Abstract: The invention relates to a method and apparatus for producing aligned carbon nanotube thermal interface structures using batch and continuous manufacturing processes. In a batch process a capacitor is immersed in a bath containing a slurry of thermoplastic polymer containing randomly oriented carbon nanotubes and energized to create an electrical field to orient the carbon nanotubes prior to curing. In a continuous process, slurry carried by a conveyor receives the nanotube aligning electric field from capacitors positioned on both sides of the conveyor bearing the slurry.

Abstract: The invention relates to a method for the production on a substrate of gas- and liquid-impermeable layers, which have a relatively high elasticity. This elasticity is attained through the inclusion of carbon in a layer comprised of a metal or semiconductor oxide. In order to attain such an inclusion, a metal or semiconductor is ionized by means of an arc discharge. Subsequently, a reactive gas, for example O2, is introduced, with which the ionized metal or the ionized semiconductor forms an oxide. In addition, a carbon-containing gas is added, which releases its carbon such that on the substrate an oxide layer is formed, in which carbon is included.

Abstract: Apparatus for producing a carbon structure at least including two electrodes 11 and 12 having forefront portions opposed to each other, and a power supply 18 for applying a voltage between the electrodes 11 and 12 so that discharge plasma is produced in a discharge area between the electrodes 11 and 12. The apparatus for producing a carbon structure further including a magnetic field generating unit 20 to 23 for forming at least a magnetic field including multidirectional lines of magnetic force or a magnetic field including a component parallel with the traveling direction of a discharge current, in an area where the discharge plasma is generated. In addition, a method for producing a carbon structure, using such an operation.

Abstract: A method of converting graphite from solid state to a gaseous state and further processing the gas to produce liquid fuel. The gasification of the graphite is achieved by using electrolysis under seawater.

Abstract: The method of the present invention deposits carbon nanotubes by contacting carbon vapor with a non-magnetic transition metal including at least two elements selected from the group consisting of ruthenium, rhodium, palladium, and platinum. For example, carbon vapor and particulates of the non-magnetic transition metal are generated by arc discharge between a rod-shaped anode containing carbon and the non-magnetic transition metal, and a rod-shaped cathode opposing to the anode, and carbon nanotubes are deposited on a base portion of the cathode. The arc discharge is performed in a reactor chamber containing inert gas or the mixture of inert gas and hydrogen gas, at a pressure ranging from 50 to 1500 Torr.

Abstract: Carbon nanotubes are produced by depositing carbon material from an electrical arc established between a cathode and a carbon anode. A vibrational driver is coupled to the cathode to vibrate the cathode in a manner which enhances the proportion of carbon nanotubes deposited on the face of the cathode as compared to other carbon materials. The vibration of the cathode may also stabilize the arc to enhance the formation of longer nanotubes than are otherwise possible. The vibrational driver may also be operated to periodically apply a stress pulse of high amplitude to the cathode to dislodge the entire boule of carbon materials which has been deposited on the cathode, allowing a new boule to be formed. In this manner, continuous production of nanotubes can be carried out without the need to periodically halt the arc process to remove carbon material from the cathode.

Abstract: A fullerene/nanotubes mixture is produced during a periodical pulsed auto-regulated action of the electric current arc-discharge in the multi-component hydrocarbon medium with limited fullerenes′ solubility, besides, the action is continued until the medium dissolves C60. Higher fullerenes absorbed by the ultra-thin graphite particles are separated from C 60 dissolved in the liquid medium by sedimentation, whereas the carbon nanotubes are separated from the ultra-thin graphite particles by treating with a boiling concentrated HN03 acid and by low speed centrifuging/acid mixture until the black sediment of the ultra-thin graphite particles is precipitated to the bottom. The periodically pulsed auto-regulated regime of the electric-current arc-discharge is performed by contact breaking an electric circuit due to lifting spherical contactors by gaseous products released during the action and by switching the circuit due to the contacts' going down under action of gravity.

Abstract: The invention relates to a method and a device for the continuous production of carbon black with a high fullerene content. The device essentially consists of a plasma reactor (1), a downstream heat separator (2) to separate the non-volatile constituents and a cold separator (3) attached thereto.

