Solenoid Within Flow Line Patents (Class 251/129.22)
  • Patent number: 11946562
    Abstract: A pilot valve is provided, which comprises a valve body having a cylindrical structure, a magnetically permeable sleeve made of permeability magnetic material, and a coil assembly. The magnetically permeable sleeve is sleeved and fixed on one end of the valve body. The coil assembly is sleeved on the magnetically permeable sleeve. The coil assembly comprises an electromagnetic coil wound along the circumference of the magnetically permeable sleeve.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: April 2, 2024
    Assignee: ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO., LTD.
    Inventors: Jianjun Chen, Haibo Liu
  • Patent number: 9027905
    Abstract: A fluid control valve includes an inflow channel for introducing fluid, an outflow channel for discharging the fluid, a valve seat, a valve body for blocking/allowing communication between the inflow channel and the outflow channel in association with a movement thereof into contact with or away from the valve seat, and a solenoid configured to apply a magnetic force to the valve body, the magnetic force being generated in response to supply of electric power to the solenoid. The inflow channel is formed through the core of the solenoid so that the core and the fluid comes into contact with each other in the inflow channel.
    Type: Grant
    Filed: October 12, 2011
    Date of Patent: May 12, 2015
    Assignee: Aisin Seiki Kabushiki Kaisha
    Inventors: Masanobu Matsusaka, Tadayoshi Sato
  • Patent number: 8863777
    Abstract: A flow control device is disclosed. The flow control device includes a solenoid, the solenoid including an armature. Also, a piston connected to the armature. The piston includes a primary orifice. The piston having an open position and a closed position. A piston spring connected to the piston is also includes and at least one secondary orifice. The movement of the piston to the open position at least partially opens the at least one secondary orifice and the movement of the piston to the closed position at least partially closes the at least one secondary orifice. The movement of the armature actuates the piston movement and controls fluid flow from the primary orifice through the at least one secondary orifice.
    Type: Grant
    Filed: May 7, 2009
    Date of Patent: October 21, 2014
    Assignee: DEKA Products Limited Partnership
    Inventors: Felix Winkler, Russell H. Beavis, Eric J. VanWyk
  • Patent number: 8783650
    Abstract: A gas valve having a gas enclosure with a gas inlet, a gas outlet and a passage opening situated between the gas inlet and the gas outlet. A valve seat of the valve cooperates with the passage opening to regulate the flow of gas through the valve. An electrical actuator assembly is operatively coupled with the valve seat to regulate the flow of gas through the valve. In one implementation the gas enclosure is at least in part sealed by an elastic sealing member that is pressed upon by a printed circuit board that electrically connects the actuator assembly to an exterior of the gas valve.
    Type: Grant
    Filed: July 27, 2011
    Date of Patent: July 22, 2014
    Assignee: Coprecitec, S.L.
    Inventors: Félix Querejeta Andueza, Francisco Javier Echenausía Sáez de Zaitegui, José Ignacío Múgica Odriozoal
  • Patent number: 8720488
    Abstract: In order to achieve high opening speeds in a dry running gas valve with electromagnetic actuation, it is provided to arrange the engagement point of the magnet armature 22 and the limit stop at the radially inner guide region 16 of the valve element 2. Due to the resulting reduced deflection, the valve element can be built more compact and lighter and the residual air gap can be reduced, which allows higher opening speeds.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: May 13, 2014
    Assignee: Hoerbiger Kompressortechnik Holding GmbH
    Inventors: Gerhard Ranegger, Martin Geh
  • Publication number: 20130161548
    Abstract: A fluid control valve includes an inflow channel for introducing fluid, an outflow channel for discharging the fluid, a valve seat, a valve body for blocking/allowing communication between the inflow channel and the outflow channel in association with a movement thereof into contact with or away from the valve seat, and a solenoid configured to apply a magnetic force to the valve body, the magnetic force being generated in response to supply of electric power to the solenoid. The inflow channel is formed through the core of the solenoid so that the core and the fluid comes into contact with each other in the inflow channel.
