Abstract: An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles including ion emitted from the plasma region toward the direction of the magnetic field, a first charged particle collector (receiver) mounted at both sides of an axis of the magnetic field in the magnetic field region in order to collect (receive) the charged particles converged by the magnetic field, a target supply unit supplying a target from a nozzle located outside a converging region in which the charged particles are to be converged inside the magnetic field region in an extreme ultraviolet light generating chamber, and a target collector located at a position opposite to the nozzle, the target retrieval portion retrieving a residual target which does not contribute to generation of the plasma.

Abstract: A detector array and method for making the detector array. The array includes a substrate including a plurality of trenches formed therein, and includes a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection. The array includes a plurality of readout circuits disposed on a side of the substrate opposite openings to the collectors. The readout circuits are configured to read charge collection signals from respective ones of the plurality of collectors.

Abstract: According to an embodiment, an apparatus for measuring the uniformity of a beam of charged particles at an exposure location includes a plurality of Faraday cups, each cup including an electrometer for determining the current collected by said cup, at least one multi-channel low current scanner card electrically coupled to the electrometers, a processor electrically coupled to said at least one scanner card, computational analysis software for receiving signals from said processor and calculating beam parameters, and display software for generating a graphical representation of the beam parameters calculated by said computational analysis software.

Abstract: A detector array and method for making the detector array. The detector array includes a substrate including a plurality of trenches formed therein, and a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charged particles incident on respective ones of the collectors and to output from the collectors signals indicative of charged particle collection. In the detector array, adjacent ones of the plurality of trenches are disposed in a staggered configuration relative to one another. The method forms in a substrate a plurality of trenches across a surface of the substrate such that adjacent ones of the trenches are in a staggered sequence relative to one another, forms in the plurality of trenches a plurality of collectors, and connects a plurality of electrodes respectively to the collectors.

Abstract: This invention describes an electrode structure formed from a plurality of individual electrodes, the individual electrodes being provided on separate submounts, the submounts being coupled to one another using kinematic ball mounts. Such a structure may be configured as a RF ion guide, mass filter or ion trap.

Abstract: A time-of-flight mass spectrometer (1) comprises an ion source a segmented linear ion device (10) for receiving sample ions supplied by the ion source and a time-of-flight mass analyser for analysing ions ejected from the segmented device. A trapping voltage is applied to the segmented device to trap ions initially into a group of two or more adjacent segments and subsequently to trap them in a region of the segmented device shorter than the group of segments. The trapping voltage may also be effective to provide a uniform trapping field along the length of the device (10).

Abstract: A cylindrical neutron generator is formed with a coaxial RF-driven plasma ion source and target. A deuterium (or deuterium and tritium) plasma is produced by RF excitation in a cylindrical plasma ion generator using an RF antenna. A cylindrical neutron generating target is coaxial with the ion generator, separated by plasma and extraction electrodes which contain many slots. The plasma generator emanates ions radially over 360° and the cylindrical target is thus irradiated by ions over its entire circumference. The plasma generator and target may be as long as desired. The plasma generator may be in the center and the neutron target on the outside, or the plasma generator may be on the outside and the target on the inside. In a nested configuration, several concentric targets and plasma generating regions are nested to increase the neutron flux.

Abstract: Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement. In one embodiment, an ion gauge substrate is formed. The electronic portion of the MEMs ion gauge is assembled by coupling a plurality of ion collectors with the ion gauge substrate, wherein the coupling of the plurality of ion collectors with the ion gauge substrate further comprises performing an operation that causes the plurality of ion collectors to be bowed out of plane to form a three dimensional arrangement.

Abstract: A particle inlet system comprises a first chamber having a limiting orifice for an incoming gas stream and a micrometer controlled expansion slit. Lateral components of the momentum of the particles are substantially cancelled due to symmetry of the configuration once the laminar flow converges at the expansion slit. The particles and flow into a second chamber, which is maintained at a lower pressure than the first chamber, and then moves into a third chamber including multipole guides for electromagnetically confining the particle. The vertical momentum of the particles descending through the center of the third chamber is minimized as an upward stream of gases reduces the downward momentum of the particles. The translational kinetic energy of the particles is near-zero irrespective of the mass of the particles at an exit opening of the third chamber, which may be advantageously employed to provide enhanced mass resolution in mass spectrometry.

