Multistep Processes For Manufacture Of Device Whose Active Layer, E.g., Base, Channel, Comprises Semiconducting Carbon, E.g., Diamond, Diamond-like Carbon (epo) Patents (Class 257/E21.049)
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Patent number: 9024300Abstract: An apparatus including: a stacked structure including a first substrate having a flat surface; a flat first graphene layer adjacent the flat surface of the first substrate; a flat second graphene layer adjacent the flat first graphene layer; and a second substrate having a flat surface adjacent the flat second graphene layer. An apparatus including: a stacked structure including a substrate having a flat upper surface; a flat lower patterned layer overlying the flat upper surface of the substrate and including at least one patterned electrode; a flat lower graphene layer overlying the flat lower patterned layer; a flat upper graphene layer overlying the flat lower graphene layer; and a flat upper patterned layer overlying the flat upper graphene layer and including at least one patterned electrode.Type: GrantFiled: May 13, 2010Date of Patent: May 5, 2015Assignee: Nokia CorporationInventors: Martti Kalevi Voutilainen, Pirjo Pasanen
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Patent number: 9018638Abstract: A MOSFET device is provided. An N-type epitaxial layer is disposed on an N-type substrate. An insulating trench is disposed in the epitaxial layer. A P-type well region is disposed in the epitaxial layer at one side of the insulating trench. An N-type heavily doped region is disposed in the well region. A gate structure is disposed on the epitaxial layer and partially overlaps with the heavily doped region. At least two P-type first doped regions are disposed in the epitaxial layer below the well region. At least one P-type second doped region is disposed in the epitaxial layer and located between the first doped regions. Besides, the first and second doped regions are separated from each other. The first doped regions extend along a first direction, and the second doped region extends along a second direction different from the first direction.Type: GrantFiled: June 11, 2013Date of Patent: April 28, 2015Assignee: Industrial Technology Research InstituteInventors: Chee-Wee Liu, Hui-Hsuan Wang
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Patent number: 8987740Abstract: A set of buried electrodes are embedded in a dielectric material layer, and a graphene layer having a doping of a first conductivity type are formed thereupon. A first upper electrode is formed over a center portion of each buried electrode. Second upper electrodes are formed in regions that do not overlie the buried electrodes. A bias voltage is applied to the set of buried electrodes to form a charged region including minority charge carriers over each of the buried electrodes, and to form a p-n junction around each portion of the graphene layer overlying a buried electrode. Charge carriers generated at the p-n junctions are collected by the first upper electrodes and the second upper electrodes, and are subsequently measured by a current measurement device or a voltage measurement device.Type: GrantFiled: September 16, 2013Date of Patent: March 24, 2015Assignee: International Business Machines CorporationInventors: Phaedon Avouris, Tony A. Low, Fengnian Xia
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Patent number: 8975134Abstract: A doped fullerene-based conductive material can be used as an electrode, which can contact a dielectric such as a high k dielectric. By aligning the dielectric with the band gap of the doped fullerene-based electrode, e.g., the conduction band minimum of the dielectric falls into one of the band gaps of the doped fullerene-based material, thermionic leakage through the dielectric can be reduced, since the excited electrons or holes in the electrode would need higher thermal excitation energy to overcome the band gap before passing through the dielectric layer.Type: GrantFiled: December 27, 2012Date of Patent: March 10, 2015Assignee: Intermolecular, Inc.Inventors: Sergey Barabash, Dipankar Pramanik, Xuena Zhang
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Patent number: 8852342Abstract: A surface of a single crystalline semiconductor-carbon alloy layer having a surface normal along or close to a major crystallographic direction is provided by mechanical means such as cutting and/or polishing. Such a surface has naturally formed irregular surface features. Small semiconductor islands are deposited on the surface of single crystalline semiconductor-carbon alloy layer. Another single crystalline semiconductor-carbon alloy structure may be placed on the small semiconductor islands, and the assembly of the two semiconductor-carbon alloy layers with the semiconductor islands therebetween is annealed. During the initial phase of the anneal, surface diffusion of the semiconductor material proceeds to form vicinal surfaces while graphitization is suppressed because the space between the two semiconductor-carbon alloy layers maintains a high vapor pressure of the semiconductor material.Type: GrantFiled: August 30, 2010Date of Patent: October 7, 2014Assignee: International Business Machines CorporationInventors: Christos D. Dimitrakopoulos, Marcus O. Freitag, Alfred Grill, Robert L. Wisnieff
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Patent number: 8822315Abstract: A method is disclosed for treating a silicon carbide substrate for improved epitaxial deposition thereon and for use as a precursor in the manufacture of devices such as light emitting diodes. The method includes the steps of implanting dopant atoms of a first conductivity type into the first surface of a conductive silicon carbide wafer having the same conductivity type as the implanting ions at one or more predetermined dopant concentrations and implant energies to form a dopant profile, annealing the implanted wafer, and growing an epitaxial layer on the implanted first surface of the wafer.Type: GrantFiled: December 22, 2004Date of Patent: September 2, 2014Assignee: Cree, Inc.Inventors: Davis Andrew McClure, Alexander Suvorov, John Adam Edmond, David Beardsley Slater, Jr.
