Abstract: A calibration method for determining temperature set point corrections to be applied to the nominal temperature set points of each of the N heating zones of a heat treatment unit having L substrate locations, includes the following steps: establishing a sensitivity model linking variations of a substrate characteristic at each of M representative locations of the L locations to temperature set point variations applied in each of the N heating zones, the variations respectively reflecting differences with respect to a target characteristic and with respect to the nominal set points; executing the process in the heat treatment unit and on the basis of nominal set points; measuring the substrate characteristic at least at a representative measurement location of each heating zone of the unit to supply M measurements; and determining temperature set point corrections from the sensitivity model, the measurements and the target substrate characteristic.

Abstract: Methods and systems for heating a space deployed membrane assembly are provided. The membrane assembly can include one or more framed sections. Each section can include a composite membrane having a membrane substrate and a transparent, electrically conductive resistive coating. The composite membrane is held within a frame. Electrically conductive bus bars are provided and are placed in intimate electrical contact with the resistive coating. The electrically conductive bus bars are generally arranged, on opposite sides of the perimeter of the membrane. A controller passes current between selected bus bars, with different bus bars operative to pass current between them at different times. The magnitude of the voltage applied to the bus bars, the location of the bus bars, the operational sequence of powering the bus bars, and the time over which current is passed between a selected pair of bus bars, are selected to provide substantially uniform time averaged heating of the membrane.

Abstract: A temperature regulation system configured to regulate a temperature of the device may include first and second temperature-dependent current sources that are configured to generate first and second currents, respectively. The system may also include amplifiers configured to apply respective first and second amplification factors to the respective first and second currents to generate respective first and second intermediate currents. The system may also include a heater configured to generate heat based on the first and second intermediate currents and positioned such that the generated heat affects the device. Additionally, the system may include a controller configured to adjust the first and second amplification factors such that changes in the first and second currents, resulting from changes in temperature of the first and second current sources, result in changes to the heat generated by the heater to maintain an approximately equal temperature of the device.

Abstract: The core of a high temperature furnace has an elongated central test cavity for testing/calibration of a temperature-sensitive component, such as the probe of a thermocouple. At least three electrical heating elements as positioned adjacent to the test cavity, including two elements adjacent to the opposite end portions of the test cavity, respectively, and a center element between the end elements. A uniform temperature profile is maintained in the cavity by control circuitry that manages the supply of electrical power to the heating elements, by periodically configuring interconnections of the elements during multiple phases of a duty cycle. The duty cycle includes a first phase in which current is passed through the center element, a second phase in which current is passed through the end elements in series, and a third phase in which current is passed through one of the end elements and also through the center element without passing current through the other end element.

Abstract: An AC/DC converter includes a first terminal and a second terminal for receiving an AC voltage and a third terminal and a fourth terminal for delivering a DC voltage. A capacitive circuit is connected between the third and fourth terminals. A rectifying bridge circuit has input terminals respectively coupled to the first and second terminals and has output terminal respectively connected to the third and fourth terminals. An inductive element is coupled in series with a first switch circuit between the first terminal and an input terminal of the rectifying bridge circuit.

Abstract: Apparatus includes: a mixer configured to mix local a oscillator signal with a baseband signal and output a radio frequency (RF) signal; a first load coupled to the mixer and tuned to an operating frequency; and a second load coupled to the mixer and tuned to a predetermined multiple of the operating frequency.

Abstract: The invention relates to a heating device for heating the interior of a motor vehicle, comprising a plurality of heating modules arranged in at least one heating unit, each heating module comprising at least one heating resistor, at least one heat exchanger configured for delivering heat generated by the heating resistor to an airflow, and a rectangular frame surrounding the at least one heating resistor and the at least one heat exchanger, each frame having openings in opposed frame legs, wherein in the at least one heating unit the frame legs, comprising openings, of adjacent heating modules face one another and electrical connection elements reaching through the openings electrically connect the heating modules to one another.

Abstract: A controller includes a control unit, at least one DOF (Dynamic Offshoot Factor) unit, and a compensation unit. The control unit produces an output signal for a process according to a measured signal and a reference signal, so that the measured signal can be changed to approach the reference signal. The DOF unit receives a selection signal corresponding to a variable of the process that affects the measured signal or is affected by the control unit. Also, the DOF unit produces a DOF signal according to short-time and long-time average values of the selection signal. The compensation unit incorporates the DOF signal into one of the measured signal, the reference signal, and the output signal to obtain a compensation signal being sent back to the control unit, instead of the measured signal, the reference signal or the output signal, to facilitate controlling the process.