Abstract: The method of the present invention deposits carbon nanotubes by contacting carbon vapor with a non-magnetic transition metal including at least two elements selected from the group consisting of ruthenium, rhodium, palladium, and platinum. For example, carbon vapor and particulates of the non-magnetic transition metal are generated by arc discharge between a rod-shaped anode containing carbon and the non-magnetic transition metal, and a rod-shaped cathode opposing to the anode, and carbon nanotubes are deposited on a base portion of the cathode. The arc discharge is performed in a reactor chamber containing inert gas or the mixture of inert gas and hydrogen gas, at a pressure ranging from 50 to 1500 Torr.

Abstract: The method of manufacturing carbon nanotubes and/or fullerenes reduces the pressure inside a system to 1.3 Pa or lower, supplies a carboniferous liquid state material to raise the pressure inside the system to at least 1.3 kPa to 93.3 kPa, generates arc discharges, supplies the carboniferous liquid state material in discharge plasma created by the arc discharges, and disintegrates or excites the carboniferous liquid state material, thereby producing the carbon nanotubes and/or the fullerenes. And, the manufacturing apparatus is equipped with at least a pair of electrodes that generate arc discharges into a vacuum chamber to create discharge plasma, a gas supply unit capable of supplying a carrier gas into the vacuum chamber, and a raw material supply unit capable of supplying a carboniferous liquid state material in the discharge plasma through an introduction tube.

Abstract: The invention is directed to an apparatus and a method for the reduction of pollutants in a gas stream containing gas formed from the oxidation of fuel, such as, in the exhaust stream of a combustion engine. Radicals are produced using a corona discharge in the combustion gas stream of the engine, either in the precombustion gas stream or from water in the exhaust gas. When the radicals are produced from the exhaust gas stream, the radicals may be produced using a corona discharge placed directly in the exhaust stream leading to or within the catalytic converter, or a portion of the exhaust stream may be diverted to a remote corona discharge radical generator. The corona discharge in the generator produces radicals in the diverted exhaust gas, and the exhaust gas containing radicals is then conveyed to the exhaust gas stream at a point upstream of the outlet of the catalytic converter.

Abstract: A system for delivering electromagnetic energy into a solution using a delivery apparatus to modify its characteristics. Preferred systems are described that deliver electromagnetic energy into a target solution for modifying its characteristics by first treating a primary solution, e.g., water or any hydrogen bonded liquid, and then causing the primary solution to be proximate to the target solution. The treated secondary solution improves the performance of various processes including: scale control in water heater systems, printing ink treatment, de-inking of pulp paper, etc.

Abstract: Fuel gas production by underwater arcing bubbles up from the vicinity of the arc and is collected by an overlying hood and used or stored for use as a fuel, as in operation of a cutting or welding torch, or in operation of an internal-combustion engine. A reactor or production unit for such fuel gas contains a body of water, which may be open to the ambient atmosphere and be at ambient temperature. The arc is established in a spark gap between carbon electrodes and is facilitated by introduction of successive carbon rods end-on into the spark gap, as by dispensing them successively from a magazine.

Abstract: A method of vertically aligning pure carbon nanotubes on a large glass or silicon substrate at a low temperature using a low pressure DC thermal chemical vapor deposition method is provided. In this method, catalytic decomposition with respect to hydro-carbon gases is performed in two steps. Basically, an existing thermal chemical vapor deposition method using hydro-carbon gases such as acetylene, ethylene, methane or propane is used. To be more specific, the hydro-carbon gases are primarily decomposed at a low temperature of 400-500° C. by passing the hydro-carbon gases through a mesh-structure catalyst which is made of Ni, Fe. Co, Y, Pd. Pt, Au or an alloy of two or more of these materials. Secondly, the catalytically—and thermally-decomposed hydro-carbon gases pass through the space between a carbon nanotube growing substrate and an electrode substrate made of Ni, Fe, Co, Y, Pd.

Abstract: A method and apparatus for vacuum arc deposition of carbon on a substrate inhibits or eliminates emission of contaminating carbon particles in the ion plasma by maintaining an elevated local plasma pressure at the cathode or target surface, thereby minimizing the role of heat conduction in the creation of the particles and strongly increasing the electron emission cooling effects.

