Capacitor Coupled To, Or Forms Gate Of, Insulated Gate Field Effect Transistor (e.g., Non-destructive Readout Dynamic Memory Cell Structure) Patents (Class 257/300)
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Patent number: 9269766Abstract: A device and a method for forming a device are presented. The method includes providing a substrate having an array region in which memory cells are to be formed. Storage gates of the memory cells are formed in the array region. A guard ring surrounding the array region is formed. A gate electrode layer is formed on the substrate. The gate electrode layer fills gaps between the storage gates and guard ring. The gate electrode layer is planarized to produce a planar surface between the gate electrode layer, storage gates and guard ring. The guard ring maintains thickness of the gate electrode layer in the array region such that thickness of the storage gates across center and edge regions of the array region is uniform.Type: GrantFiled: September 18, 2014Date of Patent: February 23, 2016Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Ling Wu, Jianbo Yang, Kian Hong Lim, Sung Mun Jung
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Patent number: 9257501Abstract: A semiconductor substrate of a semiconductor device includes a first conductive body region that is formed in the element region; a second conductive drift region that is formed in the element region; a gate electrode that is formed in the element region, that is arranged in a gate trench, and that faces the body region; an insulating body that is formed in the element region and is arranged between the gate electrode and an inside wall of the gate trench; a first conductive floating region that is formed in the element region and that is surrounded by the drift region; a first voltage-resistance retaining structure that is formed in the peripheral region and that surrounds the element region; and a gate pad that is formed in the peripheral region, and is electrically connected to the gate electrode in a position on the element region-side of the first voltage-resistance retaining structure.Type: GrantFiled: December 23, 2013Date of Patent: February 9, 2016Assignee: Toyota Jidosha Kabushiki KaishaInventors: Hidefumi Takaya, Masaru Nagao, Narumasa Soejima
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Patent number: 9252188Abstract: Some embodiments include methods of forming memory cells. A series of rails is formed to include bottom electrode contact material. Sacrificial material is patterned into a series of lines that cross the series of rails. A pattern of the series of lines is transferred into the bottom electrode contact material. At least a portion of the sacrificial material is subsequently replaced with top electrode material. Some embodiments include memory arrays that contain a second series of electrically conductive lines crossing a first series of electrically conductive lines. Memory cells are at locations where the electrically conductive lines of the second series overlap the electrically conductive lines of the first series. First and second memory cell materials are within the memory cell locations. The first memory cell material is configured as planar sheets and the second memory cell material is configured as upwardly-opening containers.Type: GrantFiled: November 17, 2011Date of Patent: February 2, 2016Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Scott E. Sills, John K. Zahurak
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Patent number: 9240417Abstract: According to an embodiment, a nonvolatile semiconductor memory device comprises a memory area, a capacitor area, and a transistor area, on a semiconductor substrate. The nonvolatile semiconductor memory device comprises a memory cell and a select gate transistor, in the memory area. The nonvolatile semiconductor memory device includes a capacitor comprising a first electrode layer and a second electrode layer stacked on the first electrode layer via an insulating layer. An upper surface of the capacitor is covered by a first insulating layer, and the insulating layer has an upper level portion and a lower level portion. A part of an outline of the upper level portion is along a part of an outline of the second electrode layer.Type: GrantFiled: February 24, 2015Date of Patent: January 19, 2016Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Kenrou Kikuchi, Koichi Matsuno
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Patent number: 9208826Abstract: Provided is a semiconductor storage device with which it is possible to write information to individual memory cells in which a storage node is configured with an oxide semiconductor insulated-gate FET source and a terminal of a capacitor element being connected. A storage node is configured by connecting a source of a first transistor to one terminal of a capacitor element. A drain of the first transistor and a source of a second transistor are connected to each other. A drain of the second transistor is a data input terminal. A first control terminal, which is formed by a gate of the first transistor being connected to another terminal of the capacitor element, is connected to a wordline, which extends in the row direction. A second control terminal, which is formed of a gate of the second transistor terminal, is connected to a write control line, which extends in the column direction.Type: GrantFiled: February 27, 2013Date of Patent: December 8, 2015Assignee: SHARP KABUSHIKI KAISHAInventor: Yoshimitsu Yamauchi