Abstract: The current application is directed to an intelligent-thermostat-controlled environmental-conditioning system in which computational tasks and subcomponents with associated intelligent-thermostat functionalities are distributed to one or more of concealed and visible portions of one or more intelligent thermostats and, in certain implementations, to one or more intermediate boxes. The intelligent thermostats are interconnected to intermediate boxes by wired and/or wireless interfaces and intelligent thermostats intercommunicate with one another by wireless communications. Wireless communications include communications through a local router and an ISP, 3G and 4G wireless communications through a mobile service provider. Components of the intelligent-thermostat-controlled thermostat-controlled environmental-conditioning system may also be connected by wireless communications to remote computing facilities.

Abstract: An apparatus for dispensing hot or boiling water which is provided with a thermally insulated reservoir which is resistant to an excess pressure prevailing in the interior, an electric heating element which is arranged in the reservoir, a discharge conduit and a valve which is included in a fluid communication between the reservoir and the discharge conduit and provided with a valve seat and a movably arranged valve member which in a closed position is pressed with a closing force against the valve seat and which can be brought with an operating element to an opened position, wherein the configuration of the valve and the connection thereof to the fluid communication are such that an excess pressure prevailing in the reservoir exerts a force on the valve body which is directed opposite to the closing force, wherein the closing force is such that the valve member is pressed from the closed position when an excess pressure prevailing in the reservoir reaches a threshold value.

Abstract: An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.

Abstract: An Electronically-Controlled Register vent (ECRV) that can be easily installed by a homeowner or general handyman is disclosed. The ECRV can be used to convert a non-zoned HVAC system into a zoned system. The ECRV can also be used in connection with a conventional zoned HVAC system to provide additional control and additional zones not provided by the conventional zoned HVAC system. In one embodiment, the ECRV is configured have a size and form-factor that conforms to a standard manually-controlled register vent. In one embodiment, a zone thermostat is configured to provide thermostat information to the ECRV. In one embodiment, the zone thermostat communicates with a central monitoring system that coordinates operation of the heating and cooling zones.

Abstract: A plasma processing apparatus includes a processing chamber, a wafer table, a refrigerant passage disposed inside the wafer table in which a refrigerant flows, a refrigeration cycle comprising the refrigerant passage in the wafer table as a first evaporator in which the refrigerant is evaporated as a result of a heat-exchange therein, a compressor, a condenser and an expansion valve, a second evaporator, and a controlling unit which adjusts a number of rotations of the compressor based upon a degree of dryness of the refrigerant at a position on the refrigeration cycle after passing through the first evaporation in a range in which dry-out does not occur in the first evaporator, and the dryness of the refrigerant being determined based upon an amount of a heat exchange during the evaporation of the refrigerant in the second evaporator.

Abstract: Apparatus and methods for heating of one or more substrates with a plurality of independently controllable heating zones. Pressurized air is provided to each of a plurality of independently controlled heater blocks each including a heating element. The pressurized air is heated in the heater blocks and discharged towards one or more regions of the one or more substrates. The amount of power provided to the heating element in one of the heating blocks may be adjusted relative to the amount of power provided to the heating element in another of the heating blocks. The temperature of one heating zone may thereby be adjusted relative to other heating zones so that the temperature of different heating zones for the one or more substrates may be independently controlled. Heated air may be recovered from the heating zones and recycled. The pressurized air may be preheated by passing through a lift plate.

Abstract: An electric heater for an automobile vehicle, with an electronic controller and a heat transmitting net, whereby the heat transmitting net contains a multitude of PTC-heating elements, a multitude of contact sheets, a multitude of heat dissipating fins and a multitude of distance elements. At least one PTC-heating element and at least one distance element is arranged between two adjacent contact sheets, whereby the PTC-heating elements and the distance elements between the adjacent contact sheets and the adjacent contact sheets themselves form a heating element, whereby the heating elements are connected to the electronic controller through connectors, which are arranged at the electronic controller and are connected to a power supply, whereby the heat transmitting net is divided in a first area, which contains only distance elements, and a second area, which contains PTC-heating elements and/or distance elements.

