With Means To Increase Current Gain Or Operating Frequency Patents (Class 257/593)
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Patent number: 11967636Abstract: Structures for a bipolar junction transistor and methods of fabricating a structure for a bipolar junction transistor. The structure includes a first terminal having a first raised semiconductor layer, a second terminal having a second raised semiconductor layer, and a base layer positioned laterally between the first raised semiconductor layer and the second raised semiconductor layer. The structure further includes a spacer positioned laterally positioned between the first raised semiconductor layer and the base layer. The spacer includes a dielectric material and an airgap surrounded by the dielectric material.Type: GrantFiled: February 25, 2022Date of Patent: April 23, 2024Assignee: Global Foundries U.S. Inc.Inventors: Shesh Mani Pandey, Hong Yu
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Patent number: 10819445Abstract: Embodiments may relate to a transceiver chip. The transceiver chip may include a substrate that has a first transceiver component and a second transceiver component positioned therein. The transceiver chip may further include a well material that is positioned between the first transceiver component and the second transceiver component. The well material may mitigate cross-talk between the first transceiver component and the second transceiver component. Other embodiments may be described or claimed.Type: GrantFiled: November 20, 2018Date of Patent: October 27, 2020Assignee: Intel CorporationInventors: Telesphor Kamgaing, Georgios Dogiamis, Henning Braunisch, Hyung-Jin Lee, Richard Dischler
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Patent number: 10645824Abstract: There are provided an electronic component housing package and the like which have high efficiency of heating by infrared rays. An electronic component housing package includes an insulating substrate including a plurality of insulating layers stacked on top of each other, an upper surface of the insulating substrate being provided with an electronic component mounting section. The plurality of insulating layers each contain a first material as a major constituent. The electronic component housing package comprises one or more infrared-ray absorbing layers disposed between the plurality of insulating layers and/or disposed on an upper surface of uppermost one of the plurality of insulating layers. The one or more absorbing layers contain a second material which is higher in infrared absorptivity than the first material.Type: GrantFiled: August 22, 2014Date of Patent: May 5, 2020Assignee: KYOCERA CORPORATIONInventor: Noritaka Niino
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Patent number: 10043792Abstract: An apparatus including an electrostatic discharge (ESD) protection device comprising a semiconductor having first, second and third regions arranged to form a transistor, wherein the first region is doped with a first impurity of a first conductivity type and is separated from the second region which is doped with a second impurity of a second conductivity type opposite the first type, and wherein a dimensional constraint of the regions defines an operational threshold of the ESD protection device. In one example, the separation between a collector and an emitter of a bipolar transistor defines a trigger voltage to cause the electrostatic discharge protection device to become conducting. In another example, a width of a bipolar transistor base controls a holding voltage of the electrostatic discharge protection device.Type: GrantFiled: November 8, 2016Date of Patent: August 7, 2018Assignee: Analog Devices, Inc.Inventors: Edward John Coyne, Patrick Martin McGuinness, Paul Malachy Daly, Bernard Patrick Stenson, David J. Clarke, Andrew David Bain, William Allan Lane
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Patent number: 9653566Abstract: Device structures, fabrication methods, and design structures for a bipolar junction transistor. A trench isolation region is formed in a substrate. The trench isolation region is coextensive with a collector in the substrate. A base layer is formed on the collector and on a first portion of the trench isolation region. A dielectric layer is formed on the base layer and on a second portion of the trench isolation region peripheral to the base layer. After the dielectric layer is formed, the trench isolation region is at least partially removed to define an air gap beneath the dielectric layer and the base layer.Type: GrantFiled: December 3, 2015Date of Patent: May 16, 2017Assignee: GLOBALFOUNDRIES Inc.Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater, Anthony K. Stamper
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Patent number: 9490353Abstract: This disclosure describes a switch having a collector, base, emitter, and an intrinsic region between the collector and base. The intrinsic region increases the efficiency of the switch and reduces losses. The collector, base, and emitter each have respective terminals, and an AC component of current passing through the base terminal is greater than an AC component of current passing through the emitter terminal. Additionally, in an on-state a first alternating current between the base and collector terminals is greater than a second alternating current between the collector and emitter terminals. In other words, AC passes primarily between collector and base as controlled by a DC current between the base and emitter.Type: GrantFiled: August 27, 2013Date of Patent: November 8, 2016Assignee: Advanced Energy Industries, Inc.Inventors: Gideon Van Zyl, Gennady G. Gurov