Abstract: An electron beam source device is provided in which the disconnection and deterioration of a filament of the electron beam source device can be accurately predicted and determined, so as to avoid an unnecessary resource waste and increase of cost due to a premature replacement of a still-functional filament in a conventional device. Additionally, disorganization caused by a sudden disconnection or by the subsequent recovery procedure when the deformation of the filament occurs can be avoided to, reduce the measuring time, the maintenance and management man-hour. A filament current is measured at all time through a filament current measuring circuit 11, and a ratio of the filament current when the light-on time is zero to the current filament current is calculated at all time through an operational circuit 12.

Abstract: A low energy electron cooling system and method for increasing the phase space intensity and overall intensity of low energy ion beams, including a vacuum chamber to allow electron beam and ion beam merging and separation, a cathode to generate the electron beam, a collector to collect the electron beam, magnetic field generation devices to guide the electrons on their desired trajectories, and electrodes to accelerate and decelerate the electron beam. By overlapping the electron and ion beams, thermal energy is transferred from the ion beam to the electron beam, which allows an increase in the phase space density and overall density of the ion beams. Advantageously, the low energy electron cooling system uses electrodes to set up electrostatic potentials that trap non-beam neutralizing-background-ions longitudinally within the electron cooling region and solenoidal fields that trap the non-beam neutralizing-background-ions radially within the electron cooling region.

Abstract: Analyte ions are generated in an ion source by matrix-assisted laser desorption (MALDI) in which laser light pulses have significantly less than one nanosecond duration, focal diameters of less than twenty micrometers and energy densities such that only about one picogram of sample is desorbed per pulse of laser light and per laser spot. An unexpectedly high degree of ionization of analyte molecules is produced for selected matrix substances. Many laser spots can be generated side-by-side from a single laser light pulse for use with MALDI time-of-flight mass spectrometers. Applying pulses with a repetition rate of around 50 kilohertz and moving the sample or guiding the laser light beam so each laser light pulse impinges on a cool sample spot allows the ion source to be used with spectrometers that require a constant ion current.

Abstract: This invention relates to a method of measuring a property of an ion beam, for example an ion beam current profile or the emittance of an ion beam. A Faraday array comprising an array of ion beam current sensors is employed. The array can provide an ion beam current profile at the plane of the array. The Faraday array is also used in conjunction with an occluding element that may be moved through the ion beam upstream of the Faraday array, there obscuring varying portions of the ion beam from the Faraday array. Suitable manipulation of the signals from the Faraday allows the ion beam current profile to be determined for the plane of the occluding element, and also for the emittance of the ion beam at the plane of the occluding element to be determined.

Abstract: Apparatus for amplifying a stream of primary charged particles comprises a body defining a chamber and an entrance aperture for receiving the stream of primary charged particles into the chamber, and an incident dynode, adapted to be charged to a pre-determined electrical potential, having a surface positioned in the chamber to be impacted by said primary charged particles at an angle of incidence greater than 30° from the surface normal and in response to the impact to generate a stream of secondary charged particles.

Abstract: A Faraday assembly of an ion implantation apparatus includes a Faraday cup in a vacuum chamber, a driving shaft to which the Faraday cup is connected, a motor for inserting the driving shaft further into and drawing the driving shaft out of the vacuum chamber to cause the Faraday cup to advance and retreat within the chamber, and an auxiliary supplier of power for exerting a force that acts on the driving shaft as the driving shaft is being extracted by the motor from the vacuum chamber. Therefore, the force of suction, due to a pressure difference between interior and exterior of the vacuum chamber, is prevented from overloading the motor as the Faraday cup retreats within the vacuum chamber. As a result, the Faraday cup is positioned precisely and efficiently within the vacuum chamber.

Abstract: An ion balance monitor for simultaneous monitoring of the positive and negative ion production rates, and therefore ion concentration, by measurement of currents resulting from the presence of airborne ions as created for example by an air (gas) ionizer. Additionally it examines the ion balance by comparing the aforementioned currents. Information acquired in this way can be used in real time monitoring of the ionizer. Ion balance and production rate of ions of both polarities can be recorded by the ion monitor, regardless of the type of the ionizer. The ion monitor can provide a feedback signal needed to keep an ionizer system in balance.