Abstract: An electric heater for an automobile vehicle, with an electronic controller and a heat transmitting net, whereby the heat transmitting net contains a multitude of PTC-heating elements, a multitude of contact sheets and heat dissipating fins, whereby the PTC-heating elements are respectively arranged between two adjacent contact sheets and form a heating element with the contact sheets whereby some of the contact sheets are connected to connectors, which are arranged at the electronic controller and are connected to either a positive pole of a power supply or a negative pole of a power supply and are arranged in an alternating order, whereby the quantity of connectors that are connected to a positive pole of a power supply and the quantity of connectors that are connected to a negative pole of a power supply differs by one.

Abstract: The present invention provides a stretch-resistant light-emitting or heat-emitting structure. The wirelessly-chargeable stretch-resistant light-emitting structure includes a woven member, conductive twisted cables, a light-emitting element, and a receiver circuit. The woven member is mounted to the article. Each conductive twisted cable includes a stretch-resistant wire and a electrically conductive wire twisted together. The conductive twisted cables are woven in the woven member. The light-emitting element, which is arranged inside the woven member, includes a light emission section and two conductive pins. The conductive pins are respectively and electrically connected to the electrically conductive wires of the conductive twisted cables.

Abstract: A system includes, in one example, a first heater device, a second heater device, and a temperature sensor, each disposed within a fluid flow. The system further includes a controller communicatively coupled to the first heater device, the second heater device, and the temperature sensor. The controller is configured to receive, from the temperature sensor, an indication of a measured temperature of the fluid flow. The controller is further configured to control, based on a difference between the measured temperature of the fluid flow and a target temperature, operation of the first heater device via a first pulse width modulation signal and operation of the second heater device via a second pulse width modulation signal.

Abstract: A control system for an electric water heater having an upper heating element and a lower heating element is disclosed. The control system includes a control module that controls operation of the electric water heater by selectively toggling the upper and lower heating elements between an ON state and an OFF state and a consumer interface module that allows a consumer to input a set point temperature and select an energy savings mode for the electric water heater. The control module regularly monitors hot water usage and adjusts the set point temperature by a predetermined setback amount until a capacity of the water heater matches consumer usage.

Abstract: A column oven includes a main unit, an auxiliary unit, an outside sensor, an internal sensor, a temperature range holding section for holding a plurality of temperature ranges, a temperature range specifying portion for specifying the temperature range to which the outside temperature belongs, a temperature control program holding section for holding a temperature control program for a control method of the main unit and the auxiliary unit in each temperature range in such a way that outputs of the main unit and the auxiliary unit are continuous in the temperature ranges that are adjacent to each other, a control method setting portion for setting a control method of the main unit and the auxiliary unit based on the temperature range specified and the temperature control program, and a temperature control portion for controlling the main unit and the auxiliary unit.

Abstract: The disclosure provides a heating medium heating apparatus by which it is possible to directly detect a temperature of a semiconductor switching element such as an IGBT, and to perform high-reliability overheating protection control, while suppressing the number of installations of the temperature sensor, and provides a vehicle air conditioner provided with the heating medium heating apparatus. In the heating medium heating apparatus, at least two PTC heaters are provided, the energization of the PTC heaters is respectively ON/OFF-controlled by a plurality of circuits, each containing a semiconductor switching element (34), and the amount of heating is adjusted. Overheating protection temperature sensors (58 and 59) are respectively installed between two pairs of adjacent semiconductor switching elements (34) of a plurality of the semiconductor switching elements (34).

Abstract: The present invention provides an apparatus and method for performing heat-exchanging reactions on an electro wetting-based micro fluidic device. The apparatus provides one or multiple thermal contacts to an electro wetting-based device, where each thermal contact controls the part of the electro wetting-based device it communicates with to a designed temperature. The electrowetting-based device can be used to create, merge and mix liquids in the format of droplets and transport them to different temperature zones on the micro fluidic device. The apparatus and methods of the invention can be used for heat-exchanging chemical processes such as polymerase chain reaction (PCR) and other DNA reactions, such as ligase chain reactions, for DNA amplification and synthesis, and for real-time PCR.

