Superconductor Patents (Class 204/192.24)
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Patent number: 11316092Abstract: Operational characteristics of an high temperature superconducting (“HTS”) film comprised of an HTS material may be improved by depositing a modifying material onto appropriate surfaces of the HTS film to create a modified HTS film. In some implementations of the invention, the HTS film may be in the form of a “c-film.” In some implementations of the invention, the HTS film may be in the form of an “a-b film,” an “a-film” or a “b-film.” The modified HTS film has improved operational characteristics over the HTS film alone or without the modifying material. Such operational characteristics may include operating in a superconducting state at increased temperatures, carrying additional electrical charge, operating with improved magnetic properties, operating with improved mechanic properties or other improved operational characteristics. In some implementations of the invention, the HTS material is a mixed-valence copper-oxide perovskite, such as, but not limited to YBCO.Type: GrantFiled: May 27, 2016Date of Patent: April 26, 2022Assignee: Ambature, Inc.Inventors: Douglas J. Gilbert, Timothy S. Cale
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Patent number: 10985059Abstract: A method is provided of forming a superconductor device interconnect structure. The method comprises forming a first dielectric layer overlying a substrate and forming a superconducting interconnect element in the first dielectric layer. The superconducting interconnect element includes a top surface aligned with a top surface of the first dielectric layer to form a first interconnect layer. The superconductor device interconnect structure is moved into a dielectric deposition chamber. The method further comprises performing a cleaning process on a top surface of the first interconnect layer in the dielectric deposition chamber to remove oxidization from a top surface of the first interconnect layer, and depositing a second dielectric layer over the first interconnect layer in the dielectric deposition chamber.Type: GrantFiled: November 1, 2018Date of Patent: April 20, 2021Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Brian Paul Wagner, Christopher F. Kirby, Michael Rennie, James T. Kelliher, Khyhouth Lim
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Patent number: 10737222Abstract: The present invention provides a preparation method for a composite porous structure, comprising the following steps: step (a): preparing a porous substrate having multiple pores, a first surface and a second surface; and step (b): continuously feeding a cooling fluid to contact the first surface and to flow continuously to the second surface through the pores of the porous substrate, and heating a coating material to multiple molten particles by a heat source and spraying the molten particles onto the second surface of the porous substrate, so as to form a coating layer having multiple micropores on the second surface of the porous substrate and obtain the composite porous structure formed. Besides, also provided is a composite porous structure prepared by the preparation method.Type: GrantFiled: November 14, 2018Date of Patent: August 11, 2020Assignee: EXTREMEM, INC.Inventors: Yu-Ling Li, Chao-Hsiang Kang
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Patent number: 10619250Abstract: Substrate provided with a plurality of layers, at least one of which includes metal oxides and is topped directly by a metal coating layer that contains at least 8% by weight nickel and at least 10% by weight chromium, the remainder being iron, additional elements and the impurities resulting from the fabrication process, wherein this metal coating layer is topped directly by an anticorrosion coating layer. A corresponding fabrication method is also provided.Type: GrantFiled: April 4, 2014Date of Patent: April 14, 2020Assignee: ArcelorMittalInventors: Daniel Chaleix, Eric Silberberg, Bruno Schmitz, Xavier Vanden Eynde, Sergio Pace
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Patent number: 10349511Abstract: The present application relates to a conductive structure body and a manufacturing method thereof. The method for manufacturing the conductive structure body according to an exemplary embodiment of the present application includes forming a metal layer on a substrate and forming a darkening layer on the metal layer, in which the forming of the darkening layer is performed by reactive sputtering using CO2.Type: GrantFiled: February 11, 2016Date of Patent: July 9, 2019Assignee: LG CHEM, LTD.Inventors: Jin Hyong Lim, Jin Hyuk Min, Ki-Hwan Kim, Chan Hyoung Park, Ilha Lee