Abstract: An ion shower comprises a plasma source operable to generate source gas ions within a chamber, and an extraction assembly associated with a top portion of the chamber. The extraction assembly is operable to extract ions from the top portion of the chamber. The ion shower further comprises a workpiece support structure associated with the top portion of the chamber that is operable to secure the workpiece having an implantation surface orientated facing downward toward the extraction assembly for implantation thereof. The ion shower of the present invention advantageously facilitates SIMOX processing with a high oxygen fraction, and uniform beam current for next generation processing.

Abstract: A substrate for mass spectrometry for effectively performing ionization has been demanded. The substrate for mass spectrometry includes a base, a porous film formed on the base, and an inorganic material film formed on the porous film. The inorganic material film has a plurality of concaves formed vertically to the base, and the diameter of the concaves is not less than 1 nm and less than 1 ?m.

Abstract: A method of inhibiting the reaction between ions of opposite polarity is disclosed. The method includes exposing a population of ions to a resonance excitation frequency during a mass-to-charge altering reaction between a first subpopulation of ions and a second subpopulation of ions, the resonance excitation frequency being tuned to inhibit the mass-to-charge altering reaction between an ion of the first subpopulation of ions having a predetermined mass-to-charge ratio and an ion of the second subpopulation of ions so that when an ion of the first subpopulation of ions attains the predetermined mass-to-charge ratio, the ion having the predetermined mass-to-charge ratio is selectively inhibited from reacting with ions of the second subpopulation of ions.

Abstract: An ion neutralizer enhances a heat transfer rate between a reflecting plate and a frame while preventing the reflecting plate from being bent due to thermal deformation. The ion neutralizer includes a frame and a plurality of reflecting plates integrally formed with the frame to neutralize plasma ions. Each reflecting plate has a cantilever shape. Each reflecting plate has a supporting end in surface contact with the frame, and a free end to define a space with the frame in order to prevent the reflecting plate from being bent upon stretching due to thermal deformation.

Abstract: An apparatus for an ion trap includes an electrically conductive substrate having top and bottom surfaces and having vias that cross from the top surface to the bottom surface. The apparatus includes a pair of planar first electrodes supported over said top surface and second electrodes having planar surfaces. The planar surfaces are located over said top surface, and portions of the planar surfaces are located laterally adjacent to said planar first electrodes. One of the second electrodes includes a portion that is located in one of the vias and traverses the substrate.

Abstract: An ion funnel screen ions from a gas stream flowing into a differential pump stage of a mass spectrometer, transfers them to a subsequent differential pump stage. The ion funnel uses apertured diaphragms between which gas escapes easily. Holders for the apertured diaphragms are also provided that offer little resistance to the escaping gas while, at the same time, serving to feed the RF and DC voltages.

Abstract: A method of inhibiting the reaction between ions of opposite polarity is disclosed. The method includes exposing a population of ions to a resonance excitation frequency during a mass-to-charge altering reaction between a first subpopulation of ions and a second subpopulation of ions, the resonance excitation frequency being tuned to inhibit the mass-to-charge altering reaction between an ion of the first subpopulation of ions having a predetermined mass-to-charge ratio and an ion of the second subpopulation of ions so that when an ion of the first subpopulation of ions attains the predetermined mass-to-charge ratio, the ion having the predetermined mass-to-charge ratio is selectively inhibited from reacting with ions of the second subpopulation of ions.

Abstract: The invention provides apparatus and methods which facilitate movement of an instrument relative to an item or location being monitored and/or the item or location relative to the instrument, whilst successfully excluding extraneous ions from the detection location. Thus, ions generated by emissions from the item or location can successfully be monitored during movement. The technique employs sealing to exclude such ions, for instance, through an electro-field which attracts and discharges the ions prior to their entering the detecting location and/or using a magnetic field configured to repel the ions away from the detecting location.

Abstract: In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged particles strike a specimen, the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means for generating a first magnetic field is applied. Another means for generating a second magnetic field is provided to cancel the magnetic filed leaked from the first means for generating magnetic field at the position of the specimen.

Abstract: A beam/wafer alignment arrangement has a laser and sensor mounted on the scanning magnet. Direct alignment of the wafer relative to the scanning magnet is determined by reflecting the beam in a specular surface on the wafer holder back to the sensor. Correct alignment of the wafer translation direction is also confirmed from any movement of the reflected light spot on the sensor as the wafer holder is translated up and down. A further sensor is mounted on the beam stop to monitor any misalignment of the process chamber to the collimator magnet, and for checking the location of the travelling Faraday.

