Abstract: A pyroelectric detector includes a support member, a capacitor and a fixing part. The support member includes a first side and a second side opposite from the first side, with the first side facing a cavity. The capacitor includes a pyroelectric body between a first electrode and a second electrode such that an amount of polarization varies based on a temperature. The capacitor is mounted and supported on the second side of the support member with the first electrode being disposed on the second side of the support member. The fixing part supports the support member, with the cavity being formed between the support member and the fixing part.

Abstract: A passive infrared sensor has two or more detector element arrays, each consisting of positive polarity and negative polarity elements. The signals from the arrays are both summed together and subtracted from each other, and if either the sum or difference signal exceeds a threshold, detection is indicated.

Abstract: An infrared sensor formed from a resonant sensor element having a mechanical resonator and an IR absorber arranged to receive and absorb incident infrared radiation. The resonator includes a temperature-responsive material that exhibits pyroelectric and piezoelectric effects. The IR absorber is thermally coupled to the resonator such that the resonator receives thermal energy from at least some of the incident infrared radiation absorbed by the IR absorber. The resonator has at least one resonant characteristic that varies based on the amount of thermal energy received from the IR absorber by the resonator. A sensor array and infrared sensing method are included that use a plurality of the infrared sensors along with a reference sensor having the same construction as the other sensor elements, except that the sensor either lacks the IR absorber or has it arranged so that it is not exposed to the incident infrared radiation.

Abstract: An infrared detector includes a pyroelectric element, a first amplifier, and a second amplifier. The pyroelectric element includes a first electrode formed on a first surface of a pyroelectric body, and a second electrode formed on the opposite surface. The first amplifier is connected to the first electrode, and amplifies signals induced to the first electrode. The second amplifier is connected to the second electrode, and amplifies signals induced to the second electrode.

Abstract: Disclosed is a net radiometer that measures the net difference between incoming solar and outgoing terrestrial radiant flux energy in the combined short-wave and long-wave far infrared spectral range. In accordance with principles of the invention, a balanced net radiometer can be constructed where each thermal absorber is formed from two separate pieces joined together to form a single thermal mass. Within each thermal absorber, each piece is coated with a separate surface coating of different spectral sensitivity. By constructing an absorber from two separate pieces, it is possible to apply spectral coatings with different curing characteristics, to thermal absorber that acts as a single thermal mass. The pieces within each thermal absorber are sized in a proportion that thermally balances the absorber's thermal sensitivity between short-wave and long-wave far infrared radiant energy.

Abstract: The invention relates to a device for detecting electromagnetic radiation comprising: a resistive bolometer, a biasing circuit capable of biasing said bolometer with a predetermined bias voltage, a rejection module capable of generating a common mode current, a measuring circuit capable of being connected to a bolometer and a rejection module in order to measure the difference between the current flowing through the bolometer when it is biased and the common mode current generated by the rejection module. According to the invention, rejection module comprises: a module for estimating a current that flows through resistive bolometer when it is subjected to the bias voltage and made insensitive to the electromagnetic radiation; and a current generator which is controlled by the estimation module and generates the current estimated by the latter as a common mode current.

Abstract: A MEMS sensor has a frame portion 2 formed in a rectangular frame shape and a convexoconcave shaped membrane 3 that is constructed within the frame portion 2, the convexoconcave shape of the membrane 3 extend to two direction where a concave and a convex are orthogonal to each other, and square concave portions 3a and square convex portions 3b are disposed in a web shape within a whole in-plane area of the membrane 3.

Abstract: An infrared gas detector includes an infrared reception member, a package configured to accommodate the infrared reception member, and an optical filter. The infrared reception member includes a plurality of thermal infrared detection elements each configured to detect infrared based on heat caused by received infrared. The thermal infrared detection elements are placed side by side. The package is provided with a window opening configured to allow the infrared reception member to receive infrared. The optical filter is attached to the package so as to cover the window opening, and includes a plurality of filter elements respectively corresponding to the plurality of the thermal infrared detection elements. Each of the filter elements includes a filter substrate made of an infrared transparent material, a transmission filter configured to transmit infrared of a selected wavelength, and a cut-off filter configured to absorb infrared of a wavelength longer than the selected wavelength.