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Patent number: 9368608Abstract: Fabrication methods for a device structure and device structures. A trench isolation region is formed that bounds an active device region of a semiconductor substrate. A first semiconductor layer is formed on the active device region and on the trench isolation region. A first airgap is formed between the first semiconductor layer and the active device region. A second airgap is formed between the first semiconductor layer and the trench isolation region. The first airgap extends into the active device region such that the height of the first airgap is greater than the height of the second airgap.Type: GrantFiled: June 25, 2015Date of Patent: June 14, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
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Patent number: 9331186Abstract: The present invention provides a semiconductor with a multilayered contact structure. The multilayered structure includes a metal contact placed on an active region of a semiconductor and a metal contact extension placed on the metal contact.Type: GrantFiled: December 21, 2009Date of Patent: May 3, 2016Assignee: NXP B.V.Inventors: Soenke Habenicht, Detief Oelgeschlaeger, Olrik Schumacher, Stefan Bengt Berglund
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Patent number: 9231074Abstract: Device structures, fabrication methods, and design structures for a bipolar junction transistor. A trench isolation region is formed in a substrate. The trench isolation region is coextensive with a collector in the substrate. A base layer is formed on the collector and on a first portion of the trench isolation region. A dielectric layer is formed on the base layer and on a second portion of the trench isolation region peripheral to the base layer. After the dielectric layer is formed, the trench isolation region is at least partially removed to define an air gap beneath the dielectric layer and the base layer.Type: GrantFiled: July 19, 2013Date of Patent: January 5, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Renata Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater, Anthony K. Stamper
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Publication number: 20150108542Abstract: A bipolar transistor includes a substrate and a first well in the substrate, the first well having a first dopant type. The bipolar transistor further includes a split collector region in the first well. The split collector region includes a highly doped central region having a second dopant type opposite the first dopant type; and a lightly doped peripheral region having the second dopant type, the lightly doped peripheral region surrounding the highly doped central region. A dopant concentration of the lightly doped peripheral region is less than a dopant concentration of the highly doped central region.Type: ApplicationFiled: October 17, 2013Publication date: April 23, 2015Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Fu-Hsiung YANG, Long-Shih LIN, Kun-Ming HUANG, Chih-Heng SHEN, Po-Tao CHU
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Patent number: 8946862Abstract: Methods are provided for forming a device that includes merged vertical and lateral transistors with collector regions of a first conductivity type between upper and lower base regions of opposite conductivity type that are Ohmically coupled via intermediate regions of the same conductivity type and to the base contact. The emitter is provided in the upper base region and the collector contact is provided in outlying sinker regions extending to the thin collector regions and an underlying buried layer. As the collector voltage increases part of the thin collector regions become depleted of carriers from the top by the upper and from the bottom by the lower base regions. This clamps the collector regions' voltage well below the breakdown voltage of the PN junction formed between the buried layer and the lower base region. The gain and Early Voltage are increased and decoupled and a higher breakdown voltage is obtained.Type: GrantFiled: March 6, 2014Date of Patent: February 3, 2015Assignee: Freescale Semiconductor, Inc.Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
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Patent number: 8896024Abstract: Provided is an electrostatic discharge (ESD) protection structure including a first and a second well region adjacent to each other, a first and a second doped region disposed in the first well region, a fourth and a fifth doped region disposed in the second well region, and a third doped region disposed in the first region and extending into the second well region. The second doped region is disposed between the first and the third doped regions, forming a diode with the first doped region, forming, together with the first well region and the second well region, a first bipolar junction transistor (BJT) electrically connecting to the diode, and having no contact window disposed thereon. The fourth doped region is disposed between the third and the fifth doped regions, forming a second BJT with the second well region and the first well region.Type: GrantFiled: July 11, 2013Date of Patent: November 25, 2014Assignee: United Microelectronics Corp.Inventors: Yi-Chun Chen, Li-Cih Wang, Lu-An Chen, Tien-Hao Tang