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Patent number: 8535635Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.Type: GrantFiled: June 19, 2009Date of Patent: September 17, 2013Assignee: Fujitsu LimitedInventors: Yuji Awano, Akio Kawabata, Shozo Fujita
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Patent number: 8518816Abstract: A method for making electrical interconnections of carbon nanotubes, including a) depositing an ionic liquid including nanoparticles of at least one suspended electrically conducting material, covering at least one surface of an element configured to be used as a support for carbon nanotubes, b) forming a deposit of the nanoparticles at least against the surface of the element, c) removing the remaining ionic liquid, d) growing carbon nanotubes from the deposited nanoparticles, and further including between the c) removing the remaining ionic liquid and the d) growing carbon nanotubes, passivating the deposited nanoparticles not found against the surface of the element.Type: GrantFiled: March 24, 2010Date of Patent: August 27, 2013Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, Centre National de la Recherche ScientifiqueInventors: Paul-Henri Haumesser, Jean-Marie Basset, Paul Campbell, Simon Deleonibus, Thibaut Gutel, Gilles Marchand, Catherine Santini
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Patent number: 8487356Abstract: The graphene device may include an upper oxide layer on at least one embedded gate, and a graphene channel and a plurality of electrodes on the upper oxide layer. The at least one embedded gate may be formed on the substrate. The graphene channel may be formed on the plurality of electrodes, or the plurality of electrodes may be formed on the graphene channel.Type: GrantFiled: November 30, 2011Date of Patent: July 16, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jin seong Heo, Sun-ae Seo, Dong-chul Kim, Yun-sung Woo, Hyun-jong Chung
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Patent number: 8461028Abstract: A method and semiconductor device for synthesizing graphene using ion implantation of carbon. Carbon is implanted in a metal using ion implantation. After the carbon is distributed in the metal, the metal is annealed and cooled in order to precipitate the carbon from the metal to form a layer of graphene on the surface of the metal. The metal/graphene surface is then transferred to a dielectric layer in such a manner that the graphene layer is placed on top of the dielectric layer. The metal layer is then removed. Alternatively, recessed regions are patterned and etched in a dielectric layer located on a substrate. Metal is later formed in these recessed regions. Carbon is then implanted into the metal using ion implantation. The metal may then be annealed and cooled in order to precipitate the carbon from the metal to form a layer of graphene on the metal's surface.Type: GrantFiled: October 8, 2012Date of Patent: June 11, 2013Assignee: Board of Regents, The University of Texas SystemInventors: Luigi Colombo, Robert M. Wallace, Rodney S. Ruoff
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Patent number: 8435833Abstract: Wide bandgap devices are formed on a diamond substrate, such as for light emitting diodes as a replacement for incandescent light bulbs and fluorescent light bulbs. In one embodiment, diodes (or other devices) are formed on diamond in at least two methods. A first method comprises growing a wide bandgap material on diamond and building devices on that grown layer. The second method involves bonding a wide bandgap layer (device or film) onto diamond and building the device onto the bonded layer. These devices may provide significantly higher efficiency than incandescent or fluorescent lights, and provide significantly higher light or energy density than other technologies. Similar methods and structures result in other wide bandgap semiconductor devices.Type: GrantFiled: March 2, 2012Date of Patent: May 7, 2013Assignee: Apollo Diamond, Inc.Inventor: Robert C. Linares
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Patent number: 8421131Abstract: A graphene electronic device may include a silicon substrate, connecting lines on the silicon substrate, a first electrode and a second electrode on the silicon substrate, and an interlayer dielectric on the silicon substrate. The interlayer dielectric may be configured to cover the connecting lines and the first and second electrodes and the interlayer dielectric may be further configured to expose at least a portion of the first and second electrodes. The graphene electronic device may further include an insulating layer on the interlayer dielectric and a graphene layer on the insulating layer, the graphene layer having a first end and a second end. The first end of the graphene layer may be connected to the first electrode and the second end of the graphene layer may be connected to the second electrode.Type: GrantFiled: February 17, 2011Date of Patent: April 16, 2013Assignees: Samsung Electronics Co., Ltd., SNU R&DB FoundationInventors: Hyun-jong Chung, Seung-jae Baek, Sun-ae Seo, Yun-sung Woo, Jin-seong Heo, David Seo
