With Means (e.g., A Buried Channel Stop Layer) To Prevent Leakage Current Along The Interface Of The Semiconductor Layer And The Insulating Substrate Patents (Class 257/349)
  • Patent number: 11978810
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming a varactor comprising a reduced surface field (RESURF) region. The method includes forming a drift region having a first doping type within a substrate. A RESURF region having a second doping type is formed within the substrate such that the RESURF region is below the drift region. A gate structure is formed on the substrate. A pair of contact regions is formed within the substrate on opposing sides of the gate structure. The contact regions respectively abut the drift region and have the first doping type, and wherein the first doping type is opposite the second doping type.
    Type: Grant
    Filed: May 19, 2021
    Date of Patent: May 7, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Liang-Yu Su, Chih-Wen Yao, Hsiao-Chin Tuan, Ming-Ta Lei
  • Patent number: 11955475
    Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.
    Type: Grant
    Filed: December 30, 2022
    Date of Patent: April 9, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woocheol Shin, Myunggil Kang, Minyi Kim, Sanghoon Lee
  • Patent number: 11948998
    Abstract: A method includes forming a semiconductor substrate having an oxide layer embedded therein, forming a multi-layer (ML) stack including alternating channel layers and non-channel layers over the semiconductor substrate, forming a dummy gate stack over the ML, forming an S/D recess in the ML to expose the oxide layer, forming an epitaxial S/D feature in the S/D recess, removing the non-channel layers from the ML to form openings between the channel layers, where the openings are formed adjacent to the epitaxial S/D feature, and forming a high-k metal gate stack (HKMG) in the openings between the channel layers and in place of the dummy gate stack.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Xusheng Wu, Chang-Miao Liu, Huiling Shang
  • Patent number: 11908935
    Abstract: The present invention provides a single-gate field effect transistor device and a method for modulating the drive current thereof. The field effect transistor comprises an active layer, a source region and a drain region formed at two sides of the active layer, and a channel region located between the source region and the drain region. The field effect transistor device is configured as follows: when the transistor is turned off, a second channel of depletion-mode spontaneously forms in the channel region, and the second channel does not connect the source region and the drain region; when the transistor is turned on, the second channel and a first channel of the same polarity as the second channel are formed in the channel region; at least one of the first channel and the second channel injects carriers into the other channel so that current conduction occurs between the source and the drain and the carriers of the second channel contribute to the on-state current of the transistor.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: February 20, 2024
    Assignee: Soochow University
    Inventors: Mingxiang Wang, Jinfeng Zhao, Dongli Zhang, Huaisheng Wang
  • Patent number: 11876011
    Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; first metal layers interconnecting at least the first transistors; a second metal layer overlaying the first metal layers; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where at least one of the second transistors includes a raised source or raised drain transistor structure, where the second level is directly bonded to the first level, and where the bonded includes direct oxide-to-oxide bonds.
    Type: Grant
    Filed: June 27, 2023
    Date of Patent: January 16, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11860489
    Abstract: The shorting bar includes a test signal wiring layer, an insulating layer, a signal lead layer, a protective layer and a bonding lead layer that are sequentially stacked. The test signal wiring layer is arranged with test signal lines, and the signal lead layer is arranged with signal leads. The test signal lines are made of a transparent conductive material, and a coverage region of the insulating layer and a coverage region of the protective layer are staggered from coverage regions of the test signal lines; or, the signal leads are made of the transparent conductive material, the coverage region of the protective layer is staggered from coverage regions of the signal leads; or, the protective layer is arranged with a plurality of first through holes, and the first through holes correspond to the signal leads in a one-to-one correspondence.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: January 2, 2024
    Assignee: HKC Corporation Limited
    Inventors: Shishuai Huang, Wei Li
  • Patent number: 11804550
    Abstract: A method for fabricating a field-effect transistor includes the following steps. A gate structure layer in a line shape including a first region and a second region abutting to the first region is formed on a silicon layer. A first implanting process is performed to implant first-type dopants at least into a second portion of the second region of the gate structure layer. A second implanting region is performed to implant second-type dopants into the silicon layer to form a source region and a second region corresponding to the first region of the gate structure layer. The gate structure layer has a conductive-type junction at an interface between the first and second portions of the second region. A width of the silicon layer under the second region of the gate structure layer is smaller than a width of the gate structure layer.