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Publication number: 20140266407Abstract: A bipolar junction transistor and an operating method and a manufacturing method for the same are provided. The bipolar junction transistor comprises a first doped region, a second doped region and a third doped region. The first doped region has a first type conductivity. The second doped region comprises well regions formed in the first doped region, having a second type conductivity opposite to the first type conductivity, and separated from each other by the first doped region. The third doped region has the first type conductivity. The third doped region is formed in the well regions or in the first doped region between the well regions.Type: ApplicationFiled: April 23, 2013Publication date: September 18, 2014Applicant: MACRONIX INTERNATIONAL CO., LTDInventors: Li-Fan Chen, Wing-Chor Chan, Jeng Gong
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Patent number: 8729669Abstract: A method for manufacturing a bipolar transistor includes forming a first epitaxial layer on a semiconductor substrate, forming a second epitaxial layer on the first epitaxial layer, forming an oxide layer on the second epitaxial layer, etching the oxide layer to form an opening in which the second epitaxial layer is exposed, and forming a third epitaxial layer in the opening. The first and third epitaxial layers have a first-type conductivity, and the second epitaxial layer has a second-type conductivity.Type: GrantFiled: December 2, 2010Date of Patent: May 20, 2014Assignees: CSMC Technologies FAB1 Co., Ltd., CSMC Technologies FAB2 Co., Ltd.Inventors: Le Wang, Linchun Gui, Kongwei Zhu, Zhiyong Zhao
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Patent number: 8669640Abstract: An improved device (20) is provided, comprising, merged vertical (251) and lateral transistors (252), comprising thin collector regions (34) of a first conductivity type sandwiched between upper (362) and lower (30) base regions of opposite conductivity type that are Ohmically coupled via intermediate regions (32, 361) of the same conductivity type and to the base contact (38). The emitter (40) is provided in the upper base region (362) and the collector contact (42) is provided in outlying sinker regions (28) extending to the thin collector regions (34) and an underlying buried layer (28). As the collector voltage increases part of the thin collector regions (34) become depleted of carriers from the top by the upper (362) and from the bottom by the lower (30) base regions. This clamps the thin collector regions' (34) voltage well below the breakdown voltage of the PN junction formed between the buried layer (28) and the lower base region (30).Type: GrantFiled: July 14, 2009Date of Patent: March 11, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
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Patent number: 8664697Abstract: To provide a transistor device, which is composed of a compound semiconductor, having a multilayer structure in which a high electron mobility transistor (HEMT) and a heterojunction bipolar transistor (HBT) are overlapped on the same substrate and epitaxial-grown thereon, wherein a band gap energy of an indium gallium phosphide layer (InGaP) included in an epitaxial layer, is set to 1.91 eV or more.Type: GrantFiled: July 6, 2012Date of Patent: March 4, 2014Assignee: Hitachi Cable, Ltd.Inventors: Takeshi Meguro, Jiro Wada, Yoshihiko Moriya
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Patent number: 8525233Abstract: A pnp SiGe heterojunction bipolar transistor (HBT) reduces the rate that p-type dopant atoms in the p+ emitter of the transistor out diffuse into a lowly-doped region of the base of the transistor by epitaxially growing the emitter to include a single-crystal germanium region and an overlying single-crystal silicon region.Type: GrantFiled: March 23, 2012Date of Patent: September 3, 2013Assignee: Texas Instruments IncorporatedInventors: Jeffrey A. Babcock, Alexei Sadovnikov
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Patent number: 8357985Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: January 13, 2012Date of Patent: January 22, 2013Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Patent number: 8350352Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: November 2, 2009Date of Patent: January 8, 2013Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Publication number: 20130001747Abstract: A method for manufacturing a bipolar transistor includes forming a first epitaxial layer on a semiconductor substrate, forming a second epitaxial layer on the first epitaxial layer, forming an oxide layer on the second epitaxial layer, etching the oxide layer to form an opening in which the second epitaxial layer is exposed, and forming a third epitaxial layer in the opening. The first and third epitaxial layers have a first-type conductivity, and the second epitaxial layer has a second-type conductivity.Type: ApplicationFiled: December 2, 2010Publication date: January 3, 2013Applicants: CSMC TECHNOLOGIES FAB2 CO., LTD., CSMC TECHNOLOGIES FAB1 CO., LTD.Inventors: Le Wang, Linchun Gui, Kongwei Zhu, Zhiyong Zhao