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Patent number: 8362568Abstract: A transistor, which can be referred to as a multi-gate transistor or as a FinFET, includes a gate structure having a length, a width and a height. The transistor further includes at least one electrically conductive channel or fin between a source region and a drain region that passes through the width of the gate structure. The channel has a first height (h1) within the gate structure that is less than the height of the gate structure, and has a second height (h2) external to the gate structure, where h2 is less than h1. The transistor further includes a silicide layer disposed at least partially over the at least one channel external to the gate structure. Reducing the fin height external to the gate structure is shown to beneficially reduce parasitic resistance.Type: GrantFiled: August 28, 2009Date of Patent: January 29, 2013Assignee: International Business Machines CorporationInventors: Chung-Hsun Lin, Josephine B. Chang
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Publication number: 20120261644Abstract: Disclosed is a ribbon of graphene less than 3 nm wide, more preferably less than 1 nm wide. In a more preferred embodiment, there are multiple ribbons of graphene each with a width of one of the following dimensions: the length of 2 phenyl rings fused together, the length of 3 phenyl rings fused together, the length of 4 phenyl rings fused together, and the length of 5 phenyl rings fused together. In another preferred embodiment the edges of the ribbons are parallel to each other. In another preferred embodiment, the ribbons have at least one arm chair edge and may have wider widths. The invention further comprises a method of making a ribbon of graphene comprising the steps of: a. placing one or more polyaromatic hydrocarbon (PAH) precursors on a substrate; b. applying UV light to the PAH until one or more intermolecular bonds are formed between adjacent PAH molecules; and c. applying heat to the PAH molecules to increase the number of intermolecular bonds that are formed to create a ribbon of graphene.Type: ApplicationFiled: April 18, 2011Publication date: October 18, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Christos Dimitrakopoulos
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Patent number: 8278666Abstract: The disclosure relates to a high purity 2H-SiC composition and methods for making same. The embodiments represented herein apply to both thin film and bulk growth of 2H-SiC. According to one embodiment, the disclosure relates to doping an underlying substrate or support layer with one or more surfactants to nucleate and grow high purity 2H-SiC. In another embodiment, the disclosure relates to a method for preparing 2H-SiC compositions by nucleating 2H-SiC on another SiC polytype using one or more surfactants. The surfactants can include AlN, Te, Sb and similar compositions. These nucleate SiC into disc form which changes to hexagonal 2H-SiC material.Type: GrantFiled: June 23, 2010Date of Patent: October 2, 2012Assignee: Northrop Grumman Systems CorporationInventors: Narsingh B. Singh, Sean R. McLaughlin, Thomas J. Knight, Robert M. Young, Brian P. Wagner, David A. Kahler, Andre E. Berghmans, David J. Knuteson, Ty R. McNutt, Jerry W. Hedrick, Jr., George M. Bates, Kenneth Petrosky
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Patent number: 8216904Abstract: According to one embodiment, a semiconductor substrate is provided having at least two transistor regions formed therein. Overlying the channel regions is a gate dielectric and transistor gate electrodes overly the gate dielectric and are positioned overlying the channel regions. Source and drain regions are formed on either side of the channel regions to create a transistor structure. In order to provide isolation between transistors in the semiconductor substrate, a trench is formed in the substrate. A strain-inducting layer is then deposited over the transistor structures and into the trench in the semiconductor substrate. A high-stress nitride layer is one type of material which is suitable for forming the strain-inducing layer.Type: GrantFiled: December 31, 2009Date of Patent: July 10, 2012Assignee: ST Microelectronics, Inc.Inventor: Barry Dove
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Patent number: 8212253Abstract: A semiconductor structure comprises a gate stack in a semiconductor substrate and a lightly doped source/drain (LDD) region in the semiconductor substrate. The LDD region is adjacent to a region underlying the gate stack. The LDD region comprises carbon and an n-type impurity, and the n-type impurity comprises phosphorus tetramer.Type: GrantFiled: September 8, 2011Date of Patent: July 3, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Feng Nieh, Keh-Chiang Ku, Nai-Han Cheng, Chi-Chun Chen, Li-Te S. Lin
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Publication number: 20120112164Abstract: A single crystalline silicon carbide layer can be grown on a single crystalline sapphire substrate. Subsequently, a graphene layer can be formed by conversion of a surface layer of the single crystalline silicon layer during an anneal at an elevated temperature in an ultrahigh vacuum environment. Alternately, a graphene layer can be deposited on an exposed surface of the single crystalline silicon carbide layer. A graphene layer can also be formed directly on a surface of a sapphire substrate or directly on a surface of a silicon carbide substrate. Still alternately, a graphene layer can be formed on a silicon carbide layer on a semiconductor substrate. The commercial availability of sapphire substrates and semiconductor substrates with a diameter of six inches or more allows formation of a graphene layer on a commercially scalable substrate for low cost manufacturing of devices employing a graphene layer.Type: ApplicationFiled: November 9, 2010Publication date: May 10, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jack O. Chu, Christos D. Dimitrakopoulos, Marcus O. Freitag, Alfred Grill, Timothy J. McArdle, Robert L. Wisnieff
