Utilizing Brush Or Absorbent Applicator Patents (Class 205/117)
  • Patent number: 8968839
    Abstract: There is provided a method for producing a surface-treated metallic material, by use of which a metallic material having a stable and excellent sliding characteristic can be produced with a low environmental load without covering the metallic material surface with an oxide film. The method for producing a surface-treated metallic material includes immersing an anode and a cathode in an electrolyte solution, placing a metallic material used as a material to be treated above the surface of the electrolyte solution, and applying a voltage between the anode and the cathode to treat the metallic material surface, the voltage being equal to or higher than a voltage for causing a complete plasma state.
    Type: Grant
    Filed: November 24, 2011
    Date of Patent: March 3, 2015
    Assignee: JFE Steel Corporation
    Inventors: Masayasu Nagoshi, Kaoru Sato, Seiichi Watanabe, Souki Yoshida
  • Patent number: 8529747
    Abstract: An exposed surface on a steel component is prepared for an application of a nickel high speed solution. The nickel high speed solution is applied to the exposed surface to create an intermediate surface on the component. The intermediate surface is prepared for an application of a nickel sulfamate solution. The nickel sulfamate solution is applied to the intermediate surface to create a duplex brush plating.
    Type: Grant
    Filed: July 12, 2011
    Date of Patent: September 10, 2013
    Assignee: The Boeing Company
    Inventors: Stephen P. Gaydos, Mary Ann Gilman
  • Patent number: 8512542
    Abstract: A method for the electrochemical coating of a substrate uses brush plating. This is to take place with an electrolyte in that particles are dispersed, which are embedded into the developing layer. It is proposed to add the particles to the carrier for the electrolyte by way of a separate conduit system. The electrolyte is added by way of a conduit system. In this way it is achieved that an agglomeration of the particles in the electrolyte can be prevented because only a short time passes between when the particles are fed and the layer is formed. A device for electrochemical coating has two conduit systems provided for this purpose.
    Type: Grant
    Filed: April 1, 2009
    Date of Patent: August 20, 2013
    Assignee: Siemens Aktiengesellschaft
    Inventors: Frank Heinrichsdorff, Jens Dahl Jensen, Hans-Richard Kretschmer, Daniel Reznik, Arno Steckenborn
  • Patent number: 8192606
    Abstract: A device and a method for metallic electrolytic coating of an object of electrically conductive material, wherein the object has at least two surface portions that are desired to be coated with layers of different thicknesses. The device includes an anode. The device is designed to receive the object in such a way that the object constitutes a cathode and that, upon receipt of the object, a space is formed for receiving a liquid-absorbing material and an electrolyte for coating the object. The body of the anode includes at least two surface portions) that have different electrical conductivity and that are arranged opposite to the surface portions of the received object.
    Type: Grant
    Filed: December 19, 2006
    Date of Patent: June 5, 2012
    Assignee: ABB Technology Ltd.
    Inventor: Jan Haglund
  • Publication number: 20120058692
    Abstract: A contact is included by an electrical connector and has a base layer and a plating layer. The base layer includes a contacting portion at one end thereof, a soldering portion at the other end thereof, and a connecting portion connecting the contacting portion and the soldering portion. The plating layer is plated on the base layer. The plating layer includes a nickel plating layer plated on the contacting portion, the soldering portion and the connecting portion of the base layer, a first gold plating layer and a second gold plating layer plated on two end portions of the nickel plating layer corresponding to the contacting portion and the soldering portion, respectively. A middle portion of the nickel plating layer corresponding to the connecting portion is exposed outside.
    Type: Application
    Filed: September 2, 2010
    Publication date: March 8, 2012
    Applicant: Cheng Uei Precision Industry Co., LTD
    Inventors: CHENG-QIANG HUANG, Bing-Tao Yang, Yin-Lung Wu, Ming-Chiang Chen
  • Publication number: 20110195272
    Abstract: A process is provided for the protection of a metal substrate of an aircraft part, in particular made of aluminum alloy, from corrosion and abrasion. The method includes the formation, on the substrate, of a coating made of alloy of zinc and nickel and then polishing the coating thus formed. This process can additionally include applying, to the polished coating made of alloy of zinc and nickel, a transparent and airtight surface coating.