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Publication number: 20120313146Abstract: Disclosed is a transistor structure, having a completely silicided extrinsic base for reduced base resistance Rb. Specifically, a metal silicide layer covers the extrinsic base, including the portion of the extrinsic base that extends below the upper portion of a T-shaped emitter. One exemplary technique for ensuring that the metal silicide layer covers this portion of the extrinsic base requires tapering the upper portion of the emitter. Such tapering allows a sacrificial layer below the upper portion of the emitter to be completely removed during processing, thereby exposing the extrinsic base below and allowing the metal layer required for silicidation to be deposited thereon. This metal layer can be deposited, for example, using a high pressure sputtering technique to ensure that all exposed surfaces of the extrinsic base, even those below the upper portion of the emitter, are covered.Type: ApplicationFiled: June 8, 2011Publication date: December 13, 2012Applicant: International Business Machines CorporationInventors: Marc W. Cantell, Thai Doan, Jessica A. Levy, Qizhi Liu, William J. Murphy, Christa R. Willets
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Patent number: 8324713Abstract: A lateral-vertical bipolar junction transistor (LVBJT) includes a well region of a first conductivity type over a substrate; a first dielectric over the well region; and a first electrode over the first dielectric. A collector of a second conductivity type opposite the first conductivity type is in the well region and on a first side of the first electrode, and is adjacent the first electrode. An emitter of the second conductivity type is in the well region and on a second side of the first electrode, and is adjacent the first electrode, wherein the second side is opposite the first side. A collector extension region having a lower impurity concentration than the collector adjoins the collector and faces the emitter. The LVBJT does not have any emitter extension region facing the collector and adjoining the emitter.Type: GrantFiled: March 1, 2010Date of Patent: December 4, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shuo-Mao Chen, Chih-Ping Chao, Chih-Sheng Chang, Hua-Chou Tseng
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Patent number: 8263469Abstract: A bipolar transistor, comprising a collector, a base and an emitter, in which the collector comprises a relatively heavily doped region, and a relatively lightly doped region adjacent the base, and in which the relatively heavily doped region is substantially omitted from an intrinsic region of the transistor.Type: GrantFiled: October 6, 2011Date of Patent: September 11, 2012Assignee: Analog Devices, Inc.Inventors: Bernard Patrick Stenson, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, William Allan Lane
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Patent number: 8258545Abstract: An integrated circuit includes a bipolar transistor disposed over a substrate. The bipolar transistor includes a base electrode disposed around at least one germanium-containing layer. An emitter electrode is disposed over the at least one germanium-containing layer. At least one isolation structure is disposed between the emitter electrode and the at least one germanium-containing layer. A top surface of the at least one isolation structure is disposed between and electrically isolating a top surface of the emitter electrode from a top surface of the at least one germanium-containing layer.Type: GrantFiled: March 14, 2011Date of Patent: September 4, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Tung Huang, Chun-Tsung Kuo, Shih-Chang Liu, Yeur-Luen Tu
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Patent number: 8120136Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: November 2, 2009Date of Patent: February 21, 2012Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, Bernard Patrick Stenson
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Patent number: 8115280Abstract: An integrated circuit structure includes a well region of a first conductivity type, an emitter of a second conductivity type opposite the first conductivity type over the well region, a collector of the second conductivity type over the well region and substantially encircling the emitter, and a base contact of the first conductivity type over the well region. The base contact is horizontally spaced apart from the emitter by the collector. At least one conductive strip horizontally spaces the emitter, the collector, and the base contact apart from each other. A dielectric layer is directly under, and contacting, the at least one conductive strip.Type: GrantFiled: March 1, 2010Date of Patent: February 14, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Shuo-Mao Chen, Chin-Wei Kuo, Sally Liu