    Type: Grant
    Filed: March 27, 2022
    Date of Patent: October 31, 2023
    Assignee: United Microelectronics Corp.
    Inventors: Su Xing, Chung Yi Chiu, Hai Biao Yao
  • Patent number: 11789168
    Abstract: A diode and a transistor are connected in parallel. The transistor is located on a first doped region forming a PN junction of the diode with a second doped region located under the first region. The circuit functions as an ionizing radiation detection cell by generating a current through the PN junction which changes by a voltage generated across the transistor. This change in voltage is compared to a threshold to detect the ionizing radiation.
    Type: Grant
    Filed: August 23, 2021
    Date of Patent: October 17, 2023
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Gilles Gasiot, Fady Abouzeid
  • Patent number: 11756959
    Abstract: The present disclosure provides an integrated circuit that includes a circuit formed on a semiconductor substrate; and a de-cap device formed on the semiconductor substrate and integrated with the circuit. The de-cap device includes a filed-effect transistor (FET) that further includes a source and a drain connected through contact features landing on the source and drain, respectively; a gate stack overlying a channel and interposed between the source and the drain; and a doped feature disposed underlying the channel and connecting to the source and the drain, wherein the doped feature is doped with a dopant of a same type of the source and the drain.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ching-Wei Tsai, Yu-Xuan Huang, Kuan-Lun Cheng, Wei Ju Lee, Chun-Fu Cheng, Chung-Wei Wu
  • Patent number: 11728335
    Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, buried channel structures integrated with non-planar structures. In an example, an integrated circuit structure includes a first fin structure and a second fin structure above a substrate. A gate structure is on a portion of the substrate directly between the first fin structure and the second fin structure. A source region is in the first fin structure. A drain region is in the second fin structure.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: August 15, 2023
    Assignee: Intel Corporation
    Inventors: Guannan Liu, Akm A. Ahsan, Mark Armstrong, Bernhard Sell
  • Patent number: 11705503
    Abstract: A semiconductor device includes a substrate, a gate electrode on the substrate, a gate spacer on a sidewall of the gate electrode, an active pattern penetrating the gate electrode and the gate spacer, and an epitaxial pattern contacting the active pattern and the gate spacer. The gate electrode extends in a first direction. The gate spacer includes a semiconductor material layer. The active pattern extends in a second direction crossing the first direction.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: July 18, 2023
    Inventors: Jin Bum Kim, MunHyeon Kim, Hyoung Sub Kim, Tae Jin Park, Kwan Heum Lee, Chang Woo Noh, Maria Toledano Lu Que, Hong Bae Park, Si Hyung Lee, Sung Man Whang
  • Patent number: 11705514
    Abstract: A MOS transistor structure is provided. The MOS transistor structure includes a semiconductor substrate having an active area including a first edge and a second edge opposite thereto. A gate layer is disposed on the active area of the semiconductor substrate and has a first edge extending across the first and second edges of the active area. A source region having a first conductivity type is in the active area at a side of the first edge of the gate layer and between the first and second edges of the active area. First and second heavily doped regions of a second conductivity type are in the active area adjacent to the first and second edges thereof, respectively, and spaced apart from each other by the source region.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: July 18, 2023
    Assignee: MediaTek Inc.
    Inventors: Cheng Hua Lin, Yan-Liang Ji
  • Patent number: 11695014
    Abstract: To provide a semiconductor device having a thin-film BOX-SOI structure and capable of realizing a high-speed operation of a logic circuit and a stable operation of a memory circuit. A semiconductor device according to the present invention includes a semiconductor support substrate, an insulation layer having a thickness of at most 10 nm, and a semiconductor layer. In an upper surface of the semiconductor layer, a first field-effect transistor including a first gate electrode and constituting a logic circuit is formed. Further, in the upper surface of the semiconductor layer, a second field-effect transistor including a second gate electrode and constituting a memory circuit is formed. At least three well regions having different conductivity types are formed in the semiconductor support substrate.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: July 4, 2023
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Ryuta Tsuchiya, Toshiaki Iwamatsu
  • Patent number: 11668988
    Abstract: When a pixel portion and a driver circuit are formed over one substrate and a counter electrode is formed over an entire surface of a counter substrate, the driver circuit may be adversely affected by an optimized voltage of the counter electrode. A semiconductor device according to the present invention has a structure in which: a liquid crystal layer is provided between a pair of substrates; one of the substrates is provided with a pixel electrode and a driver circuit; the other of the substrates is a counter substrate which is provided with two counter electrode layers in different potentials; and one of the counter electrode layers overlaps with the pixel electrode with the liquid crystal layer therebetween and the other of the counter electrode layers overlaps with the driver circuit with the liquid crystal layer therebetween. An oxide semiconductor layer is used for the driver circuit.
    Type: Grant
    Filed: November 3, 2016
    Date of Patent: June 6, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Jun Koyama, Shunpei Yamazaki
  • Patent number: 11658230
    Abstract: A method for forming a semiconductor structure is provided. The method includes the following operations. A substrate is received. A fin structure is formed on the substrate, and a dielectric layer is formed over the fin structure. A sacrificial gate is formed over the substrate. A portion of the dielectric layer is exposed through the sacrificial gate. Recesses are formed in the fin structure at two sides of the sacrificial gate. A cleaning operation is performed with an HF-containing plasma. The HF-containing plasma includes HF and NH3.
    Type: Grant
    Filed: November 23, 2020
    Date of Patent: May 23, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Chun Hsiung Tsai, Ru-Shang Hsiao, Clement Hsingjen Wann
  • Patent number: 11658211
    Abstract: Occurrence of short-channel characteristics and parasitic capacitance of a MOSFET on a SOI substrate is prevented. A sidewall having a stacked structure obtained by sequentially stacking a silicon oxide film and a nitride film is formed on a side wall of a gate electrode on the SOI substrate. Subsequently, after an epitaxial layer is formed beside the gate electrode, and then, the nitride film is removed. Then, an impurity is implanted into an upper surface of the semiconductor substrate with using the gate electrode and the epitaxial layer as a mask, so that a halo region is formed in only a region of the upper surface of the semiconductor substrate which is right below a vicinity of both ends of the gate electrode.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: May 23, 2023
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Yoshiki Yamamoto, Hideki Makiyama, Toshiaki Iwamatsu, Takaaki Tsunomura
  • Patent number: 11631609
    Abstract: A method for manufacturing a microelectronic device from a semiconductor-on-insulator substrate, the device having active components formed in active areas of the substrate separated by isolation trenches and which are delimited by first sidewalls, the isolation trenches being filled, at least partially, with a first dielectric material, includes a step of chemically attacking a passive section of the first bottom of the isolation trenches configured to generate, at said section, a roughness quadratic mean comprised between 2 nm and 6 nm. The method also includes a step of forming a passive component covering the first dielectric material and directly above the passive section.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: April 18, 2023
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Heimanu Niebojewski, François Andrieu, Claire Fenouillet-Beranger
  • Patent number: 11574905
    Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: February 7, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woocheol Shin, Myunggil Kang, Minyi Kim, Sanghoon Lee
  • Patent number: 11538919
    Abstract: A transistor comprises a channel region having a frontside and a backside. A gate is adjacent the frontside of the channel region with a gate insulator being between the gate and the channel region. Insulating material having net negative charge is adjacent the backside of the channel region. The insulating material comprises at least one of AlxFy, HfAlxFy, AlOxNy, and HfAlxOyNz, where “x”, “y”, and “z” are each greater than zero. Other embodiments and aspects are disclosed.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: December 27, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Ramanathan Gandhi, Augusto Benvenuti, Giovanni Maria Paolucci
  • Patent number: 11500157
    Abstract: A method of Silicon Selective Epitaxial Growth (SEG) applied to a Silicon on Insulator (SOI) wafer to provide a first region of customized thickness includes with the SOI wafer having a standard thickness, applying a hard mask to a plurality of regions of the SOI wafer including the first region; applying photo-lithography protection to cover the hard mask in all of the plurality of regions except the first region; removing the hard mask in the first region; and performing Silicon SEG in the first region to provide the customized thickness in the first region, wherein the customized thickness is greater than the standard thickness.
    Type: Grant
    Filed: March 19, 2020
    Date of Patent: November 15, 2022
    Assignee: Ciena Corporation
    Inventors: Charles Baudot, Alexandre Delisle-Simard, Michel Poulin
  • Patent number: 11482473
    Abstract: A semiconductor device, including a first metal strip extending in a first direction on a first plane; a second metal strip extending in the first direction on a second plane over the first metal strip; a third metal strip immediate adjacent to the second metal strip and extending in the first direction on the second plane; and a fourth metal strip immediate adjacent to the third metal strip and extending in the first direction on the second plane; wherein the first metal strip and the second metal strip are directed to a first voltage source; wherein a distance between the second metal strip and the third metal strip is greater than a distance between the third metal strip and the fourth metal strip.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: October 25, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shih-Wei Peng, Chia-Tien Wu, Jiann-Tyng Tzeng
  • Patent number: 11444179
    Abstract: A semiconductor structure includes a semiconductor substrate, an oxide layer disposed over the semiconductor substrate, a high-k metal gate structure (HKMG) interleaved with the stack of semiconductor layers, and an epitaxial source/drain (S/D) feature disposed adjacent to the HKMG, wherein a bottom portion of the epitaxial S/D feature is defined by the oxide layer.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: September 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Xusheng Wu, Chang-Miao Liu, Huiling Shang
  • Patent number: 11442097
    Abstract: The present application discloses a method and apparatus for calculating the kink current of SOI device, which is used to solve the problem that the kink current calculation in the prior art is not accurate and is not suitable for circuit simulation. The method includes: obtaining the impact ionization factor, the parasitic transistor effect factor, and the drain saturation current of the SOI device respectively; and calculating the kink current of the SOI device according to the impact ionization factor, the parasitic transistor effect factor, and the drain saturation current.
    Type: Grant
    Filed: June 10, 2019
    Date of Patent: September 13, 2022
    Assignee: Soochow University
    Inventors: Mingxiang Wang, Yanyan Chen, Dongli Zhang, Huaisheng Wang
  • Patent number: 11380764
    Abstract: The purpose of the present invention is to provide a semiconductor device comprising an epitaxial layer formed on a SiC substrate, and a CMOS formed in the top part of the epitaxial layer, wherein growth of any defects present at the interface between the SiC substrate and the epitaxial layer is suppressed, and the reliability of the semiconductor device is improved. As a means to achieve the foregoing, a semiconductor device is formed such that the distance from a p-type diffusion layer to the interface between an n-type epitaxial layer and an n-type semiconductor substrate is larger than the thickness of a depletion layer that extends from the p-type diffusion layer to the back side of the n-type semiconductor substrate in response to the potential difference between a substrate electrode and another substrate electrode.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: July 5, 2022
    Assignee: HITACHI, LTD.
    Inventors: Masahiro Masunaga, Shintaroh Sato, Akio Shima, Digh Hisamoto
  • Patent number: 11374022
    Abstract: Electronic circuits and methods encompassing an RF switch comprising a plurality of series-coupled (stacked) integrated circuit (IC) SOI MOSFETs having a distributed back-bias network structure comprising groups of substrate contacts coupled to a bias voltage source through a resistive ladder. The distributed back-bias network structure sets the common IC substrate voltage at a fixed DC bias but resistively decouples groups of MOSFETs with respect to RF voltages so that the voltage division characteristics of the MOSFET stack are maintained. The distributed back-bias network structure increases the voltage handling capability of each MOSFET and improves the maximum RF voltage at which a particular MOSFET is effective as a switch device, while mitigating loss, leakage, crosstalk, and distortion. RF switches in accordance with the present invention are particularly useful as antenna switches.
    Type: Grant
    Filed: June 14, 2019
    Date of Patent: June 28, 2022
    Assignee: pSemi Corporation
    Inventor: Simon Edward Willard
  • Patent number: 11121073
    Abstract: An interconnect structure is disclosed. The interconnect structure includes a first metal interconnect in a bottom dielectric layer, a via that extends through a top dielectric layer, a metal plate, an intermediate dielectric layer, and an etch stop layer, and a metal in the via to extend through the top dielectric layer, the metal plate, the intermediate dielectric layer and the etch stop layer to the top surface of the first metal interconnect. The metal plate is coupled to an MIM capacitor that is parallel to the via. The second metal interconnect is on top of the metal in the via.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: September 14, 2021
    Assignee: Intel Corporation
    Inventors: Travis Lajoie, Abhishek Sharma, Juan Alzate-Vinasco, Chieh-Jen Ku, Shem Ogadhoh, Allen Gardiner, Blake Lin, Yih Wang, Pei-Hua Wang, Jack T. Kavalieros, Bernhard Sell, Tahir Ghani
  • Patent number: 11094801
    Abstract: According to an embodiment of the present invention, a semiconductor structure includes a semiconductor substrate and a plurality of fins located on the semiconductor substrate. The plurality of fins each independently includes a bottom fin portion, a top fin portion layer, and an isolated oxide layer located in between the bottom fin portion and the top fin portion layer in the y-direction parallel to the height of the plurality of fins. The isolated oxide layer includes a mixed oxide region located in between oxidized regions in an x-direction perpendicular to the height of the plurality of fins.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: August 17, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ruqiang Bao, Hemanth Jagannathan, Paul C. Jamison, Choonghyun Lee
  • Patent number: 11075197
    Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: July 27, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woocheol Shin, Myunggil Kang, Minyi Kim, Sanghoon Lee
  • Patent number: 11049773
    Abstract: A transistor device comprising a channel disposed on a substrate between a source and a drain, a gate electrode disposed on the channel, wherein the channel comprises a channel material that is separated from a body of the same material on a substrate. A method comprising forming a trench in a dielectric layer on an integrated circuit substrate, the trench comprising dimensions for a transistor body including a width; depositing a spacer layer in a portion of the trench, the spacer layer narrowing the width of the trench; forming a channel material in the trench through the spacer layer; recessing the dielectric layer to define a first portion of the channel material exposed and a second portion of the channel material in the trench; and separating the first portion of the channel material from the second portion of the channel material.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: June 29, 2021
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Matthew V. Metz, Sean T. Ma, Cheng-Ying Huang, Tahir Ghani, Anand S. Murthy, Harold W. Kennel, Nicholas G. Minutillo, Jack T. Kavalieros, Willy Rachmady
  • Patent number: 11043501
    Abstract: A chip includes a semiconductor substrate, and a first N-type Metal Oxide Semiconductor Field Effect Transistor (NMOSFET) at a surface of the semiconductor substrate. The first NMOSFET includes a gate stack over the semiconductor substrate, a source/drain region adjacent to the gate stack, and a dislocation plane having a portion in the source/drain region. The chip further includes a second NMOSFET at the surface of the semiconductor substrate, wherein the second NMOSFET is free from dislocation planes.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: June 22, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jhon Jhy Liaw
  • Patent number: 10861847
    Abstract: Provided is a semiconductor device and a protection element capable of suppressing electrical damage to a MOSFET or the like in a semiconductor substrate. A semiconductor device according to a first aspect of the present technology includes a MOSFET as a protected element formed on a semiconductor substrate and a protection element that suppresses electrical damage to the protected element formed on the semiconductor substrate, in which the protection element includes the semiconductor substrate, one or more layers of well regions formed on the semiconductor substrate, and a diffusion layer formed on the well region. The present technology can be applied to a CMOS image sensor, for example.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: December 8, 2020
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Masaaki Bairo