    Type: Application
    Filed: February 8, 2011
    Publication date: August 11, 2011
    Applicant: DALIC
    Inventors: Sylvie Guibert-Claverie, Yvan Thareau
  • Patent number: 7897027
    Abstract: A plating method includes providing an article in a plating bath, covering a surface of the article with an insulating member in the plating bath, and electrolytically plating the article while moving one of the insulating member and the article relative to each other.
    Type: Grant
    Filed: December 23, 2008
    Date of Patent: March 1, 2011
    Assignee: IBIDEN Co., Ltd.
    Inventors: Toru Nakai, Satoru Kawai, Hiroshi Niwa, Yoshiyuki Iwata
  • Patent number: 7754061
    Abstract: A plating apparatus and method for deposition of a conductive material on a semiconductor wafer having surface portions and cavity portions. A differential in an adsorbed concentration of an additive, including accelerators or suppressors, between a surface portion and a cavity portion of a wafer surface is established in a chamber. A mask or sweeper may be used to establish the differential. After establishing the differential in the chamber, the conductive material is electrodeposited to form a conductive layer on the surface in another chamber.
    Type: Grant
    Filed: September 6, 2005
    Date of Patent: July 13, 2010
    Assignee: Novellus Systems, Inc.
    Inventor: Bulent M. Basol
  • Patent number: 7674706
    Abstract: A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.
    Type: Grant
    Filed: March 16, 2005
    Date of Patent: March 9, 2010
    Assignee: FEI Company
    Inventors: George Y. Gu, Neil J. Bassom, Thomas J. Gannon, Kun Liu
  • Patent number: 7638028
    Abstract: A method of processing a probe element includes (a) providing a probe element comprising a first conductive material, and (b) coating only a tip portion of the probe element with a second conductive material.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: December 29, 2009
    Assignee: SV Probe Pte. Ltd.
    Inventors: Bahadir Tunaboylu, Edward L. Malantonio, David T. Beatson, Andrew Hmiel
  • Publication number: 20090266715
    Abstract: A composition that includes at least one alkali metal hydroxide, at least one alkali metal silicate, at least one alkali metal fluoride, and hydrogen peroxide. The invention also includes a method of applying an anodic coating on at least a portion of a surface of a magnesium-containing article that includes the steps of electrically connecting the article with a power source, absorbing a composition with an absorbent applicator, which is in contact with a cathode, supplying a voltage from the power source, and contacting the absorbent applicator with the article, wherein the composition comprises at least one alkali metal hydroxide, at least one alkali metal silicate, at least one alkali metal fluoride and hydrogen peroxide.
    Type: Application
    Filed: March 2, 2009
    Publication date: October 29, 2009
    Inventors: Earl R. Woolsey, William C. Gorman, JR.
  • Patent number: 7404886
    Abstract: The present invention relates to methods for plating a conductive material on a substrate surface in a highly desirable manner. The invention removes at least one additive adsorbed on the top portion of the workpiece more than at least one additive disposed on a cavity portion, thereby allowing plating of the conductive material take place before the additive fully re-adsorbs onto the top portion and causing greater plating of the cavity portion relative to the top portion.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: July 29, 2008
    Assignee: Novellus Systems, Inc.
    Inventor: Bulent Basol
  • Patent number: 7235165
    Abstract: An electroplating solution may be formulated as an aqueous solution of oxalic acid, trisodium phosphate and ammonium sulfate. Such solutions may be used for both brush plating and bath plating, and are suitable for use with a variety of plating metals and substrate metals without the need to add plating metal ions to the solution in the form of metal salts, chelates or complexes.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: June 26, 2007
    Inventor: Richard Lacey
  • Patent number: 7160427
    Abstract: A method of plating contacts in situ within an electrical connector, the connector having a plurality of contacts circumscribed by a skirt of a connector body. The method comprises. grounding the contacts and then applying a plate coating onto the contacts within the connector body.
    Type: Grant
    Filed: July 19, 2004
    Date of Patent: January 9, 2007
    Assignee: Pratt & Whitney Canada Corp.
