Abstract: Embodiments of the invention relate to methods and apparatuses for forming films using CVD. One or more method and apparatus embodiments include preventing the formation of bonds and/or breaking bonds that permit polymers to form in an exhaust line of a CVD apparatus.

Abstract: This invention relates to the design of a process by intermittent dielectric heating combined with a recycling system. This process consists in subjecting reagents to electromagnetic waves selected in the frequencies ranging between 300 GHz and 3 MHz intermittently using a recycling system. This process enables the treatment of oils that are hardly absorbent as well as great investment savings. This process enables operation on different scales, whether in laboratories, on a semi-industrial or industrial scale, without forfeiting the advantages of continuous dielectric heating.

Abstract: The present invention provides a method and apparatus for sanitizing air within a ventilation system using ultraviolet light. The air is exposed to the ultraviolet light for a preselected duration of time and at a desired power level to achieve a desired level of sanitization.

Abstract: Method and apparatus for removing residues of hazardous materials from vapor in a tank (1), wherein such a vapor is heated, passed outside the tank and subsequently cooled and the remaining dry vapor is recirculated, characterized in that a) said vapor is heated to a temperature of at least 5° C. above the melting point and below the self ignition point of the hazardous material, b) the vapor mixture thus formed is passed by means of a pump (3) from the tank through a discharge unit to a recovery unit, c) is cooled to a temperature of at least 5° C. lower and above the melting point of the hazardous material in a recovery unit, d) the liquid components of the vapor are recovered and the dry gas mixture is recirculated to the tank after reheating to the desired temperature, e) said recirculation being repeated as required.

Abstract: Superior hydroxyls are provided which have effects on organic and inorganic compounds and/or pollutants over substantial periods of time and/or at substantial distances from where the superior hydroxyls are generated. Also provided is a hydroxyl generator, in which UV-lamps are positioned such that the coronas which they produce when emitting UV-radiation fill substantially all of the interior space of the hydroxyl generator. The coronas overlap each other by a maximum amount of between 5% and 25% of the radius of each corona.

Abstract: A method of extracting uranium from spent nuclear fuel (SNF) particles is disclosed. Spent nuclear fuel (SNF) (containing oxides of uranium, oxides of fission products (FP) and oxides of transuranic (TRU) elements (including plutonium)) are subjected to a hydrogen plasma and a fluorine plasma. The hydrogen plasma reduces the uranium and plutonium oxides from their oxide state. The fluorine plasma etches the SNF metals to form UF6 and PuF4. During subjection of the SNF particles to the fluorine plasma, the temperature is maintained in the range of 1200-2000 deg K to: a) allow any PuF6 (gas) that is formed to decompose back to PuF4 (solid), and b) to maintain stability of the UF6. Uranium (in the form of gaseous UF6) is easily extracted and separated from the plutonium (in the form of solid PuF4). The use of plasmas instead of high temperature reactors or flames mitigates the high temperature corrosive atmosphere and the production of PuF6 (as a final product).

Abstract: A suction device has a suction pipe for aspirating fumes containing metal particles, in particular welding fumes, which aims to allow safe control of the fumes with a minimum of equipment expense and operational expense. For this purpose, an oxidation apparatus is provided according to the present invention. The particles flowing past the oxidation apparatus during operation are heated by way of a power supply and are thus oxidized.

Abstract: A method for treating a substance using an apparatus having: (a) a volute or cyclone head, (b) a throat connected to the volute or cyclone head, (c) a parabolic reflector connected to the throat, (d) a first wave energy source comprising a first electrode within the volute or cyclone head that extends through the outlet into the first opening of the throat along the central axis of the throat, and a second electrode extending into the parabolic reflector proximate to the focus wherein the second electrode is spaced apart and axially aligned with first electrode, and (e) a second wave energy source disposed inside the throat, embedded within the throat or disposed around the throat. The substance is supplied to the inlet of the volute or cyclone head and is irradiated with one or more wave energies produced by the first and second wave energy sources.

Abstract: The present invention relates to a gas purifier containing a filtering media having a photocatalytic action, a system for illuminating said media with UV radiation, a time-delay means or a volatile organic compound analyzer, and a means for automatically adjusting the speed of the gas passing through the media or for adjusting the intensity of the UV illumination, said adjusting being carried out as a function of the time determined by the time-delay means or as a function of the content of a volatile organic compound analyzed by the analyzer.

