With Sample Vaporizing Means Patents (Class 250/425)
  • Patent number: 7335897
    Abstract: A new method and system for desorption ionization is described and applied to the ionization of various compounds, including peptides and proteins present on metal, polymer, and mineral surfaces. Desorption electrospray ionization (DESI) is carried out by directing charged droplets and/or ions of a liquid onto the surface to be analyzed. The impact of the charged particles on the surface produces gaseous ions of material originally present on the surface. The resulting mass spectra are similar to normal ESI mass spectra in that they show mainly singly or multiply charged molecular ions of the analytes. The DESI phenomenon was observed both in the case of conductive and insulator surfaces and for compounds ranging from nonpolar small molecules such as lycopene, the alkaloid coniceine, and small drugs, through polar compounds such as peptides and proteins. Changes in the solution that is sprayed can be used to selectively ionize particular compounds, including those in biological matrices.
    Type: Grant
    Filed: March 25, 2005
    Date of Patent: February 26, 2008
    Assignee: Purdue Research Foundation
    Inventors: Zoltán Takáts, Bogdan Gologan, Justin Michael Wiseman, Robert Graham Cooks
  • Patent number: 7301160
    Abstract: The invention relates to methods of controlling the effect of ions of an ionisable source gas that can react with interior surfaces of an arc chamber, by introducing ions of a displacement gas into the arc chamber, where the displacement gas ions are more chemically reactive with the material of the interior surfaces than the ions of the source gas. The source gas ions may typically be oxygen ions and the displacement gas ions are then typically fluorine ions where the interior surfaces comprise tungsten. The fluorine ions may, by way of example, be sourced from fluorine, silicon tetrafluoride or nitrogen trifluoride.
    Type: Grant
    Filed: June 1, 2004
    Date of Patent: November 27, 2007
    Assignee: Applied Materials, Inc.
    Inventor: Peter Michael Banks
  • Patent number: 7294841
    Abstract: An Electrospray Ionisation ion source and an Atmospheric Pressure Chemical Ionisation ion source are disclosed which comprise a probe 1 comprising three co-axial capillary tubes 2,3,3?. A blue-flame gas torch 6 is provided downstream of the probe 1 as a combustion source. An analyte solution is sprayed from an inner capillary tube 2 of the probe 1, a combustible gas is supplied to an intermediate capillary tube 3 of the probe 1 and oxygen or air is supplied to an outer capillary tube 3? of the probe 1. The combustible gas supplies heat to aid desolvation of the droplets emerging from the probe 1 via combustion with the surrounding oxygen-containing atmosphere when combusted by the blue flame torch 6.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: November 13, 2007
    Assignee: Micromass UK Limited
    Inventors: Stevan Bajic, Robert Harold Bateman
  • Patent number: 7282706
    Abstract: The present invention is directed to a novel arrangement of optical devices for the rapid patterning of laser profiles used for desorption and/or ionization sources in analytical mass spectrometry. Specifically, the new optical arrangement provides for a user-defined laser pattern at the sample target that can be quickly changed (on a microsecond timescale) to different dimensions (or shapes) for subsequent laser firings.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: October 16, 2007
    Assignee: The Texas A&M University System
    Inventors: David H. Russell, John A. McLean
  • Publication number: 20070228301
    Abstract: A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier includes: a target nozzle that injects a target material in a liquid droplet state or solid particle state; an electric charge supplying unit that supplies electric charge to the target material; a charge amount measuring unit that measures an amount of the electric charge supplied to the target material by the electric charge supplying unit; a control unit that controls the electric charge supplying unit in a feedback manner based on a measurement result obtained by the charge amount measuring unit; and an accelerator that accelerates the target material supplied with the electric charge by the electric charge supplying unit.
    Type: Application
    Filed: March 19, 2007
    Publication date: October 4, 2007
    Inventor: Masaki Nakano
  • Publication number: 20070221861
    Abstract: A process for ionizing a liquid can comprising flowing the liquid through a capillary wire bonding tip and applying sufficient voltage to electrospray the liquid sample as it exits therefrom. The electrospray ionization process can further involve passing a liquid sample through an axially disposed aperture in a ceramic capillary wire bonding tip in which the terminus of the aperture flares into a bell-shape where the liquid sample exits therefrom. An add-on device can include gel electroelution and separating devices, and a ceramic capillary sample injection tip for carrying out the aforesaid electrospray ionization process. An adjustably mounted cartridge can also be provided with the add-on device for interchangeably receiving the ceramic capillary sample injection tip.