    Inventors: Joel Fournier, Danielle Miousse, Jean-Marc Limoges, Serge Lalancette, David Arseneault
  • Patent number: 7067423
    Abstract: An electroless plating apparatus includes: a storage tank for an electroless plating solution; a blocking member which blocks the electroless plating solution from flowing from a treatment side of a semiconductor wafer installed to the storage tank toward an opposite side to the treatment side, the treatment side being a side facing the electroless plating solution; and a solution supplier which causes the electroless plating solution to flow so that the electroless plating solution comes in contact with the treatment side of the semiconductor wafer.
    Type: Grant
    Filed: October 10, 2002
    Date of Patent: June 27, 2006
    Assignee: Seiko Epson Corporation
    Inventor: Hiroshi Ohara
  • Patent number: 7001498
    Abstract: An electroplating apparatus, in accordance with the present invention, includes a plurality of chambers. A first chamber includes an anode therein. The first chamber has an opening for delivering an electrolytic solution containing metal ions onto a surface to be electroplated. The surface to be electroplated is preferably a cathode. A second chamber is formed adjacent to the first chamber and has a second opening in proximity of the first opening for removing electrolytic solution containing metal ions from the surface to be electroplated. The plurality of chambers are adapted for movement in a first direction along the surface to be electroplated.
    Type: Grant
    Filed: October 10, 2002
    Date of Patent: February 21, 2006
    Assignee: International Business Machines Corporation
    Inventors: Evan George Colgan, John Christopher Flake, Lubomyr Taras Romankiw, Robert Luke Wisnieff
  • Patent number: 6946066
    Abstract: The present invention relates to a method for forming a planar conductive surface on a wafer. In one aspect, the present invention uses a no-contact process with electrochemical deposition, followed by a contact process with electrochemical mechanical deposition.
    Type: Grant
    Filed: July 22, 2002
    Date of Patent: September 20, 2005
    Assignee: ASM Nutool, Inc.
    Inventors: Bulent M. Basol, Cyprian E. Uzoh, Homayoun Talieh
  • Patent number: 6921551
    Abstract: The present invention relates to methods and apparatus for plating a conductive material on a workpiece surface in a highly desirable manner. Using a workpiece-surface-influencing device, such as a mask or sweeper, that preferentially contacts the top surface of the workpiece, relative movement between the workpiece and the workpiece-surface-influencing device is established so that an additive in the electrolyte solution disposed on the workpiece and which is adsorbed onto the top surface is removed or otherwise its amount or concentration changed with respect to the additive on the cavity surface of the workpiece. Plating of the conductive material can place prior to, during and after usage of the workpiece-surface-influencing device, particularly after the workpiece surface influencing device no longer contacts any portion of the top surface of the workpiece, to achieve desirable semiconductor structures.
    Type: Grant
    Filed: September 20, 2001
    Date of Patent: July 26, 2005
    Assignee: ASM Nutool, Inc.
    Inventor: Bulent M. Basol
  • Patent number: 6913681
    Abstract: A cathode potential is applied to a conductive layer formed on a substrate having a depression pattern. A plating solution in electrical contact with an anode is supplied to the conductive layer to form a plating film on the conductive layer. At this time, the plating solution is supplied by causing an impregnated member containing the plating solution to face the conductive layer. Since the plating solution stays in the depression, a larger amount of plating solution is supplied than on the upper surface of the substrate, and the plating rate of the plating film in the depression increases. Consequently, the plating film can be preferentially formed in the depression such as a groove or hole.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: July 5, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tetsuo Matsuda, Hisashi Kaneko, Katsuya Okumura
  • Patent number: 6902659
    Abstract: The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermine area by mechanically polishing the other areas while the conductive material is being applied.
    Type: Grant
    Filed: September 9, 2002
    Date of Patent: June 7, 2005
    Assignee: ASM Nutool, Inc.
    Inventor: Homayoun Talieh
  • Patent number: 6884334
    Abstract: The present invention relates to a containment chamber that is used for carrying out multiple processing steps such as depositing on, polishing, etching, modifying, rinsing, cleaning, and drying a surface on the workpiece. In one example of the present invention, the chamber is used to electro chemically mechanically deposit a conductive material on a semiconductor wafer. The same containment chamber can then be used to rinse and clean the same wafer. As a result, the present invention eliminates the need for separate processing stations for depositing the conductive material and cleaning the wafer. Thus, with the present invention, costs and physical space are reduced while providing an efficient apparatus and method for carrying out multiple processes on the wafer surface using a containment chamber.