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Patent number: 9190511Abstract: A semiconductor component with a drift region and a drift control region. One embodiment includes a semiconductor body having a drift region of a first conduction type in the semiconductor body. A drift control region composed of a semiconductor material, which is arranged, at least in sections, is adjacent to the drift region in the semiconductor body. An accumulation dielectric is arranged between the drift region and the drift control region.Type: GrantFiled: June 11, 2013Date of Patent: November 17, 2015Assignee: Infineon Technologies Austria AGInventors: Frank Pfirsch, Anton Mauder, Armin Willmeroth, Hans-Joachim Schulze, Stefan Sedlmaier, Markus Zundel, Franz Hirler, Arunjai Mittal
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Patent number: 9177998Abstract: MIMCAP devices are provided that can be suitable for memory device applications, such as current selector devices for cross point memory array. The MIMCAP devices can have lower thermal budget as compared to Schottky diodes and controllable lower barrier height and lower series resistance as compared to MIMCAP tunneling diodes. The MIMCAP diode can include a low defect dielectric layer, a high defect dielectric layer, sandwiched between two electrodes having different work function values.Type: GrantFiled: September 19, 2014Date of Patent: November 3, 2015Assignee: Intermolecular, Inc.Inventors: Venkat Ananthan, Imran Hashim, Prashant B. Phatak
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Patent number: 9159738Abstract: Provided is a semiconductor memory device including an oxide semiconductor insulated gate FET and having a capability to implement advanced performance without being affected by a variation in threshold voltage. A memory cell MC includes a memory node Nm formed at a connection point of a gate of a first transistor element T1, a source of a second transistor element T2, and one end of a capacitive element Cm, and a control node Nc formed at a connection point of a drain of the first transistor element T1 and a drain of the second transistor element T2.Type: GrantFiled: February 14, 2013Date of Patent: October 13, 2015Assignee: Sharp Kabushiki KaishaInventor: Yoshimitsu Yamauchi
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Patent number: 9159742Abstract: A non-volatile memory device includes: a semiconductor pillar stretched perpendicularly to a substrate; a plurality of memory cells stacked along the semiconductor pillar; a bit line coupled with a first end of the semiconductor pillar; a first source line coupled with one of the first end and a second end of the semiconductor pillar; a second source line disposed over the bit line and the first source line; a first switch having a first end coupled with the first source line and a second end coupled with a first voltage supplier, and controlling whether to supply a first voltage to the first source line; and a second switch having a first end coupled with the first source line and a second end coupled with the second source line, and controlling whether or not to supply a second voltage supplied from the second source line to the first source line.Type: GrantFiled: November 15, 2013Date of Patent: October 13, 2015Assignee: SK Hynix Inc.Inventor: Deung-Kak Yoo
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Patent number: 9153659Abstract: Gate-rounding fabrication techniques can be implemented to increase an effective channel length of a transistor and to consequently reduce the leakage current and static power consumption associated with the transistor. The transistor comprises a substrate region that includes a source region and a drain region. The transistor can also comprise a gate region that includes a main gate portion, one or more gate tips, and one or more corresponding gate-rounded portions. Each of the one or more gate tips is formed at a suitable position along the side of the main gate portion. During fabrication, the junction between the main gate region and each of the gate tips takes on a rounded shape to form a corresponding gate-rounded region. The gate-rounded regions increase the average length of the gate region and the effective channel length of the transistor.Type: GrantFiled: December 14, 2011Date of Patent: October 6, 2015Assignee: QUALCOMM IncorporatedInventors: Yanfei Cai, Ji Li
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Patent number: 9111681Abstract: A thin film capacitor includes a lower electrode layer, a dielectric layer that is provided on said lower electrode layer, and an upper electrode layer that is formed on the dielectric layer. Wherein, the lower electrode layer contains at least a Ni electrode layer, the upper electrode layer configured with at least two layers of a Ni electrode layer and a Cu electrode layer, and the dielectric layer is in contact with both the Ni electrode layer of the lower electrode layer and the Ni electrode layer of the upper electrode layer.Type: GrantFiled: June 21, 2013Date of Patent: August 18, 2015Assignee: TDK CorporationInventors: Hitoshi Saita, Yoshihiko Yano, Yasunobu Oikawa
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Patent number: 9076758Abstract: A rectangular capacitor for dynamic random access memory (DRAM) and a dual-pass lithography method to form the same are described. For example, a capacitor includes a trench disposed in a first dielectric layer disposed above a substrate. A cup-shaped metal plate is disposed along the bottom and sidewalls of the trench. A second dielectric layer is disposed on and conformal with the cup-shaped metal plate. A trench-fill metal plate is disposed on the second dielectric layer. The second dielectric layer isolates the trench-fill metal plate from the cup-shaped metal plate. The capacitor has a rectangular or near-rectangular shape from a top-down perspective.Type: GrantFiled: November 4, 2013Date of Patent: July 7, 2015Assignee: Intel CorporationInventor: Nick Lindert