    Type: Application
    Filed: December 20, 2006
    Publication date: September 27, 2007
    Inventors: James H. Lenke, Matthew Powell
  • Patent number: 7265362
    Abstract: An Electrospray Ionisation ion source and an Atmospheric Pressure Chemical Ionisation ion source are disclosed which comprise a probe 1 comprising two co-axial capillary tubes 2,3. A blue-flame gas torch 6 is provided downstream of the probe 1 as a combustion source. An analyte solution is sprayed from an inner capillary tube 2 of the probe 1 and a combustible gas is supplied to an outer capillary tube 3 of the probe 1. The combustible gas supplies heat to aid desolvation of the droplets emerging from the probe 1 via combustion with the surrounding oxygen-containing atmosphere when combusted by the blue flame torch 6.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: September 4, 2007
    Assignee: Micromass UK Limited
    Inventors: Stevan Bajic, Robert Harold Bateman
  • Patent number: 7259368
    Abstract: The present invention relates to an apparatus for delivering ions to a vacuum chamber. The apparatus comprises an ionization chamber, an ionization region within the ionization chamber, a vacuum interface at a vacuum interface voltage and a vacuum chamber, wherein the ionization chamber communicates with the vacuum chamber through the vacuum interface. Sample is introduced into the ionization chamber from an electrospray assembly at approximately ground potential. Two electrodes are provided within the chamber such that three electric fields are generated, a first field extending from the electrospray assembly to the first electrode, a second field extending from the second electrode to the first electrode, and a third field extending from the second electrode to the vacuum interface. Ions are forced to travel through the fields in order before entering the vacuum chamber. In addition, the invention provides a method of delivering ions to a vacuum chamber.
    Type: Grant
    Filed: February 24, 2006
    Date of Patent: August 21, 2007
    Assignee: Agilent Technologies, Inc.
    Inventors: William D. Frazer, Steven M. Fischer, Robert K. Crawford
  • Patent number: 7259378
    Abstract: A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed on the open end of the channel and extends therefrom in a second direction, where the first direction is opposite to the second direction. The distal ends of the first magnetic pole and the second magnetic pole define a gap comprising the opening in the first end. An anode is disposed within the channel. A primary magnetic field line is disposed between the first magnetic pole and the second magnetic pole, where that primary magnetic field line has a mirror field greater than 2.
    Type: Grant
    Filed: July 8, 2005
    Date of Patent: August 21, 2007
    Assignee: Applied Process Technologies, Inc.
    Inventor: John Madocks
  • Patent number: 7256396
    Abstract: A high sensitivity glow discharge ion source system for analyzing particles includes an aerodynamic lens having a plurality of constrictions for receiving an aerosol including at least one analyte particle in a carrier gas and focusing the analyte particles into a collimated particle beam. A separator separates the carrier gas from the analyte particle beam, wherein the analyte particle beam or vapors derived from the analyte particle beam are selectively transmitted out of from the separator. A glow discharge ionization source includes a discharge chamber having an entrance orifice for receiving the analyte particle beam or analyte vapors, and a target electrode and discharge electrode therein. An electric field applied between the target electrode and discharge electrode generates an analyte ion stream from the analyte vapors, which is directed out of the discharge chamber through an exit orifice, such as to a mass spectrometer.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: August 14, 2007
    Assignee: UT-Battelle, LLC
    Inventor: Peter T. A. Reilly
  • Patent number: 7238952
    Abstract: A metal ion emission device for emitting a metal ion by applying voltage to a molten liquid metal includes a needle-like part having an internal opening in which the liquid metal can be moved. The needle-like part has a first opening for supplying the liquid metal to the opening and a second opening for emitting the liquid metal as a metal ion.
    Type: Grant
    Filed: November 16, 2004
    Date of Patent: July 3, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Mitsuru Ohtsuka
  • Patent number: 7232688
    Abstract: Methods for dispensing tools that can be employed to generate multi-element arrays of sample material on a substrate surface. The resulting substrates are also provided. The substrates surfaces can be flat or geometrically altered to include wells of receiving material. The tool can dispense a spot of fluid to a substrate surface by spraying the fluid from the pin, contacting the substrate surface or forming a drop that touches against the substrate surface. The tool can form an array of sample material by dispensing sample material in a series of steps, while moving the pin to different locations above the substrate surface to form the sample array. The prepared sample arrays are passed to a plate assembly that disposes the sample arrays for analysis by mass spectrometry. To this end, a mass spectrometer is provided that generates a set of spectra signals that are indicative of the composition of the sample material under analysis.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: June 19, 2007
    Assignee: Sequenom, Inc.