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Patent number: 8173526Abstract: Various embodiments include forming a silicon-germanium layer over a substrate of a device; forming a layer in the silicon-germanium layer, the layer including at least one of boron and carbon; and forming a silicon layer over the silicon-germanium layer. Additional embodiments are described.Type: GrantFiled: June 22, 2009Date of Patent: May 8, 2012Assignee: Atmel CorporationInventor: Darwin G. Enicks
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Patent number: 8158455Abstract: First and second synthetic diamond regions are doped with boron. The second synthetic diamond region is doped with boron to a greater degree than the first synthetic diamond region, and in physical contact with the first synthetic diamond region. In a further example embodiment, the first and second synthetic diamond regions form a diamond semiconductor, such as a Schottky diode when attached to at least one metallic lead.Type: GrantFiled: August 24, 2009Date of Patent: April 17, 2012Assignee: Apollo Diamond, Inc.Inventor: Robert C. Linares
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Patent number: 8154084Abstract: A silicon/germanium material and a silicon/carbon material may be provided in transistors of different conductivity type on the basis of an appropriate manufacturing regime without unduly contributing to overall process complexity. Furthermore, appropriate implantation species may be provided through exposed surface areas of the cavities prior to forming the corresponding strained semiconductor alloy, thereby additionally contributing to enhanced overall transistor performance. In other embodiments a silicon/carbon material may be formed in a P-channel transistor and an N-channel transistor, while the corresponding tensile strain component may be overcompensated for by means of a stress memorization technique in the P-channel transistor. Thus, the advantageous effects of the carbon species, such as enhancing overall dopant profile of P-channel transistors, may be combined with an efficient strain component while enhanced overall process uniformity may also be accomplished.Type: GrantFiled: May 28, 2009Date of Patent: April 10, 2012Assignee: GLOBALFOUNDRIES Inc.Inventors: Jan Hoentschel, Vassilios Papageorgiou, Belinda Hannon
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Patent number: 8142838Abstract: A method for making a liquid crystal display screen includes the steps of: providing a base comprising a surface; manufacturing a substrate, wherein manufacturing a substrate comprises: placing a carbon nanotube layer on the surface of the base, the carbon nanotube layer comprising a plurality of carbon nanotubes substantially aligned along a same direction; applying a fixing layer on a surface of the carbon nanotube layer, thereby obtaining a first substrate; and supplying a liquid crystal layer, wherein the carbon nanotubes of a first substrate are arranged perpendicular to that of a second substrate.Type: GrantFiled: November 20, 2008Date of Patent: March 27, 2012Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Wei-Qi Fu, Liang Liu, Kai-Li Jiang, Shou-Shan Fan
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Patent number: 8119253Abstract: A diamond substrate having a contact, wherein the contact comprises a diamond-like-carbon (DLC) layer on at least part of a surface of the diamond substrate; and at least one metal layer on at least part of the surface of the DLC layer. Methods for producing the same and devices comprising such a substrate are also described.Type: GrantFiled: October 15, 2009Date of Patent: February 21, 2012Assignee: Diamond Detectors LimitedInventor: Arnaldo Galbiati
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Patent number: 8106430Abstract: The invented ink-jet printing method for the construction of thin film transistors using all SWNTs on flexible plastic films is a new process. This method is more practical than all of existing printing methods in the construction TFT and RFID tags because SWNTs have superior properties of both electrical and mechanical over organic conducting oligomers and polymers which are often used for TFT. Furthermore, this method can be applied on thin films such as paper and plastic films while silicon based techniques cannot be used on such flexible films. These are superior to the traditional conducting polymers used in printable devices since they need no dopant and they are more stable. They could be used in conjunction with conducting polymers, or as stand-alone inks.Type: GrantFiled: September 14, 2010Date of Patent: January 31, 2012Assignee: William Marsh Rice UniversityInventors: Gyou-Jin Cho, Min Hun Jung, Jared L. Hudson, James M. Tour
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Patent number: 8101980Abstract: Provided is a graphene device and a method of manufacturing the same. The graphene device may include an upper oxide layer on at least one embedded gate, and a graphene channel and a plurality of electrodes on the upper oxide layer. The at least one embedded gate may be formed on the substrate. The graphene channel may be formed on the plurality of electrodes, or the plurality of electrodes may be formed on the graphene channel.Type: GrantFiled: August 25, 2010Date of Patent: January 24, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-seong Heo, Sun-ae Seo, Dong-chul Kim, Yun-sung Woo, Hyun-jong Chung