Abstract: A temperature control circuit for two heating devices respectively provided with a heater and a sensing wire. The sensing wires' ends are respectively connected to a diode. The two diodes' polarity is opposite to that of the sensing wires' connecting ends. Another ends of the sensing wires are connected to a capacitor to form a resistor-capacitor circuit. The heater wires are connected to a diode respectively and then a bi-directional thyristor. The two diodes' polarity is opposite to that of the heater wires' connecting ends. Thereby, the heater wires can be heated up respectively by the positive and negative half-periods of alternating current. When phase shifts occur because of the heater wires' temperature change, the sensing wires can control the bi-directional thyristor via a controller so that the positive or negative half-period are not triggered. Therefore, the heater wires' heating temperatures can be controlled individually.

Abstract: Disclosed herein is a system for monitoring a heating apparatus that includes a motion detector configured to determine whether a person is proximate the heating apparatus. The motion detector is default deactivated. Further disclosed is a heat sensor configured to determine whether the heating apparatus has a temperature that is above a threshold. The heat sensor is default deactivated. A processor is in operable communication with each of the motion detector and the heat sensor configured to cyclically repeat a first countdown. The heat sensor is temporarily activated once during each of the repeated first countdowns. The processor is configured to perform a second countdown when the activated heat sensor determines that the heating apparatus has the temperature that is above the threshold. The second countdown is reset each time the motion detector determines that a person is proximate the heating apparatus.

Abstract: Provided herein are methods and devices for rapidly and accurately heating fluid droplets surrounded by a gas-phase medium, such as air. Sub-nanoliter fluid droplets can be rapidly heated by nanoscale field effect transistors via microwave heating by an applied AC voltage to the FET. The heating is in a well-defined interior portion of the fluid droplet, with minimal heating of the outer portion of the fluid droplet, thereby minimizing evaporation. In this manner, rapid thermal cycling is possible, including independently and in parallel for a plurality of droplets. Accordingly, the methods and devices provided herein are used in point-of-care detection such as by PCR that is high speed, robust and of low cost.

Abstract: A method is provided for interconnecting a single electrical heating element of a hot water heater to first and second AC electrical power sources. Typically, these first and second AC electrical power sources include a utility provided electrical power source and a renewable power source that generates AC power from DC power. The method includes operating a controller that selectively connects and disconnects the first and second power sources. If sufficient electrical power is available from the renewable power source, the utility provided electrical power source may be disconnected to preferentially utilize renewable energy.

Abstract: A heating plate of a semiconductor substrate support for supporting a semiconductor substrate in a plasma processing chamber includes a first layer with an array of heater zones operable to tune a spatial temperature profile on the semiconductor substrate, and a second layer with one or more primary heaters to provide mean temperature control of the semiconductor substrate. The heating plate can be incorporated in a substrate support wherein a switching device independently supplies power to each one of the heater zones to provide time-averaged power to each of the heater zones by time divisional multiplexing of the switches.

Abstract: The present invention relates to a multi-level and vertical assembling type PTFE heater and the methods of manufacture thereof. Said heater includes a vertical frame assembled by multi-poles and upper and lower retaining plates. Several levels of PTFE sleeves and electrical heating belts are alternatively disposed on the multi-poles. The number of the poles is determined in accordance with the size and capacity of a heater desired and the power and levels of PTFE electrical heating belts with heating needs. Multiple levels of PTFE electrical heating belts are formed in an assembling way, by which heaters with varied powers are easily produced and with the elements replaceable, will not be wholly wasted in event of an element damaged, thus the heater service life prolonged. Said heater has a better heating result than the one with only a single level of heating structure.

Abstract: A countertop multi-function oven. The oven, comprising: an internal compartment; a door for the compartment; at least five heating elements; the fifth heating element being located between two top heating elements; a controller coupled to the heating elements for providing a variable wattage; a user interface coupled to the controller, wherein upon user operation of the interface an oven mode is selected from one or more predetermined oven modes.

Abstract: An image forming apparatus includes a heat source of a fixing device to heat when an alternate current signal is supplied thereto; a conduction control circuit for controlling an alternate current power source with a conduction control signal, and for supplying the alternate current signal to the heat source; and a control unit for outputting the conduction control signal in a specific pattern. The conduction control circuit includes a conduction control element for switching between conduction and non-conduction at a zero cross timing of the alternate current power source according to the conduction control signal, and for supplying the alternate current signal.

