Abstract: Multiple plasma jet path sensing positions and multiple localized steering magnetic fields for each plasma jet leg in an atmospheric plasma jet control system are described for a precise control over positions of plasma jet legs as well as their directions in a vertex zone, where a hot gas stream is generated for treatment of a semiconductor device. With a plasma jet generator system in accordance with the invention precise control over the plasma jet legs enables one to virtually eliminate plasma jet path instability at the vertex region.

Abstract: A plasma arc torch that is capable of operating in a non-transferred arc mode and a transferred arc mode, and that is intended for use for use with a plasma arc treatment system. The plasma arc torch includes an electrode, a plasma gas ring and a nozzle. At least one power supply within the plasma arc treatment system is connected to the electrode, the nozzle and a workpiece. While the torch operates in a non-transferred arc mode, the non-transferred arc heats gas supplied by the plasma gas ring to create plasma gas that heats the workpiece to raise its conductivity. Once the workpiece is at an appropriately conductive level, the arc is automatically transferred since the ground point can now be found.