Manufacture Of Two-terminal Component For Integrated Circuit (epo) Patents (Class 257/E21.003)

  • Publication number: 20090267182
    Abstract: A method of fabricating an inductor (70) in a silicon substrate (10), wherein an Argon implantation step (84) is performed after the resist layer (82) has been deposited and the polysilicon layer (30) has been etched, but before the resist layer (82) is stripped and the polysilicon annealed. Thus, an amorphous layer (86) is created on the substrate (10) so as to improve the Q factor of the inductor (70), without the need for an additional masking step or adverse impact on the polysilicon layer (30).
    Type: Application
    Filed: May 15, 2007
    Publication date: October 29, 2009
    Applicant: NXP B.V.
    Inventor: Sebastien Jacqueline
  • Publication number: 20090236734
    Abstract: A semiconductor device is made by forming an oxide layer over a substrate and forming a first conductive layer over the oxide layer. The first conductive layer is connected to ground. A second conductive layer is formed over the first conductive layer as a plurality of segments. A third conductive layer is formed over the second conductive layer as a plurality of segments. If the conductive layers are electrically isolated, then a conductive via is formed through these layers. A first segment of the third conductive layer operates as a first passive circuit element. A second segment operates as a second passive circuit element. A third segment is connected to ground and operates as a shield disposed between the first and second segments. The shield has a height at least equal to a height of the passive circuit elements to block cross-talk between the passive circuit elements.
    Type: Application
    Filed: March 19, 2008
    Publication date: September 24, 2009
    Applicant: STATS CHIPPAC, LTD.
    Inventors: YongTaek Lee, Gwang Kim, ByungHoon Ahn
  • Publication number: 20090230506
    Abstract: A semiconductor device includes a fuse pattern formed as conductive polymer layer having a low melting point. The fuse pattern is easily cut at low temperature to improve repair efficiency. The semiconductor device includes first and second fuse connecting patterns that are separated from each other by a distance, a fuse pattern including a conductive polymer layer formed between the first and second fuse connection patterns and connecting the first and second fuse connection patterns, and a fuse box structure that exposes the fuse pattern.
    Type: Application
    Filed: May 7, 2008
    Publication date: September 17, 2009
    Applicant: Hynix Semiconductor Inc.
    Inventor: Hyung Jin PARK
  • Publication number: 20090206472
    Abstract: A COF packaging structure includes a substrate, a first conductive foil, and a second conductive foil. The substrate has a first surface and a second surface opposite to the first surface. The first conductive foil is disposed on the first surface of the substrate and has a first designated pattern for bump bonding. The second conductive foil is disposed on the second surface of the substrate and has a second designated pattern, wherein the area of the second designated pattern is not smaller than the area of the first designated pattern.
    Type: Application
    Filed: March 28, 2008
    Publication date: August 20, 2009
    Inventors: Chiu-Shun Lin, Pai-Sheng Cheng
  • Publication number: 20090153972
    Abstract: The present invention provides an organic LED element in which the extraction efficiency is improved up to 80% of emitted light. Further, the invention relates to an electrode-attached translucent substrate having a translucent substrate, a scattering layer formed over the glass substrate and containing a base material having a first refractive index for at least one wavelength of wavelengths of emitted light of an organic LED element and a plurality of scattering materials positioned in the base material and having a second refractive index different from that of the base material, and a translucent electrode formed over the scattering layer and having a third refractive index equal to or lower than the first refractive index, in which distribution of the scattering materials in the scattering layer decreases from the inside of the scattering layer toward the translucent electrode.