Abstract: A method of removing pollutants from building materials using an externally applied adsorbent. The adsorbent has a high affinity to common pollutant chemicals. The pollutants are transferred from the contaminated microporous building materials onto the adsorbent until sufficient amounts of pollutant chemicals are reduced to make the building materials acceptable and safe to use. The adsorbent may be regenerated and reused or treated as a waste.

Abstract: The invention relates to a particulate filter comprising a cartridge and a filter media placed in the cartridge in the prefiltering position, said filter media being essentially mineral. Thanks to the absence of any organic compound, the filter media generates no volatile organic compound. The filter media may also be of the type having a photocatalytic action.

Abstract: A process for cracking hydrocarbons at atmospheric pressure includes the following steps: providing a catalyst, passing a gaseous hydrocarbon over the catalyst and exposing the catalyst to microwave energy. The hydrocarbons are broken down into lower Carbon number molecules.

Abstract: The present invention provides a combined labyrinthine fluid sterilizing apparatus, comprising a chamber having an inlet and an outlet as well as a blower/fan provided in the chamber. Ultraviolet lamps are mounted in the lumen of the chamber. The lumen of the chamber is divided by a plurality of bafflers having pores. The pores in the adjacent bafflers are arranged to stagger up and down or from side to side. A mesh plate is provided at the pore. The top and bottom plates of the chamber can be flipped open. The baffler is inserted in the slots in the inner side of the front and back plates. The top and bottom plates have the pore and a cover plate which are both covered by a shield. At least one of the bafflers has a pore, and is provided with a one-way openable valve. The blower is mounted at the pore of the baffler. The chamber and the bafflers are coated with a layer of titanium dioxide.

Abstract: This invention relates to enhancing a gas-phase reaction in a plasma comprising: creating plasma (104) by at least one plasma source (106), and wherein that the method further comprises: generating ultrasonic high intensity and high power acoustic waves (102) having a predetermined amount of acoustic energy by at least one ultrasonic high intensity and high power gas-jet acoustic wave generator (101), where said ultrasonic high intensity and high power acoustic waves are directed to propagate towards said plasma (104) so that at least a part of said predetermined amount of acoustic energy is absorbed into said plasma (104), and where a sound pressure level of said generated ultrasonic high intensity and high power acoustic waves (102) is at least substantially 140 dB and where an acoustic power of said generated ultrasonic high intensity and high power acoustic waves (102) is at least substantially 100 W.

Abstract: In accordance with the present invention, there are provided simplified systems and methods for catalytically deactivating, removing, or reducing the levels of reactive component(s) from the vapor phase of fuel storage tanks. The simple apparatus described herein can be utilized to replace complex systems on the market. Simply stated, in one embodiment of the invention, the vapor phase from the fuel tank is passed over a catalytic bed operated at appropriate temperatures to allow the reaction between free oxygen and the fuel vapor by oxidation of the fuel vapor, thus deactivating reactive component(s) in the gas phase.

Abstract: A method is provided for cleaning a hot air stream, wherein the air stream is conducted through a cooling device and then through a filter device, which includes at least one plasma production device for removing gaseous organic carbon compounds. The cooling device cools the hot air stream to temperatures below 60° C. The air stream to be cleaned is accelerated before entering the filter device and is deflected by means of suitable guiding surfaces. A cleaning device is provided for a hot air stream and includes a filter device with a plasma production device for removing gaseous organic carbon compounds and a cooling device connected upstream of the filter device. The cooling device includes a spraying device for a coolant. The filter device includes an open-pored hydrophilic foam material, the plasma production device and a suitable absorber material, through which the air stream flows consecutively.

Abstract: An onsite chemistry air filtration system to remove gaseous contaminants from air is disclosed. The onsite chemistry air filtration system of the present invention comprises: a conventional particulate filtration section, a photochemical filtration section, a static gas phase filtration section and a catalytic filtration section. The conventional particulate filtration section captures solids and condensables. In the photochemical filtration section, UV lamps generate bio-destruction and surface photochemical activity on a semiconductor catalyst material, provide a radiation source to irradiate airborne contaminant molecules and to energize their states to promote reactions and generate airborne ozone and radicals. In the static gas phase filtration section, gas phase filtration media is used to capture contaminants, concentrate them in a relatively confined space and allow airborne generated chemistries to concentrate and react in-situ, thereby creating a regeneration effect on the media.