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Patent number: 9828689Abstract: Provided are an aluminum conductive member that includes an electrical connection portion excellent in conductivity and rust resistance and an electrical insulation portion excellent in long-term durability, chemical resistance, and the like, and can be manufactured at low cost, and a method of manufacturing the same. Specifically, provided are an aluminum conductive member, including: an aluminum conductive base material formed of an aluminum material including aluminum or an aluminum alloy; an electrical connection portion formed in a region of the aluminum conductive base material, the electrical connection portion having a surface coated with a conductive oxidation preventing film and being used as a terminal; and an electrical insulation portion formed in a region of the aluminum conductive base material other than the region in which the electrical connection portion is formed, the electrical insulation portion being coated with an anodic oxide film, and a method of manufacturing the same.Type: GrantFiled: January 24, 2014Date of Patent: November 28, 2017Assignee: NIPPON LIGHT METAL COMPANY, LTD.Inventor: Manabu Ookubo
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Patent number: 9725799Abstract: A method of manufacturing an article includes providing a component for an etch reactor. Ion beam sputtering with ion assisted deposition (IBS-IAD) is then performed to deposit a protective layer on at least one surface of the component, wherein the protective layer is a plasma resistant film having a thickness of less than 1000 ?m.Type: GrantFiled: December 5, 2014Date of Patent: August 8, 2017Assignee: Applied Materials, Inc.Inventors: Jennifer Y. Sun, Vahid Firouzdor, Biraja Prasad Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang
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Patent number: 8992740Abstract: An IBAD apparatus includes, a target, a sputter ion source irradiating the target with sputter ions to sputter some of constituent particles of the target, a film formation region in which a base material for depositing thereon the particles sputtered from the target is disposed, and an assist ion beam irradiation device irradiating assist ion beams from a direction oblique to the direction of a normal of the film formation surface of the base material disposed in the film formation region, where the sputter ion source includes a plurality of ion guns arranged so as to be able to irradiate the target from an end portion on one side to an end portion on the other side with sputter ion beams, and current values for generating the sputter ion beams of the plurality of ion guns are set respectively.Type: GrantFiled: April 5, 2012Date of Patent: March 31, 2015Assignee: Fujikura Ltd.Inventors: Satoru Hanyu, Yasuhiro Iijima
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Publication number: 20140162884Abstract: Described is a superconductive layered structure and an article including this superconductive layered structure on a substrate structure. The superconductive layered structure comprises a stack including at least one bi-layered assembly formed by first and second layers of similar superconducting material compositions, the second layer being superconductive at predetermined temperature condition, the first layer being a substantially thin layer and having a c lattice parameter selected in accordance with those of the substrate structure and the second layer, such that said first layer is non-superconductive at said predetermined temperature condition thereby allowing the second superconductive layer to be desirably thick to provide high critical current density of the superconductive layer.Type: ApplicationFiled: February 11, 2014Publication date: June 12, 2014Applicant: Ramot at Tel-Aviv University Ltd.Inventors: Guy DEUTSCHER, Mishael AZOULAY, Boaz ALMOG
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Patent number: 8486864Abstract: The present invention relates to a method for producing a phase-separated layer useful as a flux pinning substrate for a superconducting film, wherein the method includes subjecting at least a first and a second target material to a sputtering deposition technique in order that a phase-separated layer is deposited epitaxially on a primary substrate containing an ordered surface layer. The invention is also directed to a method for producing a superconducting tape containing pinning defects therein by depositing a superconducting film on a phase-separated layer produced by the method described above.Type: GrantFiled: December 29, 2009Date of Patent: July 16, 2013Assignees: UT-Battelle, LLC, University of Tennessee Research FoundationInventors: Tolga Aytug, Mariappan Parans Paranthaman, Ozgur Polat
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Publication number: 20130085071Abstract: Disclosed are an oxide superconductor tape and a method of manufacturing the oxide superconductor tape capable of improving the length and characteristics of superconductor tape and obtaining stabilized characteristics across the entire length thereof. A Y-class superconductor tape (10), as an oxide superconductor tape, comprises a tape (13) further comprising a tape-shaped non-oriented metallic substrate (11), and a first buffer layer (sheet layer) (12) that is formed by IBAD upon the tape-shaped non-oriented metallic substrate (11); and a second buffer layer (gap layer) (14), further comprising a lateral face portion (14a) that is extended to the lateral faces of the first buffer layer (sheet layer) (12) upon the tape (13) by RTR RF-magnetron sputtering.Type: ApplicationFiled: February 10, 2011Publication date: April 4, 2013Inventors: Tatsuhisa Nakanishi, Yuji Aoki, Tsutomu Koizumi, Atsushi Kaneko, Takayo Hasegawa