    Type: Application
    Filed: December 12, 2008
    Publication date: June 18, 2009
    Applicant: ASAHI GLASS COMPANY LIMITED
    Inventors: Nobuhiro NAKAMURA, Kazutaka Hayashi, Kenji Imakita, Hiroyuki Ohkawa, Hidefumi Odaka, Nao Ishibashi
  • Publication number: 20090152998
    Abstract: A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
    Type: Application
    Filed: November 6, 2008
    Publication date: June 18, 2009
    Applicants: STMicroelectronics (Crolles) 2 SAS, STMicroelectronics S.A., Commissariat A L'energie Atomique
    Inventors: Nicolas Abele, Pascal Ancey, Alexandre Talbot, Karim Segueni, Guillaume Bouche, Thomas Skotnicki, Stephane Monfray, Fabrice Cassett
  • Publication number: 20090108996
    Abstract: The present invention provides an RFID device having a substrate body, and an IC component and antenna disposed thereon. The RFID device may further include one or more spacing elements, wherein at least a portion of the substrate body is adapted to be disposed around at least a portion the spacing element, thus reducing the overall size of the substrate body with proper impedance matching. The RFID device may further include an EAS element coupled to the substrate body and/or the spacing element in order to create a combination RFID/EAS device with the ability to reduce its overall footprint without sacrificing the ability to provide both identification and article surveillance functions.
    Type: Application
    Filed: October 31, 2007
    Publication date: April 30, 2009
    Applicant: Sensormatic Electronics Corporation
    Inventor: Edward DAY
  • Publication number: 20090093096
    Abstract: To provide a nonvolatile memory having an excellent data holding property and a technique for manufacturing the memory, a polycrystalline silicon film 7 and an insulating film 8 are sequentially stacked on a gate insulating film 6, then the polycrystalline silicon film 7 and the insulating film 8 are patterned to form gate electrodes 7A, 7B, and then sidewall spacers 12 including a silicon oxide film are formed on sidewalls of the gate electrodes 7A, 7B. After that, a silicon nitride film 19 is deposited on a substrate 1 by a plasma enhanced CVD process so that the gate electrodes 7A, 7B are not directly contacted to the silicon nitride film 19.
    Type: Application
    Filed: December 9, 2008
    Publication date: April 9, 2009
    Inventor: KAZUYOSHI SHIBA
  • Publication number: 20090090994
    Abstract: Fuses and methods of forming fuses. The fuse includes: a dielectric layer on a semiconductor substrate; a cathode stack on the dielectric layer, a sidewall of the cathode stack extending from a top surface of the cathode stack to a top surface of the dielectric layer; a continuous polysilicon layer comprising a cathode region, an anode region, a link region between the cathode and anode regions and a transition region between the cathode region and the link region, the transition region proximate to the sidewall of the cathode stack, the cathode region on a top surface of the cathode stack, the link region on a top surface of the dielectric layer, both a first thickness of the cathode region and a second thickness of the link region greater than a third thickness of the transition region; and a metal silicide layer on a top surface of the polysilicon layer.
    Type: Application
    Filed: October 9, 2007
    Publication date: April 9, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Deok-kee Kim, Haining Sam Yang
  • Patent number: 7510900
    Abstract: A pinned photodiode, which is a double pinned photodiode having increased electron capacitance, and a method for forming the same are disclosed. The invention provides a pinned photodiode structure comprising a substrate base over which is a first layer of semiconductor material. There is a base layer of a first conductivity type, wherein the base layer of a first conductivity type is the substrate base or is a doped layer over the substrate base. At least one doped region of a second conductivity type is below the surface of said first layer, and extends to form a first junction with the base layer. A doped surface layer of a first conductivity type is over the at least one region of a second conductivity type and forms a second junction with said at least one region of a second conductivity type.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: March 31, 2009
    Assignee: Aptina Imaging Corporation
    Inventor: Inna Patrick
  • Publication number: 20090065758
    Abstract: A phase change memory array is disclosed, comprising a first cell having a patterned phase change layer, and a second cell having a patterned phase change layer, wherein the patterned phase change layer of the first cell and the patterned phase change layer of the second cell are disposed at different layers.
    Type: Application
    Filed: January 25, 2008
    Publication date: March 12, 2009
    Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.
    Inventor: Te-Sheng Chao
  • Patent number: 7453081
    Abstract: A memory cell includes a first electrode, a second electrode, storage material positioned between the first electrode and the second electrode, and a nanocomposite insulator contacting the storage material.
    Type: Grant
    Filed: July 20, 2006
    Date of Patent: November 18, 2008
    Assignee: Qimonda North America Corp.