    Type: Application
    Filed: October 12, 2011
    Publication date: June 27, 2013
    Applicant: AISIN SEIKI KABUSHIKI KAISHA
    Inventors: Masanobu Matsusaka, Tadayoshi Sato
  • Patent number: 8382072
    Abstract: A fuel and air charge forming device, such as a carburetor, may include a main body, a fuel and air mixing passage in the body, a fluid passage communicating with the fuel and air mixing passage and a solenoid valve. The solenoid valve may include a coil and a valve body having a base fixed against movement and a valve head extending from the base. The valve head may be driven by the coil between a first position wherein the valve head at least partially obstructs the fluid passage and a second position wherein the valve head permits greater fluid flow in the fluid passage to control fluid flow through the fluid passage.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: February 26, 2013
    Assignee: Walbro Engine Management, L.L.C.
    Inventors: William E. Galka, Ronald H. Roche
  • Patent number: 8360392
    Abstract: A valve control device, in particular for control pods or similar equipment used in the mining and/or production of mineral oil/natural gas, comprises a valve housing in which hole or boring sections are arranged, and a valve slide movable relative to the hole sections, with at least a first and a second flow hole for the alternative connection of a feed line from a fluid pressure hose with at least one actuator or of the actuator to return line for leading the fluid away, wherein in each case one of the connections is made and the other is interrupted.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: January 29, 2013
    Assignee: Cameron International Corporation
    Inventors: Klaus Biester, Peter Kunow
  • Patent number: 8322376
    Abstract: In one embodiment, a solenoid valve includes a supply port that fluidly communicates with a source of compressed air, a delivery port, a bore that selectively fluidly communicates with the supply and delivery ports, an armature in the bore, a pole piece in the bore, and a coil that is selectively energized with electrical power. The coil is around the armature and pole piece. The armature and pole piece selectively sealingly engage and move as an armature/pole piece single unit as a function of the electrical power in the coil. A position of the armature/pole piece within the bore controls fluid communication between the supply port and the delivery port.
    Type: Grant
    Filed: June 9, 2008
    Date of Patent: December 4, 2012
    Assignee: Bendix Commercial Vehicle Systems, LLC
    Inventor: Thanh Ho
  • Patent number: 8302327
    Abstract: A valve for magnetorheological fluids is formed with a control duct in which the magnetic field of a magnetic device, consisting of a permanent magnet and coil, acts on the fluid. The viscosity of the fluid is directly proportional to the magnetic field strength, with the result that the flow resistance of the valve can be varied via the coil current. The respective control duct is arranged in the end-face region of the coil and runs radially with respect to the center line of the valve, with the result that high flux densities can be achieved in the control duct. A permanent magnet is arranged in the inner space of the coil and, even under currentless operating conditions, can close the valve up to a certain blocking pressure.
    Type: Grant
    Filed: March 18, 2010
    Date of Patent: November 6, 2012
    Assignee: Inventus Engineering GmbH
    Inventor: Stefan Battlogg
  • Publication number: 20120175541
    Abstract: A valve assembly including a valve body with inlet and outlet ports, between which there is a main valve seat cooperating with an associated main obturator. The obturator defines together with the valve body, a variable volume control chamber in permanent communication with the inlet port through a first passage having a reduced cross-section. The control chamber is adapted to be brought into communication with the outlet port through a second passage having a larger cross-section. Also provided is a solenoid pilot valve including a control coil and a movable core associated with an auxiliary obturator adapted to open and close the second passage. Between the second passage and the outlet port, is defined a second variable volume control chamber, which is delimited in part by the auxiliary obturator, and the movable core associated with the auxiliary obturator is mounted outside of the flow-path of the fluid.
    Type: Application
    Filed: September 7, 2010
    Publication date: July 12, 2012
    Applicant: ELBI INTERNATIONAL S.P.A.
    Inventors: Paolo Da Pont, Giosue Capizzi, Paolo Ravedati, Maurizio Rendesi, Roberto Bosio, Massimo Davi, Fabrizio Paris
  • Patent number: 8100381
    Abstract: The invention relates to an integrated gas regulating and safety valve for burners of a modulatable gas heating device. According to the invention, the gas regulating and safety valve comprises a housing (1) with two controllable closing elements, the axes of which are spaced apart from each other and extend one behind the other in series in the direction of gas flow between an inlet channel (2) and an outlet channel (4) of the housing. In the de-energized state, the two closing elements abruptly close the gas regulating and safety valve independently of each other, in each case by means of an associated spring element (7, 12). The first closing element, additionally serving for the modulation of the gas stream, has a drive spindle (15.1), which is formed as a spindle of a stepping motor (15), is surrounded by an excitation winding (16) and has placed on its end a restrictor component (8) and, at a distance from that, the first spring element (7).