    Type: Grant
    Filed: December 28, 2001
    Date of Patent: April 26, 2005
    Assignee: ASM NuTool, Inc.
    Inventors: Konstantin Volodarsky, Boguslaw A. Nigorski, Rimma Volodarsky, Douglas W. Young, Cyprian Uzoh, Homayoun Talieh
  • Patent number: 6869515
    Abstract: Embodiments of the present invention provide methods for enhancing void-free metallic filling of narrow openings by electrochemical deposition (ECD). The methods provide enhanced replenishment of plating inhibitor at the field, while depleting the inhibitor inside narrow openings. The resulting inhibitor gradients facilitate void-free ECD filling of narrow openings with large aspect ratios. The inventive methods utilize vigorous electrolyte agitation at the field and top corners of the openings, while maintaining a relatively stagnant electrolyte inside the openings. Vigorous agitation is produced, for example, by high pressure jets flow and/or by mechanical means, such as brush (or pad, or wiper blade) wiping, or by a combination of jets and wiping brushes.
    Type: Grant
    Filed: March 29, 2002
    Date of Patent: March 22, 2005
    Inventor: Uri Cohen
  • Patent number: 6863794
    Abstract: A method of forming a metal layer on a substrate is disclosed. The metal layer is formed using a combined electrochemical plating/electrochemical mechanical polishing (ECP/EMP) process. In the ECP/EMP process, the metal layer is deposited on the substrate by contacting the substrate with a porous pad and then alternately applying a first electrical potential and a second electrical potential to an electrolyte plating solution. The first electrical potential functions to deposit metal on the substrate while the second electrical potential functions to remove metal from topographic portions thereof.
    Type: Grant
    Filed: September 21, 2001
    Date of Patent: March 8, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Stan Tsai, Shijian Li
  • Publication number: 20040256237
    Abstract: There is provided an electrolytic processing apparatus and method which, while omitting a CMP treatment entirely or reducing a load upon a CMP treatment to the least possible extent, can process a conductive material formed in the surface of a substrate to flatten the material, or can remove (clean) extraneous matter adhering to the surface of a workpiece such as a substrate. The electrolytic processing apparatus includes: a pair of electrodes disposed at a given distance; an ion exchange disposed between the pair of electrodes; and a liquid supply section for supplying a liquid between the pair of electrodes. The electrolytic processing method includes: providing an electrode section having, a pair of electrodes disposed at a given distance with an ion exchanger being interposed: and bringing the electrode into contact with or close to a workpiece while supplying a fluid to the ion exchanger, thereby processing the surface of the workpiece.
    Type: Application
    Filed: August 9, 2004
    Publication date: December 23, 2004
    Inventors: Itsuki Kobata, Mitsuhiko Shirakashi, Masayuki Kumekawa, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki, Kaoru Yamada, Yuji Makita, Hozumi Yasuda, Ikutaro Noji, Kunio Fujiwara, Osamu Nabeya
  • Publication number: 20040168926
    Abstract: The present invention provides a method for forming a conductive film with uniform properties on a wafer surface that has features or cavities. During the process, the workpiece is rotated and laterally moved while an electrodeposition solution is delivered onto the wafer surface at a predetermined flow rate, and a potential difference is applied between the workpiece surface and the electrode. The workpiece is rotated about an axis at predetermined revolutions per minute so that an edge region of the workpiece has a first predetermined linear velocity due to the rotation. The workpiece has a second predetermined linear velocity due to the lateral motion. The second predetermined velocity may be larger than the first predetermined velocity. Further, the wafer may not be rotated.
    Type: Application
    Filed: December 22, 2003
    Publication date: September 2, 2004
    Inventors: Bulent M. Basol, Homayoun Talieh
  • Patent number: 6773570
    Abstract: A method and apparatus are described for performing both electroplating of a metal layer and planarization of the layer on a substrate. Electroplating and electroetching of metal (such as copper) are performed in a repeated sequence, followed by chemical-mechanical polishing. An electroplating solution, electroetching solution, and a non-abrasive slurry are dispensed on a polishing pad in the respective process steps. The substrate is held against the pad with a variable force in accordance with the process, so that the spacing between substrate and pad may be less during electroplating than during electroetching.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: August 10, 2004
    Assignee: International Business Machines Corporation
    Inventors: Laertis Economikos, Hariklia Deligianni, John M. Cotte, Henry J. Grabarz, Bomy Chen
  • Patent number: 6676822
    Abstract: The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermined area by mechanically polishing the other areas while the conductive material is being applied.