    Inventors: Thomas Happ, Jan Boris Philipp
  • Publication number: 20080280389
    Abstract: A method for assembling a camera module includes following steps: providing a circuit board having a connecting region; disposing a liquid anisotropic conductive adhesive on the connecting region of the circuit board; placing an image sensor module, on the connecting region of the circuit board; thermal press-bonding the image sensor module onto the circuit board to fix the image sensor module with the circuit board. Because the anisotropic conductive adhesive before being disposed on the circuit board is liquid and doesn't needs to be cut, flow-shop operations are easy to achieve, and costs are decreased.
    Type: Application
    Filed: October 24, 2007
    Publication date: November 13, 2008
    Applicant: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: JEN-CHAO WANG, AN-CHANG LEI
  • Publication number: 20080254637
    Abstract: A method for removing at least one photoresist defect is disclosed. The photoresist defect is exposed to a plasma produced from a source gas including oxygen and a non-oxidizing gas in a plasma reactor, wherein the oxygen is present in the source gas at from 1% by volume to about 89% by volume. The non-oxidizing gas includes a mixture of hydrogen and nitrogen, ammonia or combinations thereof. A method for processing a semiconductor device structure is also disclosed, as are embodiments of the source gas.
    Type: Application
    Filed: April 11, 2007
    Publication date: October 16, 2008
    Inventors: Robert J. Hanson, Siddartha Kondoju
  • Publication number: 20080224259
    Abstract: Methods of fabricating a passive element and a semiconductor device including the passive element are disclosed including the use of a dummy passive element. A dummy passive element is a passive element or wire which is added to the chip layout to aid in planarization but is not used in the active circuit. One embodiment of the method includes forming the passive element and a dummy passive element adjacent to the passive element; forming a dielectric layer over the passive element and the dummy passive element, wherein the dielectric layer is substantially planar between the passive element and the dummy passive element; and forming in the dielectric layer an interconnect to the passive element through the dielectric layer and a dummy interconnect portion overlapping at least a portion of the dummy passive element. The methods eliminate the need for planarizing.
    Type: Application
    Filed: April 21, 2008
    Publication date: September 18, 2008
    Inventors: Anil K. Chinthakindi, Timothy J. Dalton, Ebenezer E. Eshun, Jeffrey P. Gambino, Anthony K. Stamper, Kunal Vaed
  • Publication number: 20080224229
    Abstract: An object is to provide an antifuse with little power consumption at the time of writing. The antifuse is used for a memory element in a read-only memory device. The antifuse includes a first conductive layer, a multilayer film of two or more layers in which an amorphous silicon film and an insulating film are alternately stacked over the first conductive layer, and a second conductive layer over the multilayer film. Voltage is applied between the first and second conductive layers and resistance of the multilayer film is decreased, whereby data is written to the memory element. When an insulating film having higher resistance than amorphous silicon is formed between the first and second conductive layers, current flowing through the antifuse at the time of writing is reduced.
    Type: Application
    Filed: March 12, 2008
    Publication date: September 18, 2008
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Ryota Tajima, Hajime Tokunaga
  • Publication number: 20080220543
    Abstract: A method for fabricating a semiconductor device includes forming a fuse over a substrate, the fuse having a barrier layer, a metal layer, and an anti-reflective layer stacked, selectively removing the anti-reflective layer, forming an insulation layer over a whole surface of the resultant structure including the fuse, and performing repair-etching such that part of the insulation layer remains above the fuse.
    Type: Application
    Filed: December 20, 2007
    Publication date: September 11, 2008
    Inventors: Hyun-Sik Park, Hae-Jung Lee, Jae-Kyun Lee
  • Publication number: 20080173975
    Abstract: Disclosed are embodiments of a device and method of forming the device that utilize metal ion migration under controllable conditions. The device embodiments comprise two metal electrodes separated by one or more different dielectric materials. One electrode is sealed from the dielectric material, the other is not. The device is adapted to allow controlled migration of embedded metal ions from the unsealed electrode into dielectric material to form a conductive path under field between the electrodes and, thereby, to decrease the resistance of the dielectric material. Reversing the field causes the metal ions to reverse their migration, to break the conductive metallic path between the electrodes and, thereby, to increase the resistance of the dielectric material. Thus, the device can comprise a simple switch or programmable resistor.