    Type: Grant
    Filed: August 7, 2007
    Date of Patent: January 24, 2012
    Assignee: Saia-Burgess Dresden GmbH
    Inventors: Thomas Roschke, Jörg Köhler, Michel Gamot
  • Patent number: 8052117
    Abstract: A fluid control valve comprises a valve element, a casing, a fluid flow passage formed in the casing, and an actuator drivingly moving the valve element to the casing in the axial direction. The fluid flow passage introduces a fluid from the inlet for the fluid and supplies the fluid into the clearance between the inner wall surface of a guide part and the outer peripheral surface of the valve element to lift the valve element relative to the inner wall surface of the guide part in the state of non-contact with each other. The actuator moves the valve element in the axial direction in the state of non-contact and changes the clearance between the outlet of the casing and the tip of the valve element to control the output flow amount or output pressure of the fluid.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: November 8, 2011
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Masahiro Takeshita
  • Publication number: 20100138988
    Abstract: A system for controlling water flow through a shower head includes a shower mat made of resilient material having a transmitter, an electrical power supply, and a switch embedded and hermetically sealed therein. The switch, when activated by a bather, sends a power pulse provided by the power supply to the transmitter, which transmits a control signal in response to each received power pulse. Separate from the shower mat, the system also includes a low-voltage DC power source, a receiver powered by the power source, and control logic which alternately activates and deactivates a driver transistor of a solenoid control circuit in response to the receipt of control signals received by the receiver from the transmitter. A solenoid-controlled valve in line with water flow to the shower head has a control solenoid with an input that is coupled to the low-voltage power source through the driver transistor.
    Type: Application
    Filed: November 20, 2009
    Publication date: June 10, 2010
    Inventor: Kelly David Holmes
  • Publication number: 20100102261
    Abstract: A valve mechanism includes a rigid body structure through which various channel structures are configured. A valve actuation mechanism is coupled to the rigid body structure. The valve mechanism is actuated to move a plunger within a fluid pathway, thereby opening the fluid pathway through the valve mechanism. An actuation element is actuated by the valve actuation mechanism and either directly or indirectly releases a retaining force holding the plunger in closed position. The pressure from the input fluid flow is sufficient to move the plunger once the retaining force is removed, thereby opening the valve mechanism. The valve mechanism can be configured as a single-use device, where the valve mechanism is initially closed and when actuated, is open. Once open, the valve mechanism remains open, even when the valve actuation mechanism is disengaged.
    Type: Application
    Filed: October 28, 2008
    Publication date: April 29, 2010
    Inventor: Bob Yuan
  • Patent number: 7699289
    Abstract: A valve (13a) is described comprising: a housing (50) having a fluid inlet for (54) receiving a flow of compressed fluid and a fluid outlet (55); a flow duct (60) movably mounted with respect to the housing, the duct (62) having a fluid inlet (62) for receiving a flow of compressed fluid and a fluid outlet (65), the fluid outlet being positioned around at least a part of the circumference of the duct and being dimensioned to provide a different flow rate at different sections or positions around the circumference of the duct; the fluid outlet of the housing being alignable with a portion of the fluid outlet of the duct to provide a flow rate related to the relative position of the portion of the fluid outlet of the duct and the fluid outlet of the housing; and, a drive element (70) for moving, e.g. rotating, the duct with respect to the housing such that a desired portion of the fluid outlet of the duct aligns with the fluid outlet of the housing. The valve may operate as a so-called throttle valve.
    Type: Grant
    Filed: December 24, 2004
    Date of Patent: April 20, 2010
    Assignee: Picanol N.V.