Abstract: A Positive Temperature Coefficient (PTC) assembly, in which protrusions are formed on opposite longitudinal edges of an electrode terminal, PTC elements are held between the protrusions and are in contact with the electrode terminal, an insulating member is attached to an outer surface of the electrode terminal, and a rod cover houses therein the electrode terminal, the PTC elements and the insulating member. A simple structure is realized, fabrication costs are reduced, and a hollow space inside the rod cover is minimized, leading to improved heat transfer efficiency from the PTC elements to the rod cover, reduced noise and a slim structure.

Abstract: The image heating apparatus includes first and heat generation member, a connection state switching section switching the first and second heat generation members between a serial connection state and a parallel connection state, the connection state switching section having a first make-or-break-contact relay and a second transfer-contact relay, a drive element provided used for controlling power supplied to the first and second heat generation members, and a capacitor between a power supply path closer to the side of the first and second heat generation members rather than the first relay and a power supply path closer to the commercial power supply side rather than the drive element. The image heating apparatus can suppress an increase in noise level of a noise terminal voltage by performing power control on the heater.

Abstract: An appliance network has a networked appliance configured to perform a food preparation operation on an article and a cooking sensor accessory in communication with the networked appliance and configured to sense a state of at least one of the article, the cooking sensor accessory, and the networked appliance.

Abstract: There is described a method for stabilizing a post-trimming resistance of a thermally isolated electrical component made from a thermally mutable material, the method comprising: generating at least one heating pulse, the at least one heating pulse having an initial amplitude corresponding to a trimming temperature, a slope corresponding to a given cooling rate and a duration corresponding to a given cooling time; and applying the at least one heating pulse to one of the thermally isolated electrical component and a heating device in heat transfer communication with the thermally isolated electrical component, after a trimming process, in order to cause the electrical component to cool in accordance with the given cooling rate, the given cooling rate being slower than a passive cooling rate determined by the thermal isolation of the electrical component.

Abstract: A method of operating a heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus, wherein the heating plate comprises power supply lines and power return lines and respective heater zone connected between every pair of power supply line and power return line. The method reduces maximum currents carried by the power supply lines and power return lines by temporally spreading current pulses for powering the heater zones.

Abstract: According to one aspect, a system for reducing peak power usage of an electromechanically controlled cooking appliance is provided. The system includes at least one infinite switch, one or more heating units, at least one of which comprising at least two separately controllable resistive heating elements, a control operatively coupled to the one or more heating units, the control being configured to receive and process a utility state signal indicative of the current state of an associated utility, wherein the one or more heating units include at least one relay switch configured to selectively enable and disable energization of one of the elements in response to the utility state signal.

Abstract: An apparatus for image formation comprises a fixing unit, first to fourth switching units, a DC power supply unit, an accumulating unit, a charging unit, and a switching control unit. The first switching unit switches the state of connection between the fixing unit and a commercial power source. The DC power supply unit supplies another electric load of the apparatus than the fixing unit with DC power. The second switching unit switches the state of connection between the DC power supply unit and the commercial power source. The third switching unit switches the state of connection between the charging unit and the commercial power source. The fourth switching unit switches the state of connection between the accumulating unit and the electric load. Based on the state of conduction of the first switching unit, the switching control unit switches the states of conduction of the other three switching units.

Abstract: A staining device for staining samples has a heating device including a first heating element and a second heating element. A switch arrangement allows the two heating elements to be connected in parallel or in series. A power connection supplies power to the heating elements. A sensor is designed and located to detect a current supplied to the heating elements. A switching unit is coupled to the sensor and determines a voltage causing the current. Depending on the voltage, the switching unit connects the heating elements in parallel or in series.

Abstract: A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.

Abstract: A system for shifting energy demand from on-peak time windows to off-peak time windows by using hot water heater load shifting, while providing the end user with the level of service (i.e., availability of hot water) according to the user's customary use described by service quality criteria. The shift is accomplished by a controller located at the end user establishment and in communication with a central control server. The controller monitors local water heater upper and/or lower temperature and controls upper and/or lower water heater heating elements in accordance with a demand shift process commanded by the central control server. The controller may determine usage and remaining capacity for reporting back to the central control server. A volumetric capacity and usage determination is disclosed. The control server may select water heaters according to use patterns and/or measured capacity.

