Coating Has Specified Thickness Variation Patents (Class 205/95)
  • Publication number: 20100084277
    Abstract: A composition for copper plating and associated methods, a method of forming a copper wiring including forming an insulation layer having a recessed portion on a substrate, and forming a copper layer on the insulation layer to fill the recessed portion by performing an electroplating process using a composition that includes an aqueous electrolyte solution containing a copper ion and at least one of a disulfide compound represented by Formula 1, a betaine compound represented by at least one of Formulae 3 and 4, and a triblock copolymer of polyethylene oxide-polypropylene oxide-polyethylene oxide (PEO-PPO-PEO) having a weight average molecular weight of about 2,500 to about 5,000 g/mol and an ethylene oxide content (EO %, w/w) of about 30% to about 60%.
    Type: Application
    Filed: October 6, 2009
    Publication date: April 8, 2010
    Inventors: Myung-Beom Park, Hye-Young Jin, Jin-Seo Lee, Hye-Jin Cha, Jung-Sik Choi, Jung-Ho Lee, Ki-Hag Lee
  • Publication number: 20100038116
    Abstract: A printed circuit board includes an insulating layer, a copper layer formed on the insulating layer and a reinforcing layer formed on the copper layer at opposite sides of the given portion. The copper layer includes a plurality of electrical traces at a given portion thereof. A thickness of the reinforcing layer increases in a direction away from the given portion. A method for manufacturing the printed circuit board is also provided in this disclosure.
    Type: Application
    Filed: February 20, 2009
    Publication date: February 18, 2010
    Applicant: FOXCONN ADVANCED TECHNOLOGY INC.
    Inventors: CHUNG-JEN TSAI, CHIA-CHENG CHEN, HUNG-YI CHANG, TUNG-YAO KUO, CHENG-HSIEN LIN
  • Publication number: 20100021659
    Abstract: A sensor utilizing a non-leachable or diffusible redox mediator is described. The sensor includes a sample chamber to hold a sample in electrolytic contact with a working electrode, and in at least some instances, the sensor also contains a non-leachable or a diffusible second electron transfer agent. The sensor and/or the methods used produce a sensor signal in response to the analyte that can be distinguished from a background signal caused by the mediator. The invention can be used to determine the concentration of a biomolecule, such as glucose or lactate, in a biological fluid, such as blood or serum, using techniques such as coulometry, amperometry, and potentiometry. An enzyme capable of catalyzing the electrooxidation or electroreduction of the biomolecule is typically provided as a second electron transfer agent.
    Type: Application
    Filed: September 29, 2009
    Publication date: January 28, 2010
    Inventors: Benjamin J. Feldman, Adam Heller, Ephraim Heller, Fei Mao, Josehp A. Vivolo, Jeffery V. Funderburk, Fredric C. Colman, Rajesh Krishnan
  • Publication number: 20090038946
    Abstract: A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cm2 or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.
    Type: Application
    Filed: May 9, 2006
    Publication date: February 12, 2009
    Applicants: Tohoku University, Mitsubishi Chemical Corporation
    Inventors: Tadahiro Ohmi, Yasuyuki Shirai, Hitoshi Morinaga, Yasuhiro Kawase, Masafumi Kitano, Fumikazu Mizutani, Makoto Ishikawa
  • Publication number: 20080128286
    Abstract: An electrode is described. The electrode includes a substrate having a first and a second surface, a conductive layer, multilayer structure having alternating layers of at least one polymer layer and at least one electroactive chemical bound nanoparticle layer. The conductive layer is disposed on the second surface of the substrate, and the multilayer structure is disposed on the conductive layer.
    Type: Application
    Filed: December 4, 2006
    Publication date: June 5, 2008
    Inventors: Junjun Wu, John E. Potts, Jung-Sheng Wu
  • Publication number: 20080110759
    Abstract: A method of performing electrochemical deposition is provided to minimize overburden. A constant plating voltage (and a variable plating current) is applied across a semiconductor structure (e.g., patterned dielectric layer) and a metal electrode, which are both submerged in an electrolyte that contains both suppressor and accelerator molecules. The constant plating voltage is selected such that the suppressor molecules are predominantly active on the flat upper surface of the patterned dielectric layer, and the accelerator molecules are predominantly active within the patterned features of the patterned dielectric layer. As a result, metal is deposited at a relatively high rate within the patterned features, and at a relatively low rate on the flat upper surface areas of the patterned dielectric layer. Consequently, the patterned features are filled with metal before significant overburden can be formed over the flat upper surface areas of the patterned dielectric layer.
