Abstract: A voltage tracking circuit includes first, second, third and fourth transistors. The first transistor is in a first well, and includes a first gate, a first drain and a first source coupled to a first voltage supply. The second transistor includes a second gate, a second drain and a second source. The second source is coupled to the first drain. The second gate is coupled to the first gate and a pad voltage terminal. The second body terminal is coupled to a first node. The third transistor includes a third gate, a third drain and a third source. The fourth transistor includes a fourth gate, a fourth drain and a fourth source. The fourth drain is coupled to the third source. The fourth source is coupled to the pad voltage terminal. The second transistor is in a second well different from the first well, and is separated from the first well in a first direction.

Abstract: A voltage tracking circuit includes first, second, third and fourth transistors. The first transistor is in a first well, and includes a first gate, a first drain and a first source coupled to a first voltage supply. The second transistor includes a second gate, a second drain and a second source. The second source is coupled to the first drain. The second gate is coupled to the first gate and the pad voltage terminal. The third transistor includes a third gate, a third drain and a third source. The fourth transistor includes a fourth gate, a fourth drain and a fourth source. The fourth drain is coupled to the third source. The fourth source is coupled to the pad voltage terminal. The fourth transistor is in a second well different from the first well, and is separated from the first well in a first direction.

Abstract: Structures and processes for improving radiation hardness and eliminating latch-up in integrated circuits are provided. An example process includes forming a first doped buried layer, a first well, and a second well, and using a first mask, forming a second doped buried layer only in a first region above the first doped buried layer and between at least the first well and the second well, where the first mask is configured to control spacing between the wells and the doped buried layers. The process further includes using a second mask, forming a vertical conductor located only in a second region above the first region and between at least the first well and the second well, where the vertical conductor is doped to provide a low resistance link between the second doped buried layer and at least a top surface of the substrate.

Abstract: Examples are disclosed that relate to the use of an always-depleted photodiode in a ToF depth image sensor. One example provides a method of operating a pixel of a depth image sensor, the method comprising receiving photons in a photocharge generation region of the pixel, the photocharge generation region of the pixel comprising an always-depleted photodiode formed by a doped first region comprising one of p-doping or n-doping and a more lightly-doped second region comprising the other of p-doping or n-doping. The method further comprises, during an integration phase, energizing a clock gate for a pixel tap, thereby directing photocharge generated in the photocharge generation region to an in-pixel storage comprising a capacitor, and in a readout phase, reading charge out from the in-pixel storage.

Abstract: A semiconductor memory device of embodiments includes: a memory cell array including a plurality of memory cells; and a control circuit controlling an operation of each of the memory cells and including a first capacitor. The first capacitor includes: a semiconductor substrate having a first face and a second face facing the first face and including a first semiconductor region of p-type, a second semiconductor region of n-type provided between the first face and the first semiconductor region, and a third semiconductor region of p-type provided between the first face and the second semiconductor region and electrically connected to the first semiconductor region; a first electrode electrically connected to the second semiconductor region; and a first insulating film provided between the third semiconductor region and the first electrode.

Abstract: A voltage tracking circuit includes a first, second, third and fourth transistor. The first transistor is in a first well, and includes a first gate, a first drain and a first source coupled to a first voltage supply. The second transistor includes a second gate, a second drain and a second source. The second source is coupled to the first drain. The second gate is coupled to the first gate and the pad voltage terminal. The third transistor includes a third gate, a third drain and a third source. The fourth transistor includes a fourth gate, a fourth drain and a fourth source. The fourth drain is coupled to the third source. The fourth source is coupled to the pad voltage terminal. At least the third transistor is in a second well different from the first well, and is separated from the first well in a first direction.

Abstract: A test array structure includes a substrate, first and second cells, first and second bit-line rings and four word-lines. Each of the first and second cells has a first drain region, a first gate region, a source region, a second gate region and a second drain region connected together in sequence. The first drain region and the first gate region of the first cell are located within the first bit-line ring. The second drain region and the second gate region of the first cell are located between the first and second bit-line rings. The first drain region and the first gate region of the second cell is located within the second bit-line ring. The second drain region of the first cell and the first drain region of the second cell are located between the two immediately-adjacent word-lines.