    Inventors: Jozef Peeters, Jean Marie Bamelis
  • Patent number: 7677211
    Abstract: A single hydraulic circuit module is provided for controlling valve lift at multiple cylinders in an engine. The single module includes a housing that at least partially forms a supply passage and a control passage. The supply passage is in fluid communication with the fluid supply and the control passage is in fluid communication with the feed passage. At least one solenoid valve is provided and supported by the housing positioned between the supply passage and the control passage. The solenoid valve is controllable to vary fluid flow from the supply passage to the control passage to permit adjustment of hydraulic lift assemblies to vary lift of engine valves in response to control of the solenoid valve.
    Type: Grant
    Filed: January 31, 2007
    Date of Patent: March 16, 2010
    Assignee: GM Global Technology Operations, Inc.
    Inventors: Vimesh M. Patel, Timothy L. Neal
  • Patent number: 7628379
    Abstract: A valve assembly provides a holder cantileveredly attached to a boss on an end cap to axially dispose an actuator and a poppet on an axis with a valve seat formed in the end cap. The actuator is preferably a shape memory alloy actuator. The end cap may be placed in line with a fluid system such as in a gas oven so that an electrical communication with an igniter is provided.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: December 8, 2009
    Assignee: Burner Systems International, Inc.
    Inventor: Tim Frost
  • Patent number: 7547001
    Abstract: In order to obtain a solenoid valve device installed in a gas tank that is small in size and easy to attach to a gas tank, a valve body (8) including a flow passage (a) formed therein to communicate the inside and the outside of a gas tank (1) is inserted to the inside from the outside through a mouth hole (2) of the gas tank (1) and attached to the mouth hole (2). A valve seat (46) is provided in the flow passage (a), and a movable valve element (40) attached to or detached from the valve seat (46) is provided in the valve body (8). A solenoid unit (48) includes a movable core (50) engaged with the valve element (40) and a fixed core (64) facing the movable core (50) to attract the movable core (50) by the energization of a coil (74) and distract the movable core (50) by the non-energization of the coil (74). The solenoid unit (48) is arranged inside a storage hole (16) formed at an end part of the valve body (8) inside the gas tank (1).
    Type: Grant
    Filed: November 2, 2004
    Date of Patent: June 16, 2009
    Assignees: Toyooki Kogyo Co. Ltd., Jtekt Corporation
    Inventors: Tadayoshi Kamiya, Soichi Shirai, Mikio Asai, Nobuyuki Shirai, Yoshiyuki Takeuchi, Toshihiko Shima, Hiroaki Suzuki
  • Publication number: 20080308761
    Abstract: A first cap is mounted at a movable iron core, a second cap holding a valve member is fitted to the first cap, capable of displacement, an biasing force F1 of an iron-core return spring biasing the movable iron core toward an initial position and an biasing force F2 of a buffer spring interposed between the movable iron core and the valve member are set so as to have a relation of F1>F2, and when the movable core is located at the initial position, gaps x, y are interposed between the valve member and a regulating portion of the second cap and between an engagement projection portion of the second cap and a front end wall of an engagement recess portion of the first cap, respectively.
    Type: Application
    Filed: May 30, 2008
    Publication date: December 18, 2008
    Applicant: SMC Corporation
    Inventor: Takumi MATSUMOTO
  • Patent number: 7156363
    Abstract: A bathroom flusher (10) includes a body having an inlet (12) in communication with a supply line and an outlet (16) in communication with a flush conduit, a valve assembly in the body positioned to close water flow between the inlet and the outlet upon sealing action of a moving member (60, 60A, 60B, 60C, 130, 210, 215, 526, or 628) at a valve seat (70, 70A, 140, 209, 251A, 526 or 625) thereby controlling flow from the inlet to the outlet, and an actuator (62) for actuating operation of the moving member. The bathroom flusher includes one of several novel sensors and is controlled by one of several novel controllers, as described. The controllers may execute a novel control algorithm.
    Type: Grant
    Filed: June 25, 2004
    Date of Patent: January 2, 2007
    Assignee: Arichell Technologies, Inc.