    Type: Application
    Filed: November 14, 2006
    Publication date: May 15, 2008
    Applicant: Tower Semiconductor Ltd.
    Inventors: David Sarosvetsky, Nina Sezin, Yair Ein-Eli, Mark Kovler
  • Patent number: 7223328
    Abstract: Provided is a gas molecule sensor, characterized in that the sensing element is a polycrystalline tin oxide film having a thickness less than 1 ?m. The sensing element is produced by electrolytic deposit of a tin film on an insulating support in an electromechanical cell, where the anode is comprised of tin and the cathode is a conductive film applied on the surface of the insulating support at one of its ends, the two electrodes being separated by an electrolyte comprised of a tin salt solution, and by passing a constant current through said cell. The deposit step is followed by an oxidizing step.
    Type: Grant
    Filed: July 18, 2001
    Date of Patent: May 29, 2007
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Vincent Fleury, Thierry Devers, Lévi Allam
  • Patent number: 7163613
    Abstract: There is provided a semiconductor device comprising: a first plating layer formed on one surface of an interconnect pattern; a second plating layer formed within through holes in the interconnect pattern; a semiconductor chip electrically connected to the first plating layer; an anisotropic conductive material provided on the first plating layer; and a conductive material provided on the second plating layer, wherein the first plating layer has appropriate adhesion properties with the anisotropic conductive material, and the second plating layer has appropriate adhesion properties with the conductive material.
    Type: Grant
    Filed: August 24, 2004
    Date of Patent: January 16, 2007
    Assignee: Seiko Epson Corporation
    Inventor: Nobuaki Hashimoto
  • Patent number: 6875330
    Abstract: A process is provided for coating metallic workpieces with a bearing material, wherein the workpiece first receives a hard chromium plating having a pearl or columnar structure type surface. A predominantly silver layer is then galvanically deposited, which fills in and smooths the pearl or columnar structure type surface of the hard chromium plating. Optionally, additional hard chromium platings and predominantly silver-containing layers may be applied, preferably galvanically. The predominantly silver layer may advantageously contain a graphite component.
    Type: Grant
    Filed: May 2, 2002
    Date of Patent: April 5, 2005
    Assignee: Duralloy AG
    Inventor: Marco Santini
  • Patent number: 6875519
    Abstract: A two-layer copper polyimide substrate includes a modified layer on the surface of a polyimide film having a thickness of not more than 200 ?, and preferably not less than 50 ?, as evaluated by a method by dyeing a section thereof with a silver nitrate aqueous solution and observing it by a transmission electron microscope (TEM). A metal seed layer is formed on the polyimide film surface, followed by forming a copper layer thereon by copper electroplating or copper electroless plating or a combination of the both, providing a two-layer copper polyimide substrate in which any of an initial adhesion, a heat resistant adhesion after standing in air at 150° C. for 168 hours, and a PCT adhesion after PCT test at 121° C. and at a humidity of 95% under 2 atmospheres for 100 hours are 400 N/m or more.
    Type: Grant
    Filed: May 22, 2003
    Date of Patent: April 5, 2005
    Assignee: Sumitomo Metal Mining Co., Ltd.
    Inventors: Noriyuki Saeki, Takefumi Sakou, Hiroto Watanabe, Yoshiro Ishii
  • Publication number: 20040028849
    Abstract: A low temperature method for forming a microcavity on a substrate and article having same are provided which utilize electroplated films. The method is particularly useful to package microelectromechanical systems (MEMS) in vacuum on the wafer level and provide sealed feedthroughs to the outside world. The method may be performed in a batch process to substantially reduce cost and to form metal diaphragms. Furthermore, the method is performed at near room temperature, which provides more flexibility in the manufacturing process. The method enables substantial cost savings in the production of vacuum-sealed MEMS. Many feedthroughs can be incorporated into the package to transfer signals in and out of the package. One significant advantage of this method is that it does not require bonding of a second substrate, which reduces the system cost.
    Type: Application
    Filed: April 16, 2003
    Publication date: February 12, 2004
    Inventors: Brian H. Stark, Khalil Najafi
  • Publication number: 20030205477
    Abstract: An electrode assembly arrangement for improving an electrodeposition process and method for using the same the electrode assembly arrangement including a first electrode assembly and a second electrode assembly positioned to carry a metal containing electrolyte from the first electrode assembly to the second electrode assembly for deposition of the metal upon applying an electrical potential therebetween; at least one additional electrode assembly including a means for selectively applying an electrical potential thereto the at least one additional electrode assembly positioned to attract an electrolyte flow upon applying an electrical potential between the at least one additional electrode assembly and the second electrode assembly.
