Abstract: Structures of high electron mobility thin film transistors (HEM-TFTs) are provided in this invention. In one embodiment, HEM-TFTs with a single heterojunction structure are disclosed to have a substrate, a first metal oxide channel layer, a first spacer layer, a first doped layer, a first barrier layer, a source, a drain and a gate. In another embodiment, HEM-TFTs with a double heterojunction structure are provided to have a substrate, a second barrier layer, a second doped layer, a second spacer layer, a first metal oxide channel layer, a second spacer layer, a second doped layer, a second barrier layer, a source, a drain and a gate. In yet another embodiment, HEM-TFTs with a single heterojunction structure are disclosed to comprise a substrate, a first metal oxynitride channel layer, a first spacer layer, a first doped layer, a first barrier layer, a source, a drain and a gate.

Abstract: A capacitive image sensor includes a sensor array having capacitive image pixels. Each pixel has a two-transistor configuration including a pixel selection transistor and a source follower transistor. The pixel selection transistor activates the source follower transistor. The source follower is coupled to a variable capacitance that affects an input impedance of the source follower. An AC current is source is used to interrogate the activated source follower to determine an output impedance of the source follower. The output impedance is a function of the input impedance and the output impedance is representative of the nearness of an object.

Abstract: Disclosed is a display device for use of a surface display of an arbitrary shape, including a plural number of display element units, each made up of a circuit that forms a single stage of a scanning circuit and a pixel circuit connected to an output of the scanning circuit, are arranged in a unicursal fashion on a display substrate.

Abstract: A FET inverter is provided that includes a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels, wherein the source and drain regions of one or more of the device layers are doped with an n-type dopant and the source and drain regions of one or more other of the device layers are doped with a p-type dopant; a gate common to each of the device layers surrounding the nanowire channels; a first contact to the source regions of the one or more device layers doped with an n-type dopant; a second contact to the source regions of the one or more device layers doped with a p-type dopant; and a third contact common to the drain regions of each of the device layers. Techniques for fabricating a FET inverter are also provided.

Abstract: Nanowire-based devices are provided. In one aspect, a field-effect transistor (FET) inverter is provided. The FET inverter includes a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region, wherein the source and drain regions of one or more of the device layers are doped with an n-type dopant and the source and drain regions of one or more other of the device layers are doped with a p-type dopant; a gate common to each of the device layers surrounding the nanowire channels; a first contact to the source regions of the one or more device layers doped with an n-type dopant; a second contact to the source regions of the one or more device layers doped with a p-type dopant; and a third contact common to the drain regions of each of the device layers. Techniques for fabricating a FET inverter are also provided.

Abstract: A method of forming an interconnection in a semiconductor device includes forming a first liner in a dielectric layer therein; depositing a tungsten filler on top of the first liner; performing chemical mechanical planarization (CMP) to smooth out and remove the first liner and tungsten filler from the semiconductor's exposed surface; selectively removing the first liner and tungsten filler in the via; wherein the selective removing results in the first liner and the tungsten filler being removed in an upper region of the via; forming a second liner in the upper region of the via and tungsten filler; selectively removing the second liner from the tungsten filler; forming a copper seed layer on top of the tungsten filler; depositing a copper filler on top of the copper seed layer; and performing chemical CMP to smooth out and remove the second liner and copper filler from the semiconductor's exposed surface.

Abstract: A method for fabricating a nitride-based FET device that provides reduced electron trapping and gate current leakage. The fabrication method provides a device that includes a relatively thick passivation layer to reduce traps caused by device processing and a thin passivation layer below the gate terminal to reduce gate current leakage. Semiconductor device layers are deposited on a substrate. A plurality of passivation layers are deposited on the semiconductor device layers, where at least two of the layers are made of a different dielectric material to provide an etch stop. One or more of the passivation layers can be removed using the interfaces between the layers as an etch stop so that the distance between the gate terminal and the semiconductor device layers can be tightly controlled, where the distance can be made very thin to increase device performance and reduce gate current leakage.