  • Patent number: 10818555
    Abstract: A device includes first and second transistors and first and second isolation structures. The first transistor includes an active region including a first channel region, a first source and a first drain in the active region and respectively on opposite sides of the first channel region, and a first gate structure over the first channel region. The first isolation structure surrounds the active region of the first transistor. The second transistor includes a second source and a second drain, a fin structure includes a second channel region between the second source and the second drain, and a second gate structure over the second channel region. The second isolation structure surrounds a bottom portion of the fin structure of the second transistor. The top of the first isolation structure is higher than a top of the second isolation structure.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Barn Chen, Ting-Huang Kuo, Shiu-Ko Jangjian, Chi-Cherng Jeng, Kuang-Yao Lo
  • Patent number: 10797164
    Abstract: A FinFET and methods for forming a FinFET are disclosed. A method includes forming a semiconductor fin on a substrate, implanting the semiconductor fin with dopants, and forming a capping layer on a top surface and sidewalls of the semiconductor fin. The method further includes forming a dielectric on the capping layer, and forming a gate electrode on the dielectric.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: October 6, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Hua Yu, Chih-Pin Tsao, Hou-Yu Chen
  • Patent number: 10657913
    Abstract: A display panel includes a gate line, first and second data lines, first and second gate control lines, and first and second pixels. The first pixel includes a double-gate switching element including a gate electrode connected to the gate line, a source electrode connected to the first data line, and another gate electrode connected to the first gate control line. The second pixel includes a double-gate switching element including a gate electrode connected to the gate line, a source electrode connected to the second data line, and a gate electrode connected to the second gate control line. A data voltage having a first polarity is applied to the first data line, another data voltage having a second polarity is applied to the second data line, and first and second gate control voltages are respectively applied to the first and second gate control lines.
    Type: Grant
    Filed: May 11, 2016
    Date of Patent: May 19, 2020
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jun Hyun Park, Kyoung-Ju Shin
  • Patent number: 10553706
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a substrate and a fin structure formed over the substrate. The semiconductor structure further includes an isolation structure formed around the fin structure and a gate structure formed across the fin structure. In addition, the gate structure includes a first portion formed over the fin structure and a second portion formed over the isolation structure, and the second portion of the gate structure includes an extending portion extending into the isolation structure.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: February 4, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Che-Cheng Chang, Chih-Han Lin
  • Patent number: 10269810
    Abstract: A chip includes a semiconductor substrate, and a first N-type Metal Oxide Semiconductor Field Effect Transistor (NMOSFET) at a surface of the semiconductor substrate. The first NMOSFET includes a gate stack over the semiconductor substrate, a source/drain region adjacent to the gate stack, and a dislocation plane having a portion in the source/drain region. The chip further includes a second NMOSFET at the surface of the semiconductor substrate, wherein the second NMOSFET is free from dislocation planes.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jhon Jhy Liaw
  • Patent number: 10204981
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate, a first dielectric layer, a first doping layer of a first conductivity type, and a second doping layer of a second conductivity type. The substrate has a fin portion. The first dielectric layer is disposed on the substrate and surrounds the fin portion. The first doping layer of the first conductivity type is disposed on the first dielectric layer and is located on two opposite sidewalls of the fin portion. The second doping layer of the second conductivity type is disposed on the two opposite sidewalls of the fin portion and is located between the fin portion and the first doping layer. The first doping layer covers a sidewall and a bottom surface of the second doping layer.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: February 12, 2019
    Assignee: United Microelectronics Corp.
