As Active Junction In Bipolar Transistor (e.g., Schottky Collector) Patents (Class 257/474)
  • Patent number: 10950601
    Abstract: A current source includes a substrate, a base region of a first doping type formed in the substrate, an emitter region of a second doping type formed in the substrate and surrounding the base region, a first collector region of the second doping type formed in the base region, and at least one second collector region of the second doping type formed in the base region, wherein the emitter region includes a deep-well portion and an extending portion, the deep-well portion situated beneath the base region, the extending portion laterally surrounding the base region, the extending portion joined at its bottom to the deep-well portion, the extending portion being flush at its top with a top surface of the substrate. A method of forming the current source is also disclosed.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: March 16, 2021
    Assignee: NEXCHIP SEMICONDUCTOR CORPORATION
    Inventor: Geeng-Chuan Chern
  • Patent number: 9590045
    Abstract: A graphene base transistor comprises on a semiconductor substrate surface an emitter pillar and an emitter-contact pillar, which extend from a pillar foundation in a vertical direction. A dielectric filling layer laterally embeds the emitter pillar and the emitter-contact pillar above the pillar foundation. The dielectric filling layer has an upper surface that is flush with a top surface of the emitter pillar and with the at least one base-contact arm of a base-contact structure. A graphene base forms a contiguous layer between a top surface of the emitter pillar and a top surface of the base-contact arm. A collector stack and the base have the same lateral extension parallel to the substrate surface and perpendicular to those edges of the top surface of the emitter pillar and the base-contact arm that face each other.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: March 7, 2017
    Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ—INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
    Inventors: Andre Wolff, Wolfgang Mehr, Grzegorz Lupina, Jaroslaw Dabrowski, Gunther Lippert, Mindaugas Lukosius, Chafik Meliani, Christian Wenger
  • Publication number: 20150091125
    Abstract: A semiconductor array is described whose breakdown voltage has only a very low temperature coefficient or none at all and therefore there is little or no temperature-dependent voltage rise. The voltage limitation is achieved by a punch-through effect.
    Type: Application
    Filed: October 2, 2014
    Publication date: April 2, 2015
    Applicant: ROBERT BOSCH GMBH
    Inventors: Alfred GOERLACH, Ning Qu
  • Patent number: 8878329
    Abstract: A high voltage device having a Schottky diode integrated with a MOS transistor includes a semiconductor substrate a Schottky diode formed on the semiconductor substrate, at least a first doped region having a first conductive type formed in the semiconductor substrate and under the Schottky diode, and a control gate covering a portion of the Schottky diode and the first doped region positioned on the semiconductor substrate.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: November 4, 2014
    Assignee: United Microelectronics Corp.
    Inventor: Min-Hsuan Tsai
  • Patent number: 8872222
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises a first doped region, a second doped region, a doped strip and a top doped region. The first doped region has a first type conductivity. The second doped region is formed in the first doped region and has a second type conductivity opposite to the first type conductivity. The doped strip is formed in the first doped region and has the second type conductivity. The top doped region is formed in the doped strip and has the first type conductivity. The top doped region has a first sidewall and a second sidewall opposite to the first sidewall. The doped strip is extended beyond the first sidewall or the second sidewall.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: October 28, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Ching-Lin Chan, Chen-Yuan Lin, Cheng-Chi Lin, Shih-Chin Lien
  • Patent number: 8860170
    Abstract: A power semiconductor apparatus which is provided with a first power semiconductor device using Si as a base substance and a second power semiconductor device using a semiconductor having an energy bandgap wider than the energy bandgap of Si as a base substance, and includes a first insulated metal substrate on which the first power semiconductor device is mounted, a first heat dissipation metal base on which the first insulated metal substrate is mounted, a second insulated metal substrate on which the second power semiconductor device is mounted, and a second heat dissipation metal base on which the second insulated metal substrate is mounted.