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Patent number: 8080441Abstract: A method of growing polygonal carbon from photoresist and resulting structures are disclosed. Embodiments of the invention provide a way to produce polygonal carbon, such as graphene, by energizing semiconductor photoresist. The polygonal carbon can then be used for conductive paths in a finished semiconductor device, to replace the channel layers in MOSFET devices on a silicon carbide base, or any other purpose for which graphene or graphene-like carbon material formed on a substrate is suited. In some embodiments, the photoresist layer forms both the polygonal carbon layer and an amorphous carbon layer over the polygonal carbon layer, and the amorphous carbon layer is removed to leave the polygonal carbon on the substrate.Type: GrantFiled: January 12, 2010Date of Patent: December 20, 2011Assignee: Cree, Inc.Inventor: Alexander Suvorov
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Publication number: 20110282421Abstract: The present disclosure provides devices for neuronal growth and associate methods. In one aspect, for example, a neuronal growth device is provided including a layer of nanodiamond particles having an exposed neuronal growth surface, a doped diamond layer contacting the layer of nanodiamond particles opposite the neuronal growth surface, and a semiconductor layer coupled to the doped diamond layer opposite the layer of nanodiamond particles. In one aspect, the nanodiamond particles are substantially immobilized by the doped diamond layer.Type: ApplicationFiled: April 7, 2011Publication date: November 17, 2011Inventor: Chien-Min Sung
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Patent number: 8039301Abstract: A gate after diamond transistor and method of making comprising the steps of depositing a first dielectric layer on a semiconductor substrate, depositing a diamond particle nucleation layer on the first dielectric layer, growing a diamond thin film layer on the first dielectric layer, defining an opening for the gate in the diamond thin film layer, patterning of the diamond thin film layer for a gate metal to first dielectric layer surface, etching the first dielectric layer, depositing and defining a gate metal, and forming a contact window opening in the diamond thin film layer and the first dielectric layer to the ohmic contact.Type: GrantFiled: December 5, 2008Date of Patent: October 18, 2011Assignee: The United States of America as represented by the Secretary of the NavyInventors: Francis Kub, Karl Hobart
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Patent number: 8021967Abstract: A fluid transport method and fluid transport device are disclosed. Nanoscale fibers disposed in a patterned configuration allow transport of a fluid in absence of an external power source. The device may include two or more fluid transport components having different fluid transport efficiencies. The components may be separated by additional fluid transport components, to control fluid flow.Type: GrantFiled: October 31, 2005Date of Patent: September 20, 2011Assignee: California Institute of TechnologyInventors: Jijie Zhou, Michael Bronikowski, Flavio Noca, Elijah B. Sansom
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Patent number: 8008669Abstract: In one embodiment an anti-fuse structure is provided that includes a first dielectric material having at least a first anti-fuse region and a second anti-fuse region, wherein at least one of the anti-fuse regions includes a conductive region embedded within the first dielectric material. The anti-fuse structure further includes a first diamond like carbon layer having a first conductivity located on at least the first dielectric material in the first anti-fuse region and a second diamond like carbon layer having a second conductivity located on at least the first dielectric material in the second anti-fuse region. In this embodiment, the second conductivity is different from the first conductivity and the first diamond like carbon layer and the second diamond like carbon layer have the same thickness. The anti-fuse structure also includes a second dielectric material located atop the first and second diamond like carbon layers.Type: GrantFiled: July 27, 2009Date of Patent: August 30, 2011Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, David V. Horak, Takeshi Nogami, Shom Ponoth
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Patent number: 7989241Abstract: A method for making a liquid crystal display screen includes the following steps. Firstly, providing a base including a surface. Secondly, forming carbon nanotube structure on the surface of the base to obtain a first electrode plate preform, the carbon nanotubes of each carbon nanotube structure being oriented along the extending direction thereof. Thirdly, forming a fixing layer to cover the carbon nanotube structure, thereby obtaining a first electrode plate. Fourthly, repeating the above-described steps, thereby obtaining a second electrode plate. Lastly, forming a liquid crystal layer between the fixing layers of the first electrode plate and the second electrode plate, the carbon nanotubes of the first electrode plate being perpendicular to that of the second electrode plate, thereby forming the liquid crystal display screen.Type: GrantFiled: November 20, 2008Date of Patent: August 2, 2011Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Wei-Qi Fu, Liang Liu, Kai-Li Jiang, Shou-Shan Fan
