With Means To Reduce On Resistance Patents (Class 257/342)
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Patent number: 11715774Abstract: A vertical gallium oxide (Ga2O3) device having a substrate, an n-type Ga2O3 drift layer on the substrate, an, n-type semiconducting channel extending from the n-type Ga2O3 drift layer, the channel being one of fin-shaped or nanowire shaped, an n-type source layer disposed on the channel; the source layer has a higher doping concentration than the channel, a first dielectric layer on the n-type Ga2O3 drift layer and on sidewalls of the n-type semiconducting channel, a conductive gate layer deposited on the first dielectric layer and insulated from the n-type source layer, n-type semiconducting channel as well as n-type Ga2O3 drift layer, a second dielectric layer deposited over the conductive gate layer, covering completely the conductive gate layer on channel sidewalls and an ohmic source contact deposited over the n-type source layer and over at least a part of the second dielectric layer; the source contact being configured not to be in electrical contact with the conductive gate layer.Type: GrantFiled: March 28, 2019Date of Patent: August 1, 2023Assignee: Cornell UniversityInventors: Zongyang Hu, Kazuki Nomoto, Grace Huili Xing, Debdeep Jena, Wenshen Li
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Patent number: 11575032Abstract: A vertical power semiconductor device includes a semiconductor body having opposing first and second main surfaces. At least part of a gate trench structure formed at the first main surface extends along a first lateral direction. Body and source regions directly adjoin the gate trench structure. A drift region is arranged between the body region and second main surface. A body contact structure includes first and second body contact sub-regions spaced at a first lateral distance along the first lateral direction. Each body contact sub-region directly adjoins the gate trench structure and has a larger doping concentration than the body region. In a channel region between the body contact sub-regions, the body contact structure has a second lateral distance to the gate trench structure along a second lateral direction perpendicular to the first lateral direction. The first lateral distance is equal to or less than twice the second lateral distance.Type: GrantFiled: May 10, 2021Date of Patent: February 7, 2023Assignee: Infineon Technologies AGInventors: Frank Dieter Pfirsch, Christian Philipp Sandow, Dorothea Werber
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Patent number: 11348997Abstract: A semiconductor device includes a substrate, an epitaxial layer, an emitter region, and a collector region. The epitaxial layer is disposed over the substrate and has a first conductivity type. The drift region is disposed in the epitaxial layer and has a second conductivity type that is the opposite of the first conductivity type. The emitter region is disposed in the epitaxial layer outside the drift region. The collector region is disposed in the drift region. The semiconductor device also includes a doped region. The doped region is disposed adjacent to the bottom surface of the drift region and has the first conductivity type.Type: GrantFiled: December 17, 2018Date of Patent: May 31, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Ankit Kumar, Chia-Hao Lee
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Patent number: 11211428Abstract: The disclosure relates to integrated circuits including one or more rows of transistors and methods of forming rows of transistors. In an embodiment, an integrated circuit includes a row of bipolar transistors including a first semiconductor layer having a plurality of first conduction regions, a second semiconductor layer having a second conduction region, a common base between the first semiconductor layer and the second semiconductor layer, and a plurality of insulator walls extending in a first direction. The first conduction regions are separated from one another by the insulator walls. The integrated circuit further includes an insulating trench extending in a second direction and in contact with each of the bipolar transistors of the row of bipolar transistors. A conductive layer is coupled to the base, and the conductive layer extends through the insulator walls and extends at least partially into the insulating trench.Type: GrantFiled: April 4, 2019Date of Patent: December 28, 2021Assignee: STMicroelectronics (Rousset) SASInventor: Philippe Boivin
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Patent number: 11201241Abstract: A method of forming a vertical transport field-effect transistor (VFET) is provided. The method includes forming vertical fin channels by etching part way through a substrate. The method further includes forming a bottom source/drain electrode partially into the substrate and beneath the vertical fin channels. A gate dielectric layer is then formed on the vertical fin channels. A gate conductor layer is then formed on the gate dielectric layer. A height of the gate conductor layer is less than a height of the vertical fin channels. The method further includes forming a spacer layer on a top surface of the gate conductor layer. The method also includes forming a top source/drain electrode on a top surface of the vertical fin channels. A gap exists between the top source/drain electrode and the spacer layer.Type: GrantFiled: January 7, 2020Date of Patent: December 14, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Choonghyun Lee, Alexander Reznicek, Xin Miao, Richard Glen Southwick, III
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Patent number: 11164800Abstract: The present disclosure provides a test structure on a wafer. The test structure includes a plurality of isolation regions, an active region, a plurality of gate electrodes, a first metal element and a second metal element. The active region is disposed between the isolation regions. The gate electrodes are respectively disposed over one of the isolation regions and the active region. The first metal element is electrically coupled to one of the gate electrodes, and the second metal element is electrically coupled to the active region.Type: GrantFiled: March 25, 2019Date of Patent: November 2, 2021Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Shih-Hsing Hsu