Abstract: A MEMS sensor has a membrane 3 in a polygon released via a support portion 2, and the membrane 3 has a reinforcement rib portion 6 made up of a plurality of radially extending rib portions 6a and a plurality of divisional membranes 7 constructed between adjacent two rib portions 6a, 6a and formed in a polygon with the two rib portions 6a, 6a as two sides.

Abstract: The infrared sensor in accordance with the present invention includes a pyroelectric element, an IC device, and a surface-mounted package. The IC device is configured to process an output signal of the pyroelectric element. The package houses the pyroelectric element and the IC device. The package includes a package body and a package lid configured to transmit infrared rays to be detected by the pyroelectric element, and has electrical conductivity. The package body is provided on its surface with plural recessed parts arranged in tiers. The IC device is mounted on a bottom of the lower recessed part. The package body includes an output wiring configured to electrically connect an output terminal of the IC device to an external connection terminal and a shielding member interposed between the pyroelectric element and the output wiring.

Abstract: A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The first electrode includes a first region on which the pyroelectric body is layered, and a second region protruding from the first region in plan view. The support member includes an insulating layer, a first wiring layer disposed on the second surface side of the insulating layer, and a first plug passing through the insulating layer at a position where the first wiring layer and the second region of the first electrode overlap in plan view to connect the first wiring layer with the first electrode.

Abstract: A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The support member includes an insulating layer, a first wiring layer disposed on a side of the second surface of the support member with respect to the insulating layer, and a first plug passing through the insulating layer at a position where the pyroelectric body and the first wiring layer overlap in plan view to connect the first wiring layer with the first electrode.

Abstract: The invention relates to an infrared light detector having a sensor chip (4), which comprises a thin-film element (5) made from a pyroelectrically sensitive material, having an electrical insulator (27), at least one electronic component (17, 18) having a thin-film design, which forms part of a readout electronics unit, and a thin-film membrane (2), on which the sensor chip (4) and the electronic component (17, 18) are mounted side by side in an integrated manner such that the electronic component (17, 18) is electrically conductively coupled to the thin-film element (5). A signal amplifier (22), with which, in co-operation with the electronic component (17, 18), an electrical signal emitted from the sensor chip (4) can be amplified, can be connected to the electronic component (17, 18).

Abstract: The invention relates to a device for the detection of an electromagnetic radiation including: a substrate; a resistive imaging bolometer; a circuit for polarizing the bolometer at a predetermined voltage; a rejection circuit generating a common mode current, comprising a compensation bolometer thermalized in the substrate and a polarization circuit thereof; and a measuring circuit for measuring the difference between the current flowing in the imaging bolometer when it is polarized and the common mode current generated by the rejection circuit. According to the invention, the rejection circuit further comprises a current generator capable of producing a current that simulates the current induced by the self-heating of the imaging bolometer under the effect of its polarization, the sum of the current passing through the compensation bolometer and the current generated by the current generator forming the common mode current.

Abstract: A detector for detecting electromagnetic radiation includes a substrate and at least one microstructure including a radiation-sensitive membrane extending substantially opposite and away from the substrate. The membrane is mechanically attached to at least two longilinear, collinear retention elements, at least one of which is mechanically connected to the substrate by an intermediate post. The membrane is in electrical continuity with the substrate. At least two collinear legs are attached to each other at the level of their ends which are attached to the membrane by a mechanical connector which is substantially co-planar with the legs and membrane. The other end of at least one of the legs is integral with a rigid cross piece which is substantially co-planar with the legs and extends substantially at right angles relative to the main dimension of the legs. The cross piece is integral with the post which is integral with the substrate.

Abstract: It is possible to quickly and readily determine the location of an object. A solid-state imaging element according to an embodiment includes: at least two infrared detectors formed on a semiconductor substrate; an electric interconnect configured to connect the at least two infrared detectors in series; and a comparator unit configured to compare an intermediate voltage of the electric interconnect connecting the infrared detectors in series, with a predetermined reference voltage.

