Abstract: The present invention provides a jointed liquid crystal glass panel package box, which includes a box body and a plurality of brackets mounted to the box body. The box body includes a frame and a hollow plate arranged inside the frame. The frame includes two opposite first frame members, two opposite second frame members, and four L-shaped connection members connecting between the first frame members and the second frame members. The first and second frame members are of a linear configuration. Each first frame member includes a plurality of first frame member units and a plurality of first couplers each connecting between two first frame member units. Each second frame member includes a plurality of second frame member units and a plurality of second couplers each connecting between two second frame member units. A plurality of water-resistant pads is arranged between the first couplers and the first frame member units.

Abstract: The invention provides a tray for packaging LCD assemblies, which includes a bottom plate. The bottom plate is provided with a plurality of rhombic grooves which are arranged side by side, and a plurality of discharge grooves for buffering stress concentration are arranged around the rhombic grooves. Because the bottom plate of the tray of the invention is designed with various types of stress concentration factors which are mutually associated, and the rhombic grooves of the stress concentration factors form a plurality of stress concentration zones on the bottom plate of the tray, the stress concentration in the center of the bottom plate can be effectively decreased. In addition, the discharge grooves are arranged around the rhombic grooves in the invention, and the stress concentration of the rhombic grooves is decreased by the discharge grooves.

Abstract: A blank includes a main body; at least one support connected to the main body; and at least one support brace connected to at least one of the main body and at least one support. A packaging system includes a blank, the blank including a main body, at least one support connected to the main body, and at least one support brace connected to at least one of the main body and at least one support; and shrinkwrapping. A support may be a panel. A box may be included.

Abstract: A packing box for storing a fragile substrate includes a body configured with first and second components. Each of the first and second components includes a base board, and the first and second components are engageable with each other to support the substrate. At least one of the first and second components includes a sidewall extending upward from an edge thereof. A mold with a smaller size can thus be used for making the first and second components, which are combined to form the packing box of a larger size so as to reduce the cost.

Abstract: The present invention provides a packaging structure of liquid crystal glass panel, which includes a package box and a plurality of cushioning members mounted in the package box. The cushioning members each include a main body and an anti-static layer formed on a surface of the main body that opposes liquid crystal glass panels. The packaging structure of liquid crystal glass panel according to the present invention uses a cushioning member formed by an arrangement of combining a cushioning material and an anti-static material so as to provide an excellent effect of cushioning to liquid crystal glass panels during the shipping thereof and to effectively prevent the liquid crystal glass panels from damage caused by static electricity during the shipping thereof. Further, such a combined material has a low cost and can thus effectively lower down the shipping cost.

Abstract: The present invention provides a liquid crystal glass panel packaging structure, which includes a package box and a plurality of cushioning members mounted inside the package box. The package box includes a lower case and an upper case mating the lower case. The lower case forms, on side walls thereof, mounting sections corresponding to the cushioning members and also forms a receiving channel below each of the mounting sections to correspond to the cushioning member. The cushioning members each form a mounting slot and projections. The mounting sections are each in the form of an arch bridge having a bridge floor forming mounting holes corresponding to the projections, whereby to set up, the mounting slot is fit to a side of the bridge floor and the projections are fit into the mounting holes to fix the cushioning member inside the lower case.

Abstract: The present invention provides a jointed liquid crystal glass panel package box, which includes a box body and a plurality of brackets mounted to the box body. The box body includes a frame and a hollow plate arranged inside the frame. The frame includes two opposite first frame members, two opposite second frame members, and four L-shaped connection members connecting between the first frame members and the second frame members. The two first frame members, the two second frame members, and the connection members circumferentially delimit a receiving compartment. The hollow plate is received in the receiving compartment. The brackets are mounted to the two first frame members and the two second frame members. With the frame being formed by jointing the first and second frame members and the connection members, the size is adjustable so as to be fit to packaging of liquid crystal glass panels of different sizes.

Abstract: A glass substrate transporting box includes a frame. Dustproof boards are arranged on at least one side surface in side surfaces of the frame. The dustproof boards arranged on the frame are installable to or removable from the frame.