    Inventors: Daniel P. Little, Maryanne J. O'Donnell-Maloney, Charles R. Cantor, Hubert Köster
  • Patent number: 7211805
    Abstract: An emitter of a Ga liquid metal ion source is constituted to include W12 of a base material and Ga9 of an ion source element covering a surface as construction materials. By making back-sputtered particles become elements (W and Ga) of the Ga liquid metal ion sour source, if back-sputtered particles attach to the Ga liquid metal ion source, contamination which may change physical characteristics of Ga9 does not occur. A W aperture is used as a beam limiting (GUN) aperture to place Ga of approx. 25 mg (of melting point of 30° C.) on a surface of a portion included in a beam emission region (Ga store). When emitting ions to the beam limiting (GUN) aperture, Ga in the emission region melts and diffuses on a surface of the beam emission region of the W aperture.
    Type: Grant
    Filed: December 21, 2005
    Date of Patent: May 1, 2007
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hiroyasu Kaga, Yuichi Madokoro, Shigeru Izawa, Tohru Ishitani, Kaoru Umemura
  • Patent number: 7205536
    Abstract: A source of ions for an analyzer includes a reservoir for containing a liquid, a manifold having a plurality of nozzles, a conduit connecting the reservoir to the manifold and a counter electrode having a potential different between the counter electrode and the nozzles to enable liquid to be ejected from the nozzles in droplets and to enable ions to be ejected from the droplets.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: April 17, 2007
    Assignee: Agilent Technologies, Inc.
    Inventors: Paul C. Goodley, Jean-Luc Truche
  • Patent number: 7193223
    Abstract: The invention relates to the ionization of analyte molecules on a solid surface close to atmospheric pressure as an ion source for mass spectrometers. The invention uses a spray mist from an electrospray apparatus to ionize the analyte molecules, for example a spray mist created by spraying pure water, which generates predominantly multiply charged ions of the analyte molecules which are particularly suitable for fragmentation.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: March 20, 2007
    Assignee: Bruker Daltonik, GmbH
    Inventor: Jochen Franzen
  • Patent number: 7189977
    Abstract: An inexpensive electrospray mass spectrometer capable of performing measurements consecutively from the ESI mode to the cold-spray ionization mode and vice versa. The electrospray mass spectrometer has an electrospray ion source, a nebulization nozzle, and a sampling orifice. The axes of the nozzle and orifice intersect each other. The instrument has a movable cold-spray desolvation chamber. In the electrospray ionization mode, the desolvation chamber is placed off the axis of the nebulization nozzle. In the cold-spray ionization mode, the desolvation chamber is set on the axis of the nebulization nozzle.
    Type: Grant
    Filed: August 19, 2003
    Date of Patent: March 13, 2007
    Assignee: JEOL Ltd.
    Inventors: Kentaro Yamaguchi, Tatsuji Kobayashi
  • Patent number: 7145138
    Abstract: An atmospheric pressure ionization source is provided. The atmospheric pressure ionization source comprises a chamber housing, a spray probe that produces a spray cone along a spray axis within the chamber, and an exhaust port opposite the spray probe on the housing. The exhaust port includes at least two segments, a first segment of the exhaust port is disposed between a second segment and an opening through the housing that receives the spray cone. The first segment defines a first axis that is co-axial with the spray axis, and the second segment defines a second axis that is angled relative to the first axis.
    Type: Grant
    Filed: June 1, 2005
    Date of Patent: December 5, 2006
    Assignee: Thermo Finnigan LLC
    Inventor: Rohan A. Thakur
  • Patent number: 7145136
    Abstract: An apparatus for use in atmospheric pressure ionization includes a sample receiving chamber, a sample droplet source communicating with the sample receiving chamber, an outlet conduit, and a boundary. The outlet conduit defines a sampling orifice that communicates with the sample receiving chamber. The boundary is interposed between the sample receiving chamber and the sampling orifice and comprises an opening. The opening defines a first passage through which a drying gas is flowable into the sample receiving chamber in an elongated flow profile, and a second passage through which sample material is flowable from the sample receiving chamber toward the sampling orifice. The first passage is positioned in non-coaxial relation to the second passage. The first passage is configured to introduce the elongated flow profile of the drying gas into a pathway of droplets of the sample material flowing toward the second passage.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: December 5, 2006
    Assignee: Varian, Inc.
    Inventors: Zicheng Yang, Roger C. Tong
  • Patent number: 7135689
    Abstract: The present invention relates to an apparatus and method for use with a mass spectrometer. The ion enhancement system of the present invention is used to direct a heated gas toward ions produced by a matrix based ion source and detected by a detector. The ion enhancement system is interposed between the ion source and the detector. The analyte ions that contact the heated gas are enhanced and an increased number of ions are more easily detected by a detector. The method of the invention comprises producing analyte ions from a matrix based ion source, enhancing the analyte ions with an ion enhancement system and detecting the enhanced analyte ions with a detector.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: November 14, 2006
    Assignee: Agilent Technologies, Inc.
