In the second position the switch finger separates the conducting liquid into two volumes, breaking the electrical circuit between the contacts. The switch finger may be located at the free end of a beam that is deflected or bent by the action of piezoelectric elements.

Abstract: An electrical relay having two wettable electrical contacts, each supporting a conducting liquid. A wettable switch finger is moved from a non-deflected position to first and second positions by action of an actuator. In the first position the switch finger touches the conducting liquid and causes it to wet between the contacts and the switch and thereby complete an electrical circuit between the contacts. When the switch finger is in the second position, the conducting liquid cannot wet between first and second contacts and the switch finger and the electrical circuit between the first and second contacts is broken. The switch finger may be located at the free end of a beam that is deflected or bent by the action of piezoelectric elements.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is attached to the free end of a switch bar and positioned between a pair of fixed electrical contact pads. The connections to the switching contacts and the fixed contact pads are shielded by ground traces. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. A piezoelectric actuator is energized to push or pull the switch bar and move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, causing conducting liquid droplets to separate and break an electrical circuit. The piezoelectric actuator is then de-energized and the switching contacts return to their starting positions.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is positioned between a pair of fixed electrical contact pads. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. An actuator is energized to move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The actuator is then de-energized and the switching contacts return to their starting positions. The volume of liquid metal is chosen so that liquid metal droplets remain coalesced or separated because of surface tension in the liquid.

Abstract: A piezoelectric relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in relay housing. A signal path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by piezoelectric pumps that control the flow of actuation fluid between a fluid reservoir and the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is attached to the free end of a piezoelectric actuator and positioned between a pair of fixed electrical contact pads. The electrical connections to the switching contacts and the fixed electrical contact pads are ground shielded. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. The piezoelectric actuator is energized to deform in a bending mode and move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, causing conducting liquid droplets to separate and break an electrical circuit.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable electrical contacts is attached to the free end of a piezoelectric actuator and positioned between pair of fixed electrical contacts. The contacts each support a droplet of a conducting liquid, such as a liquid metal. The piezoelectric actuator is energized to deform in a bending mode and move the pair of moveable contacts, closing the gap between one of the fixed contacts and one of the moveable contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact and the other moveable contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The piezoelectric actuator is then de-energized and the moveable electrical contacts return to their starting positions.

Abstract: An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. Each element of the relay array uses an actuator, such as a piezoelectric element, to cause a switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. Insertion of the switch actuator into the cavity causes the conducting liquid to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Abstract: A piezoelectric optical relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by a liquid, such as a liquid metal, that wets between the solid slug and at least one fixed contact pad in the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Abstract: A method and structure for an electrical switch. A gas-filled chamber is housed within a solid material. Contacts within the gas-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements within the gas-filled chamber are also coupled to the solid material. A slug within the gas-filled chamber is coupled to one or more of the plurality of contacts and further coupled to one or more of the plurality of piezoelectric elements. A liquid metal within the gas-filled chamber is coupled to the slug, and coupled to the plurality of contacts. One or more of the piezoelectric elements are actuated, with the actuation of the one or more piezoelectric elements causing the slug coupled to the one or more piezoelectric elements to move from a first number of contacts to a second number of contacts wherein the first number of contacts and the second number of contacts are wetted by the liquid metal.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of switching contacts is attached to the free end of a switch bar and positioned between a pair of fixed electrical contact pads. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. A piezoelectric actuator is energized to push or pull the switch bar and move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, causing conducting liquid droplets to separate and break an electrical circuit. The piezoelectric actuator is then de-energized and the switching contacts return to their starting positions.

Abstract: A piezoelectric relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An electrical circuit passing between fixed contact pads in the switching channel is completed or broken by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by an electrically conductive liquid, such as a liquid metal, that wets between the solid slug and the contact pad in the switching channel. The surface tension of the, liquid provides a latching mechanism for the relay.

Abstract: A method and structure for an optical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of seal belts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber, and a plurality of optical waveguides are coupled to the liquid-filled chamber. The plurality of seal belts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. According to the method, one or more piezoelectric elements are actuated, causing one or more corresponding membrane elements to be deflected.

Abstract: The switch device comprises a pair of cavities, an elongate passage, a non-conductive fluid having a high electrical resistance, a conductive fluid having a high electrical conductivity and an electrical path. The passage is in fluid communication with the cavities and has a substantially elliptical cross-section over at least part of its length. The non-conductive fluid is disposed in each of the cavities. The conductive fluid is located in the passage. The electrical path is changeable between a connected state and a disconnected state by the non-conductive fluid separating the conductive fluid in the passage into non-contiguous conductive fluid portions.

Abstract: An electrical relay using conducting liquid in the switching mechanism. Two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. A piezoelectric actuator is energized to reduce the gap between the electrical contacts, causing the two liquid metal droplets to coalesce and form an electrical circuit. The piezoelectric actuator is then de-energized and the electrical contacts return to their starting positions. The liquid metal droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing a piezoelectric actuator to increase the gap between the electrical contacts and break the surface tension bond between the liquid metal droplets. The droplets remain separated when the piezoelectric actuator is de-energized because there is insufficient liquid metal to bridge the gap between the contacts. The relay is amenable to manufacture by micro-machining techniques.