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Publication number: 20120025352Abstract: A bipolar junction transistor (BJT) device including a base region, an emitter region and a collector region comprises a substrate, a deep well region in the substrate, a first well region in the deep well region to serve as the base region, a second well region in the deep well region to serve as the collector region, the second well region and the first well region forming a first junction therebetween, and a first doped region in the first well region to serve as the emitter region, the first doped region and the first well region forming a second junction therebetween, wherein the first doped region includes a first section extending in a first direction and a second section extending in a second direction different from the first direction, the first section and the second section being coupled with each other.Type: ApplicationFiled: July 30, 2010Publication date: February 2, 2012Inventors: Cheng-Chi Lin, Wei-Hsun Hsu, Shuo-Lun Tu, Shih-Chin Lien, Chin-Pen Yeh
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Patent number: 8058704Abstract: A bipolar transistor, comprising a collector, a base and an emitter, in which the collector comprises a relatively heavily doped region, and a relatively lightly doped region adjacent the base, and in which the relatively heavily doped region is substantially omitted from an intrinsic region of the transistor.Type: GrantFiled: November 2, 2009Date of Patent: November 15, 2011Assignee: Analog Devices, Inc.Inventors: Bernard Patrick Stenson, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, William Allan Lane
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Patent number: 7932155Abstract: A method of forming a semiconductor device having two different strains therein is provided. The method includes forming a strain in a first region with a first straining film, and forming a second strain in a second region with a second straining film. Either of the first or second strains may be either tensile or compressive. Additionally the strains may be formed at right angles to one another and may be additionally formed in the same region. In particular a vertical tensile strain may be formed in a base and collector region of an NPN bipolar transistor and a horizontal compressive strain may be formed in the extrinsic base region of the NPN bipolar transistor. A PNP bipolar transistor may be formed with a compression strain in the base and collector region in the vertical direction and a tensile strain in the extrinsic base region in the horizontal direction.Type: GrantFiled: June 8, 2007Date of Patent: April 26, 2011Assignee: International Business Machines CorporationInventors: James S. Dunn, David L. Harame, Jeffrey B. Johnson, Alvin J. Joseph
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Patent number: 7898061Abstract: A method of forming a semiconductor device having two different strains therein is provided. The method includes forming a strain in a first region with a first straining film, and forming a second strain in a second region with a second straining film. Either of the first or second strains may be either tensile or compressive. Additionally the strains may be formed at right angles to one another and may be additionally formed in the same region. In particular a vertical tensile strain may be formed in a base and collector region of an NPN bipolar transistor and a horizontal compressive strain may be formed in the extrinsic base region of the NPN bipolar transistor. A PNP bipolar transistor may be formed with a compression strain in the base and collector region in the vertical direction and a tensile strain in the extrinsic base region in the horizontal direction.Type: GrantFiled: April 27, 2007Date of Patent: March 1, 2011Assignee: International Business Machines CorporationInventors: James S. Dunn, David L. Harame, Jeffrey B. Johnson, Alvin J. Joseph
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Patent number: 7888225Abstract: A method of manufacturing an electronic device including a PNP bipolar transistor comprises forming a collector in a substrate, depositing a base layer and an emitter layer on the substrate, and growing a nitride interface layer on the base layer as a base current modulation means, such that the nitride interface layer is arranged between the base layer and the emitter layer.Type: GrantFiled: February 23, 2009Date of Patent: February 15, 2011Assignee: Texas Instruments Deutschland GmbHInventor: Alfred Haeusler
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Patent number: 7843039Abstract: Stress-modified device structures, methods of fabricating such stress-modified device structures, and design structures for an integrated circuit. An electrical characteristic of semiconductor devices formed on a common substrate, such as the current gains of bipolar junction transistors, may be altered by modifying stresses in structures indirectly on or over, or otherwise indirectly coupled with, the semiconductor devices. The structures, which may be liners for contacts in a contact level of an interconnect, are physically spaced away from, and not in direct physical contact with, the respective semiconductor devices because at least one additional intervening material or structure is situated between the stress-imparting structures and the stress-modified devices.Type: GrantFiled: February 14, 2008Date of Patent: November 30, 2010Assignee: International Business Machines CorporationInventors: Edward C. Cooney, III, Mark Dupuis, William J. Murphy, Steven S. Williams