    Inventors: Jean-Luc Truche, Jian Bai, Timothy Joyce
  • Patent number: 7132670
    Abstract: The present invention relates to an apparatus and method for use with a mass spectrometer. The ion enhancement system of the present invention is used to direct a heated gas toward ions produced by a matrix based ion source and detected by a detector. The ion enhancement system is interposed between the ion source and the detector. The analyte ions that contact the heated gas are enhanced and an increased number of ions are more easily detected by a detector. The method of the invention comprises producing analyte ions from a matrix based ion source, enhancing the analyte ions with an ion enhancement system and detecting the enhanced analyte ions with a detector.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: November 7, 2006
    Assignee: Agilent Technologies, Inc.
    Inventors: Jean-Luc Truche, Jian Bai, Timothy Joyce
  • Patent number: 7115860
    Abstract: A source of ions for an analyzer includes a reservoir for containing a liquid, a manifold having a plurality of nozzles, a conduit connecting the reservoir to the manifold and a counter electrode having a potential different between the counter electrode and the nozzles to enable liquid to be ejected from the nozzles in droplets and to enable ions to be ejected from the droplets.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: October 3, 2006
    Inventors: Paul C. Goodley, Jean-Luc Truche
  • Patent number: 7109480
    Abstract: Provided are MALDI ion sources, methods of forming ions and mass analyzer systems. In various embodiments, provided are MALDI ion sources configured to irradiate a sample on a sample surface with a pulse of laser energy at angle within 10 degrees or less of the surface normal, and a first ion optics system configured to extract sample ions in a direction within 5 degrees or less of the surface normal. In various embodiments, MALDI ion sources having substantially coaxial sample irradiation and ion extraction are provided. In various embodiments, methods are provided, which produce sample ions by MALDI and extract sample ions using an accelerating electrical field to form an ion beam, such that, the angle of the trajectory at the exit from the accelerating electrical field of sample ions substantially at the center of the ion beam is substantially independent of sample ion mass.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: September 19, 2006
    Assignees: Applera Corporation, MDS Inc.
    Inventors: Marvin L. Vestal, Kevin M. Hayden, Philip J. Savickas
  • Patent number: 7091493
    Abstract: Ionization efficiency is improved in Penning ionization capable of selective ionization. A metastable excited species of a rare gas is produced by introducing the rare gas into an ionization space and inducing an electrical discharge, a sample gas is introduced into the ionization space and Penning ionization is produced owing to collision between the sample gas and the metastable excited species of the rare gas. Electrons released from atoms or molecules positively ionized by Penning ionization are captured by applying a positive potential to an electron-capture electrode placed in the ionization space, and the atoms or molecules positively ionized are guided to a mass analyzer.
    Type: Grant
    Filed: May 12, 2004
    Date of Patent: August 15, 2006
    Assignee: Yamanashi TLO Co., Ltd.
    Inventor: Kenzo Hiraoka
  • Patent number: 7084408
    Abstract: Techniques for vaporizing and handling a vaporized metallic element or metallic element salt with a heated inert carrier gas for further processing. The vaporized metallic element or salt is carried by an inert carrier gas heated to the same temperature as the vaporizing temperature to a heated processing chamber. The metal or salt vapor may be ionized (and implanted) or deposited on substrates. Apparatus for accomplishing these techniques, which include carrier gas heating chambers and heated processing chambers are also provided.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: August 1, 2006
    Assignee: LSI Logic Corporation
    Inventors: James Kimball, Sheldon Aronowitz
  • Patent number: 7081622
    Abstract: An electrospray ionization device incorporates a shaped thin film with a microfluidic channel. The device may be interfaced to a time-of-flight mass spectrometer (TFOMS). In one embodiment, the shaped thin film has a polygonal-shaped or triangle-shaped thin polymer tip formed by lithography and etching. The microfluidic channel is approximately 20 micrometer wide and 10 micrometers deep, and embossed in a substrate using a silicon master. The shaped thin film is aligned with the channel and bonded between the channel substrate and a flat plate to create a microfluidic channel with a wicking tip protruding from the end of the channel. Application of a high voltage at one end of the channel creates an electrospray from the tip, which is provided to the TFOMS.
    Type: Grant
    Filed: March 17, 2005
    Date of Patent: July 25, 2006
    Assignee: Cornell Research Foundation, Inc.