    Type: Grant
    Filed: June 29, 2000
    Date of Patent: January 13, 2004
    Assignee: Nutool, Inc.
    Inventor: Homayoun Talieh
  • Publication number: 20030132120
    Abstract: An electrochemical apparatus is provided which deposits material onto or removes material from the surface of a workpiece. The apparatus comprises a polishing pad and a platen which is in turn comprised of a first conductive layer in contact with the polishing pad and coupled to a first potential, a second conductive layer coupled to a second potential, and a first insulating layer disposed between the first and second conductive layers. At least one electrical contact is positioned within the polishing pad and is electrically coupled to the second conductive layer. A reservoir is provided which places an electrolyte solution in contact with the polishing pad and the workpiece. A carrier positions and/or presses the workpiece against the polishing pad.
    Type: Application
    Filed: January 11, 2002
    Publication date: July 17, 2003
    Inventors: Ismail Emesh, Periya Gopalan, Phillip M. Rayer, Bentley J. Palmer
  • Patent number: 6524462
    Abstract: This invention is a method of, providing conductive tracks on a printed circuit including coating a substrate carrying printed tracks with an electro-plating solution with a tool which provides a first electrode of an electro-plating circuit and a second electrode provided by the tracks which are to be electroplated, the tool including an absorptive member in which plating solution can be carried; a first electrode of an electro-plating circuit adapted to make electrical contact with plating solution carried by the absorptive member; and at least one tool second electrode electrically insulated from the first electrode and spaced from the absorptive member, the tool second electrode being so positioned that as the absorptive member is wiped across a surface of a substrate, the second electrode contactor can be wiped across the surface of the substrate to contact electrically conductive regions of the substrate to form a second electrode of the electro-plating circuit therewith.
    Type: Grant
    Filed: October 5, 2000
    Date of Patent: February 25, 2003
    Assignee: Technology Development Associate Operations Limited
    Inventor: John Michael Lowe
  • Publication number: 20030024819
    Abstract: This invention is a method of providing conductive tracks on a printed circuit including coating a substrate carrying printed tracks with an electro-plating solution with a tool which provides a first electrode of an electro-plating circuit and a second electrode provided by the tracks which are to be electroplated, and a tool suitable for use in electro-plating electrically conductive regions of a substrate, the tool including an absorptive member in which plating solution can be carried; a first electrode of an electro-plating circuit adapted to make electrical contact with plating solution carried by the absorptive member; and at least one tool second electrode electrically insulated from the first electrode and spaced from the absorptive member, the tool second electrode being so positioned that as the absorptive member is wiped across a surface of a substrate, the second electrode contactor can be wiped across the surface of the substrate to contact electrically conductive regions of the substrate to for
    Type: Application
    Filed: September 25, 2002
    Publication date: February 6, 2003
    Applicant: Technology Development Associate Operations Limited
    Inventor: John Michael Lowe
  • Patent number: 6508925
    Abstract: A method of depositing a metal coating (28) on the interconnect (26) of a tubular, hollow fuel cell (10) contains the steps of providing the fuel cell (10) having an exposed interconnect surface (26); contacting the inside of the fuel cell (10) with a cathode (45) without use of any liquid materials; passing electrical current through a contacting applicator (46) which contains a metal electrolyte solution; passing the current from the applicator (46) to the cathode (45) and contacting the interconnect (26) with the applicator (46) and coating all of the exposed interconnect surface.