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: October 14, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Katsumi Ishikawa, Kazutoshi Ogawa
  • Patent number: 8779473
    Abstract: A silicon-germanium (SiGe) heterojunction bipolar transistor (HBT) device that includes a substrate; a buried oxide layer near a bottom of the substrate; a collector region above and in contact with the buried oxide layer; a field oxide region on each side of the collector region; a pseudo buried layer under each field oxide region and in contact with the collector region; and a through region under and in contact with the buried oxide layer. A method for manufacturing a SiGe HBT device is also disclosed. The SiGe HBT device can isolate noise from the bottom portion of the substrate and hence can improve the intrinsic noise performance of the device at high frequencies.
    Type: Grant
    Filed: May 7, 2013
    Date of Patent: July 15, 2014
    Assignee: Shanghai Hua Hong NEC Electronics Co., Ltd.
    Inventors: Donghua Liu, Jing Shi, Wenting Duan, Wensheng Qian, Jun Hu
  • Patent number: 8617976
    Abstract: A method of forming an integrated circuit structure includes providing a substrate, and epitaxially growing a first semiconductor layer over the substrate. The first semiconductor layer includes a first III-V compound semiconductor material formed of group III and group V elements. The method further includes forming a gate structure on the first semiconductor layer, and forming a gate spacer on at least one sidewall of the gate structure. After the step of forming the gate structure, a second semiconductor layer including a second III-V compound semiconductor material is epitaxially grown on the first semiconductor layer.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: December 31, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 8513674
    Abstract: A method of manufacturing of a semiconductor device (101) includes: a fine pattern forming step of forming p-type impurity regions (3, 4) and surface ohmic contact electrodes (5) using a stepper, after forming an N-type epitaxial layer (2) on a SiC single-crystal substrate (1); a protective film planarizing step of forming a protective film so as to cover the surface ohmic contact electrodes (5) and performing planarization of the protective film; a substrate thinning step of thinning the SiC single-crystal substrate (1); a backside ohmic contact electrode forming step of forming a backside ohmic contact electrode (7) on the SiC single-crystal substrate (1); a surface Schottky contact electrode forming step of forming a Schottky metal portion (8) connected to the p-type impurity regions (3, 4) and the surface ohmic contact electrodes (5); and a step of forming a surface pad electrode (9) that covers the Schottky metal portion (8).
    Type: Grant
    Filed: November 25, 2009
    Date of Patent: August 20, 2013
    Assignee: Showa Denko K.K.
    Inventors: Akihiko Sugai, Yasuyuki Sakaguchi
  • Patent number: 8455975
    Abstract: A parasitic PNP bipolar transistor, wherein a base region includes a first and a second region; the first region is formed in an active area, has a depth larger than shallow trench field oxides, and has its bottom laterally extended into the bottom of the shallow trench field oxides on both sides of an active area; the second region is formed in an upper part of the first region and has a higher doping concentration; an N-type and a P-type pseudo buried layer is respectively formed at the bottom of the shallow trench field oxides; a deep hole contact is formed on top of the N-type pseudo buried layer to pick up the base; the P-type pseudo buried layer forms a collector region separated from the active area by a lateral distance; an emitter region is formed by a P-type SiGe epitaxial layer formed on top of the active area.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: June 4, 2013
    Assignee: Shanghai Hua Hong NEC Electronics Co., Ltd.
    Inventors: Donghua Liu, Wensheng Qian
  • Patent number: 8441075
    Abstract: A power semiconductor apparatus which is provided with a first power semiconductor device using Si as a base substance and a second power semiconductor device using a semiconductor having an energy bandgap wider than the energy bandgap of Si as a base substance, and includes a first insulated metal substrate on which the first power semiconductor device is mounted, a first heat dissipation metal base on which the first insulated metal substrate is mounted, a second insulated metal substrate on which the second power semiconductor device is mounted, and a second heat dissipation metal base on which the second insulated metal substrate is mounted.
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: May 14, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Katsumi Ishikawa, Kazutoshi Ogawa
  • Publication number: 20130082322
    Abstract: Disclosed is a semiconductor device including a drift region of a first doping type, a junction between the drift region and a device region, and at least one field electrode structure in the drift region. The field electrode structure includes a field electrode, a field electrode dielectric adjoining the field electrode and arranged between the field electrode and the drift region, and having an opening, at least one of a field stop region and a generation region.