Abstract: The present invention is directed to CMOS structures that include at least one nMOS device located on one region of a semiconductor substrate; and at least one pMOS device located on another region of the semiconductor substrate. In accordance with the present invention, the at least one nMOS device includes a gate stack comprising a gate dielectric, a low workfunction elemental metal having a workfunction of less than 4.2 eV, an in-situ metallic capping layer, and a polysilicon encapsulation layer and the at least one pMOS includes a gate stack comprising a gate dielectric, a high workfunction elemental metal having a workfunction of greater than 4.9 eV, a metallic capping layer, and a polysilicon encapsulation layer. The present invention also provides methods of fabricating such a CMOS structure.

Abstract: A solid image capturing element comprising a plurality of vertical shift registers arranged to each correspond to a column of a plurality of light receiving pixels in a matrix arrangement, a horizontal shift register provided on an output side of the plurality of vertical shift registers, and an output section provided on an output side of the horizontal shift register. In this solid image capturing element, a reverse conductive semiconductor region is formed over one major surface of one conductive semiconductor substrate, the plurality of light receiving pixels, the plurality of vertical shift registers, the horizontal shift register, and the output section are formed in the semiconductor region, and a portion of the semiconductor region where the output section is formed has a higher dopant concentration than the portion of the semiconductor region where the horizontal shift register is formed.

Abstract: In the solid-state imaging device of the present invention having a photoelectric conversion section and a charge transfer section equipped with a charge transfer electrode for transferring an electric charge generated in the photoelectric conversion section, the charge transfer electrode has an alternate arrangement of a first layer electrode including a first layer electrically conducting film and a second layer electrode including a second layer electrically conducting film, which are formed on a gate oxide film including a laminate film consisting of a silicon oxide film and a metal oxide thin film, and the first layer electrode and the second layer electrode are separated by insulation with an interelectrode insulating film including a sidewall insulating film formed by a CVD process to cover the lateral wall of the first layer electrode.

Abstract: The back surface of a semiconductor chip (16) is exposed from the back surface of an insulating resin (13), and a metal plate (23) is affixed to this semiconductor chip (16). The back surface of this metal plate (23) and the back surface of a first supporting member (11) are substantially within a same plane, so that it is readily affixed to a second supporting member (24). Accordingly, the heat generated by the semiconductor chip can be efficiently dissipated via the metal plate (23) and the second supporting member (24).

Abstract: A sensor chip assembly time delay integration circuit useful with image sensing arrays uses a duplex bucket brigade circuit (120) with two or more charge transfer paths, a number of capacitors (130, 133, 136) common to the charge transfer paths, and a number of capacitors (131, 132, 134, 135) specific to each of the charge transfer paths. Each of the charge transfer paths has a number of MOSFET transfer gates (122, 124, 126, 128; 123, 125, 127, 129) connected in series, and the common capacitors and the path-specific capacitors are alternately connected to the paths. Each of the common capacitors is controllably connected (112, 115, 118) either to a unit cell input circuit (113, 116, 119). a reset node (111, 114, 117), or an open circuit. The circuit operates by storing accumulated image sensor charges from alternate sensor lines on the path-specific capacitors. The common capacitors are reset and then connected to the unit cell input circuits to acquire a first set of image sensor charges.

Abstract: Semiconductor capacitors comprise first electrodes, second electrodes, and tantalum oxide layers positioned between the first electrodes and the second electrodes.

Abstract: A TDI sensor includes a bias charge voltage circuit, a reset voltage circuit, a bucket brigade column having a plurality of nodes, and a plurality of pinned photodiodes. Each photodiode is formed integral with a corresponding node of the bucket brigade column. The bucket brigade column is coupled between the bias charge voltage circuit at an initial node and the reset voltage circuit at a final node. The bucket brigade column includes a plurality of first phase clock conductors, and a plurality of second phase clock conductors, and the first and second phase clock conductors are interdigitated and formed of poly-crystalline silicon. The TDI sensor is formed in a substrate of a first conductivity type, and a cathode of each pinned photodiode is formed of a second conductivity type, and each pinned photodiode includes a pinning layer of the first conductivity type.