    Type: Grant
    Filed: March 30, 2001
    Date of Patent: January 21, 2003
    Assignee: Siemens Westinghouse Power Corporation
    Inventor: Jeffrey William Long
  • Publication number: 20020153256
    Abstract: The present invention provides a method and apparatus for plating a conductive material to a substrate and also modifying the physical properties of a conductive film while the substrate is being plated. The present invention further provides a method and apparatus that plates a conductive material on a workpiece surface in a “proximity” plating manner while a pad type material or other fixed feature is making contact with the workpiece surface in a “cold worked” manner. In this manner, energy stored in the cold worked regions of the plated layer is used to accelerate and enhance micro-structural recovery and growth. Thus, large grain size is obtained in the plated material at a lower annealing temperature and a shorter annealing time.
    Type: Application
    Filed: June 6, 2002
    Publication date: October 24, 2002
    Applicant: Nutool, Inc.
    Inventors: Cyprian Emeka Uzoh, Homayoun Talieh
  • Publication number: 20020148732
    Abstract: An electrochemical deposition apparatus and method for depositing a material onto a surface of a workpiece and for polishing the material are disclosed. The apparatus includes a platen and a polishing surface, including a conductive material and conductors embedded therein, disposed proximate the platen. During material deposition, a bias is applied across the conductor and the platen to cause deposition of material onto the workpiece surface.
    Type: Application
    Filed: April 11, 2001
    Publication date: October 17, 2002
    Inventors: Ismail Emesh, Saket Chadda, Nikolay Korovin, Brian Mueller
  • Publication number: 20020139682
    Abstract: Systems and methods to remove or lessen the size of metal particles that have formed on, and to limit the rate at which metal particles form or grow on, workpiece surface influencing devices used during electrodeposition are presented. According to an exemplary method, the workpiece surface influencing device is occasionally placed in contact with a conditioning substrate coated with an inert material, and the bias applied to the electrodeposition system is reversed. According to another exemplary method, the workpiece surface influencing device is conditioned using mechanical contact members, such as brushes, and conditioning of the workpiece surface influencing device occurs, for example, through physical brushing of the workpiece surface influencing device with the brushes. According to a further exemplary method, the workpiece surface influencing device is rotated in different direction during electrodeposition.
    Type: Application
    Filed: October 17, 2001
    Publication date: October 3, 2002
    Inventors: Bulent M. Basol, Cyprian Uzoh, Homayoun Talieh
  • Publication number: 20020139681
    Abstract: A method of depositing a metal coating (28) on the interconnect (26) of a tubular, hollow fuel cell (10) contains the steps of providing the fuel cell (10) having an exposed interconnect surface (26); contacting the inside of the fuel cell (10) with a cathode (45) without use of any liquid materials; passing electrical current through a contacting applicator (46) which contains a metal electrolyte solution; passing the current from the applicator (46) to the cathode (45) and contacting the interconnect (26) with the applicator (46) and coating all of the exposed interconnect surface.
    Type: Application
    Filed: March 30, 2001
    Publication date: October 3, 2002
    Applicant: Siemens Westinghouse Power Corporation
    Inventor: Jeffrey William Long
  • Publication number: 20020096435
    Abstract: A cathode potential is applied to a conductive layer formed on a substrate having a depression pattern. A plating solution in electrical contact with an anode is supplied to the conductive layer to form a plating film on the conductive layer. At this time, the plating solution is supplied by causing an impregnated member containing the plating solution to face the conductive layer. Since the plating solution stays in the depression, a larger amount of plating solution is supplied than on the upper surface of the substrate, and the plating rate of the plating film in the depression increases. Consequently, the plating film can be preferentially formed in the depression such as a groove or hole.
    Type: Application
    Filed: March 28, 2002
    Publication date: July 25, 2002
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Tetsuo Matsuda, Hisashi Kaneko, Katsuya Okumura
  • Publication number: 20020056646
    Abstract: The present invention relates to a containment chamber that is used for carrying out multiple processing steps such as depositing on, polishing, etching, modifying, rinsing, cleaning, and drying a surface on the workpiece. In one example of the present invention, the chamber is used to electro chemically mechanically deposit a conductive material on a semiconductor wafer. The same containment chamber can then be used to rinse and clean the same wafer. As a result, the present invention eliminates the need for separate processing stations for depositing the conductive material and cleaning the wafer. Thus, with the present invention, costs and physical space are reduced while providing an efficient apparatus and method for carrying out multiple processes on the wafer surface using a containment chamber.