Abstract: A detection device includes a plurality of pyroelectric elements and a detection circuit. The pyroelectric elements includes a first pyroelectric element through an n-th pyroelectric element serially provided between a detection node and a first power supply node with n being an integer equal to or greater than 2. Each of the first pyroelectric element through the n-th pyroelectric element has a direction of polarization that is set to the same direction. The detection circuit is connected to the detection node.

Abstract: A thermal detector includes a substrate; a support member supported on the substrate with a cavity interposed therebetween; a heat-detecting element formed on the support member; a first light-absorbing layer formed on the heat-detecting element and the support member so as to be in contact with the heat-detecting element; and a second light-absorbing layer formed on the first light-absorbing layer so as to be in contact with the first light-absorbing layer. The second light-absorbing layer has a higher refractive index than the first light-absorbing layer. A first wavelength resonates between a surface of the support member and an upper surface of the second light-absorbing layer, and a second wavelength, which is different from the first wavelength, resonates between an interface, at which the first light-absorbing layer and the second light-absorbing layer are in contact with each other, and the upper surface of the second light-absorbing layer.

Abstract: A thermal detector includes a substrate; a support member supported on the substrate interposed by a cavity; a heat-detecting element formed on the support member; a light-reflecting layer formed at a position spaced apart from the heat-detecting element in at least a portion of a peripheral region of the heat-detecting element on the support member; a light-absorbing layer formed on the heat-detecting element and the light-reflecting layer; and a thermal transfer member that is connected to the heat-detecting element by a connector, the thermal transfer member including a connecting portion connected to the heat-detecting element and a thermal collecting portion disposed inside the light-absorbing layer and having a surface area larger than a surface area of the connecting portion as seen in plan view, the thermal collecting portion being optically transmissive at least with respect to light of a prescribed wavelength.

Abstract: A thermal detector includes: a substrate; a support member supported so that a cavity is formed between the substrate and the support member; a heat-detecting element supported on the support member; a thermal transfer member disposed over the heat-detecting element, and including a thermal collecting portion made of a material having light-reflecting characteristics and having a pattern with which a portion of light incident to a region defined by the support member as seen in plan view enters towards the support member, and a connecting portion connecting the thermal collecting portion to the heat-detecting element; a first light-absorbing layer contacting the thermal transfer member between the thermal transfer member and the support member; and a second light-absorbing layer contacting the thermal transfer member and disposed on the thermal transfer member.

Abstract: A detection device includes a plurality of pyroelectric elements, detection circuit and a poling circuit. The pyroelectric elements include a first pyroelectric element through an n-th pyroelectric element serially provided between a detection node and a first power supply node with n being an integer equal to or greater than 2. The detection circuit is connected to the detection node. The poling circuit is configured to perform a poling process, in which a direction of polarization of at least one of the first pyroelectric element through the nth pyroelectric element is set independently of a direction of polarization of another one of the first pyroelectric element through the n-th pyroelectric element.

Abstract: A thermal detector includes a substrate; a support member supported on the substrate interposed by a cavity; a heat-detecting element formed on the support member and having a pyroelectric material layer disposed between a lower electrode and an upper electrode; a light-absorbing layer formed on the heat-detecting element; and a thermal transfer member including a connecting portion connected to the heat-detecting element and a thermal collecting portion disposed inside the light-absorbing layer and having a surface area larger than that of the connecting portion in plan view, the thermal collecting portion being optically transmissive at least with respect to light of a prescribed wavelength. The lower electrode has an extending portion extending around the pyroelectric material layer in plan view, and the extending portion has light-reflecting properties by which at least a part of the light transmitted through the thermal collecting portion of the thermal transfer member is reflected.

Abstract: An infrared detection element includes a pyroelectric element, an upper electrode and a lower electrode located so as to have a positional relationship where the pyroelectric element is interposed therebetween, and an opening function portion formed on the upper electrode such that a film thickness of the upper electrode is small or zero.