Abstract: A device (100) for producing fullerenes includes an IEC vacuum chamber (110) which has a central grid-like electrode (112) and a conductive outer shell (111) that are connected to a pulsed source of high voltage (114) and provide an electric field within the chamber (110). The applied voltage supports the creation of a plasma at the inner core of the chamber near the electrode (112). A carbon-based gas, which is introduced into the chamber (110), possibly along with an inert buffer gas, id dissociated into component carbon and hydrogen ions that are separated and the carbon ions recombined into fullerenes that appears as a soot. The device (100) includes a soot extraction mechanism for removing and collecting the fullerenes.

Abstract: There is provided a method for preparing a single layer carbon nano-tube stably and in high preparation efficiency. Helium is introduced from a gas inlet 19 while exhausting inside a vacuum chamber 11 by means of a rotary pump 12 to prepare an atmosphere of rare gas. DC arc discharge is established between a metal-added carbon electrode to which a single metal is added 13 and a metal-added carbon electrode to which a single metal the kind of which is different from that of the former metal is added 14 by the use of a discharge power source apparatus 17. Carbon and metals are evaporated from both electrodes, and the metals are alloyed to act as a catalyst to the carbon and the single layer carbon nano-tube is prepared.

Abstract: A process for converting carbon or carbonated compounds in a plasma into carbons having a defined nanostructure consists of a reaction chamber whose head part contains three electrodes, a plasma gas supply, and a carbon or carbonated compound supply. A process for preparing carbons having a defined nanostructure. Apparatus to carry out the processes.

Abstract: A method for the growth of diamond on a substrate combines an ECR (Electron cyclotron resonance) MPCVD (Microwave plasma chemical vapor deposition) method with a MPCVD method in one system. A two-step diamond growing method comprises firstly etching and nucleation performed by the ECR method and then diamond grown by the microwave plasma CVD method. Not only are high quality continuous polycrystalline diamond films on silicon wafer obtained but also heteroepitaxial growth has been achieved in the present invention. Auger electron spectroscopy (AES), scanning electron microscopy (SEM) and Raman spectroscopy have been used to characterize the structure and morphology of the synthesized diamond films.

Abstract: The present invention is an apparatus and method for producing nano-scale tubes and particles. The apparatus comprises novel electrodes for use in arc discharge techniques. The electrodes have interior conduits for delivery and withdrawal of material from the arc region where product is formed. In one embodiment, the anode is optionally made from more than one material and is termed a compound anode. The materials used in the compound anode assist in the reaction that forms product in the arc region of the apparatus. The materials assist either by providing reaction ingredients, catalyst, or affecting the reaction kinetics. Among other uses, the inventive apparatus is used to produce nanotubes and nanoparticles having a variety of electrical and mechanical properties.

Abstract: The invention is directed to an apparatus and a method for the reduction of pollutants in the exhaust stream of a combustion engine. Radicals are produced using a corona discharge in the combustion gas stream of the engine, either in the precombustion gas stream or from water in the exhaust gas. When the radicals are produced from the exhaust gas stream, the radicals may be produced using a corona discharge placed directly in the exhaust stream leading to the catalytic convertor, or a portion of the exhaust stream may be diverted to a remote corona discharge radical generator. The corona discharge in the generator produces radicals in the diverted exhaust gas, and the exhaust gas containing radicals is then conveyed to the exhaust gas stream at a point upstream of the catalytic convertor.

Abstract: Method for conversion of hydrocarbons assisted by gliding electric arcs in the presence of water vapor and/or carbon dioxide.The objective of the process and the plasma assistance device to steam reforming, to the reforming with CO2 or to simultaneous reforming with an H2O/CO2 mixture of hydrocarbons is the production of gases rich in CO and H2, containing also high ratios of C2H2, C2H4 and C3H6, without formation of soot or coke. The process makes it also possible to upgrade the CO2 by converting it into CO in the presence of hydrocarbons.This mixture of valuable products is obtained in a reactor /1/ with electric gliding arcs /4/ which strike directly into an endothermic reaction medium consisting of hydrocarbons mixed with H2O and/or CO2.