Abstract: A catalytic system (10) for fluid purification, the system (10) comprising: at least one photon source (2) to substantially break down at least two types of target molecules in the fluid to create short lived intermediates; and a ceramic core (5) including at least one type of micropore to adsorb the short lived intermediates for the propagation reactions and termination reactions of the short lived intermediates.

Abstract: There is provided a method for reducing the content of at least one water soluble volatile organic compound in a gas. The method comprises contacting the gas with an aqueous acidic oxidizing composition comprising H2O2 and a metal catalyst, and submitting the at least one water soluble volatile organic compound and the aqueous acidic oxidizing composition to an UV radiation.

Abstract: An exhaust system includes a combustion chamber and a radiation source configured to heat particles in an exhaust stream as the stream passes through the chamber. Once the particles are brought to an ignition temperature and begin to burn, the reaction within the chamber can become self-sustaining. The radiation source can comprise a resistive heating element, an infrared emitter, or a microwave emitter. The radiation source may radiate into the chamber through a radiation transparent window. The chamber may have a cross-section perpendicular to a longitudinal axis that is parabolic or partially parabolic. The exhaust system can also comprise a heat exchanger to pre-heat the exhaust before entering the chamber. Embodiments of the system can be configured to additionally perform as a catalytic converter and/or a muffler. A fuel such as urea or ammonia may be used in the heat exchanger for converting oxides of nitrogen. The exhaust system may be disposed between an engine and a turbocharger.

Abstract: A gaseous component treatment sheet of the present invention has a gas-permeable base film and a particulate remover for removing a predetermined gaseous component, and the particulate remover is dispersed in the base film. A protective layer and/or an adhesive layer can be laminated further on the base film. Since the gaseous component treatment sheet is a sheet-like member including the base film for holding the particulate remover, the size and the shape can be adjusted easily.

Abstract: A hollow cylindrical tube runs the length of a photo-reactor plate. The tube is positioned below the photo-reactor plate or the photo-reactor plate sits atop the device. The cylindrical tube has a slotted opening on top. The photo-reactor plate fits into the slotted opening and is supported by the slotted opening. There is added reinforcement through the use of support braces on either side of the slotted opening along the cylindrical tube. These support braces are L-shaped and add strength and support to the upright plates sitting in the slotted opening. The support braces are aid in the attachment of the cylindrical tubing and the photo-reactor plates. The photo-reactor plates contain UV light once UV light has entered. Other parts of the present invention can be manufactured to contain UV light once UV light has entered, as well.

Abstract: There is described a cement composition, based on hydraulic binders, adapted to obtain coatings with a high photocatalytic activity and improved rheologic characteristics, including a hydraulic binder, a polycarboxylic or acrylic superfluidifying agent, a cellulosic ether with a viscosity in the range between 10000 and 120000 mPa·s, an adhesive agent, a calcareous, silicic or silicic-calcareous filler and a photocatalyst.

Abstract: In accordance with the present invention, there are provided simplified systems and methods for catalytically deactivating, removing, or reducing the levels of reactive component(s) from the vapor phase of fuel storage tanks. The simple apparatus described herein can be utilized to replace complex OBIGGS systems on the market. Simply stated, in one embodiment of the invention, the vapor phase from the fuel tank is passed over a catalytic bed operated at appropriate temperatures to allow the reaction between free oxygen and the fuel vapor by oxidation of the fuel vapor, thus deactivating reactive component(s) in the gas phase.

Abstract: Disclosed are a method and an apparatus for processing an exhaust gas, which enable to suppress decrease of pH and increase of ORP of a mixture of an aqueous solution of a reducing agent and an aqueous alkali solution circulated within a wet reactor comprising a reduction reaction region and an oxidation reaction region. The method and apparatus enable to prevent deterioration of the mixed aqueous solution, and can be continuously operated for a long time. Specifically, the ORP and pH of the mixed aqueous solution of the aqueous solution of a reducing agent and the aqueous alkali solution to be circulated within the wet reactor are measured, and a fresh aqueous solution of a reducing agent and a fresh aqueous alkali solution are supplied, if necessary, into a reservoir unit arranged in the lower part of the wet reactor so that the ORP and pH of the mixed aqueous solution are kept within predetermined ranges.