Abstract: A detection circuit includes a pyroelectric element; a first P-type transistor provided between an output node and a low-potential-side power node of the detection circuit, a detection signal being inputted from the pyroelectric element to a gate of the first P-type transistor; and a second P-type transistor provided between a high-potential-side power node and the output node, a gate of the second P-type transistor being set to a reference voltage.

Abstract: An infrared light sensor for an infrared light detector (1), including a substrate membrane section (2) and at least two sensor chips (7 to 10), which are fastened next to each other on the substrate membrane section (2) and each comprise a layer element (11) which is produced from pyroelectrically sensitive material and is electrically contacted by a base electrode (12) and a head electrode (13) and is arranged in such that there is a voltage difference in each case between the head electrode (13) and the base electrode (12) of each layer element (11) when the layer elements (11) are irradiated with infrared light; and a coupling line (14 to 16) in each case for two adjacently arranged sensor chips (7 to 10), the coupling line coupling the head electrode (13) of the one sensor chip (7 to 9) and the base electrode (12) of the other sensor chip (8 to 10) to each other in an electrically conductive manner so that the layer elements (11) of the sensor chips (7 to 10) are connected in a series circuit, which has

Abstract: The invention concerns a method for the controlled distribution of pico- or nano-volumes of a liquid, comprising the step of: A. Deposing the liquid as a film or separated sessile drops on a surface of a starting substrate; the liquid being extracted and distributed on the surface of a substrate called “destination substrate”, the method being characterized in that: —At least one between said starting substrate and destination substrate is a pyroelectric substrate; The method comprising the following further step: B.

Abstract: In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described.

Abstract: A pyroelectric material is made of lithium tantalate treated to an extent that a bulk resistivity is in a range of less than 2e+14?*cm, preferably less than 5e+12?*cm, but more than a lower threshold is obtained.

Abstract: A thermal infrared sensor includes an infrared ray absorbing film that is thermally separated from a semiconductor substrate by a hollow part; and a temperature sensor configured to detect temperature changes of the infrared ray absorbing film. The infrared ray absorbing film includes an infrared ray antireflection structure configured with a sub wavelength structure, the infrared ray antireflection structure being provided on a surface of the infrared ray absorbing film facing the semiconductor substrate.

Abstract: Disclosed is a net radiometer that measures the net difference between incoming solar and outgoing terrestrial radiant flux energy in the combined short-wave and long-wave far infrared spectral range. In accordance with principles of the invention, a balanced net radiometer can be constructed where each thermal absorber is formed from two separate pieces joined together to form a single thermal mass. Within each thermal absorber, each piece is coated with a separate surface coating of different spectral sensitivity. By constructing an absorber from two separate pieces, it is possible to apply spectral coatings with different curing characteristics, to thermal absorber that acts as a single thermal mass. The pieces within each thermal absorber are sized in a proportion that thermally balances the absorber's thermal sensitivity between short-wave and long-wave far infrared radiant energy.

Abstract: The present invention aims to reduce a size and improve quality of an infrared sensor. An infrared sensor (203) according to the present invention includes a substrate (202) and an infrared detection element (201). A principal surface of the substrate (202) includes a convex shape. The infrared detection element (201) is formed over the principal surface including the convex shape of the substrate (202). Further, as for the infrared detection element (201), an entire light-receiving surface includes a planar shape. Then, it can be the small-sized infrared sensor (203) with improved quality.

Abstract: Passive infrared detectors (20, 22, 24, 26, 28) carried by an elevator car (14) detect the presence of persons on top of or in the hoistway (12) below the elevator car (14). The passive infrared detectors (20, 22, 24, 26, 28) can also be used to detect open landing doors with no elevator present.

Abstract: An infrared array sensor includes: a base substrate; cavities which have array structure and are formed on a surface side of the base substrate; and pixel parts supported by the base substrate to cover the cavities, respectively. Each of the pixel parts includes a membrane structure that includes segmented membrane structures divided by slits. Each of the segmented membrane structures includes a thermosensor. Each membrane structure of the pixel parts includes a coupling piece for connecting its own segmented membrane structures to each other.

Abstract: A thermal detector has a thermal detection element in which a physical characteristic changes based on temperature, a light-absorbing member configured and arranged to collect heat and transmit collected heat to the thermal detection element, a support member mounting the thermal detection element on a first side with a second surface facing a cavity, and a support part supporting a portion of the support member. The light-absorbing member is a plate shaped member at least partially contacting a top part of the thermal detection element and having a portion overhanging to an outside from the top part of the thermal detection element in plan view.

Abstract: A thermal-type infrared solid-state imaging device comprises a infrared detector having at least a substrate provided with an integrated circuit for reading out a signal, a diaphragm for detecting a temperature change by absorbing infrared rays, and a support section for supporting the diaphragm above a surface of one side of the substrate with space in between, and includes an eaves section connected to a connection area provided in the vicinity of outer circumference of the diaphragm and covering at least components other than the diaphragm across a space and transmitting the heat generated by absorbing incident infrared rays to the diaphragm, wherein the eaves section has the thickness of a first region covering the components other than the diaphragm across a space thicker than the thicknesses of a second region contacting the connection area of the diaphragm and a third region rising upward in mid air from the diaphragm.

Abstract: Apparatus and methods for measuring the concentrations of organic and inorganic carbon, or of other materials, in aqueous samples are described, together with related, specially adapted components and sub-assemblies and related control, operational and monitoring systems.

Abstract: A bolometer includes a membrane, a first spacer and a second spacer, the membrane including resistive and contact layers. At a side facing a foundation, the contact layer has a first contact region at which the first spacer electrically contacts the contact layer, and a second contact region at which the second spacer electrically contacts the contact layer. In this manner, the membrane is kept at a predetermined distance to the foundation. The contact layer is laterally interrupted by a gap, so that the contact layer is subdivided at least into two parts, the first part including the first contact region, and the second part including the second contact region, and no direct connection existing within the contact layer from the first contact region to the second contact region, and the resistive layer being in contact with the first and second parts of the contact layer.

Abstract: A device for detecting infrared radiation including a resistive imaging bolometer, a mechanism for measuring drift in the electrical resistance of the bolometer relative to a reference value of the electrical resistance of the bolometer which corresponds to predetermined operating conditions of the bolometer, and a mechanism for correcting the effects of the drift in resistance or for correcting the drift itself.

Abstract: According to some embodiments, an apparatus having a first sensor having a first adjustable lens and a second sensor having a second adjustable lens is disclosed. A controller is coupled to the first sensor and the second sensor. The controller is to cause the first sensor and the second sensor to operate independently in a first mode and is to cause the first motion sensor and the second motion sensor to operate interdependently in a second mode.

Abstract: A thermal detector has a substrate, a thermal detector element having a light-absorbing film, and a support member. The support member has a mounting part mounting the thermal detector element, a first arm part having one end that is linked to one end of the mounting part and another end that is supported on the substrate, and a second arm part having one end that is linked to the other end of the mounting part and another end that is supported on the other end of the substrate. A plurality of wirings electrically connected with the thermal detector element are provided on the first arm part, and the length of the second arm part is shorter than the length of the first arm part.

Abstract: A target marking system includes a light source emitting a thermal beam having a predetermined temporal modulation, and an optics assembly directing the thermal beam to impact a target, the target directing radiation to the optics assembly in response to the impact. A portion of the radiation having the predetermined temporal modulation. The target marking system further includes a detector configured to distinguish the portion of the radiation having the predetermined temporal modulation from a remainder of the radiation, the portion of the radiation passing to the director through the optics assembly. The system also includes a readout integrated circuit, the detector directing an input signal to the readout integrated circuit, and the readout integrated circuit producing a digitally enhanced output signal in response to receipt of the input signal.

Abstract: A pyroelectric infrared body sensing switch circuit comprises an amplification circuit, a delay unit, an execution unit, and an infrared detection circuit comprising one or more pyroelectric infrared detection elements. A power unit comprises first and second power circuits. Each of the first and second power circuits receives AC power and supplies DC power through RC voltage reduction, full-wave rectification, filtration, and voltage stabilization. The first power circuit supplies power to the execution unit and the second power circuit supplies power to the infrared detection circuit, the amplification circuit, and the delay unit. A signal outputted from the infrared detection circuit is inputted to the amplification circuit. A signal outputted from the amplification circuit controls the activation of the delay unit. A signal output from the delay unit controls the execution unit.