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Patent number: 9059302Abstract: One or more embodiments relate to a floating gate memory device, comprising: a substrate; a floating gate disposed over the substrate; and a control gate substantially laterally surrounding at least a portion of the floating gate.Type: GrantFiled: April 6, 2009Date of Patent: June 16, 2015Assignee: Infineon Technologies AGInventors: Koen Van Der Zanden, Thomas Schulz
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Patent number: 9059029Abstract: To provide a highly integrated semiconductor memory device. To provide a semiconductor memory device which can hold stored data even when power is not supplied. To provide a semiconductor memory device which has a large number of write cycles. The degree of integration of a memory cell array is increased by forming a memory cell including two transistors and one capacitor which are arranged three-dimensionally. The electric charge accumulated in the capacitor is prevented from being leaking by forming a transistor for controlling the amount of electric charge of the capacitor in the memory cell using a wide-gap semiconductor having a wider band gap than silicon. Accordingly, a semiconductor memory device which can hold stored data even when power is not supplied can be provided.Type: GrantFiled: March 1, 2013Date of Patent: June 16, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yasuyuki Arai
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Patent number: 9041111Abstract: A flat panel detector includes a photoelectric conversion layer and a pixel detecting element disposed under the photoelectric conversion layer. The pixel detecting element includes: a pixel electrode for receiving charges, a storage capacitor for storing the received charges, and a thin film transistor for controlling outputting of the stored charges. The storage capacitor includes a first electrode and a second electrode. The first electrode includes an upper electrode and a bottom electrode that are disposed opposite to each other and electrically connected. A second electrode is sandwiched between the upper electrode and the bottom electrode. It is insulated between the upper electrode and the second electrode and between the second electrode and the bottom electrode.Type: GrantFiled: December 16, 2013Date of Patent: May 26, 2015Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Zhenyu Xie
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Publication number: 20150123181Abstract: One illustrative integrated circuit product disclosed herein includes a metal-1 metallization layer positioned above a semiconducting substrate, a capacitor positioned between a surface of the substrate and a bottom of the metal-1 metallization layer, wherein the capacitor includes a plurality of conductive plates that are oriented in a direction that is substantially normal relative to the surface of the substrate, and at least one region of insulating material positioned between the plurality of conductive plates.Type: ApplicationFiled: January 16, 2015Publication date: May 7, 2015Inventors: Kok Yong Yiang, Patrick R. Justison
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Patent number: 9019760Abstract: A memory device is provided, including a back gate including a first portion of electrically conductive material, a first portion of dielectric material arranged on the back gate, a semiconductor nanobeam arranged on the first portion of dielectric material, a second portion of dielectric material covering the semiconductor nanobeam, a portion of material configured to receive electrons and holes, and configured to store electrical charges and covering the second portion of dielectric material, a third portion of dielectric material covering the portion of material configured to perform storage of electrical charges, and a front gate including a second portion of electrically conductive material covering the third portion of dielectric material.Type: GrantFiled: November 25, 2011Date of Patent: April 28, 2015Assignee: Commissariat a l'energie atomique et aux energies alternativesInventors: Alexandre Hubert, Maryline Bawedin, Sorin Cristoloveanu, Thomas Ernst
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Publication number: 20150108557Abstract: A capacitor structure in a semiconductor device includes a semiconductor substrate having a top surface and a bottom surface opposite the top surface, an isolation region having a top surface and a bottom surface, opposite the top surface, the bottom surface of the isolation region being disposed on the top surface of the semiconductor substrate. The capacitor structure also includes a gate terminal structure disposed on the top surface of the isolation region and a diffusion contact structure disposed on the top surface of the isolation region and arranged parallel to the gate terminal structure. In some aspects, the gate terminal structure is connected to a first contact node and the diffusion contact structure is connected to a second contact node, in which the first and second contact nodes form opposing nodes of the capacitor structure.Type: ApplicationFiled: November 5, 2013Publication date: April 23, 2015Applicant: Broadcom CorporationInventors: Shom Surendran PONOTH, Changyok PARK, Guang-Jye SHIAU, Akira ITO