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Publication number: 20100219504Abstract: An integrated circuit structure includes a well region of a first conductivity type, an emitter of a second conductivity type opposite the first conductivity type over the well region, a collector of the second conductivity type over the well region and substantially encircling the emitter, and a base contact of the first conductivity type over the well region. The base contact is horizontally spaced apart from the emitter by the collector. At least one conductive strip horizontally spaces the emitter, the collector, and the base contact apart from each other. A dielectric layer is directly under, and contacting, the at least one conductive strip.Type: ApplicationFiled: March 1, 2010Publication date: September 2, 2010Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Shuo-Mao Chen, Chin-Wei Kuo, Sally Liu
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Publication number: 20100187657Abstract: The disclosed invention provides a method for the fabrication of a bipolar transistor having a collector region comprised within a semiconductor body separated from an overlying base region by one or more isolation cavities (e.g., air gaps) filled with low permittivity gas. In particular, a multilayer base-collector dielectric film is deposited over the collector region. A base region is formed onto the multilayer dielectric film and is patterned to form one or more base connection regions. The multilayer dielectric film is selectively etched during a plurality of isotropic etch processes to allow for the formation of one or more isolation region between the base connection regions and the collector region, wherein the one or more isolation regions comprise cavities filled with a gas having a low dielectric constant (e.g., air). The resultant bipolar transistor has a reduced base-collector capacitance, thereby allowing for improved frequency properties (e.g., higher maximum frequency operation).Type: ApplicationFiled: December 18, 2009Publication date: July 29, 2010Applicant: Infineon Technologies AGInventors: Josef Boeck, Wolfgang Liebl, Thomas Meister, Herbert Schaefer
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Patent number: 7723823Abstract: An improved lateral bipolar electrostatic discharge (ESD) protection device (40) comprises a semiconductor (SC) substrate (42), an overlying epitaxial SC layer (44), emitter-collector regions (48, 50) laterally spaced apart by a first distance (52) in the SC layer, a base region (54) adjacent the emitter region (48) extending laterally toward and separated from the collector region (50) by a base-collector spacing (56) that is selected to set the desired trigger voltage Vt1. By providing a buried layer region (49) under the emitter region (48) Ohmically coupled thereto, but not providing a comparable buried layer region (51) under the collector region (50), an asymmetrical structure is obtained in which the DC trigger voltage (Vt1DC) and transient trigger voltage (Vt1TR) are closely matched so that |Vt1TR?Vt1DC|˜0.Type: GrantFiled: July 24, 2008Date of Patent: May 25, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Chai Ean Gill, Changsoo Hong, James D. Whitfield, Rouying Zhan
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Patent number: 7701038Abstract: A lateral bipolar junction transistor having improved current gain and a method for forming the same are provided. The transistor includes a well region of a first conductivity type formed over a substrate, at least one emitter of a second conductivity type opposite the first conductivity type in the well region wherein each of the at least one emitters are interconnected, a plurality of collectors of the second conductivity type in the well region wherein the collectors are interconnected to each other, and a plurality of base contacts of the first conductivity type in the well region wherein the base contacts are interconnected to each other. Preferably, all sides of the at least one emitters are adjacent the collectors, and none of the base contacts are adjacent the sides of the emitters. The neighboring emitter, collectors and base contacts are separated by spacings in the well region.Type: GrantFiled: October 30, 2006Date of Patent: April 20, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shuo-Mao Chen, Chih-Ping Chao, Chih-Sheng Chang
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Patent number: 7671447Abstract: The invention relates to a semiconductor device (10) with a semiconductor body (12) comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) of, respectively, a first conductivity type, a second conductivity type, opposite to the first conductivity type, and the first conductivity type, wherein, viewed in projection, the emitter region (1) is positioned above or below the base region (2), and the collector region (3) laterally borders the base region (2). According to the invention, the base region (2) comprises a highly doped subregion (2A) the doping concentration of which has a delta-shaped profile in the thickness direction, and said highly doped sub-region (2A) extends laterally as far as the collector region (3). Such a lateral bipolar transistor has excellent high-frequency properties and a relatively high breakdown voltage between the base and collector regions (2, 3), implying that the device is suitable for high power applications.Type: GrantFiled: July 7, 2005Date of Patent: March 2, 2010Assignee: NXP B.V.Inventors: Andreas Hubertus Montree, Jan Willem Slotboom, Prabhat Agarwal, Philippe Meunier-Beillard