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Patent number: 11011615Abstract: Various methods and devices that involve body contacted transistors are disclosed. An exemplary method comprises forming a gate on a planar surface of a semiconductor wafer. The gate covers a channel of a first conductivity type that is opposite to a second conductivity type. The method also comprises implanting a body dose of dopants on a source side of the gate using the gate to mask the body dose of dopants. The body dose of dopants spreads underneath the channel to form a deep well. The body dose of dopants has the first conductivity type. The method also comprises implanting, subsequent to implanting the body dose of dopants, a source dose of dopants on the source side of the gate to form a source. The method also comprises forming a source contact that is in contact with the deep well at the planar surface of the semiconductor wafer.Type: GrantFiled: August 9, 2019Date of Patent: May 18, 2021Assignee: Silanna Asia Pte LtdInventor: George Imthurn
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Patent number: 11005474Abstract: A system to regulate power from a first power supply to a load coupled to the first power supply, wherein a power transistor is coupled between the load and ground.Type: GrantFiled: July 15, 2020Date of Patent: May 11, 2021Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Xun Gong, Ingolf Frank
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Patent number: 10998418Abstract: Power semiconductor devices include multi-layer inter-metal dielectric patterns that include at least one reflowed dielectric material pattern and at least one non-reflowable dielectric material pattern. In other embodiments, power semiconductor devices include reflowed inter-metal dielectric patterns that are formed using sacrificial structures such as dams to limit the lateral spread of the reflowable dielectric material of the inter-metal dielectric pattern during the reflow process. The inter-metal dielectric patterns may have improved shapes and performance.Type: GrantFiled: May 16, 2019Date of Patent: May 4, 2021Assignee: CREE, INC.Inventors: Edward R. Van Brunt, Daniel J. Lichtenwalner, Shadi Sabri
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Patent number: 10923563Abstract: A power device is disclosed. The power device comprises: a semiconductor substrate; a first doped region on the semiconductor substrate; a plurality of second doped regions located in a first region of the first doped region; a plurality of third doped regions located in a second region of the first doped region. The plurality of second doped regions are separated with each other at a first predetermined spacing. A first charge compensation structure is formed by the plurality of second doped regions and the first doped region, and the first charge compensation structure and the semiconductor substrate are located on a current channel. The plurality of third doped regions are separated with each other at a second predetermined spacing. A second charge compensation structure is formed by the plurality of third doped regions and the first doped region. The second charge compensation structure is configured to disperse continuous surface electric field of the power device.Type: GrantFiled: November 30, 2018Date of Patent: February 16, 2021Assignee: HANGZHOU SILAN MICROELECTRONICS CO., LTD.Inventor: Shaohua Zhang
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Patent number: 10847617Abstract: A semiconductor device is provided, including: a semiconductor substrate; a first-conductivity-type drift region provided in the semiconductor substrate; a gate trench portion extending in a predetermined extending direction in a plane of the upper surface of the semiconductor substrate; a mesa portion provided in contact with the gate trench portion in an array direction orthogonal to the extending direction; a first-conductivity-type accumulation region provided above the drift region and in contact with the gate trench portion, and having a higher doping concentration than the drift region; a second-conductivity-type base region provided above the accumulation region and in contact with the gate trench portion; and a second-conductivity-type floating region provided below the accumulation region and in contact with the gate trench portion, and provided in a part of the mesa portion in the array direction.Type: GrantFiled: December 3, 2018Date of Patent: November 24, 2020Assignee: FUJI ELECTRIC CO., LTD.Inventor: Tatsuya Naito
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Patent number: 10720492Abstract: The width of the p type guard ring is set to match the interval between the adjacent p type guard rings, and the width of the p type guard ring is made larger as the interval between the p type guard rings becomes larger. The width of the frame portion is basically equal to the width of the p type deep layer so that the interval between the frame portions is equal to the interval between the p type deep layers. This makes it possible to reduce the difference in formation areas of the trenches per unit area in the cell portion, the connection portion and the guard ring portion. Therefore, when the p type layer is formed, the difference in the amount of the p type layer embedding into the trenches per unit area also decreases and the thickness of the p type layer is equalized.Type: GrantFiled: June 29, 2017Date of Patent: July 21, 2020Assignees: DENSO CORPORATION, TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Yuichi Takeuchi, Shuhei Mitani, Katsumi Suzuki, Yusuke Yamashita