    Type: Application
    Filed: May 6, 2002
    Publication date: November 6, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Wei Chou, Ming-Hsing Tsai
  • Patent number: 6495018
    Abstract: A single delivery channel is formed by, and between, inner wall 2 and baffle 3. Electrolyte 5 is pumped up the interior of channel 1 and is directed onto substrate 4 being a cathode maintained at −10 volts. The upper part of the inner wall 2 of channel 1 forms the anode such that electrote is forced between the substrate and the upper horizontal surface of the anode 6. A second baffle 7 is provided in order to assist in collecting and removing electrolyte 5 after impingement with substrate 4, possible for re-use. Contact between the electrolyte 5 and substrate 4 is optimised by providing the electrolyte with a swirling motion as it passes up channel 1. Anode 6 is a solid conducting bar 10, alternatively it is formed of solid rods 11 nor tubes 12.
    Type: Grant
    Filed: March 15, 2000
    Date of Patent: December 17, 2002
    Assignee: Technology Development Associate Operations Limited
    Inventor: John Michael Lowe
  • Publication number: 20020011414
    Abstract: A multilayer engine bearing (10) includes a steel backing (12) having a liner (14) of bearing metal of either copper-lead or aluminum alloys formed on the backing (12). A multilayer overplate (24, 124) is formed on the base lining member (16) and includes at least a first layer (28, 128) electrodeposited from a bath at a first current density to a desired thickness, and at least one additional layer (26, 126) electrodeposited from the same bath but at a different current density and to a desired thickness to yield a composite lamellar overplate structure having layers with differing deposit characteristics, such as hard and soft layers, generated from the same bath at different current densities.
    Type: Application
    Filed: September 19, 2001
    Publication date: January 31, 2002
    Inventors: Brian L. Bank, James R. Toth
  • Publication number: 20010052465
    Abstract: An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connected to the electrolyte cell and extends across the electrolyte cell. The diffuser is positioned between a location that the substrate is to be positioned when the metal film is deposited thereon and the anode.
    Type: Application
    Filed: December 5, 2000
    Publication date: December 20, 2001
    Applicant: Applied Materials, Inc.
    Inventors: Yezdi N. Dordi, Joseph J. Stevens, H. Peter W. Hey, Donald J. K. Olgado
  • Patent number: 6312579
    Abstract: A multilayer engine bearing (10) includes a steel backing (12) having a liner (14) of bearing metal of either copper-lead or aluminum alloys formed on the backing (12). A multilayer overplate (24, 124) is formed on the base lining member (16) and includes at least a first layer (28, 128) electrodeposited from a bath at a first current density to a desired thickness, and at least one additional layer (26, 126) electrodeposited from the same bath but at a different current density and to a desired thickness to yield a composite lamellar overplate structure having layers with differing deposit characteristics, such as hard and soft layers, generated from the same bath at different current densities.
    Type: Grant
    Filed: November 4, 1999
    Date of Patent: November 6, 2001
    Assignee: Federal-Mogul World Wide, Inc.
    Inventors: Brian L. Bank, James R. Toth
  • Publication number: 20010006151
    Abstract: Method for producing a nickel foam having a specific weight of between 200 and 400 g/m2, at least comprising the steps of:
    Type: Application
    Filed: December 27, 2000
    Publication date: July 5, 2001
    Inventors: Peter Leerkamp, Wilhelmus Aloysius Pruyn
  • Patent number: 6110346
    Abstract: In electroplating a metal layer on a semiconductor wafer, the resistive voltage drop between the edge of the wafer, where the electrical terminal is located, and center of the wafer causes the plating rate to be greater at the edge than at the center. As a result of this so-called "terminal effect", the plated layer tends to be concave. This problem is overcome by first setting the current at a relatively low level until the plated layer is sufficiently thick that the resistive drop is negligible, and then increasing the current to improve the plating rate. Alternatively, the portion of the layer produced at the higher current can be made slightly convex to compensate for the concave shape of the portion of the layer produced at the lower current. This is done by reducing the mass transfer of the electroplating solution near the edge of the wafer to the point that the electroplating process is mass transfer limited in that region.
    Type: Grant
    Filed: September 9, 1999
    Date of Patent: August 29, 2000
    Assignee: Novellus Systems, Inc.