Abstract: An integrated circuit structure includes: a well region having a first conductivity type; a semiconductor structure extending away from the well region from a major surface of the well region, the semiconductor structure having the first conductivity type; a source/drain feature disposed on the semiconductor structure, the source/drain feature having a second conductivity type different from the first conductivity type; an isolation layer laterally surrounding at least a portion of the semiconductor structure; a dielectric layer disposed on the isolation layer, where at least a portion of the source/drain feature is disposed in the dielectric layer; and a conductive plug continuously extending through the dielectric layer and the isolation layer to physically contact the major surface of the well region, wherein the conductive plug is coupled to a power supply line to bias the well region.

Abstract: In one embodiment, a method of forming a HEM diode may comprise forming the HEM diode with high forward voltage that is greater than one of a gate-to-source threshold voltage of a HEMT or a forward voltage of a P-N diode.

Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and a first gate electrode formed over the substrate. The semiconductor structure further includes a dielectric layer formed on a sidewall of the first gate electrode and a second gate electrode formed over the substrate and separated from the first gate electrode by the dielectric layer. The semiconductor structure further includes a contact formed over the second gate electrode. In addition, the contact has a first extending portion and a second extending portion extending along opposite sidewalls of the second gate electrode.

Abstract: Structures and processes for improving radiation hardness and eliminating latch-up in integrated circuits are provided. An example process includes forming a first doped buried layer, a first well, and a second well, and using a first mask, forming a second doped buried layer only in a first region above the first doped buried layer and between at least the first well and the second well, where the first mask is configured to control spacing between the wells and the doped buried layers. The process further includes using a second mask, forming a vertical conductor located only in a second region above the first region and between at least the first well and the second well, where the vertical conductor is doped to provide a low resistance link between the second doped buried layer and at least a top surface of the substrate.

Abstract: A semiconductor device includes a floating buried doped region, a first doped region disposed between the floating buried doped region and a first major surface, and a semiconductor region disposed between the floating buried doped region and a second major surface. Trench isolation portions extend from the first major surface and terminate within the semiconductor region to define an active region. An insulated trench structure is laterally disposed between the trench isolation portions, terminates within the floating buried doped region, and defines a first portion and a second portion of the active region. A biasing semiconductor device is within the first portion, and a functional semiconductor device is within the second portion. The biasing semiconductor device is adapted to set a potential of the floating buried doped region and adapted to divert parasitic currents away from the functional semiconductor device.

Abstract: According to an example embodiment, an integrated circuit may include a plurality of cells and a plurality of paths that supply power to the plurality of cells, respectively. The plurality of cells and the plurality of paths may be arranged based on a plurality of propagation delays of the plurality of cells, which include a plurality of first delays of the plurality of cells generated by a plurality of power resistances of the plurality of paths and a plurality of second delays of the plurality of cells generated based on a plurality of arrival timing windows that overlap each other.

Abstract: An apparatus comprises a charge pump packaged with a load that receives charge provided by the charge pump, the charge pump comprising a plurality of switches that, when connected to a plurality of capacitors, cause the plurality of capacitors to assume a selected configuration, wherein the switches are configured to cause transitions between configurations of the capacitors.

Abstract: A junctionless field-effect transistor is provided and has an ultra-thin low-crystalline silicon channel. A fabrication method thereof also is provided for enabling greatly improved economics by significantly reducing the process costs while having electrical characteristics similar to those of the one formed on an SOI substrate by source/channel/drain regions formed in a junctionless ultra-thin low-crystalline silicon layer that has lower crystallinity than that of single-crystal silicon and that has a thickness of 20 nm or less on a bulk silicon substrate instead of an expensive SOI substrate.

Abstract: A semiconductor transistor device includes a substrate having an active area and a trench isolation region surrounding the active area, a gate oxide layer, a gate, a spacer on a sidewall of the gate, a doping region on one side of the gate, an insulating cap layer covering the gate, the spacer and the doping region, and a redistributed contact layer (RCL) on the insulating cap layer. The RCL extends from the active area to the trench isolation region. A contact plug is disposed above the trench isolation region and is electrically connected to the gate or the doping region through the RCL.

Abstract: A semiconductor device includes a substrate having first and second regions. The first region includes an insulator and the second region includes source, drain, and channel regions of a transistor. The semiconductor device further includes first and second gate stacks over the insulator; a third gate stack over the channel region; a first dielectric layer over the first, second, and third gate stacks; a second dielectric layer over the first dielectric layer; and a metal layer over the first and second gate stacks. The metal layer is in electrical communication with the second gate stack and is isolated from the first gate stack by at least the first and second dielectric layers.