Abstract: The present invention provides a package cushioning structure for module, which includes a cushioning bottom board and a cushioning band extending through and interlaced with the cushioning bottom board. The cushioning bottom board forms a plurality of spaced hollow sections. A bar is arranged between every two of the hollow sections. The cushioning band includes a plurality of cushioning air columns mounted thereto at interval. The cushioning air columns are arranged alternately on the bars. To package, modules are each positioned on and born by each of the bars between two of the cushioning air columns. An alternate package cushioning structure includes a cushioning bottom board having a surface forming slots and a cushioning band arranged in the cushioning bottom board through a mounting channel extending through the bottom board from a side surface thereof. Air columns of the cushioning band are located in the slots to support modules.

Abstract: The present invention provides a liquid crystal glass panel packaging structure, which includes a package box and a plurality of cushioning bodies arranged inside the package box. The package box includes a lower case and an upper case mating the lower case. The cushioning bodies are airbag cushioning bodies arranged inside the lower case at locations corresponding to corners of a liquid crystal glass panel. The liquid crystal glass panel packaging structure uses airbag cushioning bodies to serve as cushioning devices for a liquid crystal glass panel, whereby with the airbag cushioning bodies being arranged at locations corresponding to corners of the liquid crystal glass panel, better protection is provided to the liquid crystal glass panel to prevent the product from being damaged by external forces. Further, the cushioning bodies of the present invention have a simple structure, is easy to manufacture, and can effectively lower down the manufacturing cost.

Abstract: The present invention provides a liquid crystal glass package box, which includes a box body, a plurality of mounting sections mounted inside the box body, and cushioning devices respectively mounted to the mounting sections. The cushioning devices each include a cushioning section and a receiving section connected to the cushioning section. The cushioning section includes an air pocket. The receiving section forms a receiving channel corresponding to the respective mounting section in order to mount the cushioning device in the box body. The liquid crystal glass package box provided by the present invention uses an air pocket to serve as a cushioning section mounted inside the box body to provide effective cushioning to liquid crystal glass for protecting the liquid crystal glass from damage during shipping. The raw material used is economic so as to effectively lower down the material cost. The structure is simple and is easy to manufacture.

Abstract: A shipping container for detachably supporting fragile panels therein, said shipping container comprising a floor and an upright panel extending upwardly in relation to said floor. Panel restraining means in adjacent surfaces of said floor and said upright panel support said fragile panels in spaced-apart generally parallel planes. A clamp panel is detachably connected to the shipping container and upright and spaced apart from the upright panel with the fragile panels between the upright panel and the clamp panel. Removable rigid panel connecting bars of substantially identical lengths removably are connected to a top edge of said fragile panels and held between the upright panel and the clamp panel. Resilient means restrain said connecting bars from displacement by a compression force exerted on opposed ends of said panel connecting bars.

Abstract: The present invention discloses a cartridge for glass substrate and which includes a top wall, a bottom wall, at least a pair of sidewalls, a plurality of supporting rods, and an adjusting device. The plurality of supporting rods are arranged on the pair of sidewalls along a first horizontal direction across the pair of sidewalls such that a plurality of supporting surfaces configured by at least a pair of supporting rods facing each other from the paid of sidewalls are defined. The adjusting device is used to move one of the sidewall toward the other sidewall with respect to the top and bottom walls so as to change a span between the pair of sidewalls. As a result, the cartridge can be used to accommodate glass substrates with different dimensions.

Abstract: A substrate storage tray that can be decreased in size for transportation. A substrate storage tray (1) for storing a large size substrate (20) includes a frame member (2) that includes a pair of first frame portions (5) opposed to each other and a pair of second frame portions (6) opposed to each other and has a frame shape, a substrate supporting member (3, 4) that has a plate shape, is disposed inside a region enclosed by the frame member (2), and is arranged to support one surface of the substrate (20), and extending portions (7) that are provided to middle portions in a long direction of the pair of first frame portions (5) and are arranged to widen a space between the pair of second frame portions (6).

Abstract: A frame of an electronic device is a closed frame, and made of plastic material. The frame defines one or more deformation grooves at the corners of the frame to be expanded out or inwardly narrowed for changing a size of the frame. The frame includes a positioning portion and a support portion extending from an inner surface of the positioning portion. The deformation grooves are defined in the support portion.