Abstract: Fullerenes are synthesized by subjecting carbon in the form of particulates or as the carbon of a liquid or gaseous hydrocarbon, that can be continuously fed to a variety of intense, heat-generating processes that vaporize the carbon from the fluid comprising the particulates or hydrocarbons into an environment that condenses the vaporized carbon to the new form of carbon fullerenes.

Abstract: A graphite filament which has carbon as a basic structural unit and which have a tubular shape being formed with a helical structure with the carbon hexagons as a main structure and with an outer diameter of 30 nm or less. The tubular lattices a.sub.1 to a.sub.3 are a multiple structure and the interval between inner and outer adjacent tubules is about 0.34 nm, which is similar to the interval between basal planes of graphitic structure. The graphite filament is a new carbon filament material having a structure that is different from a normal graphite filament.

Abstract: Carbon nanotubes are produced by submerging carbonaceous anode and cathode electrodes in liquid nitrogen or other suitable liquefied materials such as helium or hydrogen, and passing a direct current between the electrodes to strike a plasma arc between the anode and cathode that erodes carbon from the anode and deposits carbon nanotubes on the surface of the cathode.

Abstract: The present invention improves the adhesive property by pretreating under uniform conditions the substrate surface of metal, ceramics or glass etc. with a poor adhesive property, by accelerating ions under an electric field to the substrate in advance of a diamond-like film forming process. In light of the fact that a diamond-like film forming process by ionized deposition uses thermal electron ionization means and an electric potential is applied to a grid to accelerate ionized hydrocarbon ions, the present invention could attain the aimed purpose by ionizing and then accelerating a bombardment gas such as argon as a pretreatment process in the same apparatus.

Abstract: This invention provides a method and apparatus for producing fullerene fibers by establishing an electric field between a needle electrode and an opposing electrode in the presence of carbon and a heat source. Carbon is directed by the electric field to the needle electrode and heated by the heat source to form a carbon-carbon bonded fullerene network. The needle electrode may be moved to lengthen the fullerene network into a fullerene fiber. Fullerene fibers of 0.5 cm or longer may be produced by this method.

Abstract: Soot containing fullerenes is produced by impressing a DC voltage between a carbonaceous anode and a cathode in an airtight chamber maintained in an inert gas atmosphere to cause arc discharge to occur. After termination of the impression of the DC voltage, an inert gas is blown into the chamber to fluidize the soot. The fluidized soot is discharged from the chamber and is brought into contact with a solvent to recover the fullerenes.

Abstract: Carbon nanotubes are produced by successively repositioning an axially extending rod-like carbonaceous anode relative to a cathode surface such that a tip end surface of the anode successively faces on different portions of the cathode surface while impressing a direct current voltage therebetween, so that an arc discharge occur with the simultaneous formation of carbonaceous deposits containing carbon nanotubes on each of the portions of the cathode surface. The carbonaceous deposits are scraped and collected. A device for carrying out the above method includes a driving member for displacing the cathode surface relative to the anode.

Abstract: A porous article is densified by creating a plasma adjacent to the surface of the article and introducing a source of a densifying species into the plasma. The article is electrically biased with respect to the plasma to a polarization opposite in sign to the energized densifying species and to a first voltage sufficient to deposit the densifying species to the first depth below the surface of the article. The species is deposited for a time sufficient to densify the article at the first depth. If the article has porosity over a range of depths, as is often the case, the voltage is first set to densify the article at the greatest depth, and thereafter the voltage is gradually decreased to reduce the depth of densification until the article is densified over the entire range.

Abstract: An apparatus for a gasification of a biomass liquid solution includes a reaction chamber having a biomass liquid solution therein. The biomass solution includes at least water and carbon. A pair of spaced apart carbon electrodes are immersed in the solution within the chamber. A direct current electrical supply is connected to the electrodes to form an electrical arc passing from one electrode to the other and thereby oxidizing carbon of one electrode. The oxidized carbon forms a carbon monoxide and hydrogen gas mixture, and carbon released from the biomass solution during oxidation is deposited on the opposite electrode. A switch is interposed between the source of electric power and the electrodes so as to selectively switch the polarity of the electric arc to thereby cause oxidation of the opposite electrode and the deposit of carbon on the previously oxidized electrode while continuing to manufacture COH.sub.2 gas.