Abstract: A semiconductor device is provided. The semiconductor device includes a substrate; an epitaxial layer disposed over the substrate; a gate electrode disposed over the epitaxial layer; a source region and a drain region disposed in the epitaxial layer at opposite sides of the gate electrode; a trench extending from a top surface of the epitaxial layer through the source region into the epitaxial layer, wherein the trench has a slanted side and a bottom surface; and a first conductive-type linking region having the first conductive type, wherein the first conductive-type linking region surrounds the slanted side of the trench and contacts the bottom surface of the trench, wherein the first conductive-type linking region electrically connects the source region and the substrate. The present disclosure also provides a method for manufacturing this semiconductor device.

Abstract: The semiconductor device includes a first inverter and a second inverter which is connected thereto in series. Each of the first and the second inverters includes a p-channel transistor and an n-channel transistor, respectively. The number of projection semiconductor layers each as the active region of the p-channel and the transistors of the second inserter is smaller than the number of the projection semiconductor layers each as the active region of the p-channel and the n-channel transistors of the first inverter.

Abstract: A switching power supply in an integrated circuit, an integrated circuit comprising a switching power supply, and a method of assembling a switching power supply in an integrated circuit are disclosed. In one embodiment, the invention provides a three-dimensional switching power supply in an integrated circuit comprising a device layer. The switching power supply comprises three distinct strata arranged in series with the device layer, the three distinct strata including a switching layer including switching circuits, a capacitor layer including banks of capacitors, and an inductor layer including inductors. This switching power supply further comprises a multitude of connectors electrically and mechanically connecting together the device layer, the switching layer, the capacitor layer, and the inductor layer. The switching circuits, the capacitors and the inductors form a switching power supply for supplying power to the device layer.

Abstract: A method and apparatus for use in improving linearity sensitivity of MOSFET devices having an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to address degradation in second- and third-order intermodulation harmonic distortion at a desired range of operating voltage in devices employing an accumulated charge sink.

Abstract: A charge pump includes chip, package substrate and circuit board. Chip includes transistor set including at least four transistors connected to first input end of input terminal set and two rows of odd number and even number second input ends of input terminal set. Except first transistor, the other transistors are arranged in two rows subject to odd number and even number and respectively electrically coupled to the two rows of at least three second input ends by traces. At least three second external pins of package substrate and at least three capacitors of circuit board are respectively arranged in two rows subject to odd number and even number, enabling first circuit with connected odd number second external pins and second circuit with connected even number second external pin to be kept apart without intersection. Traces in chip are arranged in staggered manner, reducing parasitic capacitance.

Abstract: A circuit for generating a negative voltage on the basis of a positive voltage, including: at least one first transistor between a first terminal for applying a potential greater than a reference potential and a first node; a first capacitive element between the first node and a second node, a control terminal of said first transistor being linked to the second node; a first switch between the first node and a second terminal for applying the reference potential; a second switch between the second node and a third terminal for providing said negative voltage; a third switch between the second node and the second terminal; and a second capacitive element between the third terminal and the second terminal.

Abstract: A voltage doubler circuit supports operation in a positive voltage boosting mode to positively boost voltage from a first node to a second node and operation in a negative voltage boosting mode to negatively boost voltage from the second node to the first node. The voltage doubler circuits receive two clock signals having different high voltage levels. A series of voltage doubler circuit are connected in a charge pump with controllable operation in the first and second modes. A connecting circuit interconnects the first and second nodes of the voltage doubler circuits to provide a first connection path, with a first input voltage, to support the positive voltage boosting mode operation and a second connection path, with a proper input voltage, to support the negative voltage boosting mode. A discharge circuit is provided to discharge the voltage doubler circuits when operation of the charge pump circuit is terminated.

Abstract: According to an exemplary embodiment, a stacked half-bridge package includes a control transistor having a control drain for connection to a high voltage input, a control source coupled to an output terminal, and a control gate for being driven by a driver IC. The stacked half-bridge package further includes a sync transistor having a sync drain for connection to the output terminal, a sync source coupled to a low voltage input, and a sync gate for being driven by the driver IC. The control and sync transistors are stacked on opposite sides of a common conductive leadframe with the common conductive leadframe electrically and mechanically coupling the control source with the sync drain. The common conductive leadframe thereby serves as the output terminal.