    Type: Application
    Filed: January 7, 2002
    Publication date: May 16, 2002
    Inventors: Konstantin Volodarsky, Boguslaw A. Nigorski, Rimma Volodarsky, Douglas W. Young, Cyprian Uzoh, Homayoun Talieh
  • Patent number: 6375823
    Abstract: A cathode potential is applied to a conductive layer formed on a substrate having a depression pattern. A plating solution in electrical contact with an anode is supplied to the conductive layer to form a plating film on the conductive layer. At this time, the plating solution is supplied by causing an impregnated member containing the plating solution to face the conductive layer. Since the plating solution stays in the depression, a larger amount of plating solution is supplied than on the upper surface of the substrate, and the plating rate of the plating film in the depression increases. Consequently, the plating film can be preferentially formed in the depression such as a groove or hole.
    Type: Grant
    Filed: February 9, 2000
    Date of Patent: April 23, 2002
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tetsuo Matsuda, Hisashi Kaneko, Katsuya Okumura
  • Patent number: 6368467
    Abstract: An electrolytic process for metal-coating the surface of a workpiece of an electrically conductive material includes i) providing an electrolytic cell with a cathode defining the surface of the workpiece and an anode; ii) introducing an electrolyte of an aqueous solution containing one or more water soluble compounds of the metal or metals to be deposited into the zone created between the anode and the cathode in a manner such that the cathode is bathed but not immersed in the electrolyte; and iii) applying a voltage between the anode and the cathode such that an electrical plasma arc is maintained between the anode and cathode during the deposition of the metal-coating onto the surface of the cathode.
    Type: Grant
    Filed: September 12, 2000
    Date of Patent: April 9, 2002
    Assignee: Metal Technology, Inc.
    Inventors: Edgar Harold Andrews, Valerij Leontievich Steblianko, Vitalij Makarovich Riabkov
  • Publication number: 20020033342
    Abstract: The present invention relates to a method for fabricating high performance chip interconnects and packages by providing methods for depositing a conductive material in cavities of a substrate in a more efficient and time saving manner. This is accomplished by selectively removing portions of a seed layer from a top surface of a substrate and then depositing a conductive material in the cavities of the substrate, where portions of the seed layer remains in the cavities. Another method includes forming an oxide layer on the top surface of the substrate such that the conductive material can be deposited in the cavities without the material being formed on the top surface of the substrate. The present invention also discloses methods for forming multi-level interconnects and the corresponding structures.
    Type: Application
    Filed: July 13, 2001
    Publication date: March 21, 2002
    Inventors: Cyprian Emeka Uzoh, Homayoun Talieh, Bulent Basol
  • Patent number: 6312580
    Abstract: A method is described for plating adherent, hard decorative gold in one or two steps, eliminating multistage substrate stripping on chromium plated automobile emblems.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: November 6, 2001
    Assignee: Tivian Industries, Ltd.
    Inventor: Perry W. Antelman
  • Patent number: 6270646
    Abstract: A metal plating apparatus is described which includes a compressible member having a conductive surface covering substantially all of the surface of the substrate to be plated. The plating current is thereby transmitted over a wide area of the substrate, rather than a few localized contact points. The compressible member is porous so as to absorb the plating solution and transmit the plating solution to the substrate. The wafer and compressible member may rotate with respect to each other. The compressible member may be at cathode potential or may be a passive circuit element.
    Type: Grant
    Filed: December 28, 1999
    Date of Patent: August 7, 2001
    Assignee: International Business Machines Corporation
    Inventors: Erick Gregory Walton, Dean S. Chung, Lara Sandra Collins, William E. Corbin, Jr., Hariklia Deligianni, Daniel Charles Edelstein, James E. Fluegel, Josef Warren Korejwa, Peter S. Locke, Cyprian Emeka Uzoh
  • Patent number: 6143156
    Abstract: The present invention provides an improved method for electroplating metallic ions onto a conductive substrate. In one embodiment, the method comprises at least partially covering a selected surface of the conductive substrate with an electrode wrap that includes a pad having an abrasive surface.The metallic ions are electrically depositing onto the selected surface through the electrode wrap while the conductive substrate is moved (e.g., rotated) relative to the electrode wrap. A substantially constant frictional force is controllably applied from the abrasive surface onto the selected surface while the metallic ions are being deposited. In this manner, a substantially constant abrasive force is applied to the selected surface as the thickness of the deposited metallic coating increases to create a relatively smooth, uniform, thick deposition that is substantially free of defects.