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Patent number: 10686055Abstract: The present disclosure provides a method for forming a semiconductor device, including: providing a semiconductor substrate; forming a well region and a drift region in the semiconductor substrate; and forming one or more counter-doped regions in the drift region, the one or more counter-doped regions being aligned along a direction vertical to the semiconductor substrate to divide the drift region into a plurality of parts. The semiconductor fabrication method also includes: forming a gate structure on the semiconductor substrate, the gate structure covering a portion of the well region and a portion of the drift region; and forming a source electrode in the well region on one side of the gate structure and a drain electrode in the drift region on another side of the gate structure.Type: GrantFiled: July 18, 2016Date of Patent: June 16, 2020Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) CorporationInventor: Lei Fang
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Patent number: 10600903Abstract: A semiconductor device includes a vertical FET device and a Schottky bypass diode. The vertical FET device includes a gate contact, a source contact, and a drain contact. The gate contact and the source contact are separated from the drain contact by at least a drift layer. The Schottky bypass diode is coupled between the source contact and the drain contact and monolithically integrated adjacent to the vertical FET device such that a voltage placed between the source contact and the drain contact is distributed throughout the drift layer by the Schottky bypass diode in such a way that a voltage across each one of a plurality of P-N junctions formed between the source contact and the drain contact within the vertical FET device is prevented from exceeding a barrier voltage of the respective P-N junction.Type: GrantFiled: September 20, 2013Date of Patent: March 24, 2020Assignee: Cree, Inc.Inventors: Edward Robert Van Brunt, Vipindas Pala, Lin Cheng
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Patent number: 10593799Abstract: A semiconductor component includes a field-effect transistor arrangement having a drift zone and body region between the drift zone and a first surface of a semiconductor body. Trench structures of a first type extend from the first surface into the semiconductor body and have a maximum lateral dimension at the first surface which is less than a depth of first and second ones of the trench structures. A net doping concentration at a reference depth at a first location in the drift zone is at least 10% greater than at a second location in the drift zone at the reference depth, which is located between the body region and a bottom of the first trench structure. The first location is at the same first lateral distance from the first and second trench structures. The second location is at the same second lateral distance from the first and second trench structures.Type: GrantFiled: August 10, 2018Date of Patent: March 17, 2020Assignee: Infineon Technologies AGInventors: Markus Zundel, Karl-Heinz Bach, Peter Brandl, Andrew Christopher Graeme Wood
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Patent number: 10580862Abstract: A high-voltage semiconductor device has a main high-voltage switch device and a current-sense device for mirroring the current through the main high-voltage switch device. The main high-voltage switch device has a plurality of switch cells arranged to form a first array on a semiconductor substrate. Each switch cell has a first cell width. The current-sense device has a plurality of sense cells arranged to form a second array on the semiconductor substrate. Each sense cell has a second cell width larger than the first cell width. The switch cells and the sense cells share a common gate electrode and a common drain electrode.Type: GrantFiled: May 3, 2018Date of Patent: March 3, 2020Assignee: LEADTREND TECHNOLOGY CORPORATIONInventors: Wan Wen Tseng, Jen-Hao Yeh, Yi-Rong Tu, Chin-Wen Hsiung
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Patent number: 10418450Abstract: A fin-shaped field effect transistor (finFET) device comprising includes a substrate, an insulating layer displaced over the substrate, and a fin. The device also includes a gate formed over the fin, the gate including: a gate stack; and a high-k dielectric on opposing side of the gate stack. The device further includes metallic source and drain regions formed over the fin and on opposing sides of the gate.Type: GrantFiled: April 22, 2016Date of Patent: September 17, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Emre Alptekin, Robert R. Robison, Reinaldo A Vega
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Patent number: 10388783Abstract: Apparatus and associate methods relate to a high-voltage MOSFET bounded by two trenches, each having dielectric sidewalls and a dielectric bottom isolating a top field plate and a bottom field plate. The top field plate is electrically connected to a biasing circuit net, and the bottom field plate is biased via a capacitive coupling to the top field plate. The upper field plate and lower field plate are configured to deplete the majority carriers in a drain region of the MOSFET bounded by the two trenches so as to equalize two local maxima of an electric field induced by a drain/body bias, the two local maxima located proximate a drain/body metallurgical junction and proximate a trench bottom. The two local maxima of the electric field are equalized by controlling a depth location of an intervening dielectric between the upper field plate and the lower field plate.Type: GrantFiled: February 17, 2016Date of Patent: August 20, 2019Assignee: Polar Semiconductor, LLCInventor: Don Rankila