    Inventors: Jun Kameoka, Harold G. Craighead
  • Patent number: 7041966
    Abstract: The present invention relates to an apparatus for delivering ions to a vacuum chamber. The apparatus comprises an ionization chamber, an ionization region within the ionization chamber, a vacuum interface at a vacuum interface voltage and a vacuum chamber, wherein the ionization chamber communicates with the vacuum chamber through the vacuum interface. Sample is introduced into the ionization chamber from an electrospray assembly at approximately ground potential. Two electrodes are provided within the chamber such that three electric fields are generated, a first field extending from the electrospray assembly to the first electrode, a second field extending from the second electrode to the first electrode, and a third field extending from the second electrode to the vacuum interface. Ions are forced to travel through the fields in order before entering the vacuum chamber. In addition, the invention provides a method of delivering ions to a vacuum chamber.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: May 9, 2006
    Assignee: Agilent Technologies, Inc.
    Inventors: William D. Frazer, Steven M. Fischer, Robert K. Crawford
  • Patent number: 7026611
    Abstract: Methods and apparatus for simultaneous vaporization and ionization of a sample in a spectrometer prior to introducing the sample into the drift tube of the analyzer are disclosed. The apparatus includes a vaporization/ionization source having an electrically conductive conduit configured to receive sample particulate which is conveyed to a discharge end of the conduit. Positioned proximate to the discharge end of the conduit is an electrically conductive reference device. The conduit and the reference device act as electrodes and have an electrical potential maintained between them sufficient to cause a corona effect, which will cause at least partial simultaneous ionization and vaporization of the sample particulate. The electrical potential can be maintained to establish a continuous corona, or can be held slightly below the breakdown potential such that arrival of particulate at the point of proximity of the electrodes disrupts the potential, causing arcing and the corona effect.
    Type: Grant
    Filed: May 1, 2001
    Date of Patent: April 11, 2006
    Assignee: Battelle Energy Alliance, LLC
    Inventors: David A. Atkinson, Paul Mottishaw
  • Patent number: 7022999
    Abstract: A multi mode ion source is disclosed that includes an ion source incorporating an ionization chamber for ionizing gas species and configured to have at least two discrete modes of operation; namely, an arc-discharge mode and a non-arc discharge mode of operation.
    Type: Grant
    Filed: April 15, 2004
    Date of Patent: April 4, 2006
    Assignee: SemEquip Inc.
    Inventors: Thomas Neil Horsky, John Noel Williams
  • Patent number: 7015465
    Abstract: A method and apparatus for the continuous deposition of RP HPLC eluent, from isocratic or gradient elutions, on to a MALDI target using a parallel sample desalting method, allows increased sensitivity of the MALDI sample by pre-concentration of the analyte, separation of interfering contaminants from the analyte and increased dynamic range of peptide abundance that can be analyzed. The parallel processing of sample material allows greater throughput than that of manual methods.
    Type: Grant
    Filed: April 29, 2004
    Date of Patent: March 21, 2006
    Assignee: Waters Investments Limited
    Inventors: Robert Karol, Jeffrey Finch, Daniel Wall
  • Patent number: 6998605
    Abstract: The present invention relates to an apparatus for delivering ions to a vacuum chamber. The apparatus comprises an ionization chamber, an ionization region within the ionization chamber, a vacuum interface at a vacuum interface voltage and a vacuum chamber, wherein the ionization chamber communicates with the vacuum chamber through the vacuum interface. Sample is introduced into the ionization chamber from an electrospray assembly at approximately ground potential. Two electrodes are provided within the chamber such that three electric fields are generated, a first field extending from the electrospray assembly to the first electrode, a second field extending from the second electrode to the first electrode, and a third field extending from the second electrode to the vacuum interface. Ions are forced to travel through the fields in order before entering the vacuum chamber. In addition, the invention provides a method of delivering ions to a vacuum chamber.
    Type: Grant
    Filed: May 25, 2000
    Date of Patent: February 14, 2006
    Assignee: Agilent Technologies, Inc.