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Patent number: 7659577Abstract: A power semiconductor device includes a power device and a current sense device formed in a common semiconductor region.Type: GrantFiled: June 29, 2006Date of Patent: February 9, 2010Assignee: International Rectifier CorporationInventor: Vincent Thiery
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Publication number: 20100013051Abstract: A semiconductor component is formed using the following processes: (a) forming a first dielectric layer over the semiconductor substrate; (b) forming a base electrode for the bipolar transistor over the dielectric layer; (c) forming an oxide nitride structure over the base electrode; (d) forming a first spacer adjacent to the oxide nitride structure and the base electrode; (e) removing a top layer of the oxide nitride structure; (f) removing a first portion of the dielectric layer; (g) forming an epitaxial layer over the semiconductor substrate; (h) forming a second spacer over the epitaxial layer; and (i) forming an emitter electrode over the epitaxial layer and adjacent to the second spacer.Type: ApplicationFiled: September 24, 2009Publication date: January 21, 2010Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Jay P. John, James A. Kirchgessner, Matthew W. Menner
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Patent number: 7615455Abstract: A bipolar transistor having a base region resting by its lower surface on a collector region and surrounded with a first insulating layer, a base contact conductive region in contact with an external upper peripheral region of the base region, a second insulating region in contact with an intermediary upper peripheral region of the base region, an emitter region in contact with the central portion of the base region. The level of the central portion is higher than the level of the intermediary portion.Type: GrantFiled: September 19, 2006Date of Patent: November 10, 2009Assignee: STMicroelectronics S.A.Inventors: Pascal Chevalier, Alain Chantre
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Patent number: 7579635Abstract: A base layer made of SiGe mixed crystal includes a spacer layer formed in contact with a collector layer with no base impurities diffused therein and an intrinsic base layer formed in contact with an emitter layer with base impurities diffused therein. The spacer layer contains C at a low concentration. The intrinsic base layer has a first region containing C at a low concentration on the collector side and a second region containing C at a high concentration on the emitter side.Type: GrantFiled: January 7, 2008Date of Patent: August 25, 2009Assignee: Panasonic CorporationInventor: Shigetaka Aoki
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Publication number: 20090206449Abstract: Stress-modified device structures, methods of fabricating such stress-modified device structures, and design structures for an integrated circuit. An electrical characteristic of semiconductor devices formed on a common substrate, such as the current gains of bipolar junction transistors, may be altered by modifying stresses in structures indirectly on or over, or otherwise indirectly coupled with, the semiconductor devices. The structures, which may be liners for contacts in a contact level of an interconnect, are physically spaced away from, and not in direct physical contact with, the respective semiconductor devices because at least one additional intervening material or structure is situated between the stress-imparting structures and the stress-modified devices.Type: ApplicationFiled: February 14, 2008Publication date: August 20, 2009Inventors: Edward C. Cooney III, Mark Dupuis, William J. Murphy, Steven S. Williams
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Patent number: 7538412Abstract: A semiconductor device includes a semiconductor material, the semiconductor material including a base region and a field stop zone including a first side adjacent the base region and a second side opposite the first side. The field stop zone includes a first dopant implant and a second dopant implant. The first dopant implant has a first dopant concentration maximum and the second dopant implant has a second dopant concentration maximum with the first dopant concentration maximum being less than the second dopant concentration maximum, and being located closer to the second side than the second dopant concentration maximum.Type: GrantFiled: June 30, 2006Date of Patent: May 26, 2009Assignee: Infineon Technologies Austria AGInventors: Hans-Joachim Schulze, Franz-Josef Niedernostheide, Helmut Strack, Carsten Schaeffer, Frank Pfirsch
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Patent number: 7495313Abstract: Germanium circuit-type structures are facilitated. In one example embodiment, a multi-step growth and anneal process is implemented to grow Germanium (Ge) containing material, such as heteroepitaxial-Germanium, on a substrate including Silicon (Si) or Silicon-containing material. In certain applications, defects are generally confined near a Silicon/Germanium interface, with defect threading to an upper surface of the Germanium containing material generally being inhibited. These approaches are applicable to a variety of devices including Germanium MOS capacitors, pMOSFETs and optoelectronic devices.Type: GrantFiled: July 22, 2005Date of Patent: February 24, 2009Assignees: Board of Trustees of the Leland Stanford Junior University, Canon Kabushiki KaishaInventors: Ammar Munir Nayfeh, Chi On Chui, Krishna C. Saraswat, Takao Yonehara