    Type: Application
    Filed: September 30, 2011
    Publication date: April 4, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Hans Weber, Franz Hirler, Stefan Gamerith
  • Patent number: 8410572
    Abstract: A base contact connection, an emitter structure and a collector structure are arranged on an n-layer, which can be provided for additional npn transistors. The collector structure is arranged laterally to the emitter structure and at least one of the emitter and collector comprises a Schottky contact on a surface area of the n-layer.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: April 2, 2013
    Assignee: EPCOS AG
    Inventor: Léon C. M. van den Oever
  • Patent number: 8368166
    Abstract: A junction barrier Schottky diode has N-type well having a surface and first peak impurity concentration; P-type anode region in surface of the well having second peak impurity concentration; N-type cathode contact region in surface of the well and laterally spaced from a first wall of the anode region having third peak impurity concentration; and first N-type region in surface of the well and laterally spaced from second wall of the anode region having fourth impurity concentration. Center of the spaced region between the first N-type region and the second wall of the anode region has fifth peak impurity concentration. Ohmic contact is made to the anode region and cathode contact region. Schottky contact is made to the first N-type region. First and fifth peak impurity concentrations are less than the fourth peak impurity concentration. The fourth peak impurity concentration is less than the second and third peak impurity concentrations.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: February 5, 2013
    Assignee: Intersil Americas Inc.
    Inventors: Dev Alok Girdhar, Michael David Church
  • Patent number: 8274095
    Abstract: A semiconductor device having the present high withstand voltage power device IGBT has at a back surface a p collector layer with boron injected in an amount of approximately 3×1013/cm2 with an energy of approximately 50 KeV to a depth of approximately 0.5 ?m, and an n+ buffer layer with phosphorus injected in an amount of approximately 3×1012/cm2 with an energy of 120 KeV to a depth of approximately 20 ?m. To control lifetime, a semiconductor substrate is exposed to protons at the back surface. Optimally, it is exposed to protons at a dose of approximately 1×1011/cm2 to a depth of approximately 32 ?m as measured from the back surface. Thus snapback phenomenon can be eliminated and an improved low saturation voltage (Vce (sat))-offset voltage (Eoff) tradeoff can be achieved.
    Type: Grant
    Filed: May 31, 2011
    Date of Patent: September 25, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventor: Yoshiaki Hisamoto
  • Publication number: 20120068297
    Abstract: A high voltage device having a Schottky diode integrated with a MOS transistor includes a semiconductor substrate a Schottky diode formed on the semiconductor substrate, at least a first doped region having a first conductive type formed in the semiconductor substrate and under the Schottky diode, and a control gate covering a portion of the Schottky diode and the first doped region positioned on the semiconductor substrate.
    Type: Application
    Filed: September 17, 2010
    Publication date: March 22, 2012
    Inventor: Min-Hsuan Tsai
  • Publication number: 20110248375
    Abstract: A base contact connection, an emitter structure and a collector structure are arranged on an n-layer, which can be provided for additional npn transistors. The collector structure is arranged laterally to the emitter structure and at least one of the emitter and collector comprises a Schottky contact on a surface area of the n-layer.
    Type: Application
    Filed: October 22, 2009
    Publication date: October 13, 2011
    Inventor: Léon C. M. Van den Oever
  • Patent number: 8022496
    Abstract: A structure comprises a single wafer with a first subcollector formed in a first region having a first thickness and a second subcollector formed in a second region having a second thickness, different from the first thickness. A method is also contemplated which includes providing a substrate including a first layer and forming a first doped region in the first layer. The method further includes forming a second layer on the first layer and forming a second doped region in the second layer. The second doped region is formed at a different depth than the first doped region. The method also includes forming a first reachthrough in the first layer and forming a second reachthrough in second layer to link the first reachthrough to the surface.
    Type: Grant
    Filed: October 17, 2007
    Date of Patent: September 20, 2011
    Assignee: International Business Machines Corporation
    Inventors: Douglas D. Coolbaugh, Alvin J. Joseph, Seong-dong Kim, Louis D. Lanzerotti, Xuefeng Liu, Robert M. Rassel
  • Patent number: 8017974
    Abstract: A semiconductor device having the present high withstand voltage power device IGBT has at a back surface a p collector layer with boron injected in an amount of approximately 3×1013/cm2 with an energy of approximately 50 KeV to a depth of approximately 0.5 ?m, and an n+ buffer layer with phosphorus injected in an amount of approximately 3×1012/cm2 with an energy of 120 KeV to a depth of approximately 20 ?m. To control lifetime, a semiconductor substrate is exposed to protons at the back surface. Optimally, it is exposed to protons at a dose of approximately 1×1011/cm2 to a depth of approximately 32 ?m as measured from the back surface. Thus snapback phenomenon can be eliminated and an improved low saturation voltage (Vce (sat))-offset voltage (Eoff) tradeoff can be achieved.
    Type: Grant
    Filed: July 17, 2008
    Date of Patent: September 13, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventor: Yoshiaki Hisamoto
  • Patent number: 7936040
    Abstract: A semiconductor transistor device includes one or more conductive base regions, a first semiconductor barrier region, a second semiconductor barrier region, a conductive emitter region, and a conductive collector region. The first semiconductor barrier region or the second semiconductor barrier region has a dimension smaller than 100 ?. A first Schottky barrier junction is formed at the interface of the first semiconductor barrier region and the one or more conductive base regions. A second Schottky barrier junction is formed at the interface of the second semiconductor barrier region and the one or more conductive base regions. A third Schottky barrier junction is formed at the interface of the conductive emitter region and the first semiconductor barrier region. A fourth Schottky barrier junction is formed at the interface of the conductive collector region and the second semiconductor barrier region.
    Type: Grant
    Filed: October 26, 2008
    Date of Patent: May 3, 2011
    Inventor: Koucheng Wu
  • Patent number: 7863610
    Abstract: An integrated circuit is disclosed. One embodiment includes a first diode, a second diode, and a semiconductor line coupled to the first diode and the second diode. The line includes a first silicide region between the first diode and the second diode.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: January 4, 2011
    Assignees: Qimonda North America Corp., International Business Machines Corporation
    Inventors: Bipin Rajendran, Shoaib Hasan.Zaidi
  • Patent number: 7829970
    Abstract: A junction barrier Schottky diode has an N-type well having surface and a first impurity concentration; a p-type anode region in the surface of the well, and having a second impurity concentration; and an N-type cathode region in the surface of the well and horizontally abutting the anode region, and having a third impurity concentration. A first N-type region vertically abuts the anode and cathode regions, and has a fourth impurity concentration. An ohmic contact is made to the anode and a Schottky contact is made to the cathode. The fourth impurity concentration is less than the first, second and third impurity concentrations.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: November 9, 2010
    Assignee: Intersil Americas Inc.
    Inventors: Dev Alok Girdhar, Michael David Church
  • Publication number: 20100230774
    Abstract: A Schottky or PN diode is formed where a first cathode portion is an N epitaxial layer that is relatively lightly doped. An N+ buried layer is formed beneath the cathode for conducting the cathode current to a cathode contact. A more highly doped N-well is formed, as a second cathode portion, in the epitaxial layer so that the complete cathode comprises the N-well surrounded by the more lightly doped first cathode portion. An anode covers the upper areas of the first and second cathode portions so both portions conduct current when the diode is forward biased. When the diode is reverse biased, the depletion region in the central N-well will be relatively shallow but substantially planar so will have a relatively high breakdown voltage. The weak link for breakdown voltage will be the curved edge of the deeper depletion region in the lightly doped first cathode portion under the outer edges of the anode. Therefore, the N-well lowers the on-resistance without lowering the breakdown voltage.
    Type: Application
    Filed: March 10, 2009
    Publication date: September 16, 2010
    Applicant: MICREL, INC.
    Inventor: Martin Alter
  • Patent number: 7709923
    Abstract: A metal-base transistor is suggested. The transistor comprises a first and a second electrode (2, 6) and base electrode (6) to control current flow between the first and second electrode. The first electrode (2) is made from a semiconduction material. The base electrode (3) is a metal layer deposited on top of the semiconducting material forming the first electrode. According the invention the second electrode is formed by a semiconducting nanowire (6) being in electrical contact with the base electrode (3).