Abstract: A charge pump for an integrated circuit includes a substrate, first and second transistors and a capacitor. The first transistor includes first source and first drain regions disposed within the substrate and defining a first channel therebetween. The first source and first drain regions are implanted with one of an n-type and a p-type dopant. The second transistor includes second source and second drain regions disposed within the substrate and defining a second channel therebetween. The second source and second drain regions implanted with the same type dopant as the first source region. The capacitor includes a metal terminal and a substrate terminal with a dielectric therebetween. The substrate terminal is disposed within the substrate and implanted with the same type dopant as the first source region. The substrate terminal contacts the first drain region and second source region within the substrate to provide electrical continuity therebetween.

Abstract: A charge pump device with NMOS transistor circuit is provided for low voltage operation. The charge pump stage, comprising four NMOS transistors and three capacitors, is configured to alleviate the substrate body effect and the charge transfer loss. The charge pump circuit can be constructed on a p-type semiconductor substrate directly without deep N well isolation. The circuit is driven by two non-overlapping complementary clock signals, which can be generated easily with an integrated fabrication. The charge pump device can be implemented with a multiple stage to provide a stable high voltage output.

Abstract: A semiconductor structure comprising an improved ESD protection device is provided. The semiconductor structure comprises a substrate, a well formed in the substrate, a first heavily doped region formed in the well, a second heavily doped region formed in the well and separated apart from the first heavily doped region, a gate structure formed on the substrate between the first heavily doped region and the second heavily doped region, a field region formed in the well under the first heavily doped region and the gate structure, and a field oxide/shallow trench isolation structure formed adjacent to the first heavily doped region. The field region is not formed under the second heavily doped region. The well and the field region have a first type of doping. The first heavily doped region and the second heavily doped region have a second type of doping.

Abstract: The performances of a semiconductor device are improved. The semiconductor device has a first control gate electrode and a second control gate electrode spaced along the gate length direction, a first cap insulation film formed over the first control gate electrode, and a second cap insulation film formed over the second control gate electrode. Further, the semiconductor device has a first memory gate electrode arranged on the side of the first control gate electrode opposite to the second control gate electrode, and a second memory gate electrode arranged on the side of the second control gate electrode opposite to the first control gate electrode. The end at the top surface of the first cap insulation film on the second control gate electrode side is situated closer to the first memory gate electrode side than the side surface of the first control gate electrode on the second control gate electrode side.

Abstract: A packaged multi-output converter (200) comprising a leadframe with a chip pad (201) as ground terminal and a plurality of leads (202) including the electrical input terminal (203); a first FET chip (sync chip, 220) with its source terminal affixed to the leadframe and on its opposite surface a first drain terminal (221) positioned adjacent to a second drain terminal (222), the drain terminals connected respectively by a first (241) and a second (242) metal clip to a first (204) and second (205) output lead; a second FET chip (control chip, 211), positioned vertically over the first drain terminal, with its source terminal attached onto the first clip; a third FET chip (control chip, 212), positioned vertically over the second drain terminal, with its source terminal attached onto the second clip; and the drain terminals (213, 214) of the second and third chips attached onto a third metal clip (260) connected to the input lead (203).

Abstract: To realize further miniaturization of a semiconductor device. The semiconductor device 10 is provided with a switching element (FET 14) provided on a substrate 18, a first electrode (electrode 13) provided on an opposite side of the substrate 18 interposing the switching element, a diode 12 provided on an opposite side of the switching element interposing the first electrode, and a second electrode (electrode 11) provided on an opposite side of the first electrode interposing the diode 12.

Abstract: Radio-frequency (RF) switch circuits providing improved switching performance. An RF switch system includes at least one field-effect transistor (FET) disposed between a first node and a second node, each FET having a source, drain, gate, and body. A compensation circuit is connected to the respective source of the at least one FET. The compensation circuit may be configured to compensate a non-linearity effect generated by the at least one FET.

Abstract: A semiconductor chip in which a power MOSFET is placed above a semiconductor chip in which another power MOSFET is formed and they are sealed with an encapsulation resin. The semiconductor chips are so arranged that the upper semiconductor chip does not overlap with a gate pad electrode of the lower semiconductor chip in a plan view. The semiconductor chips are identical in size and the respective source pad electrodes and gate pad electrodes of the lower semiconductor chip and the upper semiconductor chip are identical in shape and arrangement. The lower semiconductor chip and the upper semiconductor chip are arranged with their respective centers displaced from each other. Accordingly, the size of a semiconductor device can be reduced.