Abstract: The present invention uses a piezoelectric method to actuate a liquid metal relay. The method described here uses the piezoelectric element in an extension mode to cause the switch actuator to insert into a cavity in the static (i.e. nonmoving) switch contact structure. The cavity has sides and a pad on its end that are wettable by the liquid metal. The cavity is filled with liquid metal. Insertion of the switch actuator into the cavity causes the liquid metal to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of liquid metal is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Abstract: The multi-pole, conductive liquid-based switch device includes an elongate passage, a first cavity, a second cavity, at least four electrodes disposed along the length of the passage, channels that extend from the passage, non-conductive fluid located the cavities and conductive liquid located in the passage. The channels are one fewer in number than the electrodes and are interleaved with the electrodes along the length of the passage. The channels are numbered in order from one end of the passage. Odd-numbered ones of the channels extend to the first cavity while even-numbered ones of the channels extend to the second cavity.

Abstract: A high frequency electrical relay uses a conducting liquid in the switching mechanism. The relay uses an actuator, such as a piezoelectric element, to cause the switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Abstract: The present invention uses a piezoelectric method to actuate a liquid metal relay. The method described here uses the piezoelectric element in an extension mode to cause the switch actuator to insert into a cavity in the static (i.e. nonmoving) switch contact structure. The cavity has sides and a pad on its end that are wettable by the liquid metal. The cavity is filled with liquid metal. Insertion of the switch actuator into the cavity causes the liquid metal to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of liquid metal is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator.

Abstract: An apparatus for separating a liquid in a liquid metal micro-switch. In representative embodiments, the apparatus comprises a heater and a sub-channel inside a structure. The heater is located inside a cavity of the structure onto which the liquid metal micro-switch is fabricated. The sub-channel inside the structure connects the cavity to a main channel. The sub-channel has a cross-sectional area. The value of the cross-sectional area at the boundary between the sub-channel and the main channel is less than the value of the cross-sectional area at the boundary between the sub-channel and the cavity. The gas permeates the cavity and the sub-channel and is capable of extending into the main channel.

Abstract: An acceleration responsive switch includes a material that changes from a high viscosity to a low viscosity when subjected to acceleration forces. The material's change in viscosity causes the switch to change from one state to another.

Abstract: An electrical contact breaker switch has a cavity or space that forms first and second chambers and a plurality of channels. The switch also has at least two solid electrodes formed with electrode components exposed apart from each other within the cavity. A conductive fluid held within the cavity functions as a contact for putting the electrode components of two specific solid electrodes in a “closed” state when in contiguous form and in an “open” state when in non-contiguous form. A form modification unit, which includes the first and second chambers, modifies the form of the conductive fluid.

Abstract: A motor vehicle electrical system disconnect switch is disclosed which operates to disconnect the positive lead of the battery of a motor vehicle from its electrical system and to ground the positive lead of the vehicle alternator upon either the application of a decelerating impact force to the vehicle or a tilting of the vehicle by at least a minimum predetermined angle with the horizontal. The device includes a housing containing at least three hollow chambers, a first one of which normally carries an electroconductive liquid such as mercury. A pair of electrical terminals are mounted on opposing housing end walls which partially form the first chamber so that the terminals are normally electrically connected together through the liquid in the first chamber. When the terminals are so connected, the positive lead from the battery to the vehicle electrical circuit is complete.

Abstract: A linear mercury-wetted switch is housed within a hollow, elongated, sealed, cylindrical tube having a pair of mercury-wetted, spaced contacts which can be bridged by a conforming but spaced electromagnetically driven contact element in the form of a slider or armature which slides longitudinally inside the tube on the mercury on the surfaces of the contacts. The slider has a conductive surface for closing the electrical circuit through mercury films carried on and between the surfaces of the slider and the contacts. The slider does not go to the end of the cylinder to contact the end wall. The contacts and the armature are of conforming contour of appropriate dimensions in cross-section so that they slide one within the other. The usual armature slips over the exterior of the contacts. The envelope can also be an electrode connected to the armature by a layer of mercury and the armature can ride upon the support provided by the mercury riding on the interior of the sealed tube.

Abstract: An electrostatically controlled electrical relay switch is disclosed which includes two chambers joined together by a constricted region therebetween. A conducting liquid, such as mercury, is positioned in one of the chambers and the movement thereof between the chambers is controlled by an electrostatic field. Electrical conductors extend into at least one of the two chambers so that when the conductive liquid is moved into a chamber, the electrical conductors therein are electrically coupled to one another. In an alternative embodiment, the movement of the conductive liquid between the two chambers acts as a means for switching fluid or a light beam. A dielectric fluid could be substituted for conductive fluid in the optical or fluidic switch. Also more than two chambers are possible. In the case of multiple chambers they may be grouped in a string each closest pair being separated by a constricted region or the chambers may be grouped around a single constricted region.