Abstract: The present invention discloses a liquid crystal glass packaging device for accommodating various sizes of liquid crystal glass and including a box and a cover corresponding to and positionable on the box for closure. The box includes an outer case and an inner case arranged inside the outer case. The inner case forms a plurality of accommodation chambers for accommodating the various size of liquid crystal glass. The plurality of accommodation chamber includes at least first accommodation chamber and second accommodation chamber. The first accommodation chamber is delimited and surrounded by a plurality of first inner case walls of the inner case and the second accommodation chamber is delimited and surrounded by a plurality of second inner case walls of the inner case. The first accommodation chamber and the second accommodation chamber are arranged to alternate each other in a vertical direction.

Abstract: A zipper-type loading container for transporting glass substrates in which an increased number of glass substrates can be loaded for transport, thereby increasing the convenience of workers. The loading container for transporting glass substrates includes a loading frame having a loading surface, which supports the lower end of the glass substrates, and a backing surface, which supports the rear surface of a batch of the glass substrates. A cover frame is provided on the loading frame, and slides on the loading frame in forward and backward directions of the loading frame, and cover the upper end and the sides of the glass substrates. A zipper-type opening/closing sheet is provided on the front portion of the cover frame, and opens and closes the front portion of the cover frame.

Abstract: A separate supporting body for supporting semiconductor wafers of ?450 mm is attached to the inner surface of either side wall of a container body. Each supporting body is formed of a front supporting piece that is projected laterally from a frame and horizontally retains the wafer on, at least, the side part in the front peripheral edge; and a rear supporting piece that is projected laterally from frame and horizontally retains the wafer on, at least, the side part in the rear peripheral edge. Front supporting piece is formed of a projected part that extends from the front of frame toward the front peripheral edge of the semiconductor wafer and a curved part that extends rearwards from projected part along the peripheral edge of the semiconductor wafer.

Abstract: The present invention provides a packaging carton for fragile, apparatus for making cartoon bottom, and method for making the carton bottom. The packaging carton includes a bottom and peripheral wall which jointly define a receiving space for storing fragile glass substrate with the bottom. The bottom has a skeleton configuration and is made from plastic blowing technology. By the forgoing, the present invention can effectively reduce the packaging cost, and which in turn reducing the cost of the product.

Abstract: The present provides a packaging carton, wherein the packaging carton includes a container. The container includes a base defining a receiving space. A bottom buffering pad is disposed on a bottom surface of the receiving space. A corner buffering pad is arranged in corner of the receiving space, and is dimensioned to match with corner of a workload. Wherein the base, the bottom buffering pad, and the corner buffering pad are inherited with a first buffering property, a second buffering property, and a third buffering property, respectively, wherein the second and third buffering properties are better than the first buffering property. With this, the present invention can effectively reduce the cost of the packaging carton, and which in turn reduce the cost of the product.

Abstract: The present disclosure relates to the field of packing, and more particularly relates to a packing device of liquid crystal (LC) glass. The packing device of the LC glass includes a tray; a containing cavity for containing the LC glass is arranged in the tray. The packing device of the LC glass further includes an upper cover. The upper cover is fixed to the tray by a clamp. The packing device of the LC glass of the present disclosure comprises the upper cover and the tray, the containing cavity for containing the LC glass is arranged in the tray, the upper cover is fixed to the tray by a clamp. Thus, the LC glass in the containing cavity is fixed, and the packing device can be vertically put and can also be horizontally arranged. Thus, the problem of stress deformation caused by up and down stacking is well solved.

Abstract: Disclosed is a substrate processing apparatus which can inhibit the occurrence of spots, such as watermarks, by reducing the remaining of the liquid that has been used for liquid treatment, inhibit the turn-over of the wafer, and improve throughput. In the disclosed substrate processing apparatus including a carrying means for carrying a semiconductor wafer W while vertically holding the wafer, a wafer boat (a carrying means) includes lower holders holding the bottom portion of the wafer, and a couple of left/right upper holders for holding the bottom outer edges of the wafer when the wafer is turned over. The lower holder includes a holding groove part and a turn-over prevention groove part, which are integrally formed with each other.

Abstract: The present invention provides a technical solution in which a packaging device is introduced and it includes a container with at least one positioning device arranged in inner surface of the container. And further includes at least a buffering pad defined with holes in which matches to the positioning device such that when the packaging device is erected, the buffering pad is hanged over the container. Since the buffering pads can be selected from soft material of cost effective, the cost is therefore reduced.