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Patent number: 8182862Abstract: An ion source impinging on the surface of the substrate to be coated is used to enhance a MOCVD, PVD or other process for the preparation of superconducting materials.Type: GrantFiled: June 5, 2003Date of Patent: May 22, 2012Assignee: SuperPower Inc.Inventors: Venkat Selvamanickam, Hee-Gyoun Lee
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Patent number: 8124170Abstract: A method for forming a superconducting wire with a tape substrate comprises dispensing the tape substrate, providing at least one reactor chamber to form at least one buffer material on the tape substrate based on determining at least one of a type of tape substrate, a type of superconductor material, and a type of buffer material, providing another reactor chamber to continuously form a layer of the superconductor material on a layer of the buffer material, and spooling the tape substrate with the layer of superconductor material.Type: GrantFiled: January 19, 2005Date of Patent: February 28, 2012Assignee: Metal Oxide Technologies, IncInventors: Alex Ignatiev, Xin Zhang, Alexander A. Molodyk, Louis D. Castellani
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Patent number: 8034746Abstract: Disclosed herein is a method of manufacturing round wire using superconducting tape, including the steps of: slitting superconducting tape into superconducting tape strips; silver-coating the slit superconducting tape strips; laminating the silver-coated superconducting tape strips to form a superconducting tape laminate having a square cross-section; holding the superconducting tape laminate; heat-treating the fixed superconducting tape laminate to cause diffusion junction between silver; and copper-plating the heat-treated superconducting tape laminate to have a circular section.Type: GrantFiled: June 30, 2009Date of Patent: October 11, 2011Assignee: Korea Electrotechnology Research InstituteInventors: Hong Soo Ha, Sang Soo Oh, Dong Woo Ha, Rock Kil Ko, Ho Sup Kim
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Patent number: 8022012Abstract: A device for fabricating thin films on a substrate includes a vacuum chamber, a rotatable platen configured to hold one or more substrates within the vacuum chamber, and a housing disposed within the vacuum chamber. The housing contains a heating element and is configured to enclose an upper surface of the platen and a lower portion configured to partially enclose an underside surface of the platen which forms a reaction zone. A heated evaporation cell is operatively coupled to the lower portion of the housing and configured to deliver a pressurized metallic reactant to the reaction zone. The device includes a deposition zone disposed in the vacuum chamber and isolated from the reaction zone and is configured to deposit a deposition species to the exposed underside of the substrates when the substrates are not contained in the reaction zone.Type: GrantFiled: September 11, 2008Date of Patent: September 20, 2011Assignee: Superconductor Technologies, Inc.Inventors: Brian H. Moeckly, Ward S. Ruby
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Publication number: 20110160066Abstract: The present invention relates to a method for producing a phase-separated layer useful as a flux pinning substrate for a superconducting film, wherein the method includes subjecting at least a first and a second target material to a sputtering deposition technique in order that a phase-separated layer is deposited epitaxially on a primary substrate containing an ordered surface layer. The invention is also directed to a method for producing a superconducting tape containing pinning defects therein by depositing a superconducting film on a phase-separated layer produced by the method described above.Type: ApplicationFiled: December 29, 2009Publication date: June 30, 2011Applicant: UT-BATTELLE, LLCInventors: Tolga Aytug, Mariappan Parans Paranthaman, Ozgur Polat
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Patent number: 7910155Abstract: A method for manufacturing a high-temperature superconducting conductor includes translating an elongated substrate through a reactor. Further, a high temperature superconducting layer is formed on the substrate translating through the reactor by deposition of a reaction product of metalorganic precursor materials onto the substrate. Further, partial pressure of oxygen is monitored to indirectly monitor supply of metalorganic precursors into the reactor.Type: GrantFiled: January 6, 2006Date of Patent: March 22, 2011Assignee: Superpower, Inc.Inventors: Hee-Gyoun Lee, Venkat Selvamanickam
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Publication number: 20110034338Abstract: A superconducting article includes a substrate having a biaxially textured surface, and an epitaxial biaxially textured superconducting film supported by the substrate. The epitaxial superconducting film includes particles of Ba2RETaO6 and is characterized by a critical current density higher than 1 MA/cm2 at 77K, self-field. In one embodiment the particles are assembled into columns. The particles and nanocolumns of Ba2RETaO6 defects enhance flux pinning which results in improved critical current densities of the superconducting films. Methods of making superconducting films with Ba2RETaO6 defects are also disclosed.Type: ApplicationFiled: August 4, 2010Publication date: February 10, 2011Inventors: Amit Goyal, Claudia Cantoni, Eliot Specht, Sung-Hun Wee