    Inventors: Natan E. Parsons, Fatih Guler, Kay Herbert, Xiaoxiong Mo, Gregory P. Greene
  • Patent number: 7114472
    Abstract: A shaft is press-fit into the valve member or the plunger of an electromagnetic valve to transmit the axial movement of the plunger to the valve member. A diameter reducing mechanism is provided for reducing the diameter of at least the press-fit portion of the shaft so that the diameter of the shaft is decreased by a press-fitting force applied to the shaft by the valve member and/or plunger. Deformation due to the press-fitting process is absorbed by the shaft, so deformation of the valve member and/or plunger is inhibited. Accordingly, it is unnecessary to give a large margin to a plunger side air gap, and magnetic efficiency can be improved. Also, two chambers on both axial sides of the plunger can communicate with each other through a clearance provided by the C-shaped cross-section, an inner hole and a penetration hole of the shaft. Therefore, it is unnecessary to form any separate groove or hole in the plunger for respiration.
    Type: Grant
    Filed: June 22, 2005
    Date of Patent: October 3, 2006
    Assignee: Denso Corporation
    Inventor: Jiro Kondo
  • Patent number: 7017601
    Abstract: An electromagnetic valve of a reduced size capable of suppressing temperature rise of a coil regardless of continuous electrical energization over an extended time while preventing attracting force from lowering includes a coil cooling fluid passage (9a; 8a; 4a) for communicating a coil cooling fluid sump space (2a) with a controlled pressure region for allowing a fluid to flow into the coil cooling fluid sump space (2a) from the controlled pressure region. The coil cooling fluid passage includes a small-diameter communicating passage portion (9a) provided so as not to exert influence to a hydraulic pressure prevailing in the controlled pressure region.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: March 28, 2006
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Hidehiro Soga, Kenji Nakao, Kouichi Ojima, Yuji Bando
  • Patent number: 7000850
    Abstract: An anti-scald water valve assembly comprises a body including a passage for water, a valve provided in the passage for shutting off the passage, and an electro-mechanical actuator to cause closing of the valve. A temperature sensor senses the temperature of water running through the passage. An electronic operating circuit is connected to the actuator and the sensor for activating the actuator to shut off the passage in response to the sensor sensing the water temperature exceeding a predetermined limit.
    Type: Grant
    Filed: April 27, 2004
    Date of Patent: February 21, 2006
    Assignee: Brand New Technology Ltd.
    Inventor: Pik Fan Lin
  • Patent number: 6972015
    Abstract: Improved systems, devices, and methods for delivering cryogenic cooling fluid to cryosurgical probes such as cryosurgical endovascular balloon catheters take advantage of the transients during the initiation and termination of cryogenic fluid flow to moderate the treatment temperatures of tissues engaged by the probe. A flow limiting element along a cryogenic fluid path intermittently interrupts the flow of cooling fluid, often cycling both the fluid flow and treatment temperature. This can maintain the tissue treatment temperature within a predetermined range which is above the treatment temperature provided by a steady flow of cryogenic fluid. In another aspect, room temperature single-use cooling fluid cartridges are filled with a sufficient quantity of cryosurgical fluid to effect a desired endovascular cryosurgical treatment.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: December 6, 2005
    Assignee: CryoVascular Systems, Inc.
    Inventors: James Joye, Richard S. Williams, Ronald Williams
  • Patent number: 6892997
    Abstract: A process reducing the side opening and closing time of a valve. The process uses a valve for mounting in an intake port of a reciprocating engine upstream from a charge changing valve, which valve contains a valve element operating in conjunction with the inner wall of the intake port, and may be moved back and forth between a closed position and an open position. The valve in the closed position blocks passage of fluid through the port and when in the open position, clears such passage. The valve is characterized in that the inner wall of the port and the valve element are of a design such that when the valve element is moved from its closed position the opening cross-section initially does not increase at all or increases only slowly and then increases rapidly and when the valve element is moved from its open position the opening cross-section initially does not decrease at all or decreases only slowly and then decreases rapidly.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: May 17, 2005
    Assignee: META Motoren- und Energie-Technik GmbH
    Inventor: Peter Kreuter
  • Patent number: 6843271
    Abstract: A device for controlling fluid flow between an evaporative emission space of a fuel tank and a fuel vapor collection canister that includes a housing, a valve, a seal, an electric actuator, an electric transducer, and an electrical connector. The housing includes a first port, a second port, and a fluid flow path that extends between the first and second ports. The first port is adapted for receiving fluid flow from the evaporative emission space and is at a first pressure level. The second port is adapted for supplying fluid flow to the fuel vapor collection canister and is at a second pressure level. The valve is movable along an axis with respect to the housing between a first configuration, a second configuration, and an intermediate configuration between the first and second configurations. The first configuration permits substantially unrestricted fluid flow between the first and second ports. The second configuration prevents fluid flow between the first and second ports.