Abstract: The invention relates to the field of packages and molds, and more particularly to a forming mold for plastic products and a using method thereof, and further relates to a packaging box for liquid crystal glass. The mold is used for molding box bodies of at least two different of the packaging box for liquid crystal glass; A cavity(es) of the mold is of a joining structure, and comprises a group of shared splicing piece(s), and at least two groups of selected splicing pieces. The cavities formed by the shared splicing piece(s) and different groups of selected splicing pieces are in different sizes, and are respectively used for forming box bodies of different sizes. The mold can mold box bodies of at least two different sizes of the packaging box for liquid crystal glass. Because the shared splicing piece(s) can be shared, the development cost of the mold is lower than the cost of separately developing two sets of integrated box body molds. In addition, the development cycle can be shortened.

Abstract: The invention relates to the field of packaging, and more particularly to a packaging box for liquid crystal glass. The packaging box for liquid crystal glass includes a box body; the box body is internally provided with buffer blocks which are made of material different from that of the box body and have buffer performance superior to that of the box body. The packaging box for liquid crystal glass of the invention is of a separated structure, the box body and the buffer blocks are respectively made of different materials, the buffer blocks are made of material with good buffer performance, and the box body is mainly used for fixing the buffer blocks and ensuring the strength of the whole box body; thus, the box body is made of ordinary plastic material and injection molded without being made of expanded buffer material with buffer effect and high cost, thereby reducing the cost of the packaging box.

Abstract: The invention relates to the field of packaging, and more particularly to a shared packaging box for an LCD panel and an LCD panel assembly, and a using method thereof. The packaging box includes a box body for containing an LCD panel assembly, and further includes a dismountable adjusting block which is used for covering a containing space for a FPC and a circuit board and positioning the side of the LCD panel; the adjusting block is arranged in the position inside the box body used for arranging the FPC and circuit board of the LCD panel assembly. The shared packaging box for an LCD panel and an LCD panel assembly of the invention can be used as a packaging box for an LCD panel when arranging the adjusting block, and can be used as a packaging box for an LCD panel assembly when removing the adjusting block; both positioning modes are reliable to achieve the aim of one object with dual purposes; thus, the number of packaging boxes is significantly reduced, and the packaging cost is reduced.

Abstract: Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's main inner containment diameter. These walls allow a vertical containment surface to move and capture the entire stack of wafers rather than a few wafers. The surface that contacts the wafers moves uniformly inward. The wafer stack is secured by reducing or eliminating the gap between the wafer container and the wafer stack. Further improvements include the addition of a ramped engagement surfaces in the top and/or bottom cover that provides mechanical advantage for easier assembly of the top and bottom cover. This design also allows for automated loading and unloading of the wafer stack because once the top cover is removed, the flexible walls spring back outward. Thus providing a small gap in which to freely remove the wafers.

Abstract: A mask box having a buckling structure includes a base, a cover and a plurality of buckling elements. The base is configured to support a mask and has a plurality of troughs. The cover covers the base and has a plurality of pivotal portions. The buckling elements are positioned to correspond to the troughs. Each buckling element includes an engaging block and an elastic arm connected to the pivotal portion. The engaging block moves away from the periphery of the cover when the engaging block is subjected to an external force. The engaging block is buckled into the trough via an elastic restoring force of the at least one elastic arm when the external force is removed. By this arrangement, the assembly of the buckling elements is simplified and its product cost is reduced. Further, the present invention conforms to the requirements for environmental protection.

Abstract: A packing structure for a liquid crystal display device includes a packing box for storing the liquid crystal display device and shock-absorbing members. The shock-absorbing members are stored in the packing box together with the liquid crystal display device so as to be interposed between the liquid crystal display device and the packing box. A side wall of a groove of the shock-absorbing member has a plurality of shock-absorbing surfaces with the gap with the display panel larger in the inside of the display panel than in the outside of the display panel. A central shock-absorbing member is disposed on the inside of the display panel deeper than the shock-absorbing face. The gap between the central shock-absorbing member and the display panel is larger than that between the shock-absorbing face and the display panel.

Abstract: A container for storing semiconductor devices is revealed. The container includes a receiving body and a cover. The receiving body is disposed with at least one fastener and at least one driver therein. The fastener includes a rolling element that is in contact with the driver. When the driver is rotated, it drives the fastener to move in the receiving body. At least one fixing part of the fastener is moved toward at least one fastening part of the cover. The cover is fixed on the receiving body by the fixing part locked in the fastening part. Moreover, friction between the fastener and the driver is minimized by the rolling element which reduces contact area between the fastener and the driver so as to prevent production of contaminants in the container and protect semiconductor devices stored in the container from being polluted. Thus the container is of high cleanness.

Abstract: Packages and methods of packaging a plurality of glass sheets provide a stack of glass sheets with an interleaf protective sheet positioned between each adjacent pair of glass sheets. An outer portion of each interleaf protective sheet is bent over a portion of the peripheral edge of one of a corresponding adjacent pair of glass sheets to discourage relative shifting of the glass sheets with respect to one another. The stack of glass sheets are sandwiched between pressure members of an outer housing such that the pressure members each apply a support pressure that is distributed over an outer surface of a corresponding one of the pair of outermost glass sheets of the stack of glass sheets.

Abstract: A container for transportation and/or storage of items is in the form of an enclosure having a securing arrangement with an upright restraint configured to be advanced and retracted across the width of the container for holding the items in an upright orientation; and/or access to the enclosure provided through an uppermost portion and end portion of the container, and a movable side panel proximate an end of the container; and/or spaced slide elements extending in the direction of the width of the container, in the region of the bottom of the container.

Abstract: A container for holding a plurality of substrates includes an enclosure portion defining an interior space. The enclosure has a pluralit of slots for receiving the substrates, and a door (26) for sealingly closing an open side A cushion (62) is received on the door.

Abstract: Improvements in a semiconductor wafer container including improvements in side protection to the wafers, improved cover design to minimize rotation, a simplified top cover orientation mechanism and an improved bottom holding mechanism for automation. The side protection to the wafers is with multiple staggered inner and outer walls. The improved cover design improves alignment of the top and bottom housings and minimizes rotation of the housings in transit or motion. The housings have a recessed tab ramp feature with bi-directional locking that also increases the rigidity of the containment device when the two housings are assembled. The improved bottom holding mechanism for automation is an integrated feature that is molded into the bottom housing and not assembled in a secondary operation. The molded integration reduces tolerance errors that are present in assembling multiple pieces and joining multiple pieces.

Abstract: A transport tray can be commonly used for transporting two articles whose shapes and thickness are different between factories, and an exterior box also can be commonly used. A first placement section is formed on a surface side, a second placement section is formed on a back side to overlap with the first placement section. The first placement section includes a depressed part having an enough depth for receiving a LC cell, and the cell is held at a predetermined position by a bottom face and a side face that constitute the depressed part. The second placement section is formed by the supporting walls that protrudes to the back side and that has an enough depth for receiving a LC module. The module placed in the region surrounded by the supporting walls is held at a predetermined position by a bottom face and a side face that constitute the region.

Abstract: A wafer container, comprising: a container body, the container body having a plurality of slot portions on two opposite sidewalls of the interior of the container body for horizontally sustaining a plurality of wafers, each slot portion having a horizontal carrying portion, an opening being formed on one side of the container body for exporting and importing a plurality of wafers; and a door, said door having an inner surface and a outer surface, the inner surface being joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: an elasticity module is disposed on the inner wall of the rear end of the container body opposite to the opening, the elasticity module having a rectangular body and a convex portion bending toward the interior of the container body being respectively formed on two longer opposite sides of the rectangular body.

Abstract: A modular packaging system of corrugated fibreboard construction is provided for relatively large-scale, fragile planiform materials, such as glass doors and architectural glass panels. Panels in a predetermined range of dimensions are individually enclosed within an adaptable, protective case. One or more loaded panel cases, in a substantially vertical orientation, are stacked horizontally and strapped together with a pair of buttressing pillars at each end, on opposite faces thereof. Two shock-absorbing base blocks are provided, upon which said panel case or bound stack rests. Each base block is a laminate, constructed of bonded corrugated fibreboard panels, and is disposed underneath the panel case or stack of cases, proximal to a respective lateral edge thereof, with its ends secured within recesses at the base of the pillars bound at that end.

Abstract: A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.

Abstract: A carrier and a substrate unloading method using the same are provided. The carrier comprises a bottom board, a rim and a stop board. The bottom board is for carrying a substrate. The rim is disposed on a periphery of the bottom board. The rim has at least one opening. The stop board is disposed on the rim. One end of the stop board is pivotally connected to the rim, and the other end of the stop board is rotated to the outside or the inside of the rim.

Abstract: When a lid (20) is attached to a substrate removal/insertion opening (2) in a container body (1), a placement piece forcible displacement means (22) forcibly moves a substrate placement piece (4), which is provided in a region in the vicinity of the substrate removal/insertion opening (2), to a displacement position which does not overlap with a disc-shaped substrate (W). Thus, even if the disc-shaped substrate (W) is increased in diameter, there is no risk of the stored disc-shaped substrate (W) coming into contact with the substrate placement piece (4) due to factors such as vibration or impact, thus the disc-shaped substrate (W) can be stored more safely.

Abstract: Wafer protecting grooves (10) are provided on an innermost wall (1b) of a container body (1). The wafer protecting grooves have a cross-sectional configuration in the shape of undulations having bottoms (10b), which are most distant from an opening (1a), at respective positions facing the outer edges of semiconductor wafers (W), and having an opening width wider than the thickness of each semiconductor wafer (W). In a normal state, an imaginary line (Q) connecting together the tops of the undulations is inward of or at the same position as the outer edges of the semiconductor wafers (W) facing the imaginary line. Thus, it is possible to obtain superior impact resistance that makes the semiconductor wafers (W) in the container body (1) unlikely to be damaged even when a large impact is applied thereto by a fall or other handling errors.

Abstract: A reticle pod with drain structure comprises an outer container and an inner container, wherein an upper cover of inner container is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer container are used to press the retainers for fastening and stabilizing the reticle in the inner container and thus ensuring safety and stability of the reticle in the reticle pod. Collision risks of the reticle in the reticle pod due to vacillation of reticle pod during transportation can be reduced. Cost of reticles also can be greatly decreased. Further, a plurality of drain holes is disposed on a lower cover of the outer container for draining the remained water in the outer container. It will be done without disassembling the lower cover of outer container for reducing the contamination opportunity in the pod and preventing from wasting of labor and time for disassembling.

Abstract: A damping body for packaging includes, between an abutment adapted to abut against a precision substrate storage container upon packaging and an outer peripheral wall rising from an outer peripheral edge of a bottom part having the abutment, an outer peripheral bottom formed at a position distanced more from the abutment than is the precision substrate storage container, and a stepped part formed between the outer peripheral bottom and the abutment. Consequently, in the event of an impact from the outside, the stepped part collapses, so that the abutment favorably moves with respect to the outer peripheral bottom and thus can efficiently absorb the impact. This can prevent large impacts from instantaneously being exerted on the precision substrate storage container and efficiently damp drop impacts.

Abstract: An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.

Abstract: A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head.

Abstract: A wafer-retaining unit has a plurality of vertically superimposed single-wafer retaining sections, each having a wafer-retaining frame abutting against only a lower end edge portion of the outer periphery of a semiconductor wafer, a wafer-securing frame disposed vertically movably relative to the wafer-retaining frame to abut against only an upper end edge portion of the outer periphery of the semiconductor wafer, and wafer lift members that lift the semiconductor wafer to a position where it is upwardly separate from the wafer-retaining frame and keeps the semiconductor wafer in this position. Consequently, a plurality of semiconductor wafers can be accommodated efficiently and safely without increasing the space between each pair of mutually adjacent semiconductor wafers. At the same time, the semiconductor wafers can be loaded and unloaded satisfactorily.

Abstract: A rigid holder is provided for supporting a flexible article. The rigid holder may include a first frame member and a second frame member which are held together through magnets.

Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

Abstract: A retainer includes a frame, a pair of first elastic parts projected from a pair of opposing parts of the frame so as to approach to each other, and a second elastic part that is supported at the bent free ends of the paired first elastic parts to hold a substrate. The outside end of the second elastic part is positioned outside the free end of the first elastic part and closer to the opposing part of the frame. Also, first and second holds for holding the rim of the substrate are formed apart from each other. The second hold is positioned on the outer end side of the second elastic part from the first hold.

Abstract: The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The guiding locking piece deployed on one side of the upper cover member of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of two openings. When the mask is placed into the lower cover member of pod and is covered by the upper cover member, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece.