With Means To Increase Breakdown Voltage (e.g., Field Shield Electrode, Guard Ring, Etc.) Patents (Class 257/409)
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Patent number: 9559097Abstract: A semiconductor device configured with one or more integrated breakdown protection diodes in non-isolated power transistor devices and electronic apparatus, and methods for fabricating the devices.Type: GrantFiled: October 6, 2014Date of Patent: January 31, 2017Assignee: NXP USA, Inc.Inventors: Patrice M. Parris, Hubert M. Bode, Weize Chen, Richard J DeSouza, Andreas Laudenbach, Kurt U. Neugebauer
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Patent number: 9536965Abstract: A semiconductor device comprises: a substrate; a multilayer semiconductor layer located on the substrate; a source located on the multilayer semiconductor layer, the source including a first source portion inside an active region and a second source portion inside a passive region; a drain located on the multilayer semiconductor layer, the drain including a first drain portion inside the active region and a second drain region inside the passive region; a gate located on the multilayer semiconductor layer, the gate including a first gate portion inside the active region and a second gate portion inside the passive region, and the first gate portion being in a form of interdigital among the first source portion and the first drain portion; and a heat dissipating layer disposed at one or more of the first source portion, the first drain portion, the first gate portion, the second source portion, the second drain portion and the second gate portion.Type: GrantFiled: October 23, 2015Date of Patent: January 3, 2017Assignee: DYNAX SEMICONDUCTOR, INC.Inventors: Yi Pei, Mengjie Zhou, Naiqian Zhang
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Patent number: 9520493Abstract: A high voltage integrated device includes a semiconductor layer having a first conductivity, a source region having a second conductivity and a drift region having the second conductivity which are disposed in the semiconductor layer and spaced apart from each other by a channel region, a drain region having the second conductivity and disposed in the drift region, a gate insulation layer disposed over the channel region, a first field insulation layer and a second field insulation layer which are disposed over the drift region and between the channel region and the drain region, wherein the first field insulation layer and the second field insulation layer are spaced apart from each other, an insulation layer disposed over the drift region and located between the first and second field insulation layers, and a gate electrode disposed over the gate insulation layer, the first field insulation layer, the insulation layer, and the second field insulation layer, wherein the first field insulation layer is adjaceType: GrantFiled: April 15, 2016Date of Patent: December 13, 2016Assignee: SK Hynix Inc.Inventors: Dae Hoon Kim, Se Kyung Oh
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Patent number: 9508792Abstract: An electric field buffer layer is formed so as to surround an active region. The electric field buffer layer includes a plurality of P-type impurity layers. Each of the P-type impurity layers includes P-type implantation layers and P-type diffusion layers that are formed so as to respectively surround the P-type implantation layers and contain P-type impurities at a concentration lower than that of the P-type implantation layers. A first P-type implantation layer is formed to be in contact with or to partially overlap the active region. Each of the P-type diffusion layers is formed to have an expansion to a degree to which the first P-type diffusion layer is in contact with or overlaps a second P-type diffusion layer. Intervals between the P-type implantation layers increase from the active region toward the outer peripheral portion of the semiconductor substrate.Type: GrantFiled: May 1, 2013Date of Patent: November 29, 2016Assignee: Mitsubishi Electric CorporationInventors: Tsuyoshi Kawakami, Ze Chen, Akito Nishii, Fumihito Masuoka, Katsumi Nakamura, Akihiko Furukawa, Yuji Murakami
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Patent number: 9496334Abstract: A semiconductor device according to an embodiment includes a first semiconductor layer of a first conductivity type, second semiconductor regions of a second conductivity type, a third semiconductor region of the second conductivity type, a fourth semiconductor region of the first conductivity type, a gate electrode, an insulating layer, and a first electrode. The first semiconductor layer includes first semiconductor regions. The second semiconductor regions are provided respectively between the first semiconductor regions. The insulating layer is provided between the gate electrode and the third semiconductor region. The first electrode includes a first portion and a second portion. The first portion is connected to the first semiconductor region. The second portion is provided on the fourth semiconductor region side of the first portion. The first electrode is provided on the first semiconductor region and on the second semiconductor region.Type: GrantFiled: August 14, 2015Date of Patent: November 15, 2016Assignee: Kabushiki Kaisha ToshibaInventors: Hiroaki Yamashita, Syotaro Ono, Hideyuki Ura, Masahiro Shimura