Abstract: An electrical apparatus is provided for the conversion of compounds, elements, or mixtures which are in particulate form, into new compounds, elements or mixtures in gaseous, liquid, or particulate form. In a reaction chamber, particulates are mechanically transported into a first region of high electric field, where they acquire a charge and are projected into a second region in which a low-density plasma is maintained. Energetic plasma ions strike the surfaces of the particulates, causing chemical reactions and release of both neutral and ionic products species. Charge exchange on particulates causes the reduced-size particles to fall back into the first region, where the charging recurs and the cycle is repeated. Gaseous and particulate products are removed from the chamber. In one application, naturally-occurring ores may be reduced by a methane plasma; in another, coal may be converted in a methane plasma to intermediate range hydrocarbons.

Abstract: A method and apparatus for the production of a form of carbon nitride with a chemical formula consisting of 3 carbon atoms and 4 nitrogen atoms, and a structure similar to that of beta-silicon nitride. The apparatus utilizes a nitrogen ion beam and a carbon arc. The interaction between the ionized nitrogen and the carbon evoluted in the arc produces copious compounds of carbon and nitrogn. Enrichment of the proportion of the specific carbon-nitrogen compound is achieved by adjustment of the operational parameters of the apparatus. A pure form of this compound is produced by an electric and/or magnetic field separator.

Abstract: A process is disclosed to synthesize fullerenes in a plasma reactor. It comprises introducing various amounts of carbon halides as the plasma forming gas in a plasma torch capable of producing a high enough temperature flame to dissociate the carbon bearing molecules into carbon and halogen atoms, hence forming a carbon cloud which condenses into a soot containing fullerenes. Also hydrocarbons can be introduced in the torch as the plasma forming gas and reacted with carbon halides or halogens injected therewith or directly into the plasma flame at the exit of the torch. Moreover, an inert gas, such as helium, may also be used as the plasma forming gas. The process can use a high enthalpy non-transferred d.c. plasma torch or an induction plasma torch as the plasma generating device.

Abstract: The present invention relates to an improved process for making fullerenes having greater than seventy carbon atoms. The process involves electrical heating of a low density carbon rod in an inert atmosphere.

Abstract: A carbon film consisting of diamond powder contains nitrogen and boron therein. In the light of the addition of nitrogen and boron, the diamond is fabricated without growing defects and the film make in sturdy mechanical contact with the underlying surface.

Abstract: This invention provides a method of generating fullerenes by vaporizing carbon with the heat from an electrical arc and then condensing a soot from which fullerenes may be recovered.

Abstract: A method of depositing a diamondlike carbon coating on a substrate. An ionized beam of pure methane or methane and hydrogen, and having an ion kinetic energy in the range of 500-1,000 eV is impinged on a substrate to deposit, thereon, a diamondlike carbon coating. Various substrates can be utilized, and various cleaning procedures are developed for use with the particular substrates to improve the adhesion of the diamondlike carbon coatings. The methane-hydrogen ratio and the operating pressure of the ionized gas can each be varied to vary the carbon-hydrogen ratio of the resulting diamondlike coating to thereby alter the characteristics of the coating.

Abstract: In a process for producing a diamond-like film which comprises introducing a hydrocarbon feed gas or a feed gas capable of producing a hydrocarbon on decomposition or reaction into a vacuum, ionizing the gas, and depositing the same on a substrate to form a diamond-like film thereon, the hydrocarbon gas is passed through a plasma exciter prior to the introduction into the vacuum. An apparatus for practicing the process comprises a plasma exciter means located on a passage through which the hydrocarbon gas is introduced into the vacuum.

Abstract: The deposition of diamond on a substrate is enhanced by coating the subste surface with a thin layer of carbon before deposition. Preferably, the substrate is scratched before being coated with diamond. The carbon layer may be formed by applying an oil coating to the substrate and then heating the substrate to carbonize the coating, or by the evaporative deposition of carbon.