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Patent number: 10269897Abstract: A power metal-oxide-semiconductor field-effect transistor (MOSFET) device includes a first metal layer, a substrate, an epitaxy layer, a plurality of first trench wells, a plurality of second trench wells, a plurality of body structure layers, a plurality of polysilicon layers, and a second metal layer. A part of a depletion region is formed between each first trench well and the epitaxy layer and between a body structure layer corresponding to the each first trench well and the epitaxy layer, and a rest part of the depletion region is formed between a second trench well corresponding to the each first trench well and the epitaxy layer. The plurality of second trench wells increase a breakdown voltage of the power MOSFET device and reduce a conduction resistor of the power MOSFET device.Type: GrantFiled: January 11, 2018Date of Patent: April 23, 2019Assignee: Leadtrend Technology Corp.Inventors: Chih-Wen Hsiung, Jen-Hao Yeh, Yi-Rong Tu, Wan-Wen Tseng
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Patent number: 10211284Abstract: A silicon carbide film has first and second main surfaces. The second main surface has an element formation surface and a termination surface. The silicon carbide film has a first range that constitutes a first main surface and an intermediate surface opposite to the first main surface, and a second range that is provided on the intermediate surface and constitutes the element formation surface. The first range includes: a first breakdown voltage holding layer, and a guard ring region partially provided at the intermediate surface in the termination portion. The second range has a second breakdown voltage holding layer. The second range has one of a structure only having the second breakdown voltage holding layer in the termination portion and a structure disposed only in the element portion of the element portion and the termination portion.Type: GrantFiled: November 27, 2013Date of Patent: February 19, 2019Assignee: Sumitomo Electric Industries, Ltd.Inventors: Takeyoshi Masuda, Keiji Wada
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Patent number: 10068927Abstract: A semiconductor device includes a MEMS device, a first transistor that supplies a first voltage to a first electrode of the MEMS device, a second transistor that supplies a second voltage to the first electrode of the MEMS device, a third transistor that supplies a first video signal to a gate of the first transistor, a fourth transistor that supplies the first voltage to a second electrode of the MEMS device, a fifth transistor that supplies the second voltage to the second electrode of the MEMS device, and a sixth transistor that supplies a second video signal to a gate of the fourth transistor. A gate of the second transistor is connected to the gate of the fourth transistor. A gate of the fifth transistor is connected to the gate of the first transistor.Type: GrantFiled: October 19, 2015Date of Patent: September 4, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Atsushi Umezaki
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Patent number: 10038059Abstract: An improvement is achieved in the performance of a semiconductor device. The semiconductor device includes a coupling transistor made of a p-channel MOSFET and formed in an n?-type semiconductor region over a base made of a p-type semiconductor. The coupling transistor has a resurf layer as a p-type semiconductor region and couples a lower-voltage circuit region to a higher-voltage circuit region to which a power supply potential higher than the power supply potential supplied to the lower-voltage circuit region is supplied. The semiconductor device has a p-type semiconductor region formed in the portion of the n?-type semiconductor region which surrounds the coupling transistor in plan view.Type: GrantFiled: July 7, 2016Date of Patent: July 31, 2018Assignee: Renesas Electronics CorporationInventors: Yoshinori Kaya, Yasushi Nakahara
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Patent number: 10008562Abstract: A first parallel pn layer in which first n-type regions and first p-type regions are disposed in a plan view layout of stripes in an element active portion. A second parallel pn layer has a plan view layout of stripes oriented in the same direction as that of the stripes of the first parallel pn layer in a breakdown voltage structure portion. Corner portions of the first parallel pn layer has a plan view shape where stepped regions formed by shortening the length of the first n-type and p-type regions in steps are disposed in a stepwise arrangement. The stepped regions continue with a second parallel pn layer via an intermediate region lower in average impurity concentration than the first parallel pn layer.Type: GrantFiled: January 15, 2018Date of Patent: June 26, 2018Assignee: FUJI ELECTRIC CO., LTD.Inventors: Yasushi Niimura, Toshiaki Sakata, Shunji Takenoiri
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Patent number: 9876004Abstract: A semiconductor component including a short-circuit structure. One embodiment provides a semiconductor component having a semiconductor body composed of doped semiconductor material. The semiconductor body includes a first zone of a first conduction type and a second zone of a second conduction type, complementary to the first conduction type, the second zone adjoining the first zone. The first zone and the second zone are coupled to an electrically highly conductive layer. A connection zone of the second conduction type is arranged between the second zone and the electrically highly conductive layer.Type: GrantFiled: February 5, 2016Date of Patent: January 23, 2018Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Uwe Kellner-Werdehausen, Reiner Barthelmess
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Patent number: 9812338Abstract: Embodiments of a multi-layer environmental barrier for a semiconductor device and methods of manufacturing the same are disclosed. In one embodiment, a semiconductor device is formed on a semiconductor die. The semiconductor die includes a semiconductor body and a passivation structure on the semiconductor body. A multi-level environmental barrier is provided on the passivation structure. The multi-layer environmental barrier is a low-defect multi-layer dielectric film that hermetically seals the semiconductor device from the environment. In one embodiment, the multi-layer environmental barrier has a defect density of less than 10 defects per square centimeter (cm2). By having a low defect density, the multi-layer environmental barrier serves as a robust barrier to the environment.Type: GrantFiled: March 14, 2013Date of Patent: November 7, 2017Assignee: Cree, Inc.Inventors: Zoltan Ring, Helmut Hagleitner, Daniel Namishia