Abstract: In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.

Abstract: An aspect of the present disclosure is directed to a system for removing particulate matter from an exhaust stream. The system may include an ionization device configured to ionize particles of an exhaust stream. The system may further include an electromagnetic field generating device configured to deflect the ionized particles onto an inner-surface of an exhaust passageway, the inner-surface of the exhaust passageway being coated with a substance for lowering activation energy for a reaction of the ionized particles. The system may further include a regeneration means configured to remove particles from the exhaust passageway.

Abstract: A method of dissociating or decomposing the elemental components of a medium within a treatment zone via application of radio frequency energy. The selected medium may be communicated to a treatment zone, such as a chamber, wherein the chamber walls and/or a plurality of antenna disposed within the chamber or treatment zone emit radio frequency energy capable of separating the elemental components of the selected medium. The plurality of antenna may further comprise a chemical coating disposed thereon to facilitate the medium separation process. Denser elemental components may be removed from a bottom portion of the chamber or treatment zone, while lighter elemental components may be removed from an upper portion of the chamber or treatment zone. A vacuum pump or any other means known within the art may be used to remove the elemental components from the chamber or treatment zone.

Abstract: Granulated Activated Carbon (GAC) is used to remove hydrogen sulfide (H2S) from the biogas produced in an anaerobic digester. The cleaned biogas is then combusted in a reciprocating engine. The exhaust of the engine is passed through a heat exchanger and then through GAC in an adsorber to adsorb nitrogen oxides (NOx) and any sulfur oxides (SOx). The GACs containing NOx, H2S, and SOx, are transported to a microwave reactor, mixed, and exposed to microwave energy. The H2S and NOx are desorbed from the GAC and chemically combined to produce nitrogen, carbon dioxide, sulfur and water. Unreacted nitrogen oxides or hydrogen sulfide are transported to a second reactor containing carbon media to be reacted by a further microwave process. Sulfur is removed with a filter as a solid and the remaining inert components are vented to the atmosphere. The GAC is regenerated and reused to remove additional H2S and NOx.

Abstract: The invention relates to a method for destroying effluents issuing from a reactor, the said effluents being transported through at least one pump towards plasma means capable of destroying at least certain bonds in the molecules of the PFC or HFC type between the fluorine and the other elements of these molecules of the PFC or HFC type, in order to generate first species which are then converted to second gaseous, liquid or solid species before interaction of these second species with dry or wet purifying means. According to the invention, at least one reducing agent is injected upstream and/or downstream of the plasma, but upstream of the purifying means, in order to react with the first species created.

Abstract: A reactor produces a surface corona for emitting UV light and for the production of ozone by passing air or oxygen through the surface corona. The emitted UV light activates a photocatalyst coated on a surface facing a surface with embedded electrodes which generate the surface corona. The photocatalyst is a thin film of nanoparticle TiO2 with primary particle size of 0.02 to 0.2 ?m was deposited on a substrate by a flame aerosol method. The method combines ozonation and photocatalysis to provide effective and efficient oxidation of alcohols and hydrocarbons to value added products. The method can also be used for air and water cleaning.

Abstract: A photocatalytic air purifier is disclosed. The photocatalytic purifier includes filter structures coated with a catalytic material such as titanium dioxide. One or more UV lamps are interposed between the filter structures. The catalytic layer reacts with airborne VOCs and bioaerosols when activated by the UV lamps to thereby oxidize the VOCs and destroy the bioaerosols. The photocatalytic air purifier does not need to be replaced or regenerated after a period of continuous usage. The photocatalytic purifier of the present invention substantially eliminates odors, VOCs, and bioaerosols from air directed through the fan coil. The photocatalytic air purifier includes a control system that optimizes operating costs. Because of these features, service, maintenance, and filter replacement are reduced to a minimum. At the same time, the well being of persons living in the space conditioned by the photocatalytic air purifier is improved.

Abstract: To provide a process for swiftly decomposing a volatile aromatic compound in a vapor phase. The process includes the step of bringing the volatile aromatic compound into contact with a photocatalyst layer under light irradiation. In the process, the photocatalyst layer is formed by coating a photocatalyst dispersion liquid on a substrate. The photocatalyst dispersion liquid is obtained by dispersing titanium oxide photocatalyst particles and tungsten oxide photocatalyst particles in a dispersion medium. The surfaces of the titanium oxide photocatalyst particles are charged in the same polarity as the surfaces of the tungsten oxide photocatalyst particles are.