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Publication number: 20110163312Abstract: The present invention provides semiconductor-on-diamond devices, and methods for the formation thereof. In one aspect, a mold is provided which has an interface surface configured to inversely match a configuration intended for the device surface of a diamond layer. An adynamic diamond layer is then deposited upon the diamond interface surface of the mold, and a substrate is joined to the growth surface of the adynamic diamond layer. At least a portion of the mold can then be removed to expose the device surface of the diamond which has received a shape which inversely corresponds to the configuration of the mold's diamond interface surface. The mold can be formed of a suitable semiconductor material which is thinned to produce a final device. Optionally, a semiconductor material can be coupled to the diamond layer subsequent to removal of the mold.Type: ApplicationFiled: January 3, 2011Publication date: July 7, 2011Inventor: Chien-Min Sung
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Patent number: 7968473Abstract: A plasma enhanced physical vapor deposition process deposits an amorphous carbon layer on an ion-implanted wafer for use in dynamic surface annealing of the wafer with an intense line beam of a laser wavelength. The deposition process is carried out at a wafer temperature below the dopant clustering threshold temperature, and includes introducing the wafer into a chamber having a carbon-containing target overlying the wafer, and furnishing a carrier gas into the chamber. The process further includes generating a wafer bias voltage and applying target source power to the carbon-containing target sufficient to produce ion bombardment of the carbon-containing target. The wafer bias voltage is set to a level at which the amorphous carbon layer that is deposited has a desired extinction coefficient at the laser wavelength.Type: GrantFiled: April 5, 2007Date of Patent: June 28, 2011Assignee: Applied Materials, Inc.Inventors: Vijay Parihar, Christopher Dennis Bencher, Rajesh Kanuri, Marlon E. Menezes
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Patent number: 7939367Abstract: The invention is a method for growing a critical adherent diamond layer on a substrate by Chemical Vapor Deposition (CVD) and the article produced by the method. The substrate can be a compound semiconductor coated with an adhesion layer. The adhesion layer is preferably a dielectric, such as silicon nitride, silicon carbide, aluminum nitride or amorphous silicon, to name some primary examples. The typical thickness of the adhesion layer is one micrometer or less. The resulting stack of layers, (e.g. substrate layer, adhesion layer and diamond layer) is structurally free of plastic deformation and the diamond layer is well adherent to the dielectric adhesion layer such that it can be processed further, such as by increasing the thickness of the diamond layer to a desired level, or by subjecting it to additional thin film fabrication process steps. In addition to preventing plastic deformation of the layer stack, the process also reduces the formation of soot during the CVD process.Type: GrantFiled: December 18, 2008Date of Patent: May 10, 2011Assignee: Crystallume CorporationInventors: Firooz Nasser-Faili, Niels Christopher Engdahl
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Publication number: 20110089403Abstract: An electronic device, a transparent display and methods for fabricating the same are provided, the electronic device including a first, a second and a third element each formed of a two-dimensional (2D) sheet material. The first, second, and third elements are stacked in a sequential order or in a reverse order. The second element is positioned between the first element and the third element. The second element has an insulator property, the first and third elements have a metal property or a semiconductor property.Type: ApplicationFiled: September 7, 2010Publication date: April 21, 2011Inventors: Yun-sung Woo, Sun-ae Seo, Dong-chul Kim, Hyun-jong Chung
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Patent number: 7851802Abstract: Example embodiments relate to a poly-crystalline silicon (Si) thin film, a thin film transistor (TFT) formed from a poly-crystalline silicon (Si) thin film and methods of manufacturing the same. The method of manufacturing the poly-crystalline Si thin film includes forming an active layer formed of amorphous Si on a substrate, coating a gold nanorod on the active layer, and irradiating infrared rays onto the gold nanorod to crystallize the active layer.Type: GrantFiled: July 18, 2008Date of Patent: December 14, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Kyung-bae Park, Seon-mi Yoon, Sang-yoon Lee, Jae-young Choi, Hyeon-jin Shin, Myung-kwan Ryu, Tae-sang Kim, Jang-yeon Kwon, Kyung-seok Son, Ji-sim Jung
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Patent number: 7723180Abstract: A method of making a non-volatile memory device includes forming a first electrode, forming a steering element, forming at least one feature, forming a carbon resistivity switching material on at least one sidewall of the at least one feature such that the carbon resistivity switching material electrically contacts the steering element, and forming a second electrode.Type: GrantFiled: May 27, 2008Date of Patent: May 25, 2010Assignee: SanDisk 3D LLCInventors: Xiying Chen, Chuanbin Pan, Tanmay Kumar, Er-Xuan Ping