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Patent number: 9767732Abstract: A display device includes dummy pixels adjacent to active pixels, and a controller to control pixel driving circuits in the active pixels and dummy driving circuits in the dummy pixels. The dummy driving circuit includes a pumping capacitor, and first and second transistors to connect an initialization voltage terminal to a dummy anode terminal. The first transistor includes a control electrode connected to a first input signal terminal, a source terminal connected to the dummy anode terminal, a drain terminal connected to a source terminal via a first node. The pumping capacitor connects the first node and a first power source voltage terminal. The second transistor includes a control electrode connected to a second input signal terminal, a source terminal connected to the drain terminal of the first transistor, and a drain terminal connected to a second power source voltage terminal.Type: GrantFiled: December 16, 2014Date of Patent: September 19, 2017Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Kyong Tae Park, Mi Jin Yoon, Yu Hyun Cho
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Patent number: 9722002Abstract: An organic light-emitting diode (OLED) display is disclosed. In one aspect, the OLED display includes a substrate including a pixel region including a plurality of pixels. A plurality of lighting test transistors is formed in a peripheral region surrounding the pixel region and electrically connected to the pixels, and the lighting test transistors are configured to test lighting of the pixels. Each of the lighting test transistors includes a first active layer pattern formed over the substrate, a first gate electrode formed over the first active layer pattern, and a conductive pattern formed over the first gate electrodes. The conductive pattern is electrically connected to the first gate electrode, the first gate electrodes are spaced apart from each other and have substantially the same shape, and the conductive patterns are integrally formed.Type: GrantFiled: September 22, 2015Date of Patent: August 1, 2017Assignee: Samsung Display Co., Ltd.Inventors: Kwang-Min Kim, Byoung-Sun Kim, Hyun-Ae Park, Hye-Jin Shin
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Patent number: 9711357Abstract: A semiconductor device is manufactured in a semiconductor body by forming an initial mask on a process surface of a semiconductor layer, openings in the mask exposing a part of the semiconductor layer in alignment structure and super-junction structure areas. A recess structure is formed in the semiconductor layer at portions of the process surface that are exposed by the openings, the recess structure in the alignment structure area constituting an initial alignment structure. Dopants are introduced into the semiconductor layer through portions of the process surface that are exposed by the openings of the initial mask. The dopants introduced in the super-junction area constitute part of a super-junction structure. A thickness of the semiconductor layer is increased by growing an epitaxial layer. The initial alignment structure is imaged into the process surface. Dopants are introduced into the semiconductor layer by using a mask aligned to the initial alignment structure.Type: GrantFiled: March 21, 2016Date of Patent: July 18, 2017Assignee: Infineon Technologies Austria AGInventors: Hans Weber, Andreas Moser, Johannes Baumgartl, Gabor Mezoesi
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Patent number: 9698256Abstract: The present disclosure relates to an integrated circuit with a termination region, and an associated method of formation. In some embodiments, the integrated circuit comprises a cell region and a termination region. The termination region is disposed at an outer periphery of the cell region. The cell region comprises an array of device cells. The termination region comprises a plurality of termination rings encompassing the cell region. The plurality of termination rings have different depths.Type: GrantFiled: September 24, 2014Date of Patent: July 4, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jheng-Sheng You, Che-Yi Lin, Shen-Ping Wang, Lieh-Chuan Chen, Po-Tao Chu
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Patent number: 9685443Abstract: An integrated circuit includes an active device formed in a semiconductor layer of a first conductivity type, a first guard ring of the first conductivity type formed in the semiconductor layer surrounding at least part of the active device; a second guard ring of the second conductivity type formed in the semiconductor layer surrounding the first guard ring and the active device and including comprising alternating first well regions of the first conductivity type and the second well regions of the second conductivity type, the first and second well regions being electrically shorted together and electrically coupled to a ground potential or floating; and a third guard ring of the first conductivity type formed in the semiconductor layer surrounding the second guard ring. The first and third guard rings do not receive direct electrical connection.Type: GrantFiled: May 24, 2016Date of Patent: June 20, 2017Assignee: Alpha and Omega Semiconductor IncorporatedInventor: Shekar Mallikarjunaswamy