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Publication number: 20100267568Abstract: The present invention relates to a superconducting film having a substrate and a superconductor layer formed on the substrate, in which nano grooves are formed parallel to a current flowing direction on a substrate surface on which the superconductor layer is formed and two-dimensional crystal defects are introduced in the superconductor layer on the nano grooves, and a method of manufacturing this superconducting film. A superconducting film of the invention, which is obtained at low cost and has very high Jc, is useful in applications such as cables, magnets, shields, current limiters, microwave devices, and semifinished products of these articles.Type: ApplicationFiled: April 30, 2010Publication date: October 21, 2010Inventors: Kaname Matsumoto, Masashi Mukaida, Yutaka Yoshida, Ataru Ichinose, Shigeru Horii
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Patent number: 7718574Abstract: Methods for depositing, at a very high deposition rate, a biaxially-textured film on a continuously moving metal tape substrate are disclosed. These methods comprise: depositing a film on the substrate with a deposition flux having an oblique incident angle of about 5° to about 80° from the substrate normal, while simultaneously bombarding the deposited film using an ion beam at an ion beam incident angle arranged along either a best ion texture direction of the film or along a second best ion texture direction of the film, thereby forming the biaxially-textured film, wherein a deposition flux incident plane is arranged parallel to a direction along which the biaxially-textured film has a fast in-plane growth rate. Superconducting articles comprising a substrate, a biaxially-textured film deposited on said substrate by said methods above; and a superconducting layer disposed on the biaxially-textured film are also disclosed.Type: GrantFiled: April 8, 2004Date of Patent: May 18, 2010Assignee: SuperPower, Inc.Inventors: Xuming Xiong, Venkat Selvamanickam
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Patent number: 7582328Abstract: An oxide superconductor article having an oxide superconductor layer of a predetermined pattern is prepared by continuously advancing a wire having a textured surface into a deposition zone, dispensing droplets of a precursor solution to an oxide superconductor from a reservoir and the depositing droplets onto the textured surface of the wire that is introduced into the deposition zone, heating the wire or tape in the reaction zone under conditions to convert the precursor solution into an oxide superconductor; and collecting the wire after heating.Type: GrantFiled: September 29, 2004Date of Patent: September 1, 2009Assignee: American Superconductor CorporationInventors: Martin W. Rupich, Cornelis L. Thieme
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Patent number: 7544273Abstract: A method of making a film having a uniform thickness and having a crystal axis parallel to a main surface of a substrate is described. In a deposition method, a film is formed by scattering a deposition material from a target (12) surface and growing the scattered deposition material on a main surface (100a) of a substrate (100). The method includes the steps of positioning the substrate (100) into a first state where the distance between one end (100f) and the target (12) is small and the distance between the other end (100e) and the target material (12) is relatively large, forming a first film (110) on the substrate (100) in the first state, positioning the substrate (100) into a second state where the distance between one end (100f) and the target (12) is large and the distance between the other end (100e) and the target (12) is small, and. forming a second film (120) on the first film (110) in the second state.Type: GrantFiled: December 10, 2001Date of Patent: June 9, 2009Assignees: Sumitomo Electric Industries, Ltd., International Superconductivity TechnologyInventors: Takahiro Taneda, Koso Fujino, Kazuya Ohmatsu
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Publication number: 20090137400Abstract: A superconducting thin film material that can realize attainment of an excellent property such as a high JC and a high IC and reduction of costs at the same time includes an orientated metal substrate and an oxide superconductor film formed on the orientated metal substrate. The oxide superconductor film includes a physical vapor deposition HoBCO layer formed by a physical vapor deposition method, and a metal organic deposition HoBCO layer formed on the physical vapor deposition HoBCO layer by a metal organic deposition method.Type: ApplicationFiled: April 20, 2007Publication date: May 28, 2009Applicants: Sumitomo Electric Industries, Ltd., International Superconductivity Technology Center, the Juridical FoundationInventors: Shuji Hahakura, Kazuya Ohmatsu, Munetsugu Ueyama, Katsuya Hasegawa