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Publication number: 20100124529Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.Type: ApplicationFiled: June 19, 2009Publication date: May 20, 2010Applicant: FUJITSU LIMTEDInventors: Yuji Awano, Akio Kawabata, Shozo Fujita
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Patent number: 7695564Abstract: The present invention is directed to a method for fabricating a thermal management substrate having a Silicon (Si) layer on a polycrystalline diamond film, or on a diamond-like-carbon (DLC) film. The method comprises acts of fabricating a separation by implantation of oxygen (SIMOX) wafer; depositing a polycrystalline diamond film onto the SIMOX wafer; and removing various layers of the SIMOX wafer to leave a Si overlay layer that is epitaxially fused with the polycrystalline diamond film. In the case of the DLC film, the method comprises acts of ion-implanting a Si wafer; depositing an amorphous DLC film onto the Si wafer; and removing various layers of the Si wafer to leave a Si overlay structure epitaxially fused with the DLC film.Type: GrantFiled: February 3, 2005Date of Patent: April 13, 2010Assignee: HRL Laboratories, LLCInventors: Miroslav Micovic, Peter Deelman, Yakov Royter
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Publication number: 20100038653Abstract: The present invention relates to a diamond electronic device comprising a functional interface between two solid materials, wherein the interface is formed by a planar first surface of a first layer of single crystal diamond and a second layer formed on the first surface of the first diamond layer, the second layer being solid, non-metallic and selected from diamond, a polar material and a dielectric material, and wherein the planar first surface of the first layer of single crystal diamond has an Rq of less than 10 nm and has at least one of the following characteristics: (a) the first surface is an etched surface; (b) a density of dislocations in the first diamond layer breaking the first surface is less than 400 cm?2 measured over an area greater than 0.014 cm2; (c) a density of dislocations in the second layer breaking a notional or real surface lying within the second layer parallel to the interface and within 50 ?m of the interface is less than 400 cm?2 measured over an area greater than 0.Type: ApplicationFiled: January 22, 2008Publication date: February 18, 2010Inventors: Geoffrey Alan Scarsbrook, Ian Friel, Richard Stuart Balmer
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Publication number: 20100032638Abstract: Memory cells, and methods of forming such memory cells, are provided that include a carbon-based reversible resistivity switching material. In particular embodiments, methods in accordance with this invention form a memory cell by forming a carbon-based reversible resistance-switching material above a substrate, forming a carbon nitride layer above the carbon-based reversible resistance-switching material, and forming a barrier material above the carbon nitride layer using an atomic layer deposition process. Other aspects are also provided.Type: ApplicationFiled: August 5, 2009Publication date: February 11, 2010Applicant: SanDisk 3D LLCInventor: Huiwen Xu
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Patent number: 7588990Abstract: A plasma enhanced physical vapor deposition process deposits an amorphous carbon layer on an ion-implanted wafer for use in dynamic surface annealing of the wafer with an intense line beam of a laser wavelength. The deposition process is carried out at a wafer temperature below the dopant clustering threshold temperature, and includes introducing the wafer into a chamber and furnishing a hydrocarbon process gas into the chamber, preferably propylene (C3H6) or toluene (C7H8) or acetylene (C2H2) or a mixture of acetylene and methane (C2H4). The process further includes inductively coupling RF plasma source power into the chamber while and applying RF plasma bias power to the wafer. The wafer bias voltage is set to a level at which the amorphous carbon layer that is deposited has a desired stress (compressive or tensile). We have discovered that at a wafer temperature less than or equal to 475 degrees C.Type: GrantFiled: March 28, 2007Date of Patent: September 15, 2009Assignee: Applied Materials, Inc.Inventors: Vijay Parihar, Christopher Dennis Bencher, Rajesh Kanuri, Marlon E. Menezes
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Publication number: 20090225592Abstract: A multi-level lithography processes for the fabrication of suspended structures are presented. The process is based on the differential exposure and developing conditions of several a plurality of resist layers, without harsher processes, such as etching of sacrificial layers or the use of hardmasks. These manufacturing processes are readily suited for use with systems that are chemically and/or mechanically sensitive, such as graphene. Graphene p-n-p junctions with suspended top gates formed through these processes exhibit high mobility and control of local doping density and type. This fabrication technique may be further extended to fabricate other types of suspended structures, such as local current carrying wires for inducing local magnetic fields, a point contact for local injection of current, and moving parts in microelectromechanical devices.Type: ApplicationFiled: March 3, 2009Publication date: September 10, 2009Applicant: The Regents of the University of CaliforniaInventors: Chun Ning Lau, Gang Liu, Jairo Velasco, JR.