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Patent number: 9673103Abstract: First and second transistors with different electrical characteristics are supported by a substrate having a first-type dopant. The first transistor includes a well region within the substrate having the first-type dopant, a first body region within the well region having a second-type dopant and a first source region within the first body region and laterally offset from the well region by a first channel. The second transistor includes a second body region within the semiconductor substrate layer having the second-type dopant and a second source region within the second body region and laterally offset from material of the substrate by a second channel having a length greater than the length of the first channel. A gate region extends over portions of the first and second body regions for the first and second channels, respectively.Type: GrantFiled: June 30, 2015Date of Patent: June 6, 2017Assignee: STMICROELECTRONICS, INC.Inventors: John C. Pritiskutch, Richard Hildenbrandt
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Patent number: 9660059Abstract: In a method for fabricating a field-effect transistor (FET) structure, forming a fin on a semiconductor substrate. The method further includes forming a gate on a portion of the fin and the semiconductor substrate. The method further includes epitaxially growing a semiconductor material on the fin. The method further includes depositing oxide covering the fin and the epitaxially grown semiconductor material. The method further includes recessing the deposited oxide and the epitaxially grown semiconductor material to expose a top portion of the fin. The method further includes removing the fin. In another embodiment, the method further includes epitaxially growing another fin in a respective trench formed by removing the first set of fins.Type: GrantFiled: December 12, 2014Date of Patent: May 23, 2017Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek, Dominic J. Schepis
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Patent number: 9627517Abstract: A bipolar semiconductor switch having a semiconductor body is provided. The semiconductor body includes a first p-type semiconductor region, a second p-type semiconductor region, and a first n-type semiconductor region forming a first pn-junction with the first p-type semiconductor region and a second pn-junction with the second p-type semiconductor region. On a shortest path through the first n-type semiconductor region between the first pn-junction and the second pn-junction a concentration of charge recombination centers and a concentration of n-dopants vary. The concentration of the charge recombination centers has a maximum at a point along the shortest path where the concentration of n-dopants is at least close to a maximum dopant concentration. Further, a manufacturing method for the bipolar semiconductor switch is provided.Type: GrantFiled: February 7, 2013Date of Patent: April 18, 2017Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide
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Semiconductor device with field electrode structures, gate structures and auxiliary diode structures
Patent number: 9543386Abstract: A semiconductor device includes field electrode structures extending in a direction vertical to a first surface in a semiconductor body. Cell mesas are formed from portions of the semiconductor body between the field electrode structures and include body zones that form first pn junctions with a drift zone. Gate structures between the field electrode structures control a current flow through the body zones. Auxiliary diode structures with a forward voltage lower than the first pn junctions are electrically connected in parallel with the first pn junctions, wherein semiconducting portions of the auxiliary diode structures are formed in the cell mesas.Type: GrantFiled: September 9, 2015Date of Patent: January 10, 2017Assignee: Infineon Technologies Austria AGInventors: Ralf Siemieniec, Oliver Blank, Franz Hirler, Martin Henning Vielemeyer -
Patent number: 9502498Abstract: A power semiconductor device may include a first conductivity type semiconductor substrate, a super-junction portion disposed on the first conductivity type semiconductor substrate and including a first conductivity type pillar and a second conductivity type pillar arranged in an alternating manner, and a three-dimensional (3D) gate portion disposed on the first conductivity type pillar. The 3D gate portion is disposed on the first conductivity type pillar to reduce the widths of the first and second conductivity type pillars, thereby effectively reducing a device size.Type: GrantFiled: February 9, 2015Date of Patent: November 22, 2016Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Kyu Hyun Mo, Dong Soo Seo, Chang Su Jang, Jae Hoon Park, In Hyuk Song
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Patent number: 9431428Abstract: A display device capable of operating at high speed and with low power consumption is provided. A miniaturized display device occupying a small area is also provided. The display device includes a support; a display portion which includes a pixel; a light-blocking unit which is in the support and includes a light-blocking layer having a first opening overlapping with at least part of the pixel, and a movable light-blocking layer blocking light passing through the first opening; a transistor which is electrically connected to the light-blocking unit and includes an oxide semiconductor film; and a capacitor electrically connected to the transistor.Type: GrantFiled: February 19, 2015Date of Patent: August 30, 2016Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventor: Shunpei Yamazaki
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Patent number: 9431491Abstract: A semiconductor device including an active cell region formed over the surface of a silicon substrate and including a vertical MOSFET, a drain electrode formed over the surface of the silicon substrate and leading out the drain of the vertical MOSFET from the back surface of the silicon substrate, an external drain terminal formed over the drain electrode, and a source electrode formed over the active cell region so as to be opposed to the drain electrode at least along three sides at the periphery of the external drain terminal over the active cell region and connected to the source of the vertical MOSFET.Type: GrantFiled: May 20, 2014Date of Patent: August 30, 2016Assignee: Renesas Electronics CorporationInventors: Takashi Aoki, Takahiro Korenari