Abstract: A photodiode that exhibits a photo-induced negative differential resistance region upon biasing and illumination is described. The photodiode includes an N+ silicon substrate, a silicon nitride layer formed on the N+ silicon substrate, a reoxidized nitride layer formed on the silicon nitride layer and a N+ polysilicon layer formed on at least a portion of the reoxidized nitride layer.

Abstract: A charge transfer device has a charge transfer region under charge transfer electrodes for stepwise conveying charge packets through potential wells to a floating diffusion region, and the charge transfer region has a boundary sub-region contracting toward the floating diffusion region, wherein the final potential well is created at a certain portion in said boundary sub-region close to the floating diffusion region so that each charge packet travels over a short distance, thereby enhancing a charge transfer efficiency.

Abstract: A CMOS image sensor containing a plurality of unit pixels, each unit pixel having a light sensing region and a peripheral circuit region, includes: a semiconductor substrate of a first conductive type; a transistor formed on the peripheral circuit region of the semiconductor substrate, wherein the transistor has a gate oxide layer and a gate electrode formed on the gate oxide layer; spacers formed on sidewalls of the gate oxide layer and the gate electrode, wherein one spacer are formed on the light sensing region; a first doping region of a second conductive type formed on the light sensing region, wherein the first doping region is extended to an edge of the gate electrode; and a second doping region of the first conductive type formed on the first doping region, wherein the second doping region is extended to an edge of a spacer formed on the light sensing region.

Abstract: A high-reliability damascene interconnect structure and a method for forming the same are provided. An interlevel dielectric is formed over a semiconductor topography, and trenches for interconnects and/or vias are formed in the interlevel dielectric. A trench liner may then be deposited, followed by deposition of a low-resistance metal such as copper. The low-resistance metal deposition is preferably stopped before the trenches are entirely filled. Portions of the metal and trench liner external to the trenches are subsequently removed, such that low-resistance metal interconnect portions are formed. A high-melting-point metal, such as tungsten, is deposited over upper surfaces of the interconnect portions and interlevel dielectric. Portions of the high-melting-point metal are removed to form interconnects having a low-resistance metal lower portion and a high-melting-point metal upper portion.

Abstract: A charge transfer structure (30) includes a substrate comprised of semiconductor material and, coupled to a surface of the substrate, a plurality of serially coupled devices each having a gate terminal. The plurality of serially coupled devices include a first single port device (D1) defining a first primary charge storage well, a second single port device (D3) defining a second primary charge storage well, a first two port device (D2) defining a first transfer device, a second two port device (D4) defining a second transfer device, and two instances of a third two port device each defining a cascode device (CD). The ports of these devices are serially coupled together in an order given by D1, D2, CD, D3, D4, CD for transferring charge between the first and second primary charge storage wells. Charge is inserted into and withdrawn from each of the first and second primary charge storage wells through a single diffusion that functions as both an input port and an output port.

Abstract: A photosensitive apparatus comprises a single crystal structure, wherein different regions of the structure are of different compositions. A first photosensitive region comprises a material adapted to generate electron-hole pairs in an area thereof exposed to light within a predetermined first range of wavelength, and a second photosensitive region, comprises a material adapted to generate electron-hole pairs in an area thereof exposed to light within a predetermined second range of wavelength different from the first range of wavelength.

Abstract: A photosensitive apparatus comprises a single crystal structure, wherein different regions of the structure are of different compositions. A first photosensitive region comprises a material adapted to generate electron-hole pairs in an area thereof exposed to light within a predetermined first range of wavelength, and a second photosensitive region, comprises a material adapted to generate electron-hole pairs in an area thereof exposed to light within a predetermined second range of wavelength different from the first range of wavelength.This application incorporates by reference a previously-filed application, Ser. No. 07/973,811, entitled "Color Imaging Charge-Coupled Array with Photosensitive Layers in Potential Wells," filed Nov. 5, 1992, and having the same inventor and assignee as the present application.