    Type: Grant
    Filed: October 29, 2006
    Date of Patent: May 4, 2010
    Assignee: NXP B.V.
    Inventors: Prabhat Agarwal, Godefridus A. M. Hurkx
  • Patent number: 7656002
    Abstract: The present invention relates to a microelectronic device having a bipolar epitaxial structure that provides at least one bipolar transistor element formed over at least one field effect transistor (FET) epitaxial structure that provides at least one FET element. The epitaxial structures are separated with at least one separation layer. Additional embodiments of the present invention may use different epitaxial layers, epitaxial sub-layers, metallization layers, isolation layers, layer materials, doping materials, isolation materials, implant materials, or any combination thereof.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: February 2, 2010
    Assignee: RF Micro Devices, Inc.
    Inventors: Curtis A. Barratt, Michael T. Fresina, Brian G. Moser, Dain C. Miller, Walter A. Wohlmuth
  • Publication number: 20090166795
    Abstract: A method includes forming a first conductive type buried layer on a semiconductor substrate, forming a second conductive type epi-layer on the semiconductor substrate using an epitaxial growth method such that the epi-layer surrounds the buried layer, forming a first conductive type plug from the surface of the semiconductor substrate to the buried layer, forming a first conductive type well, which is horizontally spaced from the first conductive type plug, from the surface of the semiconductor substrate to the buried layer, and forming a plurality of metal contacts as an anode and cathode of the schottky diode, respectively, by making electrical connection to the well and plug.
    Type: Application
    Filed: December 28, 2008
    Publication date: July 2, 2009
    Inventor: Chul-Jin Yoon
  • Patent number: 7528459
    Abstract: A monolithically integrated punch-through diode with a Schottky-like behavior. This is achieved as a Schottky-metal area (16) is deposited onto at least part of the first p-doped well's (9) surface. The Schottky-metal area (16) and the p-doped well (9) form the metal-semiconductor-transition of a Schottky-diode. The overvoltage protection of the inventive PT-diode is improved as the forward characteristic has a voltage drop that is less than 0.5V.
    Type: Grant
    Filed: May 24, 2004
    Date of Patent: May 5, 2009
    Assignee: NXP B.V.
    Inventors: Hans-Martin Ritter, Martin Lübbe, Jochen Wynants
  • Patent number: 7452756
    Abstract: The semiconductor device according to one of the aspects of the present invention includes a semiconductor substrate of a first conductivity type, having upper and lower surfaces. A collector region of a second conductivity type is formed on the lower surface of the semiconductor substrate, and a collector electrode is formed on the collector region. Also, at least one pair of isolation regions of the second conductivity type are formed extending from the upper surface of the semiconductor substrate to the collector layer for defining a drift region of the first conductivity type, in conjunction with the collector region. A base region of the second conductivity type is formed adjacent the upper surface of the semiconductor substrate and within the drift region, and an emitter region of the first conductivity type is formed adjacent the upper surface of the semiconductor substrate and within the base region. A gate electrode is formed opposing to the base region via an insulating layer.
    Type: Grant
    Filed: November 5, 2007
    Date of Patent: November 18, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Mitsuru Kaneda, Hideki Takahashi
  • Patent number: 7329940
    Abstract: A structure comprises a single wafer with a first subcollector formed in a first region having a first thickness and a second subcollector formed in a second region having a second thickness, different from the first thickness. A method is also contemplated which includes providing a substrate including a first layer and forming a first doped region in the first layer. The method further includes forming a second layer on the first layer and forming a second doped region in the second layer. The second doped region is formed at a different depth than the first doped region. The method also includes forming a first reachthrough in the first layer and forming a second reachthrough in second layer to link the first reachthrough to the surface.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: February 12, 2008
    Assignee: International Business Machines Corporation
    Inventors: Douglas D. Coolbaugh, Alvin J. Joseph, Seong-dong Kim, Louis D. Lanzerotti, Xuefeng Liu, Robert M. Rassel
  • Patent number: 7326996
    Abstract: The semiconductor device according to one of the aspects of the present invention includes a semiconductor substrate of a first conductivity type, having upper and lower surfaces. A collector region of a second conductivity type is formed on the lower surface of the semiconductor substrate, and a collector electrode is formed on the collector region. Also, at least one pair of isolation regions of the second conductivity type are formed extending from the upper surface of the semiconductor substrate to the collector layer for defining a drift region of the first conductivity type, in conjunction with the collector region. A base region of the second conductivity type is formed adjacent the upper surface of the semiconductor substrate and within the drift region, and an emitter region of the first conductivity type is formed adjacent the upper surface of the semiconductor substrate and within the base region. A gate electrode is formed opposing to the base region via an insulating layer.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: February 5, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Mitsuru Kaneda, Hideki Takahashi
  • Patent number: 7276771
    Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: October 2, 2007
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
  • Patent number: 7187054
    Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: March 6, 2007
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
  • Patent number: 7157785
    Abstract: A semiconductor device is disclosed that reduces the reverse leakage current caused by reverse bias voltage application and reduces the on-voltage of the IGBT. A two-way switching device using the semiconductor devices is provided, and a method of manufacturing the semiconductor device is disclosed. The reverse blocking IGBT reduces the reverse leakage current and the on-voltage by bringing portions of an n?-type drift region 1 that extend between p-type base regions and an emitter electrode into Schottky contact to form Schottky junctions.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: January 2, 2007
    Assignee: Fuji Electric Device Technology Co., Ltd.
    Inventors: Manabu Takei, Tatsuya Naito, Michio Nemoto
  • Patent number: 7112865
    Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.
    Type: Grant
    Filed: March 3, 2005
    Date of Patent: September 26, 2006
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
  • Patent number: 6975013
    Abstract: A diode is provided which includes a first-conductivity-type cathode layer, a first-conductivity-type drift layer placed on the cathode region and having a lower concentration than the cathode layer, a generally ring-like second-conductivity-type ring region formed in the drift layer, second-conductivity-type anode region formed in the drift layer located inside the ring region, a cathode electrode formed in contact with the cathode layer, and an anode electrode formed in contact with the anode region, wherein the lowest resistivity of the second-conductivity-type anode region is at least 1/100 of the resistivity of the drift layer, and the thickness of the anode region is smaller than the diffusion depth of the ring region.
    Type: Grant
    Filed: October 2, 2002
    Date of Patent: December 13, 2005
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Tatsuhiko Fujihira, Yasushi Miyasaka
  • Patent number: 6963121
    Abstract: A three-terminal semiconductor transistor device comprises a base region formed by a semiconductor material of a first conductivity type at a first concentration, the base region being in contact with a first electrical terminal via a semiconductor material of the second conductivity type at a second concentration, wherein the second concentration is lower than the first concentration. The three-terminal semiconductor transistor device also includes a conductive emitter region in contact with the semiconductor base region, forming a first Schottky barrier junction at the interface of the conductive emitter region and the semiconductor base region. The conductive emitter region is in contact with a second electrical terminal. The three-terminal semiconductor transistor device further includes a conductive collector region in contact with the semiconductor base region, which forms a second Schottky barrier junction at the interface of the conductive collector region and the semiconductor base region.
    Type: Grant
    Filed: February 18, 2004
    Date of Patent: November 8, 2005
    Inventor: Koucheng Wu
  • Patent number: 6956274
    Abstract: A metallization stack is provided for use as a contact structure in an integrated MEMS device. The metallization stack comprises a titanium-tungsten adhesion and barrier layer formed with a platinum layer formed on top. The platinum feature is formed by sputter etching the platinum in argon, followed by a wet etch in aqua regia using an oxide hardmask. Alternatively, the titanium-tungsten and platinum layers are deposited sequentially and patterned by a single plasma etch process with a photoresist mask.
    Type: Grant
    Filed: January 11, 2002
    Date of Patent: October 18, 2005
    Assignee: Analog Devices, Inc.
    Inventors: Susan A. Alie, Bruce K. Wachtmann, David S. Kneedler, Scott Limb, Kieran Nunan
  • Patent number: 6949401
    Abstract: A method for producing a semiconductor component with adjacent Schottky (5) and pn (9) junctions positions in a drift area (2, 10) of a semiconductor material. According to the method, a silicon carbide substrate doped with a first doping material of at least 1018 cm?3 is provided, and a silicon carbide layer with a second doping material of the same charge carrier type in the range of 1014 and 1017 cm?3 is homo-epitaxially deposited on the substrate. A third doping material with a complimentary charge carrier is inserted, and structured with the aid of a diffusion and/or ion implantation, on the silicon carbide layer surface that is arranged far from the substrate to form pn junctions. Subsequently the component is subjected to a first temperature treatment between 1400° C. and 1700° C. Following this temperature treatment, a first metal coating is deposited on the implanted surface in order to form a Schottky contact and then a second metal coating is deposited in order to form an ohmic contact.
    Type: Grant
    Filed: September 9, 2002
    Date of Patent: September 27, 2005
    Assignee: Daimler Chrysler AG
    Inventors: Nando Kaminski, Raban Held
  • Patent number: 6933751
    Abstract: A logic gate is described that has an N-type region, which may be an N-well or N-tub, forming a cathode of one or more Schottky diodes and a collector of an NPN bipolar transistor. Accordingly, the Schottly diodes and transistor do not need to be isolated from one another, resulting in a very compact logic gate. The logic gate forms a portion of a NAND function in one embodiment. One or more Schottky diodes between the collector and base of the bipolar transistor act as a clamp to prevent the transistor from saturating. The clamp diodes can also be used to adjust the output voltage of the gate to ensure downstream transistors can be fully turned off.
    Type: Grant
    Filed: September 18, 2003
    Date of Patent: August 23, 2005
    Assignee: Micrel, Inc.
    Inventors: Thomas S. Wong, Robert W. Bechdolt, Phi Thai
  • Publication number: 20040227203
    Abstract: A three-terminal semiconductor transistor device comprises a base region formed by a semiconductor material of a first conductivity type at a first concentration, the base region being in contact with a first electrical terminal via a semiconductor material of the second conductivity type at a second concentration, wherein the second concentration is lower than the first concentration. The three-terminal semiconductor transistor device also includes a conductive emitter region in contact with the semiconductor base region, forming a first Schottky barrier junction at the interface of the conductive emitter region and the semiconductor base region. The conductive emitter region is in contact with a second electrical terminal. The three-terminal semiconductor transistor device further includes a conductive collector region in contact with the semiconductor base region, which forms a second Schottky barrier junction at the interface of the conductive collector region and the semiconductor base region.
    Type: Application
    Filed: February 18, 2004
    Publication date: November 18, 2004
    Inventor: Koucheng Wu
  • Patent number: 6764918
    Abstract: A structure and method of making an NPN heterojunction bipolar transistor (100) includes a semiconductor substrate (11) with a first region (82) containing a dopant (86) for forming a base region of the transistor. A second region (84) adjacent to the first region is used to form an emitter region of the transistor. An interstitial trapping material (81) reduces diffusion of dopants in the base region during subsequent thermal processing.
    Type: Grant
    Filed: December 2, 2002
    Date of Patent: July 20, 2004
    Assignee: Semiconductor Components Industries, L.L.C.
    Inventor: Gary H. Loechelt
  • Patent number: 6753580
    Abstract: A diode is formed having a weak injection shallow, low P concentration anode in an N type wafer or die. The resulting diode has a soft reverse recovery characteristic with low recovery voltage and is particularly useful either as a power factor correction diode or as an antiparallel connected diode in a motor control circuit.
    Type: Grant
    Filed: May 5, 2000
    Date of Patent: June 22, 2004
    Assignee: International Rectifier Corporation
    Inventors: Richard Francis, Chiu Ng, Fabrizio Ruo Redda
  • Patent number: 6744111
    Abstract: A three-terminal semiconductor transistor device comprises a semiconductor base region in contact with a first electric terminal, a conductive emitter region in contact with the semiconductor base region, forming a first Schottky barrier junction at the interface of the conductive emitter region and the semiconductor base region. The conductive emitter region is in contact with a second electric terminal. The three-terminal semiconductor transistor device further includes a conductive collector region in contact with the semiconductor base region, forming a second Schottky barrier junction at the interface of the conductive collector region and the semiconductor base region. The conductive collector region is in contact with a third electric terminal. The tunneling currents through the first and the second Schottky barrier junctions are substantially controlled by the voltage of the semiconductor base region.
    Type: Grant
    Filed: May 15, 2003
    Date of Patent: June 1, 2004
    Inventor: Koucheng Wu
  • Patent number: 6703283
    Abstract: A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semiconductor material, thereby controlling electrical resistance at the interface.
    Type: Grant
    Filed: February 4, 1999
    Date of Patent: March 9, 2004
    Assignee: International Business Machines Corporation
    Inventors: Arne W. Ballantine, Douglas D. Coolbaugh, Jeffrey Gilbert, Joseph R. Greco, Glenn R. Miller
  • Patent number: 6674144
    Abstract: Isolation of a heterojunction bipolar transistor device in an integrated circuit is accomplished by forming the device within a trench in dielectric material overlying single crystal silicon. Precise control over the thickness of the initially-formed dielectric material ultimately determines the depth of the trench and hence the degree of isolation provided by the surrounding dielectric material. The shape and facility of etching of the trench may be determined through the use of etch-stop layers and unmasked photoresist regions of differing widths. Once the trench in the dielectric material is formed, the trench is filled with selectively and/or nonselectively grown epitaxial silicon. The process avoids complex and defect-prone deep trench masking, deep trench silicon etching, deep trench liner formation, and dielectric reflow steps associated with conventional processes.
    Type: Grant
    Filed: October 11, 2002
    Date of Patent: January 6, 2004
    Assignee: National Semiconductor Corporation
    Inventor: Stepan Essaian
  • Patent number: 6667557
    Abstract: A method for providing a package for a semiconductor chip that minimizes stresses and strains that arise from differential thermal expansion on chip-to-substrate or chip-to-card interconnections. A collar element of one or more elements is provided. Adhesive material connects the collar element to the electric device and to the substrate that supports it, forming a unitary electrical package.
    Type: Grant
    Filed: April 9, 2003
    Date of Patent: December 23, 2003
    Assignee: International Business Machines Corporation
    Inventors: David J. Alcoe, Eric A. Johnson, Matthew M. Reiss, Charles G. Woychik
  • Patent number: 6633071
    Abstract: The present invention relates to a contacting structure on a lightly-doped P-type region of a semiconductor component, this P-type region being positively biased during the on-state operation of said component, including, on the P region a layer of a platinum silicide, or of a metal silicide having with the P-type silicon a barrier height lower than or equal to that of the platinum silicide.
    Type: Grant
    Filed: May 22, 1998
    Date of Patent: October 14, 2003
    Assignee: SGS-Thomson Microelectronics S.A.
    Inventor: Cyril Furio
  • Patent number: 6627970
    Abstract: An integrated semiconductor circuit, in particular a semiconductor memory circuit, having at least one integrated electrical antifuse structure is described. The antifuse structure is located within an insulated well composed of semiconductor material.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: September 30, 2003
    Assignee: Infineon Technologies AG
    Inventors: Robert Fuller, Helmut Schneider
  • Patent number: 6573582
    Abstract: A bipolar transistor is formed on a semiconductor substrate. A Schottky diode is formed in the collector region of the bipolar transistor. The collector region and the semiconductor substrate are isolated in potential from each other by potential isolating layers.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: June 3, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yasunori Yamashita, Fumitoshi Yamamoto, Tomohide Terashima
  • Publication number: 20030094673
    Abstract: A semiconductor device and a method of fabricating a semiconductor device having multiple subcollectors which are formed in a common wafer, in order to provide multiple structures having different characteristic and frequency response are provided. The subcollectors may be provided using different doses or different material implants resulting in devices having different optimum unity current gain cutoff frequency (fT) and breakdown voltage (BVCEO and BVCBO) on a common wafer.
    Type: Application
    Filed: November 16, 2001
    Publication date: May 22, 2003
    Applicant: International Business Machines Corporation
    Inventors: James S. Dunn, Louis D. Lanzerotti, Steven H. Voldman