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Publication number: 20150108558Abstract: According to one embodiment, a scalable integrated MIM capacitor in a semiconductor die includes a high-k dielectric segment over a substrate and a metal segment over the high-k dielectric segment, where the metal segment forms a capacitor terminal of the integrated MIM capacitor. The capacitor further includes a filler laterally separating consecutive capacitor terminals, where the filler can be used as a capacitor dielectric of the integrated MIM capacitor. In one embodiment, the metal segment comprises a gate metal. In another embodiment, the integrated MIM capacitor is formed substantially concurrently with one or more transistors without requiring additional fabrication process steps.Type: ApplicationFiled: December 22, 2014Publication date: April 23, 2015Applicant: Broadcom CorporationInventors: Wei XIA, Xiangdong Chen
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Patent number: 9012967Abstract: Embedded memories. The devices include a substrate, a first dielectric layer, a second dielectric layer, a third dielectric layer, and a plurality of capacitors. The substrate comprises transistors. The first dielectric layer, embedding first and second conductive plugs electrically connecting the transistors therein, overlies the substrate. The second dielectric layer, comprising a plurality of capacitor openings exposing the first conductive plugs, overlies the first dielectric layer. The capacitors comprise a plurality of bottom plates, respectively disposed in the capacitor openings, electrically connecting the first conductive plugs, a plurality of capacitor dielectric layers respectively overlying the bottom plates, and a top plate, comprising a top plate opening, overlying the capacitor dielectric layers. The top plate opening exposes the second dielectric layer, and the top plate is shared by the capacitors.Type: GrantFiled: February 9, 2012Date of Patent: April 21, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Ching Lin, Chun-Yao Chen, Chen-Jong Wang, Shou-Gwo Wuu, Chung S. Wang, Chien-Hua Huang, Kun-Lung Chen, Ping Yang
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Patent number: 9012993Abstract: An object of the present invention is to provide a semiconductor device in which stored data can be held even when power is not supplied for a certain time. Another object is to increase the degree of integration of a semiconductor device and to increase the storage capacity per unit area. A semiconductor device is formed with a material capable of sufficiently reducing off-state current of a transistor, such as an oxide semiconductor material that is a wide-bandgap semiconductor. With the use of a semiconductor material capable of sufficiently reducing off-state current of a transistor, the semiconductor device can hold data for a long time. Furthermore, a wiring layer provided under a transistor, a high-resistance region in an oxide semiconductor film, and a source electrode are used to form a capacitor, thereby reducing the area occupied by the transistor and the capacitor.Type: GrantFiled: July 16, 2012Date of Patent: April 21, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 9000505Abstract: A CMOS IC containing a quantum well electro-optical device (QWEOD) is disclosed. The QWEOD is formed in an NMOS transistor structure with a p-type drain region. The NLDD region abutting the p-type drain region forms a quantum well. The QWEOD may be fabricated with 65 nm technology node processes to have lateral dimensions less than 15 nm, enabling possible energy level separations above 50 meV. The quantum well electro-optical device may be operated in a negative conductance mode, in a photon emission mode or in a photo detection mode.Type: GrantFiled: August 26, 2011Date of Patent: April 7, 2015Assignee: Texas Instruments IncorporatedInventors: Henry L. Edwards, Tathagata Chatterjee, Robert C. Bowen
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Publication number: 20150091069Abstract: Provided are a semiconductor device and a fabricating method thereof. The semiconductor device includes a storage electrode having a cylinder shape, a dielectric film formed on the storage electrode, and a plate electrode formed on the dielectric film, wherein the plate electrode includes a first semiconductor compound layer and a second semiconductor compound layer sequentially stacked one on the other, and the first semiconductor compound layer has a crystallinity different from that of the second semiconductor compound layer.Type: ApplicationFiled: May 15, 2014Publication date: April 2, 2015Inventors: Jung-Hwan OH, Hyun-Jun KIM, Jong-Bom SEO, Ki-Vin IM, Han-Jin LIM
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Publication number: 20150084107Abstract: In some embodiments, a capacitor device includes a metal-oxide-metal (MOM) capacitor array and a varactor array configured overlapping with the MOM capacitor array. The MOM capacitor array includes a first MOM capacitor unit. The first MOM capacitor unit includes a first electrode pattern and a second electrode pattern in a first metallization layer. The first electrode pattern includes a plurality of first fingers and a first bus interconnecting the plurality of first fingers. The second electrode pattern includes a plurality of second fingers and a second bus interconnecting the plurality of second fingers. The varactor array includes a first varactor unit. The first varactor unit includes a first electrode contacting region and a second electrode contacting region. The first electrode pattern contacts the first electrode contacting region. The second electrode pattern contacts the second electrode contacting region.Type: ApplicationFiled: September 24, 2014Publication date: March 26, 2015Inventor: CHAO-CHIEH LI