    Inventors: William D. Frazer, Steven M. Fischer, Robert K. Crawford
  • Patent number: 6998626
    Abstract: This invention relates to a method of producing a dopant gas species containing a required dopant element for implanting in a target and to an ion source for implementing such a method. In particular, although not exclusively, this invention relates to producing dopant ions for implanting in semiconductor wafers using an ion implanter. The present invention provides a method of producing a dopant gas species containing a required dopant element for implanting in a target, the method comprising: exposing a source mass of the element to gaseous bromine and element react to form a reactant product, and ionising the reactant product to produce ions of the dopant gas species.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: February 14, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Geoffrey Ryding, Shu Satoh
  • Patent number: 6987279
    Abstract: A light source device capable of extending the life of a collector mirror and reducing running cost by protecting the collector mirror from debris that is considered harmful to a mirror coating while securing the collection solid angle and collection rate of EUV light. The light source device includes a target supply unit for supplying a material to become the target; a laser unit for generating plasma by applying a laser beam to the target; a collection optical system for collecting the extreme ultra violet light radiating from the plasma and emitting the extreme ultra violet light; and magnetic field generating unit for generating a magnetic field within the collection optical system when supplied with current so as to trap charged particles radiating from the plasma.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: January 17, 2006
    Assignees: Komatsu Ltd., Gigaphoton Inc.
    Inventors: Hideo Hoshino, Hiroshi Komori, Akira Endo
  • Patent number: 6919672
    Abstract: A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed on the open end of the channel and extends therefrom in a second direction, where the first direction is opposite to the second direction. The distal ends of the first magnetic pole and the second magnetic pole define a gap comprising the opening in the first end. An anode is disposed within the channel. A primary magnetic field line is disposed between the first magnetic pole and the second magnetic pole, where that primary magnetic field line has a mirror field greater than 2.
    Type: Grant
    Filed: April 10, 2003
    Date of Patent: July 19, 2005
    Assignee: Applied Process Technologies, Inc.
    Inventor: John Madocks
  • Patent number: 6914386
    Abstract: The invention provides a system and method for controlling a source of liquid metal ions, the source comprises a tip a first electrode and a second electrode, the method includes the steps of: (i) maintaining the first electrode at a first voltage level range and maintaining the second voltage at a second voltage range, such as to extract metal ions formed on a tip of the source, during an active mode of operation of the source; and (ii) maintaining the first electrode at a third voltage level range and maintaining the second voltage at a fourth voltage level range, such as to substantially reduce an extraction of metal ions from the tip, during an idle mode of operation of the source. The third voltage level range and, alternatively or additionally, the fourth voltage level ranges does not include zero voltage level. The first voltage level range differs than the third voltage level range.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: July 5, 2005
    Assignee: Applied Materials Israel, Ltd.
    Inventor: Asher Pearl
  • Patent number: 6884997
    Abstract: A dangerous substance detecting apparatus comprises an oven for accommodating a wiping member stuck with a sample derived from a dangerous substance, a light source for emitting infrared rays for heating the sample, an ion source for ionizing the sample evaporated in the oven, a mass analyzer for performing a mass analysis on ions, a data processing unit for processing an output signal from the mass analyzer to determine the presence or absence of a dangerous substance, an operation panel for displaying the result of the determination, an alarm unit for generating an alarm based on the result of the determination, and a control unit for controlling the respective components of the apparatus based on operating conditions entered from the operation panel and specified for the respective components of the apparatus.
    Type: Grant
    Filed: March 20, 2003
    Date of Patent: April 26, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Hideo Kashima, Izumi Waki, Yasuaki Takada, Hisashi Nagano, Katsumi Nagumo, Mitsuhiro Noda
  • Patent number: 6878945
    Abstract: A vaporizer is provided for delivering a solid source, such as arsenic for example that is vaporized in a crucible, into an arc chamber through a nozzle. The vaporizer includes a nozzle formed with a gas inlet port formed in upward orientation and located downward from the upper end of the inner surface of the crucible. Here, when the crucible has an inner diameter of 26 mm for example, the gas inlet port is preferably formed at a position approximately 1.1 mm below the upper end of the inner surface of the crucible, thereby facilitating the introduction of the gas from the gas inlet port and preventing clogging of the nozzle.
    Type: Grant
    Filed: January 20, 2004
    Date of Patent: April 12, 2005
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Kazuhiro Taniguchi
  • Patent number: 6875986
    Abstract: According to the ion generation method, ion source material composed of an element of desired ions to be generated and I is heated so that vapor of the compound is generated, and the ions are generated by discharging the vapor. The iodide has no corrosiveness, and can be stably ionized. Further, it hardly reacts with oxygen or water and is safe.
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: April 5, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Atsushi Murakoshi, Kyoichi Suguro, Katsuya Okumura
  • Patent number: 6864480
    Abstract: A member for holding at least one microfluidic device and providing an interface between the at least one microfluidic device and a second device is provided. The at least one microfluidic device has a plurality of reservoirs formed therein and the member includes a body having an upper face and a lower face and a plurality of open well members formed therein. Each well member is defined by a well wall and includes a first end and an opposing second end, wherein the second end is configured and dimensioned for frictionally engaging the at least one microfluidic device such that at least some of the open well members and the reservoirs of the microfluidic device align with one another. An apparatus for interfacing with a mass spectrometer to perform a nanospray application is also provided.