    Type: Grant
    Filed: July 24, 1998
    Date of Patent: November 7, 2000
    Assignee: CAE Vanguard, Inc.
    Inventor: Ming Jason Zhang
  • Patent number: 5453174
    Abstract: Thick layers of hard dense chromium coatings are formed on metal substrates by an electrolytic brush plating operation in which a lead-tin anode is closely positioned to a cathodic workpiece in full anode wrap relationship and the surface of the cathodic workpiece is wiped by an open construction wiper to remove hydrogen bubbles and/or outwardly extending dendritic coating material with minimum contact with and force upon the coating surface. The open wiper construction allows free access to the coated surface at all times of fresh undepleted coating electrolyte and allows hydrogen bubbles and dendritic material to be discharged unimpeded from the wiper structure.
    Type: Grant
    Filed: January 10, 1994
    Date of Patent: September 26, 1995
    Assignee: Electroplating Technologies Ltd.
    Inventors: Erik S. Van Anglen, Harold M. Keeney
  • Patent number: 5409593
    Abstract: A device is provided for brush electroplating a surface of a workpiece. The device includes an anode generally composed of a metal to be electroplated on the surface of the workpiece. The anode is selectively retained within a cavity formed in a lower surface of a carrier piece composed of a generally electrical non-conductive material. The lower surface of the carrier piece is shaped to conform to at least a portion of the surface of the workpiece. An absorbent material extends over the lower surface of the carrier piece to form a brush. The cover material and lower surface of the anode are spaced from each other to form a chamber. The device also includes an assembly, fluidly connected to the space between the anode and absorbent material, to inject a flow of the electrolytic fluid into the chamber.
    Type: Grant
    Filed: December 3, 1993
    Date of Patent: April 25, 1995
    Assignee: Sifco Industries, Inc.
    Inventor: Michael Moskowitz
  • Patent number: 5389228
    Abstract: A method is taught for application of an abrasive tip to a gas turbine blade by brush plating, wherein particulate abrasive is applied to the tip of said blade and held in position during electroplating by a porous dielectric cloth.
    Type: Grant
    Filed: February 4, 1993
    Date of Patent: February 14, 1995
    Assignee: United Technologies Corporation
    Inventors: Kenneth C. Long, Brian A. Manty, Charles C. McComas
  • Patent number: 5384026
    Abstract: A compact, hand portable, mobile electroplating unit provided with wheels, a seat for the user, and all of the chemical solutions and applicator equipment, including a D.C. power source, required to electroplate a metallic film on a metallic surface.
    Type: Grant
    Filed: May 10, 1994
    Date of Patent: January 24, 1995
    Assignee: Gold Effects, Inc.
    Inventor: Daniel A. McLaughlin
  • Patent number: 5277785
    Abstract: Thick layers of hard dense chromium coatings are formed on metal substrates by an electrolytic brush plating operation in which a lead-tin electrode having a porous polypropylene felt topped by an polypropylene molded brush element is maintained during coating continuously over the area to be electrolytically coated. The correct current density and flow of electrolytic coating solution as well as relative movement between the anode and brush element and the work piece are closely controlled to enable the hard chromium coating to be produced.
    Type: Grant
    Filed: July 16, 1992
    Date of Patent: January 11, 1994
    Inventor: Erik S. Van Anglen
  • Patent number: 5184550
    Abstract: Apparatus for controlling the wetting behavior of the surface of a cylinder formed of passivatable metal. A wetting device is used to apply an electrolyte to the surface of the metal cylinder. A direct current source is connected between the wetting device and the cylinder and a control device is used to control the voltage necessary for passivating the surface of the cylinder as a function of the pH value of the electrolyte and the type of metal forming the surface of the cylinder. The oleophilic or oleophobic characteristics of the cylinder are thus controlled.
    Type: Grant
    Filed: March 1, 1991
    Date of Patent: February 9, 1993
    Assignee: Heidelberger Druckmaschinen Ag
    Inventors: Hans-Jurgen Beck, Gabriele Nowara