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Patent number: 8987797Abstract: A nonvolatile memory device has a first active region and a second active region defined in a substrate by a device isolation layer, a Metal Oxide Silicon Field-Effect Transistor (MOSFET) disposed on the first active region and including a first electrode pattern, and a Metal Oxide Silicon (MOS) capacitor disposed on the second active region and including a second electrode pattern, and in which the first electrode pattern is narrower in the widthwise direction of the channel of the MOSFET than the first active region.Type: GrantFiled: October 10, 2013Date of Patent: March 24, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Oh-Kyum Kwon, Tae-Jung Lee, Kyoung-Eun Uhm, Byung-Sun Kim
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Publication number: 20150076578Abstract: A nonvolatile semiconductor storage device is provided with a memory-cell region; a peripheral-circuit region disposed adjacent to the memory-cell region a first memory-cell unit disposed in a first layer located in the memory-cell region; a second memory-cell unit disposed in a k-th layer of the memory-cell region where k is an integer equal to or greater than 2, the second memory-cell unit having an element region extending in a first direction and having a first width in a second direction crossing the first direction; and a peripheral-circuit element disposed in the first layer located in the peripheral-circuit region. Two or more dummy element each having a second width 2n+1 times greater than the first width in the second direction are disposed in the k-th layer located in the peripheral-circuit region where n is an integer equal to or greater than 0.Type: ApplicationFiled: May 30, 2014Publication date: March 19, 2015Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Wataru SAKAMOTO, Kenta YAMADA
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Patent number: 8981453Abstract: A nonvolatile memory device includes a unit cell with a transistor and a capacitor. The transistor is disposed on a substrate having a tunneling region and a channel region and includes a floating gate crossing both the tunneling region and the channel region. The capacitor is coupled to the floating gate.Type: GrantFiled: December 2, 2010Date of Patent: March 17, 2015Assignee: Magnachip Semiconductor, Ltd.Inventor: Jae-han Cha
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Patent number: 8975677Abstract: A decoupling capacitor cell includes: a first decoupling capacitor formed by only a pMOS transistor; and a second decoupling capacitor formed by two metal layers. The decoupling capacitor cell is arranged in an unused region not occupied by basic cells in a cell-based IC and is connected to a power wiring and a ground wiring.Type: GrantFiled: March 22, 2013Date of Patent: March 10, 2015Assignee: Rohm Co., Ltd.Inventor: Yoshiharu Kito
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Patent number: 8975133Abstract: One illustrative integrated circuit product disclosed herein includes a metal-1 metallization layer positioned above a semiconducting substrate, a capacitor positioned between a surface of the substrate and a bottom of the metal-1 metallization layer, wherein the capacitor includes a plurality of conductive plates that are oriented in a direction that is substantially normal relative to the surface of the substrate, and at least one region of insulating material positioned between the plurality of conductive plates.Type: GrantFiled: August 7, 2012Date of Patent: March 10, 2015Assignee: GLOBALFOUNDRIES Inc.Inventors: Kok Yong Yiang, Patrick R. Justison
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Patent number: 8975680Abstract: A highly integrated gain cell-type semiconductor memory is provided. A first insulator, a read bit line, a second insulator, a third insulator, a first semiconductor film, first conductive layers, and the like are formed. A projecting insulator is formed thereover. Then, second semiconductor films and a second gate insulating film are formed to cover the projecting insulator. After that, a conductive film is formed and subjected to anisotropic etching, so that write word lines are formed on side surfaces of the projecting insulator. A third contact plug for connection to a write bit line is formed over a top of the projecting insulator. With such a structure, the area of the memory cell can be 4 F2 at a minimum.Type: GrantFiled: February 9, 2012Date of Patent: March 10, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yasuhiko Takemura
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Publication number: 20150060971Abstract: According to one embodiment, a nonvolatile semiconductor memory device including a memory cell transistor having a stacked gate structure including a tunnel insulating film, a charge accumulation layer, a memory cell insulating film, and a control gate electrode film are orderly stacked above a semiconductor substrate, and a capacitor in which a first insulating film, a first electrode film, a second insulating film, a second electrode film, a third insulating film, and a third electrode film are orderly stacked above the semiconductor substrate is provided. A material of the second electrode film is same as the charge accumulation layer of the memory cell transistor. The third electrode film includes a material same as the control gate electrode film of the memory cell transistor.Type: ApplicationFiled: December 2, 2013Publication date: March 5, 2015Applicant: Kabushiki Kaisha ToshibaInventor: Yoshihisa FUJII