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Patent number: 7501145Abstract: A method includes feeding an uncoated substrate from a payout spool into a multi-chambered vacuum apparatus. The vacuum apparatus includes a plurality of deposition chambers defining an extended deposition zone, a multi-zone substrate heater located within the extended deposition zone, and multiple high-temperature superconductor (HTS) targets located within and being arranged linearly along the extended deposition zone. The multiple HTS targets include a first and second HTS target. The first and second HTS targets include a HTS material. The method farther includes translating the uncoated substrate along a translation path through the plurality of deposition chambers, impinging multiple laser beams simultaneously upon the multiple HTS targets and forming multiple overlapping plumes of HTS material within the extended deposition zone, depositing HTS material on a first major surface of the uncoated substrate to provide a coated substrate, and winding the coated substrate onto a take-up spool.Type: GrantFiled: October 30, 2006Date of Patent: March 10, 2009Assignee: Superpower, Inc.Inventors: Venkat Selvamanickam, Yijie Li, Chan Park
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Publication number: 20080318793Abstract: The invention relates to a method for producing a superconductive element to be used as a wire-in-channel superconductor in magnetic resonance imaging (MRI) and in nuclear magnetic resonance (NMR) applications, which superconductive element contains a superconductive wire and a copper component having a longitudinal groove and the superconductive wire being positioned in the groove. In order to produce the wire-in-channel superconductive element by a mechanical contact between the superconductive wire and a wall of the groove in the copper component, at least one contact surface is coated with a lead free solder material before having the mechanical contact. In order to enhance the thermal and electrical conduction and to create a bond between the said components the soldering material is fused in annealing process step.Type: ApplicationFiled: May 11, 2006Publication date: December 25, 2008Inventor: Jukka Somerkoski
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Patent number: 7445808Abstract: A superconducting article and a method of making a superconducting article is described. The method of forming a superconducting article includes providing a substrate, forming a buffer layer to overlie the substrate, the buffer layer including a first buffer film deposited in the presence of an ion beam assist source and having a uniaxial crystal texture. The method further includes forming a superconducting layer to overlie the buffer layer.Type: GrantFiled: December 28, 2005Date of Patent: November 4, 2008Assignee: Superpower, Inc.Inventors: Xuming Xiong, Venkat Selvamanickam, Ping Hou
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Patent number: 7439208Abstract: A method of forming MgB2 films in-situ on a substrate includes the steps of (a) depositing boron onto a surface of the substrate in a deposition zone; (b) moving the substrate into a reaction zone containing pressurized, gaseous magnesium; (c) moving the substrate back into the deposition zone; and (d) repeating steps (a)-(c). In a preferred embodiment of the invention, the substrate is moved into and out of the deposition zone and the reaction zone using a rotatable platen.Type: GrantFiled: December 1, 2003Date of Patent: October 21, 2008Assignee: Superconductor Technologies, Inc.Inventors: Brian H. Moeckly, Ward S. Ruby
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Patent number: 7393600Abstract: A sintered article is fabricated which contains one or more of indium oxide, zinc oxide, and tin oxide as a component thereof and contains any one or more types of metal out of hafnium oxide, tantalum oxide, lanthanide oxide, and bismuth oxide. A backing plate is attached to this sintered article to constitute a sputtering target. This sputtering target is used to fabricate a conductive film on a predetermined substrate by sputtering. This conductive film achieves a large work function while maintaining as much transparency as heretofore. This conductive film can be used to achieve an EL device or the like of improved hole injection efficiency.Type: GrantFiled: June 9, 2003Date of Patent: July 1, 2008Assignee: Idemitsu Kosan Co., Ltd.Inventors: Kazuyoshi Inoue, Hisayuki Kawamura
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Patent number: 7335283Abstract: A method and an apparatus which permits making a composite oxide thin film excellent in crystallinity easily and at a low temperature, with the capability of controlling the basic unit cell structure as desired, and without the need for a post annealing, as well as a composite oxide thin film thereby, especially a Cu group high temperature superconducting thin film, are disclosed. A thin Cu group high temperature superconducting film, which is constituted of a charge supply block (1) and a superconducting block (2), is formed on a substrate by alternately sputtering from a sputtering target having a composition of the charge supply block (1) and a sputtering target having a composition of the superconducting block (2) and repeating such an alternate sputtering operation a number of times needed for the film to reach a desired thickness.Type: GrantFiled: August 24, 2001Date of Patent: February 26, 2008Assignees: Japan Science and Technology Corporation, National Institute of Advanced Industrial Science and TechnologyInventors: Yoshiko Ihara, legal representative, Hideyo Ihara, legal representative, Hidetaka Ihara, legal representative, Gen-ei Ihara, legal representative, Chiaki Ihara, legal representative, Sundaresan Athinarayanan, JiaCai Nie, Hideo Ihara