    Type: Application
    Filed: January 22, 2007
    Publication date: July 24, 2008
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATION
    Inventors: Fen Chen, Armin Fischer, Jason P. Gill
  • Publication number: 20080171418
    Abstract: A method and structure for an integrated circuit chip has a logic core which includes a plurality of insulating and conducting levels, an exterior conductor level and passive devices having a conductive polymer directly connected to the exterior conductor level. The passive devices contain RF devices which also includes resistor, capacitor, and/or inductor. The resistors can be serpentine resistors and the capacitors can be interdigitated capacitors.
    Type: Application
    Filed: March 25, 2008
    Publication date: July 17, 2008
    Applicant: International Business Machines Corporation
    Inventors: Lawrence A. Clevenger, Louis L. Hsu, Cart J. Radens, Li-Kong Wang, Kwong Hon Wong
  • Publication number: 20080169527
    Abstract: The invention relates to a semiconductor device (10) with a semiconductor body (1) comprising a high-ohmic semiconductor substrate (2) which is covered with a dielectric layer (3) containing charges, on which dielectric layer one or more passive electronic components (4) comprising conductor tracks (4) are present, and at the location of the passive elements (4) a semiconductor region (5) is present at the interface between the semiconductor substrate (2) and the dielectric layer (3, 4), a first conductivity-type conducting channel induced in the semiconductor substrate (2) by the charges being interrupted by, and at the location of, the semiconductor region (5). According to the invention, the semiconductor region (5) is monocrystalline and of a second conductivity type, opposite to the first conductivity type. In this way the charge of an induced channel is locally compensated by the charge of the semiconductor regions (5).
    Type: Application
    Filed: April 12, 2005
    Publication date: July 17, 2008
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS
    Inventor: Wibo Daniel Van Noort
  • Publication number: 20080157269
    Abstract: A structure and method of fabricating reversible fuse and antifuse structures for semiconductor devices is provided. In one embodiment, the method includes forming at least one line having a via opening for exposing a portion of a plurality of interconnect features; conformally depositing a first material layer over the via opening; depositing a second material layer over the first material layer, wherein the depositing overhangs a portion of the second material layer on a top portion of the via opening; and depositing a blanket layer of insulating material, where the depositing forms a plurality of fuse elements each having an airgap between the insulating material and the second material layer. The method further includes forming a plurality of electroplates in the insulator material connecting the fuse elements.
    Type: Application
    Filed: January 3, 2007
    Publication date: July 3, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Keith Kwong Hon Wong, Chih-Chao Yang, Haining S. Yang
  • Publication number: 20080157128
    Abstract: Provided are methods for producing multiple distinct transistors from a single semiconductor layer, and apparatus incorporating transistors so produced.
    Type: Application
    Filed: December 1, 2006
    Publication date: July 3, 2008
    Applicant: Johns Hopkins University
    Inventors: Howard E. Katz, Cheng Huang
  • Publication number: 20080153245
    Abstract: A flip chip semiconductor device has a substrate with a plurality of active devices formed thereon. A passive device is formed on the substrate by depositing a first conductive layer over the substrate, depositing an insulating layer over the first conductive layer, and depositing a second conductive layer over the insulating layer. The passive device is a metal-insulator-metal capacitor. The deposition of the insulating layer and first and second conductive layers is performed without photolithography. An under bump metallization (UBM) layer is formed on the substrate in electrical contact with the plurality of active devices. A solder bump is formed over the UBM layer. The passive device can also be a resistor by depositing a resistive layer over the first conductive layer and depositing a third conductive layer over the resistive layer. The passive device electrically contacts the solder bump.
    Type: Application
    Filed: December 18, 2007
    Publication date: June 26, 2008
    Applicant: STATS ChipPAC, Ltd.
    Inventors: Yaojian Lin, Haijing Cao, Qing Zhang, Robert C. Frye
  • Publication number: 20080116540
    Abstract: A device (10) comprises a semiconductor diode (12) and a switchable element (14) positioned in stacked adjacent relationship. The semiconductor diode (12) and the switchable element (14) are electrically connected in series with one another. The switchable element (14) is switchable from a low-conductance state to a high-conductance state in response to the application of a low-density forming current and/or a low voltage.
    Type: Application
    Filed: May 8, 2003
    Publication date: May 22, 2008
    Inventors: Qi Wang, James Scott Ward, Jian Hu, Howard M. Branz
  • Publication number: 20080116541
    Abstract: A structure for shielding high frequency passive elements includes a first face of a semi-conductive substrate in parallel with a second face of a non-conductive substrate. The first face of the semi-conductive substrate is substantially parallel to a second face thereof. A passive element is disposed in the non-conductive substrate and is isolated from the second face of the non-conductive substrate. A plurality of conductive conduits disposed in the semi-conductive substrate extends from the first face to the second face thereof, each of the conduits isolated from one another by the semi-conductive substrate material and disposed substantially beneath the passive element. A ground plane disposed on the second face of the semi-conductive substrate electrically connects the conductive conduits disposed therein. An electrical connection between an electronic circuit in the semi-conductive substrate, the passive element and the ground plane holds the passive device and the ground plane at different potentials.
    Type: Application
    Filed: November 20, 2006
    Publication date: May 22, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mete Erturk, Robert A. Groves, Anthony K. Stamper
  • Patent number: 7361968
    Abstract: A method for integrally forming a metal-oxide-semiconductor (MOS) device and an electrical fuse device on a semiconductor substrate includes the following steps. An isolation structure is formed on the semiconductor substrate. A dielectric layer is deposited over the isolation structure and the semiconductor substrate. A metal layer is deposited on the dielectric layer. A polysilicon layer is deposited on the metal layer. The dielectric layer, the metal layer and the polysilicon layer are patterned into a first stack of the dielectric layer, the metal layer and the polysilicon layer on the isolation structure for functioning as the electrical fuse device, and a second stack of the dielectric layer, the metal layer and the polysilicon layer on the semiconductor substrate for functioning as a gate of the MOS device.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: April 22, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chiang-Ming Chuang, Liang-Kai Han
  • Publication number: 20080067627
    Abstract: A fuse structure includes a substrate, a fuse conductive trace disposed closer to a first chip surface than to a second chip surface facing away from the first chip surface, a metallization layer on the substrate disposed on a side of the fuse conductive trace facing away from the first chip surface, and a planar barrier multilayer assembly disposed between the fuse conductive trace and the metallization layer and including multiple barrier layers of different materials, wherein the fuse conductive trace, the metallization layer and the barrier multilayer assembly are arranged such that when cutting the fuse conductive trace and the barrier multilayer assembly, a first area of the metallization layer is electrically isolated from a second area of the metallization layer.
    Type: Application
    Filed: September 13, 2007
    Publication date: March 20, 2008
    Inventors: Josef Boeck, Herbert Knapp, Wolfgang Liebl, Herbert Schaefer
  • Publication number: 20080054393
    Abstract: Methods of fabricating a passive element and a semiconductor device including the passive element are disclosed including the use of a dummy passive element. A dummy passive element is a passive element or wire which is added to the chip layout to aid in planarization but is not used in the active circuit. One embodiment of the method includes forming the passive element and a dummy passive element adjacent to the passive element; forming a dielectric layer over the passive element and the dummy passive element, wherein the dielectric layer is substantially planar between the passive element and the dummy passive element; and forming in the dielectric layer an interconnect to the passive element through the dielectric layer and a dummy interconnect portion overlapping at least a portion of the dummy passive element. The methods eliminate the need for planarizing.
    Type: Application
    Filed: October 30, 2007
    Publication date: March 6, 2008
    Inventors: Anil Chinthakindi, Timothy Dalton, Ebenezer Eshun, Jeffrey Gambino, Anthony Stamper, Kunal Vaed
  • Patent number: 7329558
    Abstract: The invention relates to a DNR (differential negative resistance) exhibiting device that can be programmed to store information as readable current amplitudes and to methods of making such a device. The stored data is semi-volatile. Generally, information written to a device in accordance with the invention can maintain its memory for a matter of minutes, hours, or days before a refresh is necessary. The power requirements of the device are far reduced compared to DRAM. The memory function of the device is highly stable, repeatable, and predictable. The device can be produced in a variety of ways.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: February 12, 2008
    Assignee: Micron Technology, Inc.