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Patent number: 7557378Abstract: A heterostructure having a heterojunction comprising: a diamond layer; and a boron aluminum nitride (B(x)Al(1?x)N) layer disposed in contact with a surface of the diamond layer, where x is between 0 and 1.Type: GrantFiled: November 8, 2006Date of Patent: July 7, 2009Assignee: Raytheon CompanyInventors: Jeffrey R. LaRoche, William E. Hoke, Steven D. Bernstein, Ralph Korenstein
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Patent number: 7553693Abstract: The field effect transistor comprises a source and a drain connected by a channel controlled by a gate electrode separated from the channel by a gate insulator. The channel is formed by a diamond-like carbon layer. The method for making the transistor successively comprises deposition of a diamond-like carbon layer on a substrate, deposition of a gate insulating layer and deposition of at least one conducting layer. The conducting layer is etched to form the gate electrode. Then an insulating material is deposited on the flanks of the gate electrode to form a lateral insulator. Then the gate insulating layer is etched and the diamond-like carbon layer is etched so as to delineate the channel. Then a semi-conducting material designed to form the source and a semi-conducting material designed to form the drain are deposited on each side of the channel.Type: GrantFiled: March 25, 2005Date of Patent: June 30, 2009Assignee: Commissariat a l'Energie AtomiqueInventor: Simon Deleonibus
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Patent number: 7541234Abstract: Integrated circuit transistors may be fabricated by simultaneously removing a photoresist layer on a first active area of an integrated circuit substrate and a carbon-containing layer on a second active area of the integrated circuit substrate, to expose a nitride stress-generating layer on the second active area. A single mask may be used to define the second active area for removal of the photoresist layer on the first active area and for implanting source/drain regions into the second active area.Type: GrantFiled: November 3, 2005Date of Patent: June 2, 2009Assignees: Samsung Electronics Co., Ltd., Chartered Semiconductor Manufacturing Ltd., Infineon Technologies AGInventors: Chong Kwang Chang, Haoren Zhuang, Matthias Lipinski, Shailendra Mishra, O Sung Kwon, Tjin Tjin Tjoa, Young Gun Ko
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Publication number: 20090131245Abstract: A method for forming catalyst nanoparticles on a substrate and a method for forming elongate nanostructures on a substrate using the nanoparticles as a catalyst are provided. The methods may advantageously be used in, for example, semiconductor processing. The methods are scalable and fully compatible with existing semiconductor processing technology. Furthermore, the methods allow forming catalyst particles and elongate nanostructures at predetermined locations on a substrate.Type: ApplicationFiled: November 6, 2007Publication date: May 21, 2009Applicant: Interuniversitair Microelektronica Centrum (IMEC)Inventors: Santiago Cruz Esconjauregui, Caroline Whelan
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Patent number: 7485536Abstract: A method including forming a channel region between source and drain regions in a substrate, the channel region including a first dopant profile; and forming a barrier layer between the channel region and a well of the substrate, the barrier layer including a second dopant profile different from the first dopant profile. An apparatus including a gate electrode on a substrate; source and drain regions formed in the substrate and separated by a channel region; and a barrier layer between a well of the substrate and the channel region, the barrier layer including a dopant profile different than a dopant profile of the channel region and different than a dopant profile of the well.Type: GrantFiled: December 30, 2005Date of Patent: February 3, 2009Assignee: Intel CorporationInventors: Been-Yih Jin, Brian S. Doyle, Robert S. Chau, Jack T. Kavalieros
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Patent number: 7394103Abstract: A substantially all diamond transistor with an electrically insulating substrate, an electrically conductive diamond layer on the substrate, and a source and a drain contact on the electrically conductive diamond layer. An electrically insulating diamond layer is in contact with the electrically conductive diamond layer, and a gate contact is on the electrically insulating diamond layer. The diamond layers may be homoepitaxial, polycrystalline, nanocrystalline or ultrananocrystalline in various combinations. A method of making a substantially all diamond self-aligned gate transistor is disclosed in which seeding and patterning can be avoided or minimized, if desired.Type: GrantFiled: September 13, 2005Date of Patent: July 1, 2008Assignee: UChicago Argonne, LLCInventor: Jennifer Gerbi
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Patent number: 7390947Abstract: A nanotube transistor, such as a carbon nanotube transistor, may be formed with a top gate electrode and a spaced source and drain. Conduction along the transistor from source to drain is controlled by the gate electrode. Underlying the gate electrode are at least two nanotubes. In some embodiments, the substrate may act as a back gate.Type: GrantFiled: January 18, 2005Date of Patent: June 24, 2008Assignee: Intel CorporationInventors: Amlan Majumdar, Justin K. Brask, Marko Radosavljevic, Suman Datta, Brian S. Doyle, Mark L. Doczy, Jack Kavalieros, Matthew V. Metz, Robert S. Chau, Uday Shah, James Blackwell