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Patent number: 7247340Abstract: A method of forming a superconducting conductor is disclosed. The method provides translating a substrate tape through a deposition chamber and along a helical path, where the helical path has multiple windings of the substrate tape and each winding of the substrate tape extends along a feed path and a return path. The method further provides depositing a HTS layer overlying the substrate tape within a deposition chamber, wherein the deposition chamber houses the substrate tape along the feed path but not the return path.Type: GrantFiled: December 28, 2005Date of Patent: July 24, 2007Assignee: Superpower, Inc.Inventors: Thomas Martin Salagaj, Venkat Selvamanickam
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Patent number: 7189425Abstract: A superconducting magnesium diboride (MgB2) thin film having c-axial orientation and a method and apparatus for fabricating the same are provided. The fabrication method includes forming a boron thin film on a substrate and thermally processing the substrate on which the boron thin film is formed along with a magnesium source and cooling the resulting structure. The superconducting magnesium diboride thin film can be used in a variety of electronic devices employing superconducting thin films, such as precision medical diagnosis equipment using superconducting quantum interface devices (SQUIDs) capable of sensing weak magnetic fields, microwave communications equipment used for satellite communications, and Josephson devices. Computer systems with 100 times greater computing speed can be implemented with the superconducting magnesium diboride thin film.Type: GrantFiled: February 20, 2004Date of Patent: March 13, 2007Assignee: Pohang University of Science and Technology FoundationInventors: Won nam Kang, Sung-ik Lee, Eun-mi Choi, Hyeong-jin Kim
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Patent number: 7074744Abstract: A method of coating a substrate for a high temperature superconductor material is disclosed, including loading a substrate into a first deposition chamber, routing the substrate in the first deposition chamber such that the substrate forms a helical winding in the first deposition chamber, and depositing a first buffer layer to overlie the substrate as the substrate translates along the helical winding. The buffer layer has a biaxial crystallographic texture.Type: GrantFiled: May 18, 2005Date of Patent: July 11, 2006Assignee: SuperPower, Inc.Inventors: Venkat Selvamanickam, Srinivas Sathiraju
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Patent number: 7037595Abstract: A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer of hafnium oxide is in amorphous form and has a density less than 8 gm/cm3. The layer is formed by depositing on a substrate without energy input to the substrate.Type: GrantFiled: November 15, 1999Date of Patent: May 2, 2006Assignee: Commissariat a l'Energie AtomiqueInventors: Bernard Andre, Jean Dijon, Brigitte Rafin
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Patent number: 6994775Abstract: The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.Type: GrantFiled: July 31, 2002Date of Patent: February 7, 2006Assignee: The Regents of the University of CaliforniaInventors: Terry G. Holesinger, Quanxi Jia
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Patent number: 6929820Abstract: A method includes forming an as-grown film of a superconductor composed of a MgB2 compound which is made by simultaneous evaporation of magnesium and boron. The as-grown film is superconductive without an annealing process to make the film superconductive. The method can be applied to fabricate an integrated circuit of the superconductor film, because a high temperature annealing process to make the as-grown film superconductive is not needed.Type: GrantFiled: September 9, 2002Date of Patent: August 16, 2005Assignee: National Institute of Information and Communications TechnologyInventors: Hisashi Shimakage, Atsushi Saito, Akira Kawakami, Zhen Wang
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Patent number: 6906008Abstract: The present invention is a deposition system for the production of coated substrates that provides a first deposition process that subsequently feeds a second deposition process and where the two deposition processes are occurring concurrently. The consecutive deposition system includes two dynamically isolated deposition chambers. The substrate is helically wrapped about a cooling block within the first deposition chamber such that the tape is exposed to a deposition zone a number of times sufficient to correspond to the desired film thickness. A shielding element may be included in the second deposition chamber to limit the size of the second chamber deposition zone and thus the film thickness of the second coating layer.Type: GrantFiled: June 26, 2003Date of Patent: June 14, 2005Assignee: SuperPower, Inc.Inventors: Venkat Selvamanickam, Srinivas Sathiraju