Abstract: The invention relates to a process for treating gaseous effluents according to which said effluents are subjected to simultaneous treatment by cold plasma and to the action of a photocatalyst under additional ultraviolet (UV) radiation, as well as a device for the implementation of such a process.

Abstract: A method is provided for removing malodorous compounds, such as trimethylamine (TMA), present in an exhaust gas. At least one low-voltage electron beam energy source is used to remove small quantities of malodorous compounds in air. The electron beam energy source can also be used to beneficially form ozone to enhance the EB reduction of small quantities of compounds such as TMA in air.

Abstract: An air purifying system for a vacuum cleaner. An airflow reduction chamber is insertable along an airflow passage of the vacuum cleaner so that air pumped by the vacuum cleaner passes in the airflow reduction chamber prior to being released out in the open. The airflow chamber has an air inlet and an air outlet and an inner wall extending therebetween. An air deflector plate is positioned in front of one of the air inlet and the air outlet inside the airflow reduction chamber. A UV lamp of a type emitting radiations killing germs and bacteria extends inside the airflow reduction chamber. At least a portion of the inner wall of the air chamber at a level of the UV lamp has a surface reflective to UV radiations emitted by the UV lamp. A control circuit controls operation of the UV lamp.

Abstract: The present invention relates generally to scrubbing of flue gases to remove sulfur oxides, nitrogen oxides and particulate matter resulting from burning of high-sulfur fuels, and more specifically provides improvements in electron beam design and the use thereof in a wide variety of flue gas scrubbing applications including power plants installed on water borne vessels and positioned adjacent to bodies of water permitting the discharge of environmental-friendly wet-discharge stream. In a preferred embodiment, the electron beam chamber is used in tandem with a wet by product collector apparatus. In a preferred embodiment, the electron beam generator's electron gun has a beryllium anode foil that is used in conjunction with a sacrificial foil arrangement. The sacrificial foil arrangement separates the flue gas and any corrosive by-products that are produced by the process from the anode foil.

Abstract: A system for sterilizing air includes an air duct for flowing the air therethrough. A first electron beam generator is positioned relative to the duct for irradiating the air flowing therethrough with a first electron beam. The first electron beam for disabling biological substances within the air.

Abstract: A method for reducing or substantially eliminating oxides of nitrogen from an effluent gas stream, that includes providing a source of ultraviolet radiation with a precise wavelength, adding ammonia or an ammonia based reagent to the effluent stream, upstream of the ultraviolet radiation source, controllably operating the ultraviolet radiation source to irradiate the effluent stream flowing in the duct and substantially reducing or eliminating oxides of nitrogen by promotion a reaction of ammonia with the oxides of nitrogen to produce N2 and H2O, and also thereby destroying any surplus ammonia. This process can also be modified to oxidize carbon monoxide and VOC's to CO2 and H2O.

Abstract: A method and a device for photocatalytic oxidation of organic substances in air on a photocatalytic surface of semiconductive metal oxide, air containing the organic substances being caused to flow over the photocatalytic surface and the surface being irradiated with activating light. The relative humidity of the air (RHair) and/or the temperature of the photocatalytic surface (Tcat) are regulated so that the combination of R Hair and Tcat is caused to fall within predetermined acceptable combinations of RHair and Tcat to establish and maintain 0.2-8 monolayers of water molecules on the photocatalytic surface.

Abstract: Apparatus suited for removing carbon dioxide from gases are disclosed. The apparatus may employ bodies having a photocatalytic film. Associated methods and compositions are also disclosed.

Abstract: A process for decomposing nitrogen oxides includes the following steps: providing a catalyst, passing a gaseous nitrogen oxide over the catalyst and exposing the catalyst to microwave energy. The gaseous nitrogen oxide is broken down into nitrogen and oxygen molecules.

Abstract: Apparatus and methods for heating a substrate in a pressurized environment inside of a thermal processing system. The substrate is placed in a gaseous environment inside a processing chamber of the thermal processing system. The substrate is supported in the gaseous environment. The gas pressure inside the processing chamber is increased above atmospheric pressure, which increases the temperature of the gaseous environment. Heat is transferred from the pressurized gaseous environment to the substrate for thermally processing a layer on the substrate.