    Type: Grant
    Filed: November 26, 2002
    Date of Patent: March 8, 2005
    Inventor: Sau Lan Tang Staats
  • Patent number: 6861647
    Abstract: An MALDI mass spectrometer for the composition analysis of large batch sizes of samples includes a mass spectrometer having an ionization chamber and a sample chamber coupled to the ionization chamber. A transport cart is positioned in the sample chamber with a sample cassette removably coupled thereto. A method of operating a MALDI mass spectrometer is also disclosed.
    Type: Grant
    Filed: June 25, 2003
    Date of Patent: March 1, 2005
    Assignee: Indiana University Research and Technology Corporation
    Inventors: James P. Reilly, Kirk S. Boraas
  • Patent number: 6851299
    Abstract: A measuring apparatus of a component contained in test water according to the invention can prevent a test water feed nozzle from clogging up and smoothly feed air into a combustion furnace, and further, can accurately measure in a short time carbon dioxide gas obtained from the complete combustion of an inorganic substance contained in test water. In a test water dropping unit 20 of the measuring apparatus 10, a test water dropping nozzle 21 for dropping test water into a combustion furnace 30 is provided at a top of the combustion furnace 30, and a protective pipe 23 in which this test water dropping nozzle 21 is accommodated is disposed outside the test water dropping nozzle 21. The bottom end 23a of the protective pipe 23 is extended downward from the test water dropping nozzle 21 and is formed at an acute angle, and the tip 21a of the test water dropping nozzle 21 is disposed in abutment with the inner circumferential surface 24 of the protective pipe 23.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: February 8, 2005
    Assignee: Seishin Engineering Co., Ltd.
    Inventor: Kenkichi Yano
  • Patent number: 6844556
    Abstract: In an ion source, within a support body which supports a plasma production chamber for producing a plasma on the basis of an ion source flange, a cavity is provided ranging from a position near the plasma production chamber to a position near the ion source flange. The cavity serves as a cooling medium passage which introduces a cooling medium to a position near the plasma production chamber to cool the plasma production chamber. The plasma production chamber is cooled at a position very near it by the cooling medium. Therefore, temperature of the plasma production chamber at the time of plasma production is kept at low temperatures.
    Type: Grant
    Filed: May 21, 2003
    Date of Patent: January 18, 2005
    Assignee: Nissin Electronics Co., Ltd.
    Inventor: Toshiaki Kinoyama
  • Patent number: 6825464
    Abstract: The present invention concerns the formation of a stable electrospray of a volatile liquid at reduced pressures by limiting its tendency to evaporate. In a first approach, multi-component capillary jets are produced, comprising a thin layer of low volatility liquid, which is not necessarily a good conductor, surrounding a core of volatile and conducting liquid such as water, so as to minimize direct exposure of the volatile liquid to the region of low pressure. In a second approach, the diameter of the meniscus of a Taylor cone is reduced to a critical diameter, below which no evaporative freezing occurs.
    Type: Grant
    Filed: October 4, 2002
    Date of Patent: November 30, 2004
    Assignee: Yale University
    Inventor: Juan Fernandez De La Mora
  • Patent number: 6818909
    Abstract: The invention relates to an ion source for an ion implanter in which source material for providing desired ions is provided in the form of a plate or liner which can be fitted into the reactant chamber of the ion source.
    Type: Grant
    Filed: November 7, 2003
    Date of Patent: November 16, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Adrian Murrell, Peter Michael Banks, Andrew Allen, Neil L. Clarke, Matthew Peter Dobson
  • Patent number: 6806450
    Abstract: A hazardous material detection system that can suppress occurrence of contamination due to ionization. When a sensor detects that a test sample has entered an inspection region of an X-ray inspection device as a belt conveyor moves, a corona discharge power supply in a hazardous material detection device is turned on for a constant time, to introduce a gaseous sample containing a substance stuck to the test sample into the hazardous material detection device via a sucking section and gaseous sample introduction piping, in order to ionize the gaseous sample and analyze it at an analyzer, based on a result of which analysis, a data processor decides whether the gaseous sample contains a hazardous material, to display a decision result on a screen. When the test sample is detected by an exit side sensor, the corona discharge power supply is turned off.