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Patent number: 7482673Abstract: A bipolar transistor is provided which includes a collector region, an intrinsic base region overlying the collector region and an emitter region overlying the intrinsic base region. An extrinsic base overlies a portion of the intrinsic base region. An epitaxial spacer layer is disposed between the collector region and the intrinsic base region in locations not underlying the emitter region.Type: GrantFiled: September 29, 2004Date of Patent: January 27, 2009Assignee: International Business Machines CorporationInventor: Marwan H. Khater
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Patent number: 7456071Abstract: An integrated circuit including a buried layer of determined conductivity type in a plane substantially parallel to the plane of a main circuit surface, in which the median portion of this buried layer is filled with a metal-type material.Type: GrantFiled: May 6, 2005Date of Patent: November 25, 2008Assignee: STMicroelectronics S.A.Inventors: Michel Marty, Philippe Coronel, François Leverd
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Patent number: 7446012Abstract: The present invention relates to a lateral PNP transistor and the method of manufacturing the same. The medium doping N-type base area and the light doping P? collector area were first introduced in the structure before the formation of P+ doping emitter area and the collector area. The emitter-base-collector doping profile in the lateral and the base width of LPNP were similar to NPN. The designer can optimize the doping profile and area size of each area according to the request of the current gain (Hfe), collector-base breakdown voltage (BVceo), and early voltage (VA) of LPNP transistor. These advantages may cause to reduce the area and enhance performance of the LPNP transistor.Type: GrantFiled: January 20, 2006Date of Patent: November 4, 2008Assignee: BCD Semiconductor Manufacturing LimitedInventors: Chong Ren, Xian-Feng Liu, Bin Qiu
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Patent number: 7405422Abstract: A method and apparatus for depositing single crystal, epitaxial films of silicon carbon and silicon germanium carbon on a plurality of substrates in a hot wall, isothermal UHV-CVD system is described. In particular, a multiple wafer low temperature growth technique in the range from 350° C. to 750° C. is described for incorporating carbon epitaxially in Si and SiGe films with very abrupt and well defined junctions, but without any associated oxygen background contamination. Preferably, these epitaxial SiC and SiGeC films are in-situ doped p- or n-type and with the presence of low concentration of carbon <1020 cm?3, the as-grown p- or n-type dopant profile can withstand furnace anneals to temperatures of 850° C. and rapid thermal anneal temperatures to 1000° C.Type: GrantFiled: December 30, 2006Date of Patent: July 29, 2008Assignee: International Business Machines CorporationInventors: Jack O. Chu, Basanth Jaqannathan, Alfred Grill, Bernard S. Meyerson, John A Ott
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Patent number: 7397108Abstract: A monolithically integrated bipolar transistor has an SOI substrate, a collector region in the SOI substrate, a base layer region on top of and in contact with the collector region, and an emitter layer region on top of and in contact with the base layer region, wherein the collector, base layer, and emitter layer regions are provided with separate contact regions. Further, a region of an insulating material, preferably an oxide or nitride, is provided in the base layer region, in the emitter layer region, or between the base and emitter layer regions, wherein the insulating region extends laterally at a fraction of a width of the base and emitter layer regions to reduce an effective width of the bipolar transistor to thereby eliminate any base push out effects that would otherwise occur.Type: GrantFiled: March 11, 2005Date of Patent: July 8, 2008Assignee: Infineon Technologies AGInventor: Torkel Arnborg
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Patent number: 7394113Abstract: Embodiments herein present a structure, method, etc. for a self-alignment scheme for a heterojunction bipolar transistor (HBT). An HBT is provided, comprising an extrinsic base, a first self-aligned silicide layer over the extrinsic base, and a nitride etch stop layer above the first self-aligned silicide layer. A continuous layer is also included between the first self-aligned silicide layer and the nitride etch stop layer, wherein the continuous layer can comprise oxide. The HBT further includes spacers adjacent the continuous layer, wherein the spacers and the continuous layer separate the extrinsic base from an emitter contact. In addition, an emitter is provided, wherein the height of the emitter is less than or equal to the height of the extrinsic base. Moreover, a second self-aligned silicide layer is over the emitter, wherein the height of the second silicide layer is less than or equal to the height of the first silicide layer.Type: GrantFiled: July 26, 2006Date of Patent: July 1, 2008Assignee: International Business Machines CorporationInventors: Francois Pagette, Anna Topol