Abstract: A method for reducing or substantially eliminating oxides of nitrogen from an effluent gas stream, that includes providing a source of ultraviolet radiation with a precise wavelength, adding ammonia or an ammonia based reagent to the effluent stream, upstream of the ultraviolet radiation source, controllably operating the ultraviolet radiation source to irradiate the effluent stream flowing in the duct and substantially reducing or eliminating oxides of nitrogen by promotion a reaction of ammonia with the oxides of nitrogen to produce N2 and H2O, and also thereby destroying any surplus ammonia. This process can also be modified to oxidize carbon monoxide and VOC's to CO2 and H2O.

Abstract: A method and device for the preparation of a gas or mixture of gases containing molecular fluorine from a gas or mixture of gases derived from fluorine, wherein the fluorinated gas or mixture of gases, particularly nitrogen trifluoride NF2, is decomposed by cracking in a plasma of molecules of fluorinated gases in order to produce a mixture of atomic fluorine and other species resulting form said cracking, whereupon said mixture is subsequently cooled in a rapid manner (24), if necessary at a temperature of less than 500° C., in order to result in the formation of molecular fluorine of rat least 50% atomic fluorine thus formed and to minimize the recombination of fluorine atoms with other products arising from said cracking and to reform a fluorinated gas or mixture of gases, wherein the gaseous mixture containing F2 is recovered.

Abstract: A catalytic electrode, cell, system and process for absorbing and storing hydrogen (H2) and deuterium (D2) from the gaseous to the solid ionic form. The cell includes a non-conductive sealed housing and a conductive catalytic electrode positioned within the housing which absorbs H2 and/or D2 gas and stores it in a solid ionic form. These electrodes are formed of palladium (Pd), titanium (Ti), or zirconium (Zr). Each end of the electrode is plated with a layer of gold and encapsulated with a curable resin to form a confinement zone for H± and/or D± storage. The process includes connecting an external d.c. electric power source to each confinement zone during H2 and/or D2 gas loading of the electrode to cause a plasma-like reaction to occur which drives the H2 and/or D2 in the electrode to each encapsulated confinement to effect long-term storage of the ion form H± and D± in a solid form for later use.

Abstract: The present invention entails a method of removing ammonia from a gas stream. The method entails irradiating the gas stream with light in the spectral range of 200–350 nanometers and disassociating hydrogen free radicals from ammonia to form NH2. Once NH2 is formed, then reacting the NH2 with NOx to form N2 and water. In one specific embodiment of the present invention, the method entails removing ammonia from a gas stream associated with a cement producing process. In particular, a raw feed is directed into a pyroprocessing system of a cement manufacturing facility. This raw feed is heated and in the process of producing cement, a gas stream results. Ammonia present in the gas stream is removed or substantially reduced by irradiating the gas stream and disassociating hydrogen free radicals from the ammonia to form NH2. NH2 is then reacted with NOx to form water.

Abstract: A system for sterilizing air includes an air duct for flowing the air therethrough. A first electron beam generator is positioned relative to the duct for irradiating the air flowing therethrough with a first electron beam. The first electron beam for disabling biological substances within the air.

Abstract: There is provided a method of treating a substance to be degraded comprising the steps of: degrading the substance to produce a degraded product; contacting the product obtained in the degrading step with a liquid; and entrapping a component of the product not trapped by the liquid in a medium by contacting the component with the medium. Also, the apparatus for conducting the method is provided.

Abstract: Nitric oxide in a gaseous stream is converted to nitrogen dioxide using oxidizing species generated at least in part using in situ UV radiation sources. The sources of the oxidizing species include oxygen and/or hydrogen peroxide. The oxygen may be a component of the gaseous stream or added to the gaseous stream, preferably near a UV radiation source, and is converted to ozone by the UV irradiation. The hydrogen peroxide is decomposed through a combination of vaporization and UV irradiation. The hydrogen peroxide is preferably stored at stable concentration levels, i.e., approximately 50% by volume, and increased in concentration in a continuous process preceding vaporization within the flow channel of the gaseous stream and in the presence of the UV radiation sources.