    Type: Grant
    Filed: August 8, 2001
    Date of Patent: January 18, 2005
    Assignee: Siemens VDO Automotive, Inc.
    Inventors: Craig Weldon, David W. Balsdon, Sudhir Parabdesai
  • Patent number: 6695284
    Abstract: An electromagnetic valve apparatus prevents fluid leakage and contains a stationary core having a shape of a bottomed, single-piece cup constructed by combining a housing portion, an attracting portion, a thin-walled portion that joins the housing portion and the attracting portion, and a flange portion. The housing portion has a closed bottom portion, and the attracting portion is adjacent an open end of the stationary core. The housing portion reciprocally supports a movable core. The thin-walled portion is a magnetic resistance portion for preventing leakage of magnetic flux. A magnetic cylindrical attracting member is press-inserted in the inner wall of the attracting portion located on the opened side of the stationary core. The attracting member is arranged face to face with the movable core in the reciprocating path of the movable core. Upon energizing a coil, a magnetic attractive force attracts the movable core to the attracting member.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: February 24, 2004
    Assignee: Denso Corporation
    Inventors: Eiji Isobe, Isao Hattori
  • Patent number: 6478090
    Abstract: An apparatus and method of operating devices (such as devices in a wellbore or other types of devices) utilizes actuators having expandable or contractable elements. Such expandable or contractable elements may include piezoelectric elements, magnetostrictive elements, and heat-expandable elements. Piezoelectric elements are expandable by application of an electrical voltage; magnetostrictive elements are expandable by application of a magnetic field (which may be generated by a solenoid in response to an electrical current); and heat-expandable elements are expandable by heat energy (e.g., infrared energy or microwave energy). Expandable elements are abutted to an operator member such that when the expandable element expands, the operator member is moved in a first direction, and when the expandable element contracts, the operator member moves in an opposite direction.
    Type: Grant
    Filed: August 28, 2001
    Date of Patent: November 12, 2002
    Assignee: Schlumberger Technology Corporation
    Inventor: Thomas M. Deaton
  • Patent number: 6432102
    Abstract: Improved systems, devices, and methods for delivering cryogenic cooling fluid to cryosurgical probes such as cryosurgical endovascular balloon catheters take advantage of the transients during the initiation and termination of cryogenic fluid flow to moderate the treatment temperatures of tissues engaged by the probe. A flow limiting element along a cryogenic fluid path intermittently interrupts the flow of cooling fluid, often cycling both the fluid flow and treatment temperature. This can maintain the tissue treatment temperature within a predetermined range which is above the treatment temperature provided by a steady flow of cryogenic fluid. In another aspect, room temperature single-use cooling fluid cartridges are filled with a sufficient quantity of cryosurgical fluid to effect a desired endovascular cryosurgical treatment.
    Type: Grant
    Filed: March 15, 1999
    Date of Patent: August 13, 2002
    Assignee: Cryovascular Systems, Inc.
    Inventors: James Joye, Richard S. Williams, Ronald Williams
  • Patent number: 6179921
    Abstract: An apparatus for a wafer processing system comprising a wafer support chuck attached to a gas delivery system for delivery of a gas to the backside of a wafer supported by the chuck. The gas delivery system has a gas shutoff valve directly connected to the wafer chuck. The shutoff valve provides a positive shutoff with negligible leak rate. By placing the valve in close proximity to the wafer chuck, the volume of the backside gas trapped between the valve and the wafer is minimized. Release of this trapped gas into the process chamber during wafer transfer has no adverse impact on the performance of the processing system.
    Type: Grant
    Filed: April 19, 1999
    Date of Patent: January 30, 2001
    Assignee: Applied Materials, Inc.
    Inventors: John Ruffell, Karl F. Leeser