    Inventors: Jonathan D. Reid, Robert J. Contolini, Edward C. Opocensky, Evan E. Patton, Eliot K. Broadbent
  • Patent number: 6107186
    Abstract: Erosion of high density metallization areas associated with conventional damascene-CMP processing is avoided and greater planarity achieved by selectively increasing the metal overburden layer thickness at high density metallization regions. Embodiments include initially filling recesses formed in the substrate surface with a metal forming a blanket or overburden layer of the metal thereon. Regions of the blanket or overburden layer overlying regions of high density metallization are selectively electroplated to a greater thickness. The surface is then planarized by CMP, with the selectively increased thickness areas of the overburden layer compensating for greater erosion rates thereat during CMP, thereby resulting in greater planarity of the polished surface.
    Type: Grant
    Filed: January 27, 1999
    Date of Patent: August 22, 2000
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Darrell M. Erb
  • Patent number: 5958604
    Abstract: An electrolytic process for metal-coating the pre-cleaned surface of a workpiece of an electrically conducting material, which process comprises:i) providing an electrolytic cell with a cathode comprising the workpiece and an anode comprising the metal for metal-coating of the surface of the workpiece;ii) introducing an electrolyte into the zone created between the anode and the cathode by causing it to flow under pressure through at least one opening in the anode impinge on the cathode; andiii) applying a voltage between the anode and the cathode and operating in a regime in which the electrical current decreases or remains substantially constant with increase in the voltage applied between the anode and the cathode, and in a regime in which discrete gas bubbles are present on the surface of the workpiece during treatment.
    Type: Grant
    Filed: September 22, 1997
    Date of Patent: September 28, 1999
    Assignee: Metal Technology, Inc.
    Inventors: Vitalig M. Riabkov, Valerij L. Steblianko
  • Patent number: 5939172
    Abstract: A screen material is described which is formed by cladding, using electroplating, a structure composed of strands or fibers. The structure may incorporate a knit, woven or nonwoven material or, alternatively, of strands or fibres welded together, wound strands or fibers. The structure may be subjected to a calendering operation. The screen material, after having been provided, if required, with an electrically conductive cladding, is provided with a metal layer in an electroplating operation under conditions in which an overgrowth ratio R greater than 1 is achieved. The invention also describes a method for manufacturing such a screen material which preferably involves making use of an electroplating bath for depositing a metal cladding on a starting material in which a chemical compound is present which increases the overgrowth ratio R. The method can be implemented using a variety of conditions which can lead to an overgrowth ratio R of a desired value.
    Type: Grant
    Filed: June 21, 1996
    Date of Patent: August 17, 1999
    Assignee: Stork Screens B.V.
    Inventors: Johannes T. Snakenborg, Johannes Korsse
  • Patent number: 5670265
    Abstract: A steel component is provided on its surface with an electroplated anti-corrosive coating of a metallic material and has a hardness of at least 650 HV, the anti-corrosive coating being thinner than the surface roughness which the hardened component had before the application of the protective coating. Advantageously, the component is a rolling bearing component with a surface roughness R.sub.z of 0.3 to 9.0 .mu.m and a coating thickness of 0.1 to 3.0 .mu.m. Preferably, the anti-corrosive coating comprises a zinc-cobalt alloy, a zinc-iron alloy or a zinc-nickel alloy coating. It is possible to add iron, tin, copper or chromium to the coating composition.
    Type: Grant
    Filed: February 9, 1995
    Date of Patent: September 23, 1997
    Assignee: Ina Walzlager Schaeffler KG
    Inventors: Karl Ludwig Grell, Reiner Woltmann
  • Patent number: 5667851
    Abstract: A vacuum metallized polyimide film comprising an aromatic polyimide layer containing a hydrocarbyl tin compound in oxidation states (II) or (IV) as an additive and a metal plated layer bonded integrally with a high bonding strength or high adhesion through a vacuum deposited metal layer without the use of an adhesive. The metallized polyimide film can be used for flexible printed circuits and multilayer printed wiring boards, as well as for heaters, antennas and antistatic films.
    Type: Grant
    Filed: May 30, 1996
    Date of Patent: September 16, 1997
    Assignee: E. I. Du Pont de Nemours and Company
    Inventors: James R. Edman, Donald J. Coulman
  • Patent number: 5643432
    Abstract: A method for forming solid electrolytic capacitors provides for anode lead and body surface with increased dielectric thickness as distinguished from a dielectric thickness formed within the inner anode body such that a capacitance value associated therewith is not substantially decreased. The method includes the steps of anodizing the anode to form a predetermined dielectric thickness on the anode and then soaking the anode in a solvent to impregnate an inner portion thereof with the solvent. The solvent is removed from surface areas desired to be coated by a further dielectric layer and thereafter again anodized whereby additional dielectric build-up is limited to the solvent free areas. The solvent is driven off resulting in a capacitor preform which is reinforced by thickened dielectric without capacitance loss which would result from depositing additional dielectric interiorly in the areas insulated from build-up by the solvent.
    Type: Grant
    Filed: July 13, 1995
    Date of Patent: July 1, 1997
    Assignee: AVX Corporation
    Inventor: Yong-Jian Qiu
  • Patent number: 5398791
    Abstract: A method is provided for improving the load distribution on a ramp-surface of a clutch mechanism, such as the camplate of an overrunning clutch for the turbocharger of a locomotive diesel engine. In addition, an improved camplate produced by such a method is also provided in accordance with this invention. The method involves an electroplating process in which the electrostatic field is uniquely shaped so as to concentrate the electrostatic flux at a central region of the ramp surface, such that a greater amount of plating metal is deposited in the central region of the ramp surface as compared to the edges of the ramp surface. As a result, the ramp surface has a crowned contour as defined by the plating alone, and does not require a pre- or post-plating crown grind operation. The crowned contour serves to advantageously distribute a load over the ramp surface, so as to promote a longer service life for the camplate.
    Type: Grant
    Filed: March 14, 1994
    Date of Patent: March 21, 1995
    Assignee: General Motors Corporation
    Inventors: Michael D. Tombers, James W. Heilenbach, Justin E. Wagner
  • Patent number: 5254631
    Abstract: A cationically electrodepositable finely divided gelled polymer obtained by emulsion-polymerizing, in the presence of a water-soluble or water-dispersible cationic resin, a monomer component (A) comprising(a) a polymerizable unsaturated vinylsilane monomer having a vinylic double bond and a hydrolyzable akloxysilane group,(b) a polymerizable monomer having at least two radically polymerizable unsaturated groups in the molecule,(c) a polymerizable unsaturated monomer having a vinylic double bond and a hydroxyl group, and(d) other polymerizable unsaturated monomer, and a cationically electrodepositable finely divided gelled polymer obtained by emulsion-polymerizing, in the presence of the above finely divided gelled polymer, a monomer component (B) comprising(e) a blocked mono- or polyisocyanate in which the at least one isocyanate group in the molecule is blocked with a radically polymerizable monohydroxy compound,(f) a polymerizable unsaturated monomer having a vinylic double bond and a hydroxyl group, and(g)
    Type: Grant
    Filed: September 27, 1991
    Date of Patent: October 19, 1993
    Assignee: Kansai Paint Co., Ltd.
    Inventors: Kenji Yamamoto, Haruo Nagaoka, Teiji Katayama, Masafumi Kume, Tadayoshi Hiraki, Eisaku Nakatani, Yasuyuki Hirata, Haruhiko Kataoka
  • Patent number: 5242569
    Abstract: A contact member for thermocompression bonding in integrated circuit packaging has on a conductor end a uniform texture deformable layer with a hardness value in the range of that of soft gold which is approximately 90 on the Knoop scale and with a rough surface morphology having ridges with approximately 1 micrometer modulation frequency and a depth between ridges of from 1/4 to 1/2 that of the average integrated circuit pad. The deformable layer is produced by plating gold in a strong electronegative plating bath within a range of 0.03 to 0.05 mA/sq.mm. current density. Plating apparatus, for plating different areas, with different electronegative conditions, with separate independently powered anodes, is provided.
    Type: Grant
    Filed: March 4, 1991
    Date of Patent: September 7, 1993
    Assignee: International Business Machines Corporation
    Inventors: Sung K. Kang, Michael J. Palmer, Timothy C. Reiley, Robert D. Topa
  • Patent number: 5080763
    Abstract: A method of forming conductor lines of a semiconductor device comprises a step of depositing (electroplating) a gold (Au) layer on an underlying barrier conductive layer in a gold plating bath. According to the present invention, the plating bath is supplemented with an additive in amount such that a lead (iron or nickel) concentration of the bath is form 0.7 to 10 ppm, whereby a deposition rate of the gold near a patterned resist layer is lowered, in comparison with that at the center part of the uncovered conductive layer. The gold plated layer has round edges at the both corners thereof, and therefore, when a protective insulating layer is formed over the gold plated layer, the round edges improve the step coverage of and prevent the appearance of cracks in the protective layer.
    Type: Grant
    Filed: June 5, 1990
    Date of Patent: January 14, 1992
    Assignee: Fujitsu Limited
    Inventor: Aiichirou Baigetsu