Abstract: Processes are provided for consolidating diamond particles into a mechanically stable diamond mass, called a diamond ceramic. A compacted aggregation of diamond particles is subjected to low pressure PECVD conditions in the presence of atomic hydrogen, with or without a carbon source gas, whereby a mechanically stable diamond ceramic is formed substantially devoid of interstitial spaces.

Abstract: An electric arc is used for reacting carbonaceous materials and water to produce a combustible gaseous product comprising hydrogen, carbon monoxide and methane as its major components, wherein the electrothermal and photochemical effects of the arc result in the production of active chemical species which cause and participate in the gasification reactions.

Abstract: The present invention provides a method of plasma-polymerization at low temperature (from normal temperature to about 100.degree. C.) and that at low frequency.

Abstract: The following are disclosed:A method for synthesis of diamond which is characterized by contacting a gas obtained by excitation of carbon monoxide and hydrogen in such a ratio as carbon monoxide being at least 1 mol % per total of carbon monoxide and hydrogen with a substrate in the presence of a reducing metal.A method for synthesis of diamond which is characterized by contacting with a substrate a gas obtained by excitation of carbon dioxide and hydrogen mixed at such a ratio of carbon dioxide being 0.1-20 mol % per hydrogen.A method for synthesis of diamond by depositiong diamond on the surface of a substrate by introducing onto the surface of the substrate a plasma obtained from hydrogen and carbon source gas by irradiation of microwave in a plasma generator which is characterized in that progress of microwave oscillated from one microwave oscillator is divided and thus divided respective microwaves and led to a plurality of plasma generators.

Abstract: An electromagnetic converter directs the exhaust stream of a fossil fuel combustion process, for example the exhaust from an internal combustion engine, through a series of electrostatic fields to convert a substantial portion of the pollutants into non-harmful base elements. In an exemplary embodiment, the exhaust stream is directed through an anti-turbulator chamber, which conditions the flow. The chamber includes an electron transfer grid in the path of the flow. The grid has a negative dc charge of sufficient strength to achieve the first ionization level of the HC, CO, and CO.sub.2 molecules present. The ionized exhaust is thereafter directed to an ion generator chamber, which includes coils carrying a very high positive dc charge, e.g. 20,000-50,000 volts dc, sufficient to achieve ionization potential of the molecules to induce molecular breakdown into the base components of carbon, hydrogen, and oxygen.

Abstract: A method for synthesizing diamond, which comprises:(a) generating a plasma by electric discharge in a gas selected from the group consisting of a hydrocarbon gas, hydrogen gas, an inert gas and a mixture thereof,(b) decomposing a carbon source by the plasma to form plasma gas containing carbon ions or carbon radicals,(c) effecting adiabatic expansion of the plasma gas to precipitate diamond.

Abstract: A medium to high BTU fuel gas is synthesized in a closed tank using a diffuse electrical plasma. An electrode is disposed within, and electrically insulated from, an interface between immiscible mixtures of water and oil in the tank. Comminuted fossil fuel or carbon particles are dispersed in the oil near the interface. A voltage step up transformer connects a potential of about 2-5 kV (kilovolts) across an arc gap between the electrode and the water-oil interface. Electrical breakdown of the oil, due to the high voltage, produces an initial arc across the gap, which at steady state becomes a diffuse, partially-ionized, stable plasma. The electron flow in the plasma chemically and catalytically reforms compounds in the water and oil layers. A capacitor, connected across primary windings of the transformer, has a selected capacitance sufficient to modify the AC voltage and current waveforms so that the power factor of the combined circuit across the arc gap approaches unity.

Abstract: A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atmosphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substance provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.

Abstract: A device designed to use exhaust gas discharged out of an engine combustion chamber by dissociating chemical substances contained in the exhaust gas such as CO, CO.sub.2, NOx, HC, etc., in an exhaust gas molecule dissociating tube and drawing components of the exhaust gas, oxygen in particular, again into the engine combustion chamber. The device is so constructed as to collect dust including the carbon component of the exhaust gas in a cyclone drum for removal from the exhaust gas, which allows all of the engine exhaust to be recycled without releasing it in the atmosphere. The device is utilizable with various engines, e.g., gasoline engines, diesel engines and so on, and well-suited to mass production on account of its simple, compact and lightweight construction.

Abstract: A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atomsphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substrate provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.