    Type: Grant
    Filed: June 20, 2003
    Date of Patent: October 19, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Keiko Nakashige, Seiji Tanaka, Hiroyuki Fujita, Toshio Iwasaki, Yoshihiro Nishikawa
  • Patent number: 6759650
    Abstract: Ions for analysis are formed from a liquid sample comprising an analyte in a solvent liquid by directing the liquid sample through a capillary tube having a free end so as to form a first flow comprising a spray of droplets of the liquid sample, to promote vaporization of the solvent liquid. An orifice member is spaced from the free-end of the capillary tube and has an orifice therein. An electric field is generated between the free-end of the capillary and the orifice member, thereby causing the droplets to be charged, and the first flow is directed in a first direction along the axis of the capillary tube. Two gas sources, or an arc jet of gas, provide second and third flows, of a gas, and include heaters for heating the second and third flows.
    Type: Grant
    Filed: April 9, 2002
    Date of Patent: July 6, 2004
    Assignee: MDS Inc.
    Inventors: Thomas R. Covey, Raymond Jong, Hassan Javaheri
  • Patent number: 6707051
    Abstract: An RF loaded line type CCP source-having two collar type electrodes with an operating tube passing through these electrodes. One of the electrodes (high voltage electrode) is connected with the core of a feeding coaxial cable leading to a power supply, and another one is grounded by connection to a braid of the feeding coaxial cable, and the grounded electrode is further extended to form an outer cylindrical shield enveloping the operating tube with the high voltage electrode to provide a termination of an RF loaded line wherein the high voltage electrode with a plasma beam excited within the operating tube by action of an electric field between the electrodes form a core of this RF line. To provide effective contribution of RF energy in the plasma beam, the impedance of this line can be matched to the impedance of the plasma beam and matched also to the impedance of the feeding cable.
    Type: Grant
    Filed: July 10, 2002
    Date of Patent: March 16, 2004
    Assignee: Wintek Corporation
    Inventor: Evgeny V. Shun'ko
  • Patent number: 6686595
    Abstract: An ion source configured for integration into both existing ion implanters used in semiconductor manufacturing and emerging ion implantation platforms. The ion source in accordance with the present invention includes the following features, all of which depart from the prior art to produce a well-focused, collimated and controllable ion beam. These features include: ionizing electron beams generated external to the ionization chamber, thereby extending the emitter lifetime; 90 degree magnetic deflection of electron beams such that no line-of-sight exists between the emitter and the process gas load, and the emitter is protected from bombardment by energetic charged particles; two opposed electron beams which can be operated simultaneously or separately; and use of a deceleration lens to adjust the final energy of the electron beam, substantially without affecting electron beam generation and deflection.
    Type: Grant
    Filed: June 26, 2002
    Date of Patent: February 3, 2004
    Assignee: Semequip Inc.
    Inventor: Thomas N. Horsky
  • Patent number: 6677582
    Abstract: An apparatus for detecting the minor constituents of a sample with high efficiency in positive and negative ion monitoring modes. The directions in which the sample gas is forced to flow in the ionized region within the ion source are properly switched in the positive and negative ion monitoring modes, respectively, thereby enabling both positive ions and negative ions to be detected with high sensitivity.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: January 13, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Masuyoshi Yamada, Yasuaki Takada, Masao Suga
  • Patent number: 6661014
    Abstract: An oxygen ion containing plasma is generated using a hot filament ion source. The oxygen ions in the plasma come from an oxide source (e.g., a metal oxide) which has a lower free energy of formation than that of the filament metal oxide (e.g., WO3) at the operating temperatures of the ion source. Consequently, oxidation of the filament and other metal components of the arc chamber is limited, or even prevented. Thus, the invention can advantageously lead to longer filament lives as compared to certain conventional processes that generate oxygen plasmas using hot filament sources.
    Type: Grant
    Filed: March 12, 2002
    Date of Patent: December 9, 2003
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventor: Jaime M. Reyes
  • Publication number: 20030213918
    Abstract: An electrospray ionization device incorporates a shaped thin film with a microfluidic channel. The device may be interfaced to a time-of-flight mass spectrometer (TFOMS). In one embodiment, the shaped thin film has a polygonal-shaped or triangle-shaped thin polymer tip formed by lithography and etching. The microfluidic channel is approximately 20 micrometer wide and 10 micrometers deep, and embossed in a substrate using a silicon master. The shaped thin film is aligned with the channel and bonded between the channel substrate and a flat plate to create a microfluidic channel with a wicking tip protruding from the end of the channel. Application of a high voltage at one end of the channel creates an electrospray from the tip, which is provided to the TFOMS.
    Type: Application
    Filed: March 21, 2003
    Publication date: November 20, 2003
    Inventors: Jun Kameoka, Harold G. Craighead