Abstract: A power control device includes a priority setting section capable of setting a use priority of a home appliance connected wirelessly or via cable or an adapter connected to the home appliance. The home appliance or the adaptor connected to the home appliance operates within the usable power of a result of the inquiry to the power control device. When there is no excess in usable power over the required power in the inquiry, the power control device reduces the power of a device having a lower priority than the device which has transmitted the inquiry in order to use the device with the higher priority.

Abstract: A countertop multi-function oven has a baking and a toasting mode. The oven has, in vertical arrangement, a first rotating time selection dial and second rotating temperature selection dial and graphic display area. The graphic area has a function selection indictor as well as first and second alphanumeric portions. In a toasting mode, one of the input dials is used to select a toasting load and the other input dial is used to select a toasting darkness.

Abstract: A method and apparatus for controlling heating and cooling of a transfer unit in a precision hot press device configured to suppress overheating and supercooling, and of performing quick heating and cooling, wherein the method and apparatus compares an amount of energy given to the transfer unit or taken from the transfer unit by a heating unit or a cooling unit with an amount of energy observed to enter into or exit from the transfer unit before the temperature of the transfer unit reaches a target temperature, calculates an amount of surplus or supercooled energy from a difference between the two energy amounts, and heats or cools the transfer unit based on the amount of surplus or supercooled energy.

Abstract: In the present invention, temperature drop amounts of heating plate regions when the substrate is mounted on a heating plate are detected to detect a warped state of the substrate. From the temperature drop amounts of the heating plate regions, correction values for set temperatures of the heating plate regions are calculated. The calculation of the correction values for the set temperatures of the heating plate regions is performed by estimating steady temperatures within the substrate to be heat-processed on the heating plate from the temperature drop amounts of the heating plate regions using a correlation obtained in advance. From the estimated steady temperatures within the substrate and the temperature drop amounts of the heating regions, the correction values for the set temperatures of the heating plate regions are calculated. Based on the correction values for the set temperatures, the set temperatures of the heating plate regions are changed.

Abstract: A heating plate of a semiconductor substrate support for supporting a semiconductor substrate in a plasma processing chamber includes a first layer with an array of heater zones operable to tune a spatial temperature profile on the semiconductor substrate, and a second layer with one or more primary heaters to provide mean temperature control of the semiconductor substrate. The heating plate can be incorporated in a substrate support wherein a switching device independently supplies power to each one of the heater zones to provide time-averaged power to each of the heater zones by time divisional multiplexing of the switches.

Abstract: A uniform voltage is applied to loads even to other than a multiple of three loads made of heating lamps connected in parallel to each other, without causing any burden on a primary side. The number of loads is divided into a multiple of three and a multiple of two. A three-phase AC voltage is applied to three primary windings, which are connected as a Y-connection or a ?-connection. Secondary windings, which are each magnetically coupled to a primary winding of a plurality of three-phase transformers and have the same number of turns, are connected with the multiple of three loads.

Abstract: A countertop multi-function oven has a baking and a toasting mode. The oven uses a rotating input dial as a function selector. A second rotating input dial is used to allow a user selection of a bake time or a toasting load.

Abstract: An electrostatic chuck for receiving a substrate in a substrate processing chamber comprises a ceramic puck having a substrate receiving surface having a plurality of spaced apart mesas, an opposing backside surface, and central and peripheral portions. A plurality of heat transfer gas conduits traverse the ceramic puck and terminate in ports on the substrate receiving surface to provide heat transfer gas to the substrate receiving surface. An electrode is embedded in the ceramic puck to generate an electrostatic force to retain a substrate placed on the substrate receiving surface. A plurality of heater coils are also embedded in the ceramic puck, the heaters being radially spaced apart and concentric to one another.

Abstract: A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having planar heater zones, power supply lines, power return lines and vias.

Abstract: A resistance heating system is provided which includes a resistance heater, a source of alternating current electricity connected by conductors to the resistance heater, and a controller comprising a timer arranged to connect the source of alternating current electricity to the resistance heater for a selected time period and to disconnect the source from the resistance following the selected time period. In an embodiment, the resistance heating system is provided with a controller configured to be connected to a source of alternating current electricity and having a plurality of cable plug receptacles arranged to receive electricity. An electricity conducting cable having a cable plug at one end is configured to be received in the receptacles and has a resistance heater provided at an opposite end. A master timer may be connected with a communication arrangement to the controller. The master timer is arranged to control an electric output of a plurality of the receptacles.