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Patent number: 9472660Abstract: A semiconductor device including: a first conductivity type n-type drift layer; a second conductivity type VLD region which is formed on a chip inner circumferential side of a termination structure region provided on one principal surface of the n-type drift layer and which is higher in concentration than the n-type drift layer; a second conductivity type first clip layer which is formed on a chip outer circumferential side of the VLD region so as to be separated from the VLD region and which is higher in concentration than the n-type drift layer; and a first conductivity type channel stopper layer which is formed on a chip outer circumferential side of the first clip layer so as to be separated from the first clip layer and which is higher in concentration than the n-type drift layer.Type: GrantFiled: May 9, 2014Date of Patent: October 18, 2016Assignee: FUJI ELECTRIC CO., LTD.Inventor: Hong-fei Lu
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Patent number: 9461184Abstract: A capacitor for a semiconductor device includes a bottom electrode plate, an insulating layer formed on the bottom electrode plate, and a top electrode plate formed on the insulating layer. The bottom plate includes a capacitor well and at least one diffused region formed on the capacitor well. A doping concentration of the at least one diffused region is higher than a doping concentration of the capacitor well, the capacitor well comprising a first well.Type: GrantFiled: October 9, 2013Date of Patent: October 4, 2016Assignee: Fitipower Integrated Technology, Inc.Inventors: Chun-Ping Yang, Da-Pong Zhang
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Patent number: 9412809Abstract: Provided is a semiconductor device in which movable ions in an insulation layer on a main surface are reduced and dielectric strength is enhanced. A semiconductor device has a plurality of FLRs, an insulation layer, and a semiconductor layer. The plurality of FLRs surrounds, in a plan view of a substrate, an active region in which an element is formed. The insulation layer is provided on the main surface of the semiconductor device and covers the plurality of FLRs. The semiconductor layer is provided in the insulation layer and surrounds the active region in parallel to the FLRs. The semiconductor layer contains impurities at a surface density lower than a surface density that satisfies a RESURF condition. In the plan view, the semiconductor layer overlaps with a part of the region (an inter-ring region) between adjacent FLRs and does not overlap with rest of the inter-ring region.Type: GrantFiled: February 15, 2013Date of Patent: August 9, 2016Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventor: Masaru Senoo
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Patent number: 9383266Abstract: A field effect transistor (FET) having a source, a drain and a gate includes a first connection electrically connected to the gate near a first end of the gate, a second connection electrically connected to the gate near the first end of the gate, a third connection electrically connected to the gate near a second end of the gate, and a fourth connection electrically connected to the gate near the second end of the gate. By performing gate resistance measurements at different ambient temperatures, a thermal coefficient of gate resistance can be derived and then used to monitor the gate temperature, which is representative of the channel temperature.Type: GrantFiled: October 15, 2013Date of Patent: July 5, 2016Assignee: HRL Laboratories, LLCInventors: James Chingwei Li, Tahir Hussain
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Patent number: 9373619Abstract: Provided is a high voltage semiconductor device. The high voltage semiconductor device includes a substrate that includes a doped well disposed therein. The doped well and the substrate have opposite doping polarities. The high voltage semiconductor device includes an insulating device disposed over the doped well. The high voltage semiconductor device includes an elongate resistor disposed over the insulating device. A non-distal portion of the resistor is coupled to the doped well. The high voltage semiconductor device includes a high-voltage junction termination (HVJT) device disposed adjacent to the resistor.Type: GrantFiled: August 1, 2011Date of Patent: June 21, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 9343453Abstract: A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.Type: GrantFiled: May 15, 2015Date of Patent: May 17, 2016Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Ryo Kanda, Tetsu Toda, Yasushi Nakahara, Yoshinori Kaya
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Patent number: 9324857Abstract: A semiconductor device includes a p-type semiconductor layer, n-type column regions formed of columnar thermal donors exhibiting an n-type property, a p-type column region interposed between the n-type column regions, the n-type column regions configured to form a super-junction structure in cooperation with the p-type column region, a channel region formed in the semiconductor layer, a source region formed in the channel region, a gate insulator film formed on the semiconductor layer, and a gate electrode formed on the gate insulator film and opposite to the channel region across the gate insulator film.Type: GrantFiled: April 10, 2015Date of Patent: April 26, 2016Assignee: ROHM CO., LTD.Inventor: Toshio Nakajima
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Patent number: 9312249Abstract: In a semiconductor light emitting device, a light emitting structure includes a first-conductivity type semiconductor layer, an active layer, and a second-conductivity type semiconductor layer, which are sequentially formed on a conductive substrate. A second-conductivity type electrode includes a conductive via and an electrical connection part. The conductive via passes through the first-conductivity type semiconductor layer and the active layer, and is connected to the inside of the second-conductivity type semiconductor layer. The electrical connection part extends from the conductive via and is exposed to the outside of the light emitting structure. An insulator electrically separates the second-conductivity type electrode from the conductive substrate, the first-conductivity type semiconductor layer, and the active layer. A passivation layer is formed to cover at least a side surface of the active layer in the light emitting structure.Type: GrantFiled: July 22, 2014Date of Patent: April 12, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Pun Jae . Choi, Sang Bum Lee, Jin Bock Lee, Yu Seung Kim, Sang Yeob Song
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Patent number: 9305906Abstract: In a semiconductor light emitting device, a light emitting structure includes a first-conductivity type semiconductor layer, an active layer, and a second-conductivity type semiconductor layer, which are sequentially formed on a conductive substrate. A second-conductivity type electrode includes a conductive via and an electrical connection part. The conductive via passes through the first-conductivity type semiconductor layer and the active layer, and is connected to the inside of the second-conductivity type semiconductor layer. The electrical connection part extends from the conductive via and is exposed to the outside of the light emitting structure. An insulator electrically separates the second-conductivity type electrode from the conductive substrate, the first-conductivity type semiconductor layer, and the active layer. A passivation layer is formed to cover at least a side surface of the active layer in the light emitting structure.Type: GrantFiled: July 21, 2014Date of Patent: April 5, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Pun Jae Choi, Sang Bum Lee, Jin Bock Lee, Yu Seung Kim, Sang Yeob Song
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Patent number: 9287383Abstract: A method for manufacturing a semiconductor device includes providing a semiconductor substrate having first and second sides, laterally spaced semiconductor devices integrated into the semiconductor substrate, and a drift region of a first conductivity type. Trenches are formed in the semiconductor substrate at the first side of the semiconductor substrate between laterally adjacent semiconductor devices, each of the trenches having two sidewalls and a bottom. First doping zones of a second conductivity type are formed in the semiconductor substrate at least along the sidewalls of the trenches. The first doping zones form pn-junctions with the drift region. Second doping zones of the first conductivity type are formed in the semiconductor substrate at least along a part of the bottom of the trenches. The second doping zones adjoin the drift region. The semiconductor substrate is cut along the second doping zones in the trenches to separate the semiconductor devices.Type: GrantFiled: June 11, 2015Date of Patent: March 15, 2016Assignee: Infineon Technologies AGInventor: Gerhard Schmidt
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Patent number: 9287184Abstract: Apparatuses and methods can include a die seal between an integrated circuit region of a die and a periphery of the die. A via chain(s) may be arranged around an inner circumference of the die seal between the die seal and the integrated circuit region and/or around an outer circumference of the die seal between the die seal and the periphery of the die. The via chain may include a plurality of contacts comprised of conductive material and extending through portions of the die. Circuitry may be coupled to an end of the via chain to detect an electrical signal. Additional apparatuses and methods are described.Type: GrantFiled: December 13, 2013Date of Patent: March 15, 2016Assignee: Micron Technology, Inc.Inventors: Charles H. Dennison, Kenneth W. Marr, Deepak Thimmegowda, Philip J. Ireland
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Patent number: 9245960Abstract: Disclosed are embodiments of a lateral, extended drain, metal oxide semiconductor, field effect transistor (LEDMOSFET) having tapered dielectric field plates positioned laterally between conductive field plates and opposing sides of a drain drift region of the LEDMOSFET. Each dielectric field plate comprises, in whole or in part, an airgap. These field plates form plate capacitors that can create an essentially uniform horizontal electric field profile within the drain drift region so that the LEDMOSFET can exhibit a specific, relatively high, breakdown voltage (Vb). Tapered dielectric field plates that incorporate airgaps provide for better control over the creation of the uniform horizontal electric field profile within the drain drift region, as compared to tapered dielectric field plates without such airgaps and, thereby ensure that the LEDMOSFET exhibits the specific, relatively high, Vb desired. Also disclosed herein are embodiments of a method of forming such an LEDMOSFET.Type: GrantFiled: February 8, 2013Date of Patent: January 26, 2016Assignee: GLOBALFOUNDRIES Inc.Inventors: Michel J. Abou-Khalil, Theodore J. Letavic, Stephen E. Luce, Anthony K. Stamper
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Patent number: 9240463Abstract: High-voltage LDMOS devices with voltage linearizing field plates and methods of manufacture are disclosed. The method includes forming an array of poly islands and a control gate structure by patterning a poly layer formed over a deep well region and a body of a substrate. The method further includes forming a metal shield in contact with the control gate structure and over the array of poly islands.Type: GrantFiled: May 24, 2013Date of Patent: January 19, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: John J. Ellis-Monaghan, Theodore J. Letavic, Santosh Sharma, Yun Shi, Michael J. Zierak
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Patent number: 9240464Abstract: A manufacturing method of a power MOSFET employs a hard mask film over a portion of the wafer surface as a polishing stopper, between two successive polishing steps. After embedded epitaxial growth is performed in a state where a hard mask film for forming trenches is present in at least a scribe region of a wafer, primary polishing is performed by using the hard mask film as a stopper, and secondary polishing is then performed after the hard mask film is removed.Type: GrantFiled: January 14, 2014Date of Patent: January 19, 2016Assignee: Renesas Electronics CorporationInventors: Satoshi Eguchi, Daisuke Taniguchi
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Patent number: 9224859Abstract: A high voltage metal-oxide-semiconductor (HV MOS) device includes a substrate including a first conductivity type, a gate positioned on the substrate, a drain region formed in the substrate, the drain region including a second conductivity type, and a source region formed in the substrate, where the source region includes at least one first part and at least one second part, the first part includes the second conductivity type, the second part includes the first conductivity type, and the first conductivity type and the second conductivity type are complementary.Type: GrantFiled: January 6, 2015Date of Patent: December 29, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shih-Chieh Pu, Ming-Tsung Lee, Cheng-Hua Yang, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
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Patent number: 9147791Abstract: The present invention provides a method for fabricating nano material pattern comprising the steps of forming a perfluorinated polymer pattern on top of the substrate (step 1); spreading a dispersion containing the dispersed nano material on the substrate patterned in step 1) (step 2); and eliminating the perfluorinated polymer pattern formed on the substrate of step 2) (step 3). The method for fabricating nano material pattern of the present invention has advantages over the conventional lift-off method for the fabrication of nano material pattern, which are easiness in eliminating the perfluorinated polymer pattern after forming the nano material pattern with it and no chance of damaging the substrate, suggesting that the method of the invention is excellent in fabricating an excellent nano material pattern.Type: GrantFiled: September 10, 2014Date of Patent: September 29, 2015Assignee: INHA-Industry Partnership InstituteInventors: Se-Geun Park, Jin-Kyun Lee, Myung-Soo Kim, Jung Seokheon
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Patent number: 9142625Abstract: Embodiments of a semiconductor device, a circuit including a semiconductor device and a driver circuit, and a method for operating a semiconductor device are described. In one embodiment, a semiconductor device includes a substrate, a source region, a drain region, and a drain extension region formed in the substrate, and an insulation layer adjacent to the drain extension region. A gate layer and a field plate are formed one of within and on the insulation layer. The field plate is located adjacent to the drain extension region and is electrically insulated from the gate layer and the source region such that a voltage can be applied to the field plate independent from voltages applied to the gate layer and the source region. Other embodiments are also described.Type: GrantFiled: October 12, 2012Date of Patent: September 22, 2015Assignee: NXP B.V.Inventors: Anco Heringa, Gerhard Koops, Boni Kofi Boksteen, Alessandro Ferrara
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Patent number: 9129841Abstract: A semiconductor device in which a reliable high voltage p-channel transistor is formed without an increase in cost and the number of manufacturing steps. The transistor includes: a semiconductor substrate having a main surface and a p-type region therein; a p-type well region located over the p-type region and in the main surface, having a first p-type impurity region to obtain a drain electrode; an n-type well region adjoining the p-type well region along the main surface and having a second p-type impurity region to obtain a source electrode; a gate electrode between the first and second p-type impurity regions along the main surface; and a p-type buried channel overlying the n-type well region and extending along the main surface. The border between the n-type and p-type well regions is nearer to the first p-type impurity region than the gate electrode end near to the first p-type impurity region.Type: GrantFiled: December 7, 2011Date of Patent: September 8, 2015Assignee: RENESAS ELECTRONICS CORPORATIONInventor: Hirokazu Sayama
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Patent number: 9117899Abstract: A semiconductor field-effect device is disclosed that utilizes an octagonal or inverse-octagonal deep trench super-junction in combination with an octagonal or inverse-octagonal gate trench. The field-effect device achieves improved packing density, improved current density, and improved on resistance, while at the same time maintaining compatibility with the multiple-of-45°-angles of native photomask processing and having well characterized (010), (100) and (110) (and their equivalent) silicon sidewall surfaces for selective epitaxial refill and gate oxidation, resulting in improved scalability. By varying the relative length of each sidewall surface, devices with differing threshold voltages can be achieved without additional processing steps. Mixing trenches with varying sidewall lengths also allows for stress balancing during selective epitaxial refill.Type: GrantFiled: November 26, 2013Date of Patent: August 25, 2015Assignee: D3 Semiconductor LLCInventors: Thomas E. Harrington, III, Robert Kuo-Chang Yang
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Patent number: 9105715Abstract: In a cell region of a first major surface of a semiconductor substrate of a first conductivity type, a first well of a second conductivity type is in an upper surface. A diffusion region of a first conductivity type is in the upper surface in the first well. A first gate insulating film is on the first well, and a first gate electrode on the first gate insulating film. A second well of a second conductivity type is in the upper surface of the first major surface on a peripheral portion of the cell region. A second gate insulating film is on the second well, and a thick field oxide film is on the peripheral side than the second gate insulating film. A second gate electrode is sequentially on the second gate insulating film and the field oxide film and electrically connected to the first gate electrode. A first electrode is connected to the first, second well and the diffusion region. A second electrode is connected on a second major surface of the semiconductor substrate.Type: GrantFiled: April 30, 2009Date of Patent: August 11, 2015Assignee: Mitsubishi Electric CorporationInventors: Naruhisa Miura, Shuhei Nakata, Kenichi Ohtsuka, Shoyu Watanabe, Naoki Yutani
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Patent number: 9099552Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N? type semiconductor layer. A source layer including an N? type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N? type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.Type: GrantFiled: February 24, 2014Date of Patent: August 4, 2015Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Yasuhiro Takeda, Shinya Inoue, Yuzo Otsuru
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Patent number: 9093432Abstract: A semiconductor device is free from degradation of characteristics attributable to a manufacturing process thereof and its characteristics are hardly affected by changes in electric potentials of bonding pads. The semiconductor device 10 includes an active region 12, a first insulating layer 13 covering the active region 12, a floating conductor 14 formed on the first insulating layer 13, a second insulating layer 15 formed on the first insulating layer 13 and the floating conductor 14, a bonding pad 18 formed on the second insulating layer 17 and interconnection vias 19, 20 for electrically connecting the active region 12 and the bonding pad 18.Type: GrantFiled: September 23, 2011Date of Patent: July 28, 2015Assignee: SANKEN ELECTRIC CO., LTD.Inventors: Akio Iwabuchi, Hironori Aoki
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Patent number: 9093310Abstract: A semiconductor device including a semiconductor layer of a first conductivity type in a cell region, a first base layer of a second conductivity type on the semiconductor layer in the cell region; a second base layer of the second conductivity type on the semiconductor layer in an intermediate region; a conductive region of a first conductivity type in the first base layer; a gate electrode on a channel region placed between the conductive region and the semiconductor layer; a first electrode connected to the first and second base layers; a second electrode connected to the semiconductor layer; and a gate pad on the semiconductor layer via an insulating film in a pad region and connected to the gate electrode, an impurity concentration gradation in the gate pad side of the second base layer has a gentler VLD structure than an impurity concentration gradation in the first base layer.Type: GrantFiled: September 14, 2012Date of Patent: July 28, 2015Assignee: Mitsubishi Electric CorporationInventor: Kazutoyo Takano
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Patent number: 9082779Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.Type: GrantFiled: March 31, 2014Date of Patent: July 14, 2015Assignee: PANASONIC CORPORATIONInventors: Makoto Tsutsue, Masaki Utsumi
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Patent number: 9082843Abstract: A semiconductor body has a first side, second side, lateral edge, active area, edge termination between the active area and the lateral edge, and drift region of a first conductivity type. The edge termination includes a step formed in the semiconductor body between the first side and the lateral edge. The step includes a lateral surface extending up to the first side and a bottom surface extending up to the lateral edge. A first doping zone of a second conductivity type is formed in the semiconductor body along the lateral surface of the step and forms a pn-junction with the drift region. A second doping zone of the first conductivity type is formed in the semiconductor body at least along a part of the bottom surface of the step and extends up to the lateral edge, wherein the second doping zone is in contact with the drift region.Type: GrantFiled: December 13, 2012Date of Patent: July 14, 2015Assignee: Infineon Technologies AGInventor: Gerhard Schmidt
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Patent number: 9082846Abstract: Integrated circuits with improved LDMOS structures are provided. An integrated circuit includes a semiconductor substrate, a plurality of shallow trench isolation (STI) regions, each extending at least a first depth below an upper surface of the semiconductor substrate. The STI regions electrically isolate devices fabricated in the semiconductor substrate. The integrated circuit further includes a transistor structure. The transistor structure includes a gate dielectric positioned over a portion of a first one of the plurality of STI regions, a drain region adjacent to the first one of the plurality of STI regions and spaced apart from the gate dielectric, a first gate electrode that extends over a first portion of the gate dielectric, a second gate electrode that extends over a second portion of the gate dielectric and positioned adjacent to the first gate electrode, and a source region positioned adjacent to the first portion of the gate dielectric.Type: GrantFiled: April 25, 2013Date of Patent: July 14, 2015Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Yi Lu, Dongli Wang, Deyan Chen, Purakh Raj Verma
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Patent number: 9076676Abstract: A body region (3) with a first type of electric conductivity is arranged at the upper surface (10) of a substrate (1) in a well (2), wherein a portion of the well that is not occupied by the body region has a second type of conductivity opposite the first type of conductivity. At the upper surface, a source region is arranged in the body region and a drain region is arranged in the well at a distance from the body region; the source region and the drain region both have the second type of conductivity. The body region is arranged underneath a surface area of the upper surface that has a border (7) with opposing first border sides (8). The well has a varying depth in the substrate. The depth of the well is smaller underneath the first border sides of the body region than in a portion of the body region that is spaced apart from the first border sides.Type: GrantFiled: November 21, 2012Date of Patent: July 7, 2015Assignee: ams AGInventor: Martin Knaipp
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Patent number: 9048213Abstract: A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.Type: GrantFiled: July 7, 2014Date of Patent: June 2, 2015Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Ryo Kanda, Tetsu Toda, Yasushi Nakahara, Yoshinori Kaya
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Patent number: 9041127Abstract: The present invention is a finFET type semiconductor device using LDMOS features. The device includes a first portion of a substrate doped with a second doping type and has a first trench, second trench, and first fin. The second portion of the substrate with a first doping type includes a third trench and second fin. The second fin between the second and third trench covers a part the first portion and a part of the second portion of the substrate. A first segment of the second fin is between the second segment and second trench. A second segment covers a part of the second portion of the substrate and is between the first segment and third trench. A gate covering at least a part of the first segment and a part of the first portion and a part of the second portion of the substrate.Type: GrantFiled: May 14, 2013Date of Patent: May 26, 2015Assignee: International Business Machines CorporationInventors: John B. Campi, Jr., Robert J. Gauthier, Jr., Junjun Li, Rahul Mishra, Souvick Mitra, Mujahid Muhammad
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Publication number: 20150137246Abstract: Embodiments of systems, methods, and apparatus for improving ESD performance and switching time for semiconductor devices including metal-oxide-semiconductor (MOS) field effect transistors (FETs), and particularly to MOSFETs fabricated on Semiconductor-On-Insulator (“SOT”) and Silicon-On-Sapphire (“SOS”) substrates.Type: ApplicationFiled: October 22, 2014Publication date: May 21, 2015Inventors: Eric S. Shapiro, Matt Allison
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Publication number: 20150108588Abstract: Radiation hardened NMOS devices suitable for application in NMOS, CMOS, or BiCMOS integrated circuits, and methods for fabricating them. A device includes a p-type silicon substrate, a field oxide surrounding a moat region on the substrate tapering through a Bird's Beak region to a gate oxide within the moat region, a heavily-doped p-type guard region underlying at least a portion of the Bird's Beak region and terminating at the inner edge of the Bird's Beak region, a gate included in the moat region, and n-type source and drain regions spaced by a gap from the inner edge of the Bird's Beak and guard regions. A variation of minor alterations to the conventional moat and n-type source/drain masks. The resulting devices have improved radiation tolerance while having a high breakdown voltage and minimal impact on circuit density.Type: ApplicationFiled: September 25, 2014Publication date: April 23, 2015Inventor: James Fred Salzman
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Publication number: 20150102427Abstract: A semiconductor device includes a substrate having an active region, a drain region in the active region, a source region in the active region, a gate structure, and a conductive field plate. The gate structure extends in a first direction over the active region. The gate structure is arranged between the drain region and the source region in a second direction transverse to the first direction. The conductive field plate extends in the second direction over an edge of the active region.Type: ApplicationFiled: October 11, 2013Publication date: April 16, 2015Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Po-Yu CHEN, Wan-Hua HUANG, Jing-Ying CHEN
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Patent number: 9006820Abstract: A transistor includes a semiconductor body; a body region of a first conductivity type formed in the semiconductor body; a gate electrode formed partially overlapping the body region and insulated from the semiconductor body by a gate dielectric layer; a source diffusion region of a second conductivity type formed in the body region on a first side of the gate electrode; a trench formed in the semiconductor body on a second side, opposite the first side, of the gate electrode, the trench being lined with a sidewall dielectric layer; and a doped sidewall region of the second conductivity type formed in the semiconductor body along the sidewall of the trench where the doped sidewall region forms a vertical drain current path for the transistor.Type: GrantFiled: December 19, 2012Date of Patent: April 14, 2015Assignee: Alpha and Omega Semiconductor IncorporatedInventor: Hideaki Tsuchiko
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Patent number: 9000538Abstract: A downsized semiconductor device having an excellent reverse characteristic, and a method of manufacturing the semiconductor device is sought to improve. The semiconductor device comprises a semiconductor body having a polygonal contour. An active area is formed in the semiconductor body. An EQR electrode is formed so as to surround the active area and to have curved portions of the EQR electrode along the corners of the semiconductor body. An interlayer insulating film is formed to cover the active area and the EQR electrode. The EQR electrode is embedded in the interlayer insulating film around the active area. EQR contacts are in contact with the curved portions of the EQR electrode and the semiconductor body outside the curved portions, and have at least side walls covered with the interlayer insulating film.Type: GrantFiled: June 21, 2011Date of Patent: April 7, 2015Assignee: Renesas Electronics CorporationInventor: Kouichi Murakawa
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Publication number: 20150091104Abstract: The invention provides a semiconductor structure and a semiconductor device having such semiconductor structure. The semiconductor structure includes: a substrate; a first well having a first conductivity type, which is provided on the substrate; a second well having a second conductivity type and contacting the first well at a boundary in between in a lateral direction; and a plurality of mitigation regions having the first conductivity type or the second conductivity type, provided in the first well and being close to the boundary in a lateral direction and penetrating the first well in a vertical direction.Type: ApplicationFiled: September 30, 2013Publication date: April 2, 2015Applicant: RICHTEK TECHNOLOGY CORPORATIONInventor: Tsung-Yi Huang
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Patent number: 8994115Abstract: A semiconductor structure for facilitating an integration of power devices on a common substrate includes a first insulating layer formed on the substrate and an active region having a first conductivity type formed on at least a portion of the first insulating layer. A first terminal is formed on an upper surface of the structure and electrically connects with at least one other region having the first conductivity type formed in the active region. A buried well having a second conductivity type is formed in the active region and is coupled with a second terminal formed on the upper surface of the structure. The buried well and the active region form a clamping diode which positions a breakdown avalanche region between the buried well and the first terminal. A breakdown voltage of at least one of the power devices is a function of characteristics of the buried well.Type: GrantFiled: June 16, 2014Date of Patent: March 31, 2015Assignee: Silanna Semiconductor U.S.A., Inc.Inventors: Jacek Korec, Boyi Yang
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Patent number: 8987839Abstract: Various embodiments provide ground shield structures, semiconductor devices, and methods for forming the same. An exemplary structure can include a substrate and a dielectric layer disposed on the substrate. The structure can further include multiple conductive rings disposed in the substrate, in the dielectric layer, and/or on the dielectric layer. Each conductive ring of the multiple conductive rings can have openings of about three or more, and the openings of the each conductive ring can divide the multiple conductive rings into a plurality of sub-conductive rings arranged spaced apart. The structure can further a ground ring electrically connected to each of the plurality of sub-conductive rings.Type: GrantFiled: November 12, 2013Date of Patent: March 24, 2015Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Ling Liu, Jenhao Cheng, Xining Wang
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Patent number: 8981384Abstract: There are provided a high-quality semiconductor device having stable characteristics and a method for manufacturing such a semiconductor device. The semiconductor device includes a substrate having a main surface, and a silicon carbide layer. The silicon carbide layer is formed on the main surface of the substrate. The silicon carbide layer includes a side surface as an end surface inclined relative to the main surface. The side surface substantially includes one of a {03-3-8} plane and a {01-1-4} plane in a case where the silicon carbide layer is of hexagonal crystal type, and substantially includes a {100} plane in a case where the silicon carbide layer is of cubic crystal type.Type: GrantFiled: July 14, 2011Date of Patent: March 17, 2015Assignee: Sumitomo Electric Industries, Ltd.Inventor: Takeyoshi Masuda
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Patent number: 8975681Abstract: In one surface of a semiconductor substrate, an active region in which main current flows and an IGBT is disposed is formed. A termination structure portion serving as an electric-field reduction region is formed laterally with respect to the active region. In the termination structure portion, a porous-oxide-film region, a p-type guard ring region, and an n+-type channel stopper region are formed. A plurality of floating electrodes are formed to contact the surface of the porous-oxide-film region. Another plurality of floating electrodes are formed to contact a first insulating film.Type: GrantFiled: May 31, 2013Date of Patent: March 10, 2015Assignee: Mitsubishi Electric CorporationInventors: Hajime Akiyama, Akira Okada
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Patent number: 8963260Abstract: A power semiconductor device includes a cell region on a semiconductor substrate, at least a transistor device in the cell region, a peripheral termination region encompassing the cell region, a plurality of epitaxial islands arranged around the cell region, and a grid type epitaxial layer in the peripheral termination region. The grid type epitaxial layer separates the plurality of epitaxial islands from one another.Type: GrantFiled: May 26, 2013Date of Patent: February 24, 2015Assignee: Anpec Electronics CorporationInventors: Yung-Fa Lin, Chia-Hao Chang
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Patent number: 8952457Abstract: An ESD protection circuit including a substrate of a first conductivity type, an annular well region of a second conductivity type, two first regions of the first conductivity type and at least one transistor of the second conductivity type is provided. The annular well region is disposed in the substrate. The first regions are disposed in the substrate and surrounded by the annular well region. The at least one transistor is disposed on the substrate between the first regions and including a source, a gate, and a drain. The annular well region and the drain are coupled to a first voltage source. The source and one of the first regions are coupled to a second voltage source, and the other of the first regions is coupled to a substrate triggering circuit.Type: GrantFiled: July 29, 2008Date of Patent: February 10, 2015Assignee: MACRONIX International Co., Ltd.Inventors: Shih-Yu Wang, Chia-Ling Lu, Yan-Yu Chen, Yu-Lien Liu, Tao-Cheng Lu
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Patent number: 8946817Abstract: A semiconductor device includes a semiconductor body including an inner region, and an edge region, a first doped device region of a first doping type in the inner region and the edge region and coupled to a first terminal, and at least one second doped device region of a second doping type complementary to the first doping type in the inner region and coupled to a second terminal. Further, the semiconductor device includes a minority carrier converter structure in the edge region. The minority carrier converter structure includes a first trap region of the second doping type adjoining the first doped device region, and a conductor electrically coupling the first trap region to the first doped device region.Type: GrantFiled: April 15, 2013Date of Patent: February 3, 2015Assignee: Infineon Technologies Austria AGInventor: Franz Hirler
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Publication number: 20150021713Abstract: Among other things, one or more semiconductor arrangements and techniques for forming such semiconductor arrangements are provided. A semiconductor arrangement comprises a first guard ring surrounding at least a portion of a device, and a first poly layer formed over the first guard ring.Type: ApplicationFiled: July 14, 2014Publication date: January 22, 2015Inventors: Sheng-Fang Cheng, Yen-Lin Liu, Chen-Chih Wu, Chien-Yuan Lee
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Publication number: 20150014791Abstract: A semiconductor device having a first layer adjoining a semiconductor layer, and further comprising at least one field modification structure positioned such that, in use, a potential at the field modification structure causes an E-field vector at a region of an interface between the semiconductor and the first layer to be modified.Type: ApplicationFiled: July 11, 2013Publication date: January 15, 2015Inventors: Edward John Coyne, Breandan Pol Og O hAnnaidh, Seamus P. Whiston, William Allan Lane, Donal P. McAuliffe
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Publication number: 20150008539Abstract: A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.Type: ApplicationFiled: July 7, 2014Publication date: January 8, 2015Inventors: Ryo KANDA, Tetsu TODA, Yasushi NAKAHARA, Yoshinori KAYA