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Patent number: 9368587Abstract: An accumulation-mode field effect transistor including a plurality of gates. The accumulation-mode field effect transistor including a semiconductor region including a channel region adjacent to but insulated from each of the plurality of gates.Type: GrantFiled: May 31, 2014Date of Patent: June 14, 2016Assignee: Fairchild Semiconductor CorporationInventors: Christopher Boguslaw Kocon, Praveen Muraleedharan Shenoy
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Patent number: 9349847Abstract: A semiconductor device of this invention (an IGBT with a built-in diode) includes: an n?-type drift layer 1; a p-type channel region 2 that is arranged in contact with the surface side of this n?-type drift layer 1; a gate electrode 5 that is provided in a trench T provided so as to penetrate this p-type channel region 2 and reach to the n?-type drift layer 1 through a gate insulating film 3; an n-type source region 4 that is provided so as to contact the trench T on the surface side of the p-type channel region 2; a high-concentration n-type region 6 that is arranged in contact with the back side of the n?-type drift layer 1; and a high-concentration p-type region 7 that is arranged in contact with the back side of this high-concentration n-type region 6; in which a junction of the high-concentration n-type region 6 and the high-concentration p-type region 7 is a tunnel junction. According to this semiconductor device, it is possible to form the IGBT and the diode on a single chip.Type: GrantFiled: December 15, 2011Date of Patent: May 24, 2016Assignee: Hitachi, Ltd.Inventors: Takayuki Hashimoto, Mutsuhiro Mori
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Patent number: 9324782Abstract: A semiconductor layer, a well region, and a source region form a unit cell. The unit cell is defined into a certain shape in plan view at a main surface of the semiconductor layer, and a plurality of the unit cells is coupled in a chain manner to form a unit chain structure with a constriction. The certain shape of the unit cell is defined by an outer edge of a virtual region of the semiconductor layer defined so as to include the source region and the well region inside and by respective outer edges of the source region and the well region at a joint with a different unit cell. An active region is composed of a plurality of the unit chain structures. The unit chain structures are arranged so as to avoid generation of a gap between the unit cells of adjacent ones of the unit chain structures.Type: GrantFiled: November 9, 2012Date of Patent: April 26, 2016Assignee: Mitsubishi Electric CorporationInventors: Naruhisa Miura, Shiro Hino, Kenichi Ohtsuka
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Patent number: 9318597Abstract: A semiconductor device includes a vertical field-effect-transistor (FET) and a bypass diode. The vertical FET device includes a substrate, a drift layer formed over the substrate, a gate contact and a plurality of source contacts located on a first surface of the drift layer opposite the substrate, a drain contact located on a surface of the substrate opposite the drift layer, and a plurality of junction implants, each of the plurality of junction implants laterally separated from one another on the surface of the drift layer opposite the substrate and extending downward toward the substrate. Each of the one or more bypass diodes are formed by placing a Schottky metal contact on the first surface of the drift layer, such that each Schottky metal contact runs between two of the plurality of junction implants.Type: GrantFiled: September 20, 2013Date of Patent: April 19, 2016Assignee: Cree, Inc.Inventors: Vipindas Pala, Edward Robert Van Brunt, Lin Cheng, John Williams Palmour
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Patent number: 9299774Abstract: A semiconductor device has a substrate and a gate formed over the substrate. An LDD region is formed in the substrate adjacent to the gate. A superjunction is formed in the LDD region while a portion of the LDD region remains between the superjunction and gate. A mask is formed over the substrate. A first region is doped with a first type of dopant using the mask. A stripe is doped with a second type of dopant using a portion of the mask. A drain contact region is formed in the substrate. The first region extends to the drain contact region. The first region and stripe are formed using chain implants. A source field plate and drain field plate are formed over the substrate. A trench is formed in the substrate. A source contact region is formed in the trench.Type: GrantFiled: July 16, 2014Date of Patent: March 29, 2016Assignee: Great Wall Semiconductor CorporationInventors: Patrick M. Shea, Samuel J. Anderson, David N. Okada
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Patent number: 9214458Abstract: In a semiconductor device having a built-in Schottky barrier diode as a reflux diode, a maximum unipolar current is increased in a reflux state and a leakage current is reduced in an OFF state. A Schottky electrode is provided in at least a part of a surface between adjacent well regions of a second conductivity type disposed on a surface layer side of a drift layer of a first conductivity type, and an impurity concentration of a first conductivity type in a first region provided in a lower part of the Schottky electrode and provided between the adjacent well regions is set to be higher than a first impurity concentration of a first conductivity type in the drift layer and to be lower than a second impurity concentration of a second conductivity type in the well region.Type: GrantFiled: April 11, 2013Date of Patent: December 15, 2015Assignee: Mitsubishi Electric CorporationInventors: Shiro Hino, Naruhisa Miura, Masayuki Imaizumi