Abstract: In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged particles strike a specimen, the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means for generating a first magnetic field is applied. Another means for generating a second magnetic field is provided to cancel the magnetic filed leaked from the first means for generating magnetic field at the position of the specimen.

Abstract: A device for trapping at least one chromatography peak of a chromatography flow comprises at least one trapping column, an inlet capillary for leading the chromatography flow into the trapping column and an outlet capillary departing from the trapping column. A plurality of trapping columns are provided on a column carrier wherein the trapping columns are separately and selectively connectable to the inlet and outlet capillary.

Abstract: A surface treating method of the invention comprises the steps of generating mixed chemical species containing an intended chemical species of ions necessary for surface treatment by ionization of a gas, selectively trapping the intended chemical species from the mixed chemical species, exciting the intended chemical species to predetermined vibrational and electronic states, extracting the excited chemical species from a position where trapped, and subjecting the extracted chemical species to surface treatment on a surface of an article to be treated. In this method, the intended chemical species of ions which are under vibrational and electronic conditions effective for the surface treatment and have a certain mass number have been once trapped at a given position. The trapped ions are uniformly arranged with respect to their translational velocity and applied to a sample surface. Thus, dry etching with high anisotropy and high selectivity to material and deposition with good uniformity can be realized.

Abstract: A tapered substantially cylindrical housing forming an antenna structure to collect radiation as an emission from a human body and consisting of an antenna, the antenna forming a reflective liner having an upward taper relative to the housing becoming reduced to a small outlet passage in the neck portion of the housing, a sensing plate across the neck portion of the housing above the outlet passage, a shutter pivotal to overlie the outlet passage, a hood having a reflective lining extending upwardly of the housing and providing access to the sensing plate, and both the liner and the hood focus radiation onto the sensing plate.

Abstract: An ion gauge having a reduced "x-ray limit" and means for measuring that limit. The gauge comprises an ion gauge of the Bayard-Alpert type having a short collector and having means for varying the grid-collector voltage.The "x-ray limit" (i.e. the collector current resulting from x-rays striking the collector) may then be determined by the formula: ##EQU1## where: I.sub.x ="x-ray limit",I.sub.l and I.sub.h =the collector current at the lower and higher grid voltage respectively; and,.alpha.=the ratio of the collector current due to positive ions at the higher voltage to that at the lower voltage.

Abstract: Method and apparatus for separation of an isotope substance from a mixture of isotope substances such as UF.sub.6 by adiabatically decompressing the mixture in vaporous or gaseous form to cool the mixture to a temperature below 100.degree. K. and irradiating by an electromagnetic wave selectively absorbed by an isotope substance, passing the mixture after cooling and irradiating in a diffuser at a velocity greater than the speed of sound and decelerating to convert the velocity into pressure with reduced velocity of the mixture. The higher pressure results in substantial reduction in operating costs and capital investment.

Abstract: A multi-stage collector for a transit-time tube has a catcher plate with a hollow element extending inwardly therefrom and coaxially aligned with the electron beam of the tube.

Abstract: A Faraday dish for making measurements at a beam path of a heavy ion accelerator comprising a supporting structure, a hollow outer conductor and an inner conductor coaxial with the outer conductor. The outer and inner conductors each have a first portion with an open end facing the beam and a second portion perpendicular to the beam path.

Abstract: An arrangement for the electrical detection of ions for mass spectroscopic etermination of the mass values and of the mass intensities, in which a channel multiplier plate has a number of electron multipliers of minimum dimension, and is located behind the exit gap of the magnet of the mass spectroscopic device for capturing ions focused in the focal plane of the spectroscopic device. The electrons emanating from the channel multiplier plate and emitted off by ions of different mass in the electron multipliers, are captured and the signals generated by the collected electrons are transmitted to a recorder. Wires located behind and along the channel multiplier plate, capture the electrons and transmit the signals generated by the electrons, to the recorder. The wires are perpendicular to the direction of the electron multipliers, and perpendicular to the lengthwise direction of the exit gap. The wires are isolated from each other and do not contact one another.