Abstract: An area efficient distributed device for integrated voltage regulators comprising at least one filler cell coupled between a pair of PADS on I/O rail of a chip and at least one additional filler cell having small size portion of said device is coupled to said I/O rails for distributing portions of said device on the periphery of said chip. The device is coupled as small size portion on the lower portion of said second filler cell for distributing said device on the periphery of said chip and providing maximal area utilization.

Abstract: A solid-state image pickup device includes: a photoelectric conversion portion formed on a substrate and composed of a photodiode; an image pickup area in which plural pixels each including a reading-out electrode for reading out signal electric charges generated and accumulated in the photoelectric conversion portion are formed; and a light blocking film having an opening portion right above the photoelectric conversion portion in an effective pixel area of the image pickup area, and light-blocking said photoelectric conversion portion in an OB pixel area of the image pickup area, in which a film deposited between the light blocking film and the substrate right above the photoelectric conversion portion in the OB pixel area is composed of only a silicon oxide film.

Abstract: An integrated circuit includes isolation capacitors which include a silicon dioxide dielectric layer and a polymer dielectric layer over the layer of silicon dioxide. The silicon dioxide dielectric layer and the polymer dielectric layer extend across the integrated circuit. Top plates of the isolation capacitors have bond pads for wire bonds or bump bonds. Bottom plates of the isolation capacitors are connected to components of the integrated circuit. Other bond pads are connected to components in the integrated circuit through vias through the silicon dioxide dielectric layer and the polymer dielectric layer.

Abstract: A switching element unit comprising a switching element and a smoothing capacitor that suppresses variation in DC voltage to be supplied to the switching element. An element mounting surface may be formed in an outer surface of the smoothing capacitor and may be formed integrally with a dielectric portion interposed between electrodes of the smoothing capacitor. A capacitor connection electrode as an electrode may be electrically connected to a terminal of the smoothing capacitor formed on the element mounting surface, and the switching element is placed on the element mounting surface such that a terminal of the switching element is electrically connected to the capacitor connection electrode.

Abstract: Provided is a semiconductor device having a high switching speed. A semiconductor device is provided with an n-type epitaxial layer having a plurality of trenches arranged at prescribed intervals; an embedded electrode formed on an inner surface of the trench through a silicon oxide film to embed each trench; and a metal layer, which is capacitively coupled with the embedded electrode by being arranged above the embedded electrode through a silicon oxide film. In the semiconductor device, a region between the adjacent trenches operates as a channel (current path). A current flowing in the channel is interrupted by covering the region with a depletion layer formed at the periphery of the trenches, and the current is permitted to flow through the channel by eliminating the depletion layer at the periphery of the trenches.

Abstract: A direct current (DC)-DC converter having a DC-DC converter semiconductor die and an alpha flying capacitive element is disclosed. The DC-DC converter semiconductor die includes a first series alpha switching element, a second series alpha switching element, a first alpha flying capacitor connection node, which is about over the second series alpha switching element, and a second alpha flying capacitor connection node, which is about over the first series alpha switching element. The alpha flying capacitive element is electrically coupled between the first alpha flying capacitor connection node and the second alpha flying capacitor connection node. By locating the first alpha flying capacitor connection node and the second alpha flying capacitor connection node about over the second series alpha switching element and the first series alpha switching element, respectively, lengths of transient current paths may be minimized, thereby reducing noise and potential interference.

Abstract: According to one embodiment, a semiconductor device includes at least one semiconductor region provided in a semiconductor substrate, and a capacitor group including a plurality of capacitors provided in the semiconductor region, each capacitor including a capacitor insulating film provided on the semiconductor region, a capacitor electrode provided on the capacitor insulating film, and at least one diffusion layer provided in the semiconductor region adjacent to the capacitor electrode.