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Patent number: 9190468Abstract: A semiconductor device that can improve reliability while suppressing increase of a conduction loss or a switching loss. In the semiconductor device, when a two-dimensional shape on a main surface of the semiconductor substrate is an unit cell, the shape being a repeating unit of a plurality of well regions periodically disposed in a surface layer of a drift layer, one unit cell and another unit cell adjacent in an x-axis direction are disposed misaligned in a y-axis direction, and one unit cell and another unit cell adjacent in the y-axis direction are disposed misaligned in the x-axis direction.Type: GrantFiled: September 24, 2012Date of Patent: November 17, 2015Assignee: Mitsubishi Electric CorporationInventors: Shiro Hino, Naruhisa Miura, Akihiko Furukawa, Tomokatsu Watanabe, Kenichi Ohtsuka, Hiroshi Watanabe, Yuji Ebiike
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Patent number: 9184258Abstract: A semiconductor device according to one embodiment includes an n-type first GaN-based semiconductor layer, a p-type second GaN-based semiconductor layer on the first GaN-based semiconductor layer. The second GaN-based semiconductor layer includes a low impurity concentration region and a high impurity concentration region. An n-type third GaN-based semiconductor layer is provided on the second GaN-based semiconductor layer. The device includes a gate electrode being located adjacent to the third GaN-based semiconductor layer, the low impurity concentration region, and the first GaN-based semiconductor layer intervening a gate insulating film. The device includes a first electrode on the third GaN-based semiconductor layer, a second electrode on the high impurity concentration region, and a third electrode on the opposite side of the first GaN-based semiconductor layer from the second GaN-based semiconductor layer.Type: GrantFiled: March 17, 2014Date of Patent: November 10, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Akira Yoshioka, Toru Sugiyama, Yasunobu Saito, Kunio Tsuda
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Patent number: 9159795Abstract: A high side DMOS provides high breakdown voltage with small termination area. The high side DMOS has three parts which may comprise a stair-field plate in the termination part of the poly gate.Type: GrantFiled: June 28, 2013Date of Patent: October 13, 2015Assignee: Monolithic Power Systems, Inc.Inventors: Ji-Hyoung Yoo, Lei Zhang, Daping Fu, Yanjie Lian
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Patent number: 9123766Abstract: In accordance with an embodiment of the present invention a transistor is disclosed. The transistor comprises a collector, a base and an emitter, wherein a first end width of the base is larger than a middle width of the base, wherein a first end width of the collector is larger than a middle width of the collector, or wherein a first end width of the emitter is larger than a middle width of the emitter.Type: GrantFiled: September 26, 2013Date of Patent: September 1, 2015Assignee: Infineon Technologies AGInventor: Klaus Diefenbeck
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Patent number: 9064925Abstract: A power semiconductor device is disclosed with layers of different conductivity types between an emitter electrode on an emitter side and a collector electrode on a collector side. The device can include a drift layer, a first base layer in direct electrical contact to the emitter electrode, a first source region embedded into the first base layer which contacts the emitter electrode and has a higher doping concentration than the drift layer, a first gate electrode in a same plane and lateral to the first base layer, a second base layer in the same plane and lateral to the first base layer, a second gate electrode on top of the emitter side, and a second source region electrically insulated from the second base layer, the second source region and the drift layer by a second insulating layer.Type: GrantFiled: September 24, 2012Date of Patent: June 23, 2015Assignee: ABB TECHNOLOGY AGInventors: Munaf Rahimo, Arnost Kopta, Christoph Von Arx, Maxi Andenna
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Patent number: 9059283Abstract: A semiconductor structure is provided. The semiconductor structure includes a first doped region, a second doped region, a field oxide layer, a gate structure, and a metal layer. The first doped region has a first type conductivity. The second doped region is formed in the first doped region and has a second type conductivity opposite to the first type conductivity. The field oxide layer is located on the first doped region. The gate structure includes a first gate portion and a second gate portion which are separated from each other, wherein the second gate portion is located on the field oxide layer and electrically connected to a source end. The metal layer is located on the gate structure and includes a first metal portion and a second metal portion which are separated from each other.Type: GrantFiled: December 1, 2014Date of Patent: June 16, 2015Assignee: MACRONIX INTERNATIONAL CO., LTD.Inventors: Ching-Lin Chan, Cheng-Chi Lin
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Patent number: 9048308Abstract: A rectifier building block has four electrodes: source, drain, gate and probe. The main current flows between the source and drain electrodes. The gate voltage controls the conductivity of a narrow channel under a MOS gate and can switch the RBB between OFF and ON states. Used in pairs, the RBB can be configured as a three terminal half-bridge rectifier which exhibits better than ideal diode performance, similar to synchronous rectifiers but without the need for control circuits. N-type and P-type pairs can be configured as a full bridge rectifier. Other combinations are possible to create a variety of devices.Type: GrantFiled: March 14, 2013Date of Patent: June 2, 2015Assignee: STMICROELECTRONICS INTERNATIONAL N.V.Inventors: Alexei Ankoudinov, Vladimir Rodov