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Patent number: 8969923Abstract: Apparatus, methods, and systems are provided for a memory layer layout for a three-dimensional memory. The memory layer includes a plurality of memory array blocks; a plurality of memory lines coupled thereto; and a plurality of zia contact areas for coupling the memory layer to other memory layers in a three-dimensional memory. The memory lines extend from the memory array blocks, are formed using a sidewall defined process, and have a half pitch dimension smaller than the nominal minimum feature size capability of a lithography tool used in forming the memory lines. The zia contact areas have a dimension that is approximately four times the half pitch dimension of the memory lines. The memory lines are arranged in a pattern that allows a single memory line to intersect a single zia contact area and to provide area between other memory lines for other zia contact areas. Other aspects are disclosed.Type: GrantFiled: July 17, 2014Date of Patent: March 3, 2015Assignee: SanDisk 3D LLCInventors: Roy E. Scheuerlein, Christopher J. Petti, Yoichiro Tanaka
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Patent number: 8946801Abstract: An improved field effect transistors (FETs) and methods of manufacturing the field effect transistors (FETs) are provided. The method of manufacturing a zero capacitance random access memory cell (ZRAM) includes comprises forming a finFET on a substrate and enhancing a storage capacitance of the finFET. The enhancement can be by either adding a storage capacity to the finFET or altering a portion of the finFET after formation of a fin body of the finFET.Type: GrantFiled: February 8, 2013Date of Patent: February 3, 2015Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Publication number: 20150028407Abstract: A capacitor and method of forming a capacitor are presented. The capacitor includes a substrate having a capacitor region in which the capacitor is disposed. The capacitor includes first, second and third sub-capacitors (C1, C2 and C3). The C1 comprises a metal oxide semiconductor (MOS) capacitor which includes a gate on the substrate. The gate includes a gate electrode over a gate dielectric. A first C1 plate is served by the gate electrode, a second C1 plate is served by the substrate of the capacitor region and a C1 capacitor dielectric is served by the gate dielectric. The C2 includes a back-end-of-line (BEOL) vertical capacitor disposed in ILD layers with metal levels and via levels. A plurality of metal lines are disposed in the metal levels. The metal lines of a metal level are grouped in alternating first and second groups, the first group serves as first C2 plates and second group serves as second.Type: ApplicationFiled: July 23, 2014Publication date: January 29, 2015Inventors: Laiqiang LUO, Xinshu CAI, Danny SHUM, Fan ZHANG, Khee Yong LIM, Juan Boon TAN, Shaoqiang ZHANG
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Patent number: 8933499Abstract: In some embodiments, a circuit element includes a first FET and a first storage capacitor. The first FET includes a gate stack, a first source or drain region, a second source or drain region and a body structure. The gate stack is configured over the body structure. The first source or drain region and the second source or drain region are configured on opposite sides of the gate stack. The first storage capacitor includes an anode and a cathode. The first source or drain region is coupled to the anode of the first storage capacitor non-selectively, and does not have stressor material with a lattice constant different from that of a channel region in the body structure. The second source or drain structure is coupled to the anode of the first storage capacitor selectively, and has the stressor material.Type: GrantFiled: September 23, 2013Date of Patent: January 13, 2015Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventor: Chih-Yang Chang
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Publication number: 20150008497Abstract: A capacitor includes an active layer, a gate insulation layer on the active layer, a gate electrode on the gate insulation layer, an interlayer insulating layer on the gate electrode, and a first electrode on the interlayer insulating layer and connected to the active layer through at least one contact hole.Type: ApplicationFiled: April 10, 2014Publication date: January 8, 2015Applicant: SAMSUNG DISPLAY CO., LTD.Inventors: Guang-Hai JIN, Jae-Beom CHOI, Se-Hun PARK, Jae-Seol CHO
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Patent number: 8928040Abstract: A semiconductor device having a line-type active region and a method for manufacturing the same are disclosed. The semiconductor device includes an active region configured in a successive line type, at least one active gate having a first width and crossing the active region, and an isolation gate having a second width different from the first width and being formed between the active gates. The isolation gate's width and the active gate's width are different from each other to guarantee a large storage node contact region, resulting in increased device operation characteristics (write characteristics).Type: GrantFiled: December 27, 2013Date of Patent: January 6, 2015Assignee: SK Hynix Inc.Inventor: Kyung Do Kim