Abstract: An infrared ray sensor and a method of fabricating the same is provided to increase detection sensitivity and to be easily fabricated with high yield rate. Provided herein is an infrared ray sensor having a frame-shaped substrate section formed in a square frame shape, a projecting base material section formed inside the frame-shaped substrate section and elongating to an incident direction of an infrared ray, and an infrared ray detection section provided on at least an upper lateral surface of the projecting base material section. The projecting base material section is made up of a plurality of rib-like element base material sections having a plurality of vertical base material sections and horizontal base material sections combined in a lattice shape.

Abstract: The invention relates to a bolometer element, a bolometer cell, a bolometer camera, and a method for reading a bolometer cell. The bolometer cell comprises several bolometer elements. Each bolometer element comprises a first bolometer having a first heating resistance for sensing radiation power acting on the element, and a second bolometer having a second heating resistance, and in each bolometer element the first and second bolometers are electrically connected to each other in such a way that the heating resistance (611) of the first bolometer can be biased with the aid of a voltage through the heating resistance of the second bolometer in order to amplify the radiation power detected with the aid of the connection. With the aid of the invention, it is possible to implement an extremely sensitive bolometer camera.

Abstract: A system and method for detecting the presence of a moving object within a detection zone is provided. The system includes a first sensor responsive to light in a first range of wavelengths in the detection zone, a second sensor responsive to light in a second range of wavelengths in the detection zone, wherein the second range of wavelengths is different from the first range of wavelengths, and a processing component for generating a variable threshold value for the first sensor based upon at least maximum and minimum output signals from the second sensor within a predetermined period of time, and for comparing the first output signal with the variable threshold value. The processing component generates an activating signal if the first output signal exceeds the threshold value.

Abstract: In one embodiment, a system includes a turbine including multiple components in fluid communication with a working fluid that provides power or thrust. The system also includes an imaging system in optical communication with at least one component. The imaging system is configured to receive a broad wavelength band image of the at least one component during operation of the turbine, to split the broad wavelength band image into multiple narrow wavelength band images, and to output a signal indicative of a two-dimensional intensity map of each narrow wavelength band image.

Abstract: A pyroelectric detector includes a pyroelectric detection element, a support member, a fixing part and a first reducing gas barrier layer. A first side of the support member faces a cavity and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface of the support member facing the opening part, and a part of a second surface of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.

Abstract: It is possible to quickly and readily determine the location of an object. A solid-state imaging element according to an embodiment includes: at least two infrared detectors formed on a semiconductor substrate; an electric interconnect configured to connect the at least two infrared detectors in series; and a comparator unit configured to compare an intermediate voltage of the electric interconnect connecting the infrared detectors in series, with a predetermined reference voltage.

Abstract: The thermal detector includes a substrate, a thermal detector element including a light absorbing film, a support member supporting the thermal detector element and supported on the substrate so that a cavity is present between the member and the substrate, and at least one auxiliary support post of convex shape protruding from either the substrate or the support member towards the other. The height of the at least one auxiliary support post is shorter than the maximum height from the substrate to the support member.

Abstract: A thermal infrared sensor is provided in a housing with optics and a chip with thermoelements on a membrane. The membrane spans a frame-shaped support body that is a good heat conductor, and the support body has vertical or approximately vertical walls. The object is to provide a thermopile infrared sensor in monolithic silicon micromachining technology, wherein the infrared sensor has a high thermal resolution capacity with a small chip size, a high degree of filling and a high response rate. The thermopile sensor structure consists of a few long thermoelements per sensor cell. The thermoelements being arranged on connecting webs that connect together hot contacts on an absorber layer to cold contacts of the thermoelements. The membrane is suspended by one or more connecting webs and has, on both sides of the long thermoelements, narrow slits that separate the connecting webs from both the central region and also the support body. At least the central region is covered by the absorber layer.