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Patent number: 6843898Abstract: Copper or excess copper is added to one or more layers of a superconducting composite structure to reduce migration of copper form a copper based superconducting layer.Type: GrantFiled: April 6, 2004Date of Patent: January 18, 2005Assignee: The Regents of the University of CaliforniaInventors: Terry G. Holesinger, Stephen R. Foltyn, Paul N. Arendt, James R. Groves, Quanxi Jia, Alicia Ayala
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Patent number: 6835696Abstract: The present invention provides methods forming the superconductor of as-grown film of MgB2 which is made with magnesium and boron ejected from a magnesium target and a boron target, respectively, each in simultaneously sputtering process. The as-grown film composed of a compound of magnesium and boron is a superconductor without being annealed. The present invention can be applied to fabricate an integrated circuit of superconductor film, because the high temperature annealing process for the as-grown film of MgB2 is unnecessary.Type: GrantFiled: September 6, 2002Date of Patent: December 28, 2004Assignee: Communications Research Laboratory Independent Administrative InstituteInventors: Atsushi Saito, Akira Kawakami, Hisashi Shimakage, Zhen Wang
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Patent number: 6752911Abstract: The invention relates to a device for coating an object at a high temperature by means of cathode sputtering, having a vacuum chamber and a sputter source, the sputter source having a sputtering cathode. Inside the vacuum chamber is arranged an inner chamber formed from a heat-resistant material, which completely surrounds the sputtering cathode and the object to be coated, at a small spacing, and which has at least one opening to let a gas in and at least one opening to let a gas out.Type: GrantFiled: July 16, 2002Date of Patent: June 22, 2004Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.Inventor: Thomas Jung
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Publication number: 20040110042Abstract: The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.Type: ApplicationFiled: July 31, 2002Publication date: June 10, 2004Inventors: Terry G. Holesinger, Quanxi Jia
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Patent number: 6740624Abstract: A method and an apparatus for spraying materials onto a substrate to produce a coating thereon is described which allows very thick layers of complex metal oxides to be produced. The apparatus and method are particularly suitable for producing superconducting coatings.Type: GrantFiled: January 29, 2001Date of Patent: May 25, 2004Assignee: Universiteit GentInventors: Serge Hoste, Frans Persyn, Isabel Van Driessche
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Patent number: 6676811Abstract: A method of depositing nanoparticles for flux pinning into a superconducting material is described. According to the method of the present invention, a target made of superconducting material and a substrate are placed in the deposition chamber of a pulsed laser deposition apparatus. A first, moderate vacuum level is established in the chamber and the target is irradiated with light from a pulsed, high energy laser. By virtue of the moderate vacuum level, the material ejected from the target is slowed sufficiently to agglomerate into nanoparticles having the same composition as the target material. These nanoparticles are deposited upon the substrate. A uniform layer of superconducting material is deposited on the substrate by evacuating the deposition chamber to a second, high vacuum level and performing the pulsed laser deposition process again. The nanoparticles thus deposited within the superconducting material act as a flux pinning mechanism.Type: GrantFiled: July 17, 2002Date of Patent: January 13, 2004Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: Paul N. Barnes, P. Terry Murray
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Publication number: 20030181337Abstract: A plurality of superconductor particles are formed being of a first material which is relatively brittle and is selected to be in a superconductive state at a relatively high temperature, typically above 77K which is the temperature of liquid nitrogen. A coating layer is formed on each superconductor particle, the coating layer being of a second material selected to be substantially non-reactive with the first material. The coated particles are then mixed with a third material to form a composite wherein the third material is in proximity to the first material but separated by the second material. The third material is selected to be relatively ductile when compared to the first material and to be driven to a superconductive state by the first material when the first material is in a superconductive state and the third material is in proximity to the first material. The second material protects the third material from oxidation by the first material.Type: ApplicationFiled: December 24, 2002Publication date: September 25, 2003Inventor: Matthew J. Holcomb