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Publication number: 20150001604Abstract: A semiconductor device and a method for forming the same are disclosed, which relate to a reservoir capacitor. The semiconductor device includes: an active region defined by forming a device isolation region over a semiconductor substrate of peripheral region; gate electrodes formed over the active region; a plurality of metal lines over the gate electrodes; a plurality of contact slits elongated into the gate electrode at a position between the plurality of metal lines, a plurality of the first capacitors respectively formed over the plurality of metal lines, and a plurality of the second capacitors respectively formed over the plurality of contact slits.Type: ApplicationFiled: March 28, 2014Publication date: January 1, 2015Applicant: SK hynix Inc.Inventor: Jung Sam KIM
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Patent number: 8921977Abstract: A capacitor array includes a plurality of capacitors and a support frame. Each capacitor includes an electrode. The support frame supports the plurality of electrodes and includes a plurality of support structures corresponding to the plurality of electrodes. Each support structure may surround the respective electrode. The support frame may include oxide of a doped oxidizable material.Type: GrantFiled: December 21, 2011Date of Patent: December 30, 2014Assignee: Nan Ya Technology CorporationInventors: Jen Jui Huang, Che Chi Lee, Shih Shu Tsai, Cheng Shun Chen, Shao Ta Hsu, Chao Wen Lay, Chun I Hsieh, Ching Kai Lin
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Patent number: 8921910Abstract: To reduce power consumption of a memory device. To reduce the area of a memory device. To reduce the number of transistors included in a memory device. The memory device includes a comparator comparing a first output signal with a second output signal, a first memory portion including a first oxide semiconductor transistor and a first silicon transistor, a second memory portion including a second oxide semiconductor transistor and a second silicon transistor, and an output potential determiner determining a potential of the first output signal and a potential of the second output signal. One of a source and a drain of the first oxide semiconductor transistor is electrically connected to a gate of the first silicon transistor. One of a source and a drain of the second oxide semiconductor transistor is electrically connected to a gate of the second silicon transistor.Type: GrantFiled: May 16, 2012Date of Patent: December 30, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shuhei Nagatsuka, Yuto Yakubo
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Publication number: 20140367756Abstract: The capacitor of a nonvolatile memory device includes first and second electrodes formed in the capacitor region of a semiconductor substrate to respectively have consecutive concave and convex shape of side surfaces formed along each other and a dielectric layer formed between the first and the second electrodes.Type: ApplicationFiled: September 3, 2014Publication date: December 18, 2014Inventor: Je Il RYU
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Patent number: 8890224Abstract: A semiconductor structure includes a through-substrate-via (TSV) structure disposed in a substrate. A metal-insulator-metal (MIM) capacitor structure is disposed over the substrate. A dual damascene structure disposed over and electrically coupled with the TSV structure, wherein the dual damascene structure includes a via portion and a trench portion A first dielectric layer is disposed around the via portion of the dual damascene structure. A second dielectric layer disposed around the trench portion of the dual damascene, wherein the second dielectric layer is disposed over the MIM capacitor structure.Type: GrantFiled: September 17, 2013Date of Patent: November 18, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun Hua Chang, Sung-Hui Huang, Der-Chyang Yeh
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Patent number: 8890223Abstract: An integrated circuit includes isolation capacitors which include a silicon dioxide dielectric layer and a polymer dielectric layer over the layer of silicon dioxide. The silicon dioxide dielectric layer and the polymer dielectric layer extend across the integrated circuit. Top plates of the isolation capacitors have bond pads for wire bonds or bump bonds. Bottom plates of the isolation capacitors are connected to components of the integrated circuit. Other bond pads are connected to components in the integrated circuit through vias through the silicon dioxide dielectric layer and the polymer dielectric layer.Type: GrantFiled: August 6, 2013Date of Patent: November 18, 2014Assignee: Texas Instruments IncorporatedInventors: Thomas Dyer Bonifield, Byron Williams, Shrinivasan Jaganathan
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Patent number: 8878338Abstract: Capacitor designs for substrates, such as interposers, and methods of manufacture thereof are disclosed. A through via is formed in the interposer, and a capacitor is formed between a lower level metallization layer and a higher level metallization layer. The capacitor may be, for example, a planar capacitor with dual capacitor dielectric layers.Type: GrantFiled: May 31, 2012Date of Patent: November 4, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun Hua Chang, Der-Chyang Yeh, Kuang-Wei Cheng, Yuan-Hung Liu, Shang-Yun Hou, Wen-Chih Chiou, Shin-Puu Jeng