Abstract: A liquid crystal display device with a built-in touch screen, which uses a common electrode as a touch-sensing electrode including an intersection of a gate line and a data line to define a pixel region, a bridge line disposed in a central portion of the pixel, an insulating layer formed on the bridge line, a first contact hole disposed through the insulating layer to expose a predetermined portion of an upper surface of the bridge line, a contact metal on the insulating layer and inside the first contact hole, the contact metal electrically connected with the bridge line, a first passivation layer on the contact metal, a second contact hole disposed through the first passivation layer to expose a predetermined portion of an upper surface of the contact metal, a common electrode on the first passivation layer and inside the second contact hole, a conductive line electrically connected with the common electrode, and a second passivation layer on the first passivation layer and the conductive line, wherein the

Abstract: A semiconductor integrated circuit according to an embodiment includes a transfer transistor including a first gate electrode, the first gate electrode and a diffusion layer being diode-connected with a first wiring, and a clock signal line to which a clock signal is supplied, at least a portion of a first partial clock signal line, which is a portion of the clock signal line, being formed above the first gate electrode.

Abstract: Various aspects of the technology include an integrated circuit device comprising a compound semiconductor layer and a plurality of input, switch, and ground ohmic metal fingers fabricated on the compound semiconductor layer in a repeating sequence. A control gate may be disposed between each input finger and adjacent switch finger, and a sync gate may be disposed between each ground finger and adjacent switch finger. A sync gate and a control gate may be disposed adjacent each switch finger. The device further includes a plurality of control gate pads, each control gate pad at an end of two control gates, and a control gate pad at opposite ends of each control gate, and a plurality of sync gate pads, each sync gate pad at an end of two sync gates, and a sync gate pad at opposite ends of each sync gate.

Abstract: An apparatus and method of forming the same including, in one embodiment, a printed circuit board and a semiconductor device coupled to the printed circuit board. The apparatus also includes a decoupling device coupled to the printed circuit board and positioned under the semiconductor device.

Abstract: A multi-layer integrated circuit package includes a switched-mode power supply circuit including a plurality of transistors which form part of a main current loop of the switched-mode power supply circuit. The plurality of transistors are arranged in one or more layers of the integrated circuit package. The package further includes a conductive plate arranged in a different layer of the integrated circuit package than the plurality of transistors. The conductive plate is in close enough proximity to at least part of the main current loop so that a current can be electromagnetically induced in the conductive plate responsive to a change in current in the main current loop.

Abstract: A method for manufacturing a semiconductor device comprises forming a first layer on an impurity diffusion region in a semiconductor substrate by a selective epitaxial growth method, forming a second layer on the first layer by the selective epitaxial growth method, forming a contact hole penetrating an interlayer insulating film in a thickness direction thereof and reaching the second layer, and filling a conductive material into the contact hole to form a contact plug including the first and second layers and the conductive material.

Abstract: A charge pump circuit includes a substrate and first well region formed in the substrate. A first transistor includes first and second conduction regions disposed in the first well region. A second well region is formed in the substrate. A third well region is formed within the second well region. A second transistor includes first and second conduction regions disposed in the third well region. The second well region and third well region are coupled to a common terminal. The common terminal receives a local potential and the first well region and second well region are commonly maintained at the local potential. The first transistor and second transistor operate within the charge pump cell. A plurality of charge pump cells can be cascaded together with an output of a first charge pump cell coupled to an input of a second charge pump cell.

Abstract: A semiconductor device is provided, which includes an N well having a peak concentration of 2E+17 atom/cm3 or more in the range of 0.2 to 1 ?m depth from the surface of a P-type semiconductor substrate, and a region provided below the N well, the region containing P-type impurities with higher concentration than concentration of electrons.

Abstract: A circuit arrangement includes a first transistor device and a second transistor device. Each transistor device includes a first load terminal, a second load terminal, a gate terminal, and a control terminal. The first load terminals are electrically connected, and the control terminals are electrically connected. A capacitive storage element is connected between the first load terminals and the control terminals.

Abstract: A device includes an active region formed of a semiconductor material, a gate dielectric at a surface of the active region, and a gate electrode over the gate dielectric. A first source/drain region and a second source/drain region are on opposite sides of the gate electrode. A Contact Etch Stop Layer (CESL) is over the first and the second source/drain regions. An Inter-Layer Dielectric (ILD) includes a top surface substantially level with a top surface of the gate electrode. A first contact plug is over and electrically connected to the first source/drain region. A second contact plug is over and aligned to the second source/drain region. The second contact plug and the second source/drain region are spaced apart from each other by a portion of the first CESL to form a capacitor.