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Publication number: 20030096711Abstract: The present invention provides methods forming the superconductor of as-grown film of MgB2 which is made with magnesium and boron ejected from a magnesium target and a boron target respectively each in simultaneously sputtering process. The as-grown film composed of a compound of magnesium and boron is a superconductor without annealed. The present invention can be applied to fabricate an integrated circuit of superconductor film, because the high temperature annealing process for the as-grown film of MgB2 is not needed.Type: ApplicationFiled: September 6, 2002Publication date: May 22, 2003Applicant: Communications Research Laboratory, Independent Administrative InstitutionInventors: Atsushi Saito, Akira Kawakami, Hisashi Shimakage, Zhen Wang
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Patent number: 6555221Abstract: A method for forming an ultra microparticle-structure composed of ultra microparticles including the steps of: forming on a substrate higher wettability parts and lower wettability parts to a material to be deposited, depositing on the substrate the material to be deposited to form particles made of the material on the substrate, and accumulating the particles in the higher wettability parts to form the ultra microparticle-structure composed of the ultra microparticles.Type: GrantFiled: October 25, 1999Date of Patent: April 29, 2003Assignee: The University of TokyoInventors: Hiroshi Komiyama, Hiroaki Shirakawa, Toshio Osawa
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Patent number: 6506439Abstract: An apparatus and process for applying a superconductive layer on an elongate substrate that includes moving the elongate substrate through a heating zone, applying a pulsed laser beam against a target, having a length, that is coated with superconductive material wherein particles of superconductive material are separated from the target and strike the elongate substrate with a plasma beam in the heating zone, and oscillating the pulsed laser beam across the target to provide a substantially uniform coating of superconductive material on the elongate substrate.Type: GrantFiled: November 22, 2000Date of Patent: January 14, 2003Assignee: Zentrum für Funktionswerkstoffe Gemeinnuetzige Gesellschaft mbHInventors: Alexander Usoskin, Herbert Carl Freyhardt, Juergen Knoke
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Patent number: 6387851Abstract: An SrTiO3 monocrystal substrate having a crystallographic plane (100) or (110) is anisotropically etched in an H3PO4 solution using an SiO2 thin film as an etching mask. The H3PO4 solution is maintained at a boiling point of approximately 150 deg. C. for increasing an etching rate and enhancing selectivity for protection with the SiO2 thin film mask.Type: GrantFiled: December 16, 1999Date of Patent: May 14, 2002Assignee: Hitachi, Ltd.Inventor: Takao Matsumoto
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Patent number: 6333111Abstract: The present invention provides a method for producing layered aluminum fine particles, and applications to single electron tunneling quantum devices, and the present invention further relates to a method for producing spherical metallic aluminum fine particles (layered aluminum fine particles), characterized in that metallic aluminum is supplied into a mixed gas of helium and 1×10−7 to 3×10−7 torr water vapor by sputtering induced by argon gas discharge to generate aggregates, after which this product is released into a vacuum to generate single crystals in which the surface layer is covered with alumina.Type: GrantFiled: March 13, 2000Date of Patent: December 25, 2001Assignee: Agency of Industrial Science and TechnologyInventors: Junichi Murakami, Yutaka Tai, Kazuki Yoshimura, Kazuo Igarashi, Sakae Tanemura, Masahiro Goto
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Patent number: 6214772Abstract: A method is presented for making a polycrystalline thin film (B) by depositing particles emitted from a target (36) on a substrate base (A) to form the film (B) constituted by the target material while concurrently irradiating the depositing particles with an ion beam generated by an ion source (39) at an angle of incidence, in a range of 50 to 60 degrees to a normal (H) to a film surface, and maintaining a film temperature at less than 300 degrees Celsius. This method is effective in producing an excellent alignment of crystal axes of the grains in the film when the film thickness exceeds 200 nm. The target material includes yttrium-stabilized zirconia but other material can also be used. A layer (C) of a superconducting substance formed on top of the polycrystalline thin film (B) produces a superconducting film (22) exhibiting excellent superconducting properties.Type: GrantFiled: June 18, 1998Date of Patent: April 10, 2001Assignee: Fujikura Ltd.Inventors: Yasuhiro Iijima, Mariko Hosaka, Nobuo Tanabe, Nobuyuki Sadakata, Takashi Saitoh