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Patent number: 8872247Abstract: Memory arrays having folded architectures and methods of making the same. Specifically, memory arrays having a portion of the transistors in a row that are reciprocated and shifted with respect to other transistors in the same row. Trenches formed between the rows may form a weave pattern throughout the array, in a direction of the row. Trenches formed between legs of the transistors may also form a weave pattern throughout the array in a direction of the row.Type: GrantFiled: November 4, 2009Date of Patent: October 28, 2014Assignee: Micron Technology, Inc.Inventor: Shigeki Tomishima
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Patent number: 8866233Abstract: An object is to provide a semiconductor device having a novel structure which includes a combination of semiconductor elements with different characteristics and is capable of realizing higher integration. A semiconductor device includes a first transistor, which includes a first channel formation region including a first semiconductor material, and a first gate electrode, and a second transistor, which includes one of a second source electrode and a second drain electrode combined with the first gate electrode, and a second channel formation region including a second semiconductor material and electrically connected to the second source electrode and the second drain electrode.Type: GrantFiled: January 3, 2011Date of Patent: October 21, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8860112Abstract: A method of forming a strap connection structure for connecting an embedded dynamic random access memory (eDRAM) to a transistor comprises forming a buried oxide layer in a substrate, the buried oxide layer defining an SOI layer on a surface of the substrate; forming a deep trench through the SOI layer and the buried oxide layer in the substrate; forming a storage capacitor in a lower portion of the deep trench; conformally doping a sidewall of an upper portion of the deep trench; depositing a metal strap on the conformally doped sidewall and on the storage capacitor; forming at least one fin in the SOI layer, the fin being in communication with the metal strap; forming a spacer over the metal strap and over a juncture of the fin and the metal strap; and depositing a passive word line on the spacer.Type: GrantFiled: October 28, 2013Date of Patent: October 14, 2014Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Effendi Leobandung, Tenko Yamashita, Chun-Chen Yeh
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Patent number: 8860109Abstract: Provided is a capacitorless memory device. The device includes a semiconductor substrate, an insulating layer disposed on the semiconductor substrate, a storage region disposed on a partial region of the insulating layer, a channel region disposed on the storage region to provide a valence band energy offset between the channel region and the storage region, a gate insulating layer and a gate electrode sequentially disposed on the channel region, and source and drain regions connected to the channel region and disposed at both sides of the gate electrode. A storage region having different valence band energy from a channel region is disposed under the channel region unit so that charges trapped in the storage region unit cannot be easily drained. Thus, a charge retention time may be increased to improve data storage capability.Type: GrantFiled: April 30, 2009Date of Patent: October 14, 2014Assignee: Industry-University Cooperation Foundation Hanyang UniversityInventors: Jea-Gun Park, Tae-Hun Shim, Gon-Sub Lee, Seong-Je Kim, Tae-Hyun Kim
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Patent number: 8853761Abstract: A nonvolatile memory (“NVM”) bitcell with one or more active regions capacitively coupled to the floating gate but that are separated from both the source and the drain. The inclusion of capacitors separated from the source and drain allows for improved control over the voltage of the floating gate. This in turn allows CHEI (or IHEI) to be performed with much higher efficiency than in existing bitcells, thereby the need for a charge pump to provide current to the bitcell, ultimately decreasing the total size of the bitcell. The bitcells may be constructed in pairs, further reducing the space requirements of the each bitcell, thereby mitigating the space requirements of the separate capacitor/s. The bitcell may also be operated by CHEI (or IHEI) and separately by BTBT depending upon the voltages applied at the source, drain, and capacitor/s.Type: GrantFiled: January 30, 2012Date of Patent: October 7, 2014Assignee: Synopsys, Inc.Inventor: Andrew E. Horch
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Publication number: 20140293673Abstract: A nonvolatile memory cell structure includes a doping well disposed in a substrate, an antifuse gate disposed on the doping well, a drain disposed in the substrate, an optional select gate disposed on the doping well and an optional shallow trench isolation disposed inside the doping well.Type: ApplicationFiled: February 10, 2014Publication date: October 2, 2014Applicant: eMemory Technology Inc.Inventors: Meng-Yi Wu, Chih-Hao Huang, Yueh-Chia Wen, Chin-Yi Chen, Lun-Chun Chen, Hsin-Ming Chen