    Inventor: Kristy A. Campbell
  • Publication number: 20080009142
    Abstract: A novel arrangement and method for depositing evaporation control agents so as to coat immersion lithographic solutions which are employed on the surface of semiconductor wafers in connection with the etching of the surfaces of the wafer through the intermediary of an immersion lithographic process.
    Type: Application
    Filed: September 18, 2007
    Publication date: January 10, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Daniel Corliss, Darlo Goldfarb, Steven Holmes, Kurt Kimmel, Michael Lercel
  • Publication number: 20080003761
    Abstract: According to an exemplary embodiment, a wafer level package includes a device wafer including at least one device wafer contact pad and a device, and where the at least one device wafer contact pad is electrically connected to the device. The wafer level package includes a first polymer layer situated over the device wafer. The wafer level package includes at least one passive component situated over the first polymer layer and having a first terminal and a second terminal. The first terminal of the at least one passive component is electrically connected to the at least one device wafer contact pad. The wafer level package includes a second polymer layer situated over the at least one passive component. The wafer level package includes at least one polymer layer contact pad situated over the second polymer layer and electrically connected to the second terminal of the at least one passive component.
    Type: Application
    Filed: September 7, 2007
    Publication date: January 3, 2008
    Inventors: Qing Gan, Robert Warren, Anthony Lobianco, Steve Liang
  • Publication number: 20070287224
    Abstract: A three dimensional (3D) integrated circuit (IC), 3D IC chip and method of fabricating a 3D IC chip. The chip includes multiple layers of circuits, e.g., silicon insulator (SOI) CMOS IC layers, each including circuit elements. The layers may be formed in parallel and one layer attached to another to form a laminated 3D chip.
    Type: Application
    Filed: April 19, 2007
    Publication date: December 13, 2007
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPERATION
    Inventors: Syed Alam, Ibrahim Elfadel, Kathryn Guarini, Meikei Ieong, Prabhakar Kudva, David Kung, Mark Lavin, Arifur Rahman
  • Patent number: 7282459
    Abstract: Aspects of the invention can provide an ejection method to form a micro lens efficiently on each of a plurality of semiconductor lasers in a wafer state. So that a distance in an x-axis direction between two mutually adjacent sections subject to ejection and a distance between any two nozzles of a plurality of nozzles arranged in the x-axis direction may be in agreement, the ejection method can include a step of positioning a substrate having the two sections subject to ejection, a step of moving relatively the plurality of nozzles along a y-axis direction intersecting the x-axis direction perpendicularly to the substrate, and a step of ejecting a liquid material respectively from the two nozzles to the two sections subject to ejection if the two nozzles should respectively penetrate areas corresponding to the two sections.
    Type: Grant
    Filed: September 16, 2004
    Date of Patent: October 16, 2007
    Assignee: Seiko Epson Corporation
    Inventor: Hironori Hasei
  • Patent number: 7208388
    Abstract: A method of making integrated circuit thin film resistor includes forming a first dielectric layer (18B) over a substrate and providing a structure to reduce variation of head resistivity thereof by forming a dummy fill layer (9A) on the first dielectric layer, and forming a second dielectric layer (18D) over the first dummy fill layer. A thin film resistor (2) is formed on the second dielectric layer (18D). A first inter-level dielectric layer (21A) is formed on the thin film resistor and the second dielectric layer. A first metal layer (22A) is formed on the first inter-level dielectric layer and electrically contacts a portion of the thin film resistor. Preferably, the first dummy fill layer is formed as a repetitive pattern of sections such that the repetitive pattern is symmetrically aligned with respect to multiple edges of the thin-film resistor (2).
    Type: Grant
    Filed: April 8, 2005
    Date of Patent: April 24, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Eric W. Beach, Philipp Steinmann