    Inventors: En-Chiuan Liou, Yu-Cheng Tung, Ching-Ling Lin
  • Patent number: 10170068
    Abstract: The embodiments of the present disclosure provide a gate driving circuit, an array substrate, a display panel and a driving method. The gate driving circuit comprises: at least a Gate driver on Array (GOA) unit GOAn and a GOA unit GOAn+m, an output terminal of GOAn being connected to an input terminal of GOAn+m, an output terminal of GOAn+m is connected to a reset terminal of GOAn; and an electrical leakage compensation module having two input terminals connected to output terminals of GOAn and GOAn+m, respectively, a control terminal connected to a signal line, and an output terminal connected to a Pull-Up (PU) node of GOAn+m, and configured to compensate for a voltage at the PU node of GOAn+m in response to receipt of the electrical leakage compensation signal VLHB.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: January 1, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
    Inventors: Qiujie Su, Feng Li
  • Patent number: 10164022
    Abstract: A device includes a substrate, insulation regions extending into the substrate, a first semiconductor region between the insulation regions and having a first valence band, and a second semiconductor region over and adjoining the first semiconductor region. The second semiconductor region has a compressive strain and a second valence band higher than the first valence band. The second semiconductor region includes an upper portion higher than top surfaces of the insulation regions to form a semiconductor fin, and a lower portion lower than the top surfaces of the insulation regions. The upper portion and the lower portion are intrinsic. A semiconductor cap adjoins a top surface and sidewalls of the semiconductor fin. The semiconductor cap has a third valence band lower than the second valence band.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Jing Lee, Chi-Wen Liu
  • Patent number: 10121861
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: November 6, 2018
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Seiyon Kim, Kelin Kuhn, Willy Rachmady, Jack Kavalieros
  • Patent number: 10109630
    Abstract: The present invention provides a semiconductor device and a method of forming the same. The semiconductor device includes a substrate, a first transistor and a second transistor. The first transistor and the second transistor are disposed on the substrate. The first transistor includes a first channel and a first work function layer. The second transistor includes a second channel and a second work function layer, where the first channel and the second channel include different dopants, and the second work function layer and the first work function layer have a same conductive type and different thicknesses.
    Type: Grant
    Filed: May 24, 2017
    Date of Patent: October 23, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Tian Choy Gan, Chu-Yun Hsiao, Chia-Fu Hsu
  • Patent number: 9935196
    Abstract: The present invention provides a semiconductor device, which includes a substrate, a first gate electrode, a second gate electrode, a source region and a drain region, wherein the first gate electrode and the second gate electrode are embedded in the substrate respectively; the source region is formed in the substrate, and at least a portion of the source region is disposed between the first gate electrode and the second gate electrode; and the drain region is formed in the substrate, and at least a portion of the drain region is disposed between the first gate electrode and the second gate electrode.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: April 3, 2018
    Assignee: Realtek Semiconductor Corp.
    Inventors: Hsiao-Tsung Yen, Yuh-Sheng Jean, Ta-Hsun Yeh
  • Patent number: 9886905
    Abstract: A display device includes a plurality of pulse output circuits each of which outputs signals to one of the two kinds of scan lines and a plurality of inverted pulse output circuits each of which outputs, to the other of the two kinds of scan lines, inverted or substantially inverted signals of the signals output from the pulse output circuits. Each of the plurality of inverted pulse output circuits operates with at least two kinds of signals used for the operation of the plurality of pulse output circuits. Thus, through current generated in the inverted pulse output circuits can be reduced.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: February 6, 2018
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Kouhei Toyotaka
  • Patent number: 9882600
    Abstract: According to various embodiments, a switching device may include: an antenna terminal; a switch including a first switch terminal and a second switch terminal, the first switch terminal coupled to the antenna terminal, the switch including at least one transistor at least one of over or in a silicon region including an oxygen impurity concentration of smaller than about 3×1017 atoms per cm3; and a transceiver terminal coupled to the second switch terminal, wherein the transceiver terminal is at least one of configured to provide a signal received via the antenna terminal or configured to receive a signal to be transmitted via the antenna terminal.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: January 30, 2018
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Christian Kuehn, Martin Bartels, Henning Feick, Dirk Offenberg, Anton Steltenpohl, Hans Taddiken, Ines Uhlig
  • Patent number: 9842838
    Abstract: A method of manufacturing a semiconductor structure includes: forming a trench in a back side of a substrate; depositing a dopant on surfaces of the trench; forming a shallow trench isolation (STI) structure in a top side of the substrate opposite the trench; forming a deep well in the substrate; out-diffusing the dopant into the deep well and the substrate; forming an N-well and a P-well in the substrate; and filling the trench with a conductive material.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: December 12, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Phillip F. Chapman, David S. Collins, Steven H. Voldman
  • Patent number: 9842735
    Abstract: A method of manufacturing a low temperature polycrystalline silicon thin film and a thin film transistor, a thin film transistor, a display panel and a display device are provided. The method includes: forming an amorphous silicon thin film (01) on a substrate (1); forming a pattern of a silicon oxide thin film (02) covering the amorphous silicon thin film (01), a thickness of the silicon oxide thin film (02) located at a preset region being larger than that of the silicon oxide thin film (02) located at other regions; and irradiating the silicon oxide thin film (02) by using excimer laser to allow the amorphous silicon thin film (01) forming an initial polycrystalline silicon thin film (04), the initial polycrystalline silicon thin film (04) located at the preset region being a target low temperature polycrystalline silicon thin film (05). The polycrystalline silicon thin film has more uniform crystal size.
    Type: Grant
    Filed: July 16, 2015
    Date of Patent: December 12, 2017
    Assignee: BOE Technology Group Co., Ltd.
    Inventors: Yanan Niu, Chao Liu, Zengsheng He, Lei Chen, Yujun Zhang
  • Patent number: 9755046
    Abstract: A method of forming a semiconductor device is provided. At least two shallow trenches are formed in a substrate. An insulating layer is formed on surfaces of the substrate and the shallow trenches. A conductive layer is formed on the substrate between the shallow trenches. At least one spacer is formed on a sidewall of the conductive layer, wherein the spacer fills up each shallow trench.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: September 5, 2017
    Assignee: United Microelectronics Corp.
    Inventors: Shih-Yin Hsiao, Ching-Chung Yang
  • Patent number: 9698059
    Abstract: The present invention provides a semiconductor device and a method of forming the same. The semiconductor device includes a substrate, a first transistor and a second transistor. The first transistor and the second transistor are disposed on the substrate. The first transistor includes a first channel and a first work function layer. The second transistor includes a second channel and a second work function layer, where the first channel and the second channel include different dopants, and the second work function layer and the first work function layer have a same conductive type and different thicknesses.
    Type: Grant
    Filed: April 15, 2015
    Date of Patent: July 4, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Tian Choy Gan, Chu-Yun Hsiao, Chia-Fu Hsu
  • Patent number: 9653476
    Abstract: An integrated circuit includes a transistor, an UTBOX buried insulating layer disposed under it and a ground plane disposed under the layer. A well is disposed under the plane and a first trench is at the periphery of the transistor and extends through the layer into the well. There is a substrate under the well and a p-n diode on a side of the transistor. The diode comprises first and second zones of opposite doping and the first zone is configured for electrical connection to a first electrode of the transistor. The first and second zones are coplanar with the plane and a second trench for separating the first and second zones. The second trench extends through the layer into the plane to a depth less than an interface between the plane and the well. There is a third zone under the second trench forming a junction between the zones.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: May 16, 2017
    Assignees: Commissariate a l'energie atomique et aux energies alternatives, STMicroelectronics SA
    Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
  • Patent number: 9627480
    Abstract: The present invention relates generally to semiconductor devices and more particularly, to a structure and method of forming a partially depleted semiconductor-on-insulator (SOI) junction isolation structure using a nonuniform trench shape formed by reactive ion etching (RIE) and crystallographic wet etching. The nonuniform trench shape may reduce back channel leakage by providing an effective channel directly below a gate stack having a width that is less than a width of an effective back channel directly above the isolation layer.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: April 18, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anthony I. Chou, Judson R. Holt, Arvind Kumar, Henry K. Utomo