Abstract: A welding head for a welding apparatus, the head comprising an outer face attachable to a welding device such as an electron beam gun or laser, an inner face sealable to a workpiece, and an outer sealing ring and an inner sealing ring situated within the inner face and disposed on either side of an evacuatable region, wherein the inner face has a teardrop-shaped profile. Outer and inner sealing rings can be inflatable or formed from different materials, the outer sealing ring being formed from a material with a Shore hardness of between 50 to 70 and the inner sealing ring being formed from a material with a Shore hardness of 20 to 40. A bridging seal can extend from within the inner sealing ring to the outer sealing ring.

Abstract: A vacuum condition processing apparatus is provided, the top of which is connected to an external charged particle beam generating device, and the apparatus includes: a suction cup in contact with the specimen to be observed or the stage holding the specimen, a first gas controlling device connected to an external gas supplying system, and a second gas controlling device connected to an external pumping system; a window is deployed at the top of the apparatus, through which the particle beam can go into the apparatus; the first gas controlling device is arranged to connect the gas supplying system and the suction cup; the second gas controlling device is arranged to connect the gas pumping system and the suction cup. Also disclosed is a specimen observation system and method.

Abstract: The present invention provides a laser processing method comprising the steps of attaching a protective tape 25 to a front face 3 of a wafer 1a, irradiating a substrate 15 with laser light L while employing a rear face of the wafer 1a as a laser light entrance surface and locating a light-converging point P within the substrate 15 so as to form a molten processed region 13 due to multiphoton absorption, causing the molten processed region 13 to form a cutting start region 8 inside by a predetermined distance from the laser light entrance surface along a line 5 along which the object is intended to be cut in the wafer 1a, attaching an expandable tape 23 to the rear face 21 of the wafer 1a, and expanding the expandable tape 23 so as to separate a plurality of chip parts 24 produced upon cutting the wafer 1a from the cutting start region 8 acting as a start point from each other.

Abstract: A preserving apparatus for preserving welded joint portions 7, 8 by deposit welding on the inner surface of the welded joint portions 7, 8, in which a nozzle 4 and a pipe 5 supported under water are joined, the apparatus having: a seal member 9 that is disposed in front and behind the welded joint portions 7, 8 to be deposit welded within the nozzle 4 and pipe 5, and serves to demarcate and form a closed operation area A within the nozzle 4 and pipe 5; water drainage means 12 for draining the inside of the operation area A demarcated and formed by the seal member 9 and obtaining a gas atmosphere therein; and welding means 13 for deposit welding on the inner surface of the welded joint portions 7, 8 within the operation area A in which the gas atmosphere has been created.

Abstract: A sealing system includes two fittings, a compliant member, and a spring. The first fitting has two ends, a first cavity, and a first channel. The first channel extends from the first end to the first cavity, which is formed in the second end radially inwardly from an outer surface of the first fitting. The second fitting is disposed in the first cavity and has two ends, a second cavity, and a second channel. The first end is disposed in the first cavity, the second cavity is formed in the first end of the second fitting, and the second channel extends from the second cavity to the second end. The compliant member is disposed in the second cavity. The spring is disposed in the second cavity against the compliant member.

Abstract: An electron beam processing device includes a chamber housing that defines a chamber interior space and has a first opening. A carriage is movable along the first opening. An electron beam generator is disposed on the carriage so that the generated electron beam passes through the first opening when the carriage moves along the first opening. A disk is disposed between the chamber housing and the carriage and is rotatable about a rotational axis, which is perpendicular to the first opening, at least between a first rotational position and a second rotational position. The disk has a second opening spaced from the rotational axis of the disk in the radial direction. The rotational axis of the disk is disposed so that the first opening always overlaps the second opening at least along an electron beam propagation axis when the disk rotates between the first and second rotational positions.

Abstract: A workpiece supply device for an electron beam processing device is provided that can reduce the cycle times for changing a workpiece using a multi-functional workpiece holding device.

Abstract: The interfacial joint area of a target/backing plate assembly is sealed so as to inhibit the migration of air and/or water vapor that may be present or trapped along the interfacial surfaces. A pool or bead of molten solder is placed along the interfacial joint and moved continuously around the full 360° circumference of the assembly so as to cover and seal the boundary area. The solder is melted, preferably, by e-beam welding in a vacuum or the like.

Abstract: An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18.

Abstract: In a partial-vacuum-type, electron-beam irradiation system having a construction such that a static-pressure floating pad is connected to a vacuum chamber incorporating an electron-beam column, and an electron-beam passes through an electron-beam passage of the static-pressure floating pad to impinge on a body to be irradiated in the condition where the static-pressure floating pad is contactlessly attracted to the body to be irradiated, a vacuum-seal valve for opening and closing the electron-beam passage is provided inside the static-pressure floating pad, and when the static-pressure floating pad is separated away from the body to be irradiated, the vacuum-seal valve is actuated to close the electron-beam passage, whereby the atmospheric air is prevented from flowing into the vacuum chamber.

Abstract: In accordance with the present invention a gravure cylinder is engraved by means of an electron beam which is modulated to create upon the surface of the gravure cylinder the desired gravure cells, the required vacuum being maintained only in a limited volume around the electron gun by the use of a conformal high vacuum ferrofluid seal that is substantially free of mechanical friction.

Abstract: A seal for an opening defined by a sidewall portion of the pressurizable tank. The tank contains desiccant for drying gases which pass through the desiccant. An elongate antenna extends from an interior portion to an exterior portion of the tank and is used for carrying microwave energy to the desiccant for regeneration of the desiccant. The seal has an insulator with an interior surface for receiving engagement with the antenna at the opening of the tank. In one embodiment, the interior surface of the insulator is tapered such that a distance between opposing portions of the insulator reduces as the insulator extends in a direction through the opening toward the exterior of the tank. The antenna has a cross sectional dimension which reduces in size as the antenna extends in the direction through the opening toward the exterior of the tank.

Abstract: The invention relates to a device for laser cutting, having: means (2) for emitting a pulsed laser beam, with energy pulses E≧10 joules, at least one optical fiber (4) for transmitting the laser pulses, from the means of emitting the laser beam in the direction of a piece (6) to be cut, means of focusing the laser beam. The invention also relates to a method for the laser cutting, at a distance, of a piece to be cut. Application to the dismantling and/or taking apart of an installation.

Abstract: In a partial vacuum type electron beam irradiation system having a construction such that a static pressure floating pad is connected to a vacuum chamber incorporating an electron beam column, and an electron beam passes through an electron beam passage of the static pressure floating pad to impinge on a body to be irradiated in the condition where the static pressure floating pad is contactlessly attracted to the body to be irradiated, a vacuum seal valve for opening and closing the electron beam passage is provided in the inside of the static pressure floating pad, and when the static pressure floating pad is separated away from the body to be irradiated, the vacuum seal valve is actuated to close the electron beam passage, whereby the atmospheric air is prevented from flowing into the vacuum chamber

Abstract: A light seal for use with robotic equipment includes a window having a divider panel rotatably mounted therein. Flexible sealing flaps at the opposite sides of the window opening engage the divider panel when the divider panel is in a sealed position to provide a light seal